TW201832268A - High-pressure discharge lamp - Google Patents

Abstract

An insulator (30) has an open section (34) that enables communication between the outside and a space (s) formed between one side tube section (15) of a light-emitting tube (10) and an insertion hole (23) of a reflector (20), the length (L1) of the other side tube section (14) being greater than the length (L2) of the one side tube section (15). A high-pressure discharge lamp is thereby provided in which cooling efficiency can be increased and luminance can be increased.

Description

High pressure discharge lamp

The present invention relates to a high-pressure discharge lamp, and more specifically, to a high-pressure discharge lamp that constitutes a light source part of a multiple lamp of an exposure device.

In recent years, in an exposure apparatus used in manufacturing a color filter of a flat panel display device or a printed wiring board, since the expansion of the exposure area is required, the output of the light source section is also required to be increased. Therefore, it is known that a plurality of high-pressure discharge lamps that are advantageous in terms of manufacturing cost and relatively low illuminance are used to constitute a light source unit (for example, refer to Patent Document 1). As shown in FIG. 8, as the previous high-pressure discharge lamp 100, it mainly includes: a light-emitting tube 110, which discharges to emit light; a reflector 120, which emits light from the light-emitting tube 110 with directivity; and an insulator 130, which will The light-emitting tube 110 and the reflector 120 are fixed; and the wire 140 is electrically connected to the light-emitting tube 110. In the light-emitting tube 110, a light-emitting portion 111 having an internal space sealed with halogen gas, mercury, argon for startup, etc., a pair of sealing portions 112, 113 that seal the internal space of the light-emitting portion 111, and the light-emitting portion 111 are provided A pair of electrodes 114 and 115 are arranged to face each other. In addition, in the light source device described in Patent Document 1, an incandescent lamp 131 is provided inside the insulator 130, so that the discharge lamp 100 can be checked with high accuracy, in a short time, and at low cost, whether it is a genuine product. Furthermore, regarding the light irradiation device described in Patent Document 2, the following is described: In a configuration in which a plurality of lamps are positioned in a cassette and used, a base member for each lamp is formed to cool each lamp. Cooling road. Prior Art Literature Patent Literature Patent Literature 1: Japanese Patent Laid-Open No. 2016-200751 Patent Literature 2: Japanese Patent Laid-Open No. 2012-113269

[Problems to be Solved by the Invention] Moreover, in high-pressure discharge lamps, the illuminance of each lamp is also required to be improved. Therefore, the amount of energy of the bright spot in the light-emitting portion increases, so it is required to further improve the cooling efficiency. The present invention has been completed in view of the above-mentioned problems, and its object is to provide a high-pressure discharge lamp that can improve cooling efficiency and improve illuminance. [Technical Means for Solving the Problems] The above object of the present invention is achieved by the following configuration. (1) A high-pressure discharge lamp, characterized by comprising: a light-emitting tube made of glass having an ellipsoidal or spherical light-emitting tube portion with a pair of electrodes facing each other, and connected to both ends of the light-emitting tube portion A pair of side tube portions extending along the longitudinal axis of the pair of electrodes; a reflector having an opening portion provided on one side of the longitudinal axis and protruding from the side tube portion, formed around the longitudinal axis A parabolic reflecting surface, and an insertion hole formed on the other side of the longitudinal axis direction and into which the other side tube portion can be inserted with a gap; and an insulator that fixes the light-emitting tube and the reflector, respectively; The insulator has an open portion that communicates the space formed between the other-side tube portion and the insertion hole of the reflector with the outside, and the length of the one-side tube portion is longer than the length of the other-side tube portion. (2) The high-pressure discharge lamp according to (1), characterized in that the one side tube portion is arranged in a non-sensing area of the lamp. (3) The high-pressure discharge lamp according to (1) or (2), characterized in that the reflector is provided with a flat surface adjacent to the opening and perpendicular to the longitudinal axis direction, and in the longitudinal axis direction When the distance from the center of the light-emitting tube portion to the flat surface of the reflector is L4, the distance L3 from the flat surface of the reflector to the one-side tube portion is 0.2 × L4 ≦ L3 ≦ 1.0 × L4. [Effects of the Invention] According to the high-pressure discharge lamp of the present invention, the insulator has an opening portion that communicates the space formed between the other side tube portion of the arc tube and the insertion hole of the reflector with the outside, and the one side tube portion The length is longer than the length of the tube on the other side. Thereby, the cooling efficiency of the tube portions on both sides of the light emitting tube can be improved, and the illuminance of the lamp itself can be improved.

Hereinafter, a high-pressure discharge lamp according to an embodiment of the present invention will be described in detail with reference to FIGS. 1 to 6. As shown in FIG. 1, the high-pressure discharge lamp 1 of this embodiment mainly includes: a light-emitting tube 10 made of glass that discharges and emits light; a reflector 20 that emits light from the light-emitting tube 10 with directivity; and an insulator 30 It fixes the light-emitting tube 10 and the reflector 20, and the wires 16, 17 (see FIG. 4), which are electrically connected to the light-emitting tube 10. As shown in FIG. 3, the light-emitting tube 10 has: an ellipsoidal light-emitting tube portion 13 in which a pair of electrodes 11, 12 are arranged oppositely; and a pair of side tube portions 14, 15 which are connected to the light-emitting tube portion Both ends of 13 extend along the longitudinal axis X of the pair of electrodes 11 and 12. In addition, a halogen gas, mercury, argon for startup, etc. are enclosed in the internal space of the light-emitting tube portion 13, and the pair of side tube portions 14 and 15 seal the internal space of the light-emitting tube portion 13. In addition, the shape of the light-emitting tube portion 13 may be spherical. The reflector 20 has an opening 21 provided on one side of the longitudinal axis X direction and protruding from one side of the tube portion 14; a parabolic reflecting surface 22 formed around the longitudinal axis X; and an insertion hole 23 formed in The other side of the longitudinal axis X direction allows the other side tube portion 15 to be inserted with a gap g. In the arc tube 10, one electrode 11 extending into one tube portion 14 is an anode, and the other electrode 12 extending into the other tube portion 15 is a cathode. The reason is that, in general, the size of the shape of the front end of the electrode in the DC discharge lamp is (cathode) <(anode), so the angle of light emitted by the discharge is blocked on the anode side compared to the angle blocked on the cathode side Big. On the other hand, in order for the reflector 20 to increase the angle of the light received on the side of the opening 21, the reflector 20 must be deepened. Therefore, by providing the anode with a large light-shielding angle on the opening 21 side of the reflector 20, the reflector 20 can be miniaturized compared with the cathode on the opening 21 side. The wires extending from the front end of the one-side tube portion 14 and the base end of the other-side tube portion 15 are connected to a pair of wires 16, 17 for power supply, respectively. Furthermore, the lead wire 16 connected to the one-side tube portion 14 is led out to the outside through the support 24 attached to the reflector 20. The reflector 20 covers the base portion 31 of the insulator 30 on the outer side of the bowl-shaped bottom portion, and fixes the joint portion thereof with an adhesive (see FIG. 4). In addition, the cylindrical central portion of the base portion 31 of the insulator 30 is provided with a holding portion 32 that holds the base end portion of the other side tube portion 15 inserted into the insertion hole 23 of the reflector 20. The other side tube portion 15 is fixed to the holding portion 32 and the insulator 30 with an adhesive. Therefore, the reflector 20 and the other side tube portion 15 of the light emitting tube 10 are respectively fixed to the insulator 30, the reflector 20 and the light emitting tube 10 are not connected, and the gap between the other side tube portion 15 and the insertion hole 23 of the reflector 20 Form space s. The insulator 30 has the base portion 31 described above, and a cover portion 33 covering the base portion 31 and the rear portion of the base portion 31 together with the holding portion 32. The bottom portion 33a of the cover portion 33 is formed flat. Therefore, it is also possible to fix the lamp 1 to the lamp holder 40 by contacting the lamp fixing cover (not shown) to the flat bottom 33a, combining the lamp fixing cover with the lamp holder 40 shown in FIG. Returning to FIG. 3, the base portion 31 of the insulator 30 has two open portions 34 that connect the space s between the other-side tube portion 15 and the insertion hole 23 of the reflector 20 to the outside, and The other side tube portion 15 is opened to the outside. Furthermore, as shown in FIG. 6, in a state where the lamp 1 is mounted on the lamp holder 40, by exhausting air behind the lamp holder 40 to exhaust, the air introduced from the front of the lamp 1 passes through the space s and is opened Part 34 to cool the arc tube 10. Therefore, the space s and the opening 34 form a cooling path. Further, as shown in FIG. 4, an incandescent lamp 35 as a resistor is arranged in the accommodating space between the base portion 31 of the insulator 30 and the cover portion 33, and is connected to an external power supply lead 36. Since the filament 35a of the incandescent lamp 35 is a resistor, its resistance value will change depending on the surrounding temperature. Furthermore, the power supply wire 36 is connected to the power supply of different systems with the wires 16 and 17. In addition, the incandescent lamp 35 is arranged in the storage space so as not to be cooled by the air passing through the cooling path. For example, current can be supplied to the incandescent lamp 35, the voltage across the filament 35a of the incandescent lamp 35 can be measured, and the voltage can be compared with a database of voltage and temperature surveyed in advance to manage the temperature or cooling state of the lamp. Alternatively, a sufficiently large current is supplied to the incandescent lamp 35 to fuse the filament 35a of the incandescent lamp 35. The judgment circuit can also be used to confirm the presence or absence of fuse and to manage the use history. In addition, as the resistor, in addition to the incandescent lamp 35, a metal film resistor, a carbon resistor, a metal wire, a thermocouple, a bimetal, or the like can be used for life management or temperature management. In addition, the incandescent lamp 35 may exist inside the insulator 30 of the lamp 1 or may be disposed outside the insulator 30 and connected to the power supply wire 36. In addition, the outer edge of the opening 21 of the reflector 20 is formed into a substantially square shape with chamfered corners, and one of the four corners is used as a notch 26 for alignment, which is different from the three corners Of shape. Thereby, if the lamp 1 is mounted on the lamp holder 40, all the lamps 1 are aligned in the same direction. Since the temperature of the light-emitting tube 10 on the upper side becomes higher, if the amount of air passing through the upper side is increased, the cooling efficiency is improved. Therefore, in the lighting device incorporating the lamp holder 40, it is preferable to align the lamp 1 on the lamp holder 40 so that the two openings 34 formed in the insulator 30 are located in the up-down direction. In addition, the opening area of the opening portion 34 located on the upper side may be larger than the opening area of the opening portion 34 located on the lower side, so that the shape of the insulator 30 is asymmetrical to further improve the cooling efficiency. For example, in this embodiment, as shown in FIG. 1, the opening gap g of the opening portion 34 is defined by two planes passing through the longitudinal axis X, and the opening gap g can be changed by changing the angle formed by the two planes , And the opening area. Here, in the lamp 1 of the present embodiment, in order to improve the illuminance, the amount of energy in the arc tube portion 13 is increased, and as a result, the temperature in the arc tube portion 13 becomes higher than the former. On the other hand, from the viewpoint of heat resistance, the connection portion of the electric wires extending from the one-side tube portion 14 and the other-side tube portion 15 to the lead wires 16 and 17 must have a relatively low temperature. Therefore, in the present embodiment, the length L1 of the one-side tube portion 14 is designed to be longer than the length L2 of the other-side tube portion 15. That is, the other-side tube portion 15 has a higher heat dissipation effect than the one-side tube portion 14 by being exposed to the air passing through the cooling passage. On the other hand, by forming the one-side tube portion 14 longer than the other-side tube portion 15, the distance from the light-emitting tube portion 13 to the connection portion of the electric wire and the lead wire 16 from the one-side tube portion 14 is increased, and further The temperature drop at the connection part. Therefore, cooling efficiency can be improved on the tube portions 14 and 15 on both sides of the arc tube 10. Specifically, in this embodiment, the length L1 of the one-side tube portion 14 is set to 1.1 to 1.4 times the length L2 of the other-side tube portion 15. In addition, as shown in FIG. 4, the one side tube portion 14 is arranged in the non-sensing area A of the lamp 1 so as not to block the light from the lamp 1. As shown in FIG. 5 (a), in the light-emitting tube portion 13, the light generated at the bright spot P by the discharge between the pair of electrodes 11, 12 diffuses radially, and by the presence of the electrodes 11, 12, the light The directional distribution becomes like a diagonal line B, forming a shadow in the direction in which the electrodes 11 and 12 extend. As shown in FIG. 5 (b), the reflector 20 is a parabolic surface, and the bright point P of the arc tube 10 is arranged at the focal point of the parabolic surface. Therefore, the light emitted from the bright point P is reflected by the reflection surface 22 of the reflector 20 as parallel light as shown by a chain line. However, since the bright spot P is shifted from the focus and the bright spot P has a limited size, it actually includes the light shown by the dotted line, so not all of them become parallel light. If the direction of all light rays including the parallel light is considered, all the light reflected by the reflector 20 passes through the oblique line portion C shown in FIG. 5 (b). On the other hand, if the position where all reflected light does not pass is set as the non-sensing area A, the one-side tube portion 14 is arranged in the non-sensing area A of the lamp 1 as shown in FIG. The light reflected by the reflector 20. The non-sensing area A is formed by designing the shape of the paraboloid of the reflector 20. Therefore, the reflector 20 is provided with a flat surface 25 which is adjacent to the opening 21 and defines one axial end of the reflector 20 and is perpendicular to the longitudinal axis X direction. The protruding length becomes longer. That is, as shown in FIG. 3, in the direction of the longitudinal axis X, when the distance from the center of the light-emitting tube portion 13 to the flat surface 25 of the reflector 20 is set to L4, from the flat surface 25 of the reflector 20 to a The distance L3 of the front end of the side tube portion 14 is set to 0.2 × L4 ≦ L3 ≦ 1.0 × L4. The diameter of each side pipe portion 14 and 15 is such that the thickness L1 and L2 of the side pipe portions 14 and 15 can ensure the thickness of the strength, and the side pipe portion 14 is not exposed from the non-sensing area A of the lamp 1 Way setting. Here, as shown in FIG. 3, if the diameter of each side pipe portion 14 and 15 is D1, the length L1 of the side pipe portion 14 is set to D1 ≦ 0.4 × L1. In addition, the one-side tube portion 14 and the other-side tube portion 15 are each cylindrical, and have the same tube diameter as D1. The side tube portions 14 and 15 are connected to the light-emitting tube portion 13, and the light-emitting tube portion 13 is connected to the lead wires 16 and 17 via the side tube portions 14 and 15. The temperature of the light-emitting tube portion 13 is very high, but the temperature of the lead wires 16 and 17 must be reduced to prevent oxidation. The temperature of the lead wires 16 and 17 is reduced by forming a temperature gradient on each side tube portion 14 and 15. By setting the tube diameter D1 of each of the side tube portions 14 and 15 to be the same, it is easy to set the temperature gradient near the connection to the light-emitting tube portion 13 to be the same at both poles. On the other hand, when the temperature gradient difference between the two electrodes of the arc tube portion 13 becomes larger, it becomes a main cause of the accumulation of strain inside the glass to cause cracking. In addition, if the opening diameter of the reflector 20 is D2 and the focal position on the virtual paraboloid PA is f1, it is preferably set to D2 / f1 = 7-10. By setting to this range, the light-condensing position becomes approximately 1 m or more, and the light can be efficiently condensed on the fly-eye lens. As shown in FIG. 6, a plurality of high-pressure discharge lamps 1 are installed in the lamp holder 40 in the longitudinal direction and the lateral direction, and are used as the light source section for the exposure device. In addition, the air on the back side of the lamp holder 40 is exhausted by an exhaust device not shown, and the air from the front side of the lamp holder 40 is introduced into the lamp 1 using the space s of each high-pressure discharge lamp 1 as a cooling path In this way, each lamp 1 can be cooled. Furthermore, the back side of the lamp holder 40 may cooperate with the lamp fixing cover to form an enclosed space, and air may be discharged from the enclosed space. As described above, according to the high-pressure discharge lamp of the present embodiment, the insulator 30 has the opening portion that connects the space s formed between the other side tube portion 15 of the arc tube 10 and the insertion hole 23 of the reflector 20 to the outside 34, and the length L1 of the one-side tube portion 14 is longer than the length L2 of the other-side tube portion 15. Thereby, the cooling efficiency of the tube portions 14 and 15 on both sides of the arc tube 10 can be improved, and the illuminance of the lamp itself can be improved. In addition, the present invention is not limited to the above-mentioned embodiment, and changes, improvements, and the like can be appropriately performed. For example, in the present invention, the connection method of the light-emitting tube and the wire or the internal structure of the light-emitting tube are not limited to those of this embodiment, and any of the previous ones can be applied. In addition, in the present invention, the circuit shown in FIG. 7 can also be used for life time management. That is, the resistor Ri arranged in series and the fuse Fi (respectively i = 1, 2, ..., n, n is 1, preferably an integer of 2 or more) are arranged in parallel in n rows. The resistance value of the resistor Ri is different, and the current value cut by the fuse Fi is different. When managing the life time, by passing different currents from the power supply unit 50, each fuse Fi is cut off every time a specific time passes. In addition, r of the power supply unit 50 represents the internal resistance of the power supply. In addition, by controlling the voltage of the power supply unit 50, each fuse Fi can be sequentially cut off to manage the life time. Furthermore, by determining the combined resistance value of all the resistors Ri and fuses Fi using the determination circuit, the specifications of the lamp 1 can be determined. In this case, even when the lamps 1 with different specifications are turned on, life management can be performed, and the lamps can be turned on normally and safely. Furthermore, the above circuit may not be provided with a fuse Fi, and a plurality of resistors Ri having different resistance values may be arranged in parallel. By flowing different currents from the power supply section 50, each resistor Ri Sequence fuse. In addition, the resistor may exist inside the insulator of the lamp 1 or may be connected to a connector portion (not shown) that seeks to electrically contact the power supply wire 36 with the outside. In this case, the resistor must also be connected to a power source of a different system than the wires 16, 17 supplying power to the lamp electrodes. This invention is based on the Japanese patent application (Japanese Patent Application No. 2017-017856) filed on February 2, 2017, and the contents thereof are incorporated herein by reference.

1‧‧‧High-pressure discharge lamp

10‧‧‧luminescent tube

11‧‧‧electrode

12‧‧‧electrode

13‧‧‧Luminous tube department

14‧‧‧Side Tube Department

15‧‧‧Side tube department

16‧‧‧Wire

17‧‧‧Wire

20‧‧‧Reflector

21‧‧‧Opening

22‧‧‧Reflecting surface

23‧‧‧Insert hole

24‧‧‧support

25‧‧‧flat

26‧‧‧Notch

30‧‧‧Insulator

31‧‧‧Base

32‧‧‧Maintaining Department

33‧‧‧Hood

33a‧‧‧Bottom

34‧‧‧Open Department

35‧‧‧ Incandescent lamp

35a‧‧‧Filament

36‧‧‧Power supply wire

40‧‧‧ lamp holder

50‧‧‧Power Department

100‧‧‧discharge lamp

110‧‧‧luminescent tube

111‧‧‧Lighting Department

112‧‧‧Seal

113‧‧‧Seal

114‧‧‧electrode

115‧‧‧electrode

120‧‧‧Reflector

130‧‧‧Insulator

131‧‧‧ Incandescent lamp

140‧‧‧wire

A‧‧‧Insensitive area

B‧‧‧Slash

C‧‧‧Slash

D1‧‧‧ Diameter

D2‧‧‧ Diameter

f1‧‧‧Focus position

F1, F2, ..., Fn‧‧‧ fuse

g‧‧‧Gap

L1‧‧‧Length of one side tube

L2‧‧‧The length of the other side tube

L3‧‧‧Distance

L4‧‧‧Distance

P‧‧‧ Highlights

PA‧‧‧paraboloid

r‧‧‧Internal resistance

R1, R2, ..., Rn‧‧‧ resistor

s‧‧‧Space

X‧‧‧length axis

FIG. 1 is a perspective view of a high-pressure discharge lamp according to an embodiment of the present invention. Fig. 2 is a side view of the high-pressure discharge lamp shown in Fig. 1. 3 is a cross-sectional view of the high-pressure discharge lamp shown in FIG. 4 is a cross-sectional view obtained by cutting the high-pressure discharge lamp shown in FIG. 1 at a position orthogonal to FIG. 3. Fig. 5 (a) is a diagram showing the directional distribution of light emitted from a bright spot, and (b) is a diagram showing the directional distribution of light reflected on the reflecting surface of the reflector and the non-sensitive area. Fig. 6 is a perspective view showing a state in which the high-pressure discharge lamp of this embodiment is mounted on a lamp holder. 7 is a diagram showing a circuit for managing the life time of a lamp. Fig. 8 is a cross-sectional view of the previous high-pressure discharge lamp.

Claims (3)

A high-pressure discharge lamp is characterized by comprising: a light-emitting tube made of glass, which has an ellipsoidal or spherical light-emitting tube portion with a pair of electrodes facing each other, and two ends of the light-emitting tube portion connected along A pair of side tube portions extending along the longitudinal axis of the pair of electrodes; a reflector having an opening portion provided on one side of the longitudinal axis direction and protruding from the side tube portion, and having a parabolic shape formed around the longitudinal axis A reflecting surface, and an insertion hole formed on the other side of the longitudinal axis direction and allowing the other side tube portion to be inserted with a gap; and an insulator that fixes the light-emitting tube and the reflector respectively; the insulator has a The space formed between the other side tube part and the insertion hole of the reflector is an open part communicating with the outside, and the length of the one side tube part is longer than the length of the other side tube part. The high-pressure discharge lamp as claimed in claim 1, wherein the one-side tube portion is disposed in the non-inductive area of the lamp. The high-pressure discharge lamp according to claim 1 or 2, wherein the reflector is provided with a flat surface adjacent to the opening and perpendicular to the longitudinal axis direction, and in the longitudinal axis direction, from the light-emitting tube portion When the distance from the center to the flat surface of the reflector is set to L4, the distance L3 from the flat surface of the reflector to the one-side tube portion is 0.2 × L4 ≦ L3 ≦ 1.0 × L4.