JP7067782B2 - High pressure discharge lamp - Google Patents

Description

The present invention relates to a high-pressure discharge lamp, and more particularly to a high-pressure discharge lamp constituting a light source unit of multiple lamps of an exposure apparatus.

In recent years, in color filters of flat panel display devices and exposure devices used when manufacturing printed wiring boards, it is required to expand the exposure area, so that the output of the light source unit is also required to be increased. .. For this reason, various types are known in which a light source unit is configured by using a plurality of high-voltage discharge lamps having relatively low illuminance, which is advantageous in terms of manufacturing cost (see, for example, Patent Document 1).

In the light source device described in Patent Document 1, the lamp is a genuine product by measuring the resistance value of the resistor (incandescent lamp) embedded in the lamp porcelain and comparing it with the reference resistance value measured in advance. It is determined whether or not it is.

Japanese Patent No. 5869713

By the way, in order to maintain the same illuminance in the conventional discharge lamp, it is necessary to increase the applied voltage with the lighting time. Further, when a plurality of lamps are fixed to one frame and used, if the illuminance of each lamp is different, the illuminance balance may not be uniform and the exposure result may be affected. Therefore, it is required to manage the history of each lamp such as a genuine lamp, an unused lamp, and a used lamp.

Further, according to Patent Document 1, although it is possible to discriminate between a genuine product and a non-genuine product, it is not possible to determine whether the product is a used product or not, and in the case of a used product, the cumulative lighting time cannot be determined. It is desirable to know the state in detail.

The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a high-pressure discharge lamp capable of controlling the state of the lamp in more detail.

The above object of the present invention is achieved by the following configuration.
(1) High pressure including a light emitting tube as a light source, a reflector having a reflective surface in the shape of a parabolic surface and reflecting light emitted from the light emitting tube, and a goblet to which the light emitting tube and the reflector are fixed. It ’s a discharge lamp,
A high-voltage discharge lamp comprising a resistor unit in which a plurality of resistor rows in which at least one or more resistors are connected in series are connected in parallel, and the combined resistance value of each of the resistor trains is different.
(2) The resistance values of all the resistors are the same,
The high-voltage discharge lamp according to (1), wherein the number of the resistors in each resistor row is different for each resistor row.
(3) The high-voltage discharge lamp according to (1) or (2), wherein the history of the high-voltage discharge lamp can be managed based on the resistance value of the resistor unit.
In addition, in this invention, the resistance array "at least one or more resistors are connected in series" includes the case where one resistor is connected to the resistor array.

According to the high-voltage discharge lamp of the present invention, a plurality of resistor trains in which at least one or more resistors are connected in series are connected in parallel, and the combined resistance value of each of the resistor trains is different. By measuring the combined resistance value of the resistor unit, it is possible to know in detail the history such as whether the lamp is new or not and the cumulative lighting time.

It is a perspective view of the high voltage discharge lamp which concerns on one Embodiment of this invention. It is sectional drawing of the high voltage discharge lamp shown in FIG. It is a circuit diagram of the resistor unit incorporated in the high voltage discharge lamp shown in FIG. It is a perspective view which shows the state which the high voltage discharge lamp of this embodiment is attached to a lamp holder.

Hereinafter, an embodiment of the high-voltage discharge lamp according to the present invention will be described in detail with reference to the drawings.
As shown in FIGS. 1 and 2, the high-voltage discharge lamp 10 includes a glass arc tube 20 that discharges and emits light, and a reflector 30 that emits light from the arc tube 20 with directivity. It mainly includes an insulator 40 for fixing the arc tube 20 and the reflector 30, respectively.

The arc tube 20 is connected to an ellipsoidal arc tube portion 23 in which a pair of electrodes 21 and 22 are arranged to face each other and both ends of the arc tube portion 23, and is connected to both ends of the arc tube portion 23 in the longitudinal direction of the pair of electrodes 21 and 22. It has a pair of side tube portions 24, 25 extending along the line. Halogen gas, mercury, starting argon and the like are sealed in the internal space of the arc tube portion 23.

In the arc tube 20, one electrode 21 extending into one side tube portion 24 is an anode (anode), and the other electrode 22 extending into the other side tube portion 25 is a cathode (cathode). The electric wires extending from the tip of one side tube 24 and the base end of the other side tube 25 are connected to the pair of wires 26 and 27, respectively, and power is supplied from the outside. The wire 26 connected to the electrode 21 of one side tube portion 24 is led out to the outside via the pedestal 34 attached to the reflector 30.

The reflector 30 has an opening 31 from which one side tube portion 24 protrudes, a parabolic reflection surface 32, and an insertion hole 33 into which the other side tube portion 25 can be inserted with a gap. , Formed in a bowl shape. A light emitting tube portion 23 is arranged near the focal point of the parabolic reflecting surface 32 of the reflector 30, and the light emitted from the arc tube portion 23 is emitted as substantially parallel rays.

The insulator 40 includes a base portion 41 and a cover portion 42. The reflector 30 covers a bowl-shaped bottom portion with a base portion 41, and the joint portion thereof is fixed with an adhesive. Further, the cylindrical central portion of the base portion 41 is provided with a holding portion 43 for holding the proximal end side portion of the other side pipe portion 25, and the other side pipe portion 25 is the holding portion 43 and has an adhesive with the insulator 40. It is fixed with.

Therefore, the reflector 30 and the other side tube portion 25 of the arc tube 20 are fixed to the insulator 40, respectively. Further, the reflector 30 and the arc tube 20 are not adhered to each other, and the gap between the other side tube portion 25 and the insertion hole 33 of the reflector 30 forms a space s.

The base portion 41 of the insulator 40 communicates the space s between the other side pipe portion 25 and the insertion hole 33 of the reflector 30 with the outside, and has two open portions that open the other side pipe portion 25 to the outside. It has 44 (see FIG. 1). A resistor unit 50, which will be described later, is housed in the internal space 45 defined by the base portion 41 and the cover portion 42.

As shown in FIG. 4, a plurality of high-voltage discharge lamps 10 configured in this way are mounted on the lamp holder 80 in the vertical direction and the horizontal direction, and are applied as a light source unit for an exposure apparatus. Further, by exhausting the air on the back side of the lamp holder 80 by an exhaust device (not shown), the air from the front side of the lamp holder 80 is sent to the high pressure discharge lamp 10 by using the space s of each high pressure discharge lamp 10 as a cooling path. By taking in, each high-voltage discharge lamp 10 can be cooled. The back side of the lamp holder 80 may form a closed space in cooperation with a lamp holding cover (not shown), and air may be exhausted from the closed space.

As shown in FIG. 3, the resistor unit 50 includes a resistor row 60 of i rows (i = 1, 2, 3, · · n) connected in parallel, and a power supply unit 70. Further, the resistor row 60 in row i is composed of j (j = 1, 2, 3, · · m) resistors Rij connected in series.

For example, when n = m = 4, as shown in FIG. 3, the resistor unit 50 has four rows of resistors 61, which are connected in parallel with the wires 51, 52 connected to the power supply unit 70. 62,63,64 are provided. The first resistor row 61 has one resistor R11, the second resistor row 62 has two resistors R21, R22 connected in series, and the third resistor row 63 has a third resistor row 63. , Three resistors R31, R32, R33 connected in series, and a fourth resistor row 64 has four resistors R41, R42, R43, R44 connected in series. The combined resistance value Ri of each resistor row 61,62,63,64 is different for each resistor row 61,62,63,64.

The resistor Rij (R11 to R44) may be any one that consumes electric energy when power is supplied from the power supply unit 70, such as a metal film resistor, a carbon resistor, a metal wire, a thermocouple, a bimetal, and a fuse. Resistors, Nichrome wire, Tungsten wire, lamp filament, etc. can be used.

As a result, the history such as the determination of new / used high-voltage discharge lamp 10 and the cumulative lighting time can be recognized by measuring the combined resistance value of the resistor unit 50. For example, when the cumulative lighting time reaches a predetermined time, the current flowing through the resistor unit 50 is increased to a predetermined current value so that an arbitrary resistor Rij is blown, and the cumulative lighting time and the resistor unit 50 are formed. By associating with the combined resistance value of, the history of the cumulative lighting time of the high-voltage discharge lamp 10 can be stored and managed. Further, when the high-voltage discharge lamp 10 is used for the first time, if the current flowing through the resistor unit 50 is increased to a predetermined current value to melt an arbitrary resistor Rij, the combined resistance of the resistor unit 50 is obtained. By measuring the value, it is possible to easily determine whether the product is new or used.

として表される。 The action will be described below.
The combined resistance value Ri of the resistor row 60 in row i is

It is expressed as.

となる。但し、Ｖは電源部７０の電圧であり、ｒは電源部７０の内部抵抗値である。 For the sake of simplicity, assuming that the combined resistance values Ri of each resistor row 60 are all equal (Ri = R), the total current Io flowing through the circuit of the resistor unit 50 is

Will be. However, V is the voltage of the power supply unit 70, and r is the internal resistance value of the power supply unit 70.

Therefore, as shown in FIG. 3, the current value flowing through each resistor row 60 (61,62,63,64) is Io / n, and at this time, each resistance row 60 (61,62,63, The Joule heat Pi generated in 64) is Pi = R (Io / n) ² .

Then, when the cumulative lighting time reaches a predetermined time, when the Joule heat Pi generated by increasing the current flowing through the resistor unit 50 exceeds the heat radiation amount ν to the surroundings, the temperature of the resistor Rij rises. Eventually it will melt. For example, if the resistor row 60 (resistor row 61 in FIG. 3) having one resistor Rij having a resistance value R (m = 1) begins to melt at the current Ic, RIc ² ≈ν is established.

At this time, assuming that the number of resistors Rij in the other resistor row 60 (resistor row 62,63,64 in FIG. 3) is m (m> 1), the Joule heat Pi generated by each resistor Rij is
Pi = R (Io / n) ² / m, and the resistor Rij of the other resistor train 60 (62,63,64) does not melt.

Further, for example, when the next predetermined cumulative lighting time is reached, when the current flowing through the resistor unit 50 is further increased in the same manner as described above, the generated Joule heat Pi is fused in order from the largest resistor Rij.

The timing for increasing the current value flowing through the resistor unit 50 may be manually performed when the predetermined cumulative lighting time is reached, or the current value may be increased each time the predetermined cumulative lighting time is reached by a control device (not shown). You may try to raise it. Further, the timing for increasing the current value may be a control value other than the cumulative lighting time.

Therefore, by measuring the combined resistance value of the resistor unit 50, it is possible to know the fused resistor Rij, and to confirm the history of the high-voltage discharge lamp 10 such as new / used discrimination and cumulative lighting time. Can be done.

であるからＲｔ＝１２Ｒ／２５ となり、抵抗体ユニット５０の回路を流れる全電流Ｉｏは、

となる。 (Example)
When the resistance values of all the resistors Rij are the same and the number of the resistors Rij is different for each of the resistor rows 60 (61,62,63,64), specifically, as shown in FIG. When the resistance values R of the resistors Rij are all the same (Rij = R) and the resistance unit 50 has n = m = 4, the combined resistance value Rt of the resistor units 50 is

Therefore, Rt = 12R / 25, and the total current Io flowing through the circuit of the resistor unit 50 is

Will be.

At this time, the current values flowing through the resistor rows 61, 62, 63, 64 and the Joule heat generated are as shown in Table 1.

As can be seen from Table 1, the largest amount of current flows in the first resistor row 61, so as the current value is increased, R11 in the first resistor row 61 first melts.

Table 2 shows the current values and Joule heat generated in the remaining resistor rows 60 (62, 63, 64) after the R11 of the first resistor row 61 is fused. When the current value is further increased after R11 of the first resistor row 61 is blown, either R21 or R22 of the second resistor row 62 through which a large amount of current flows is blown.

By repeating the same operation, the resistors Rij of each resistor row 61, 62, 63, 64 can be sequentially fused, whereby the combined resistance value Rt of the resistor unit 50 changes.

That is, the state of each high-voltage discharge lamp 10 can be known by measuring the combined resistance value Rt of the resistor unit 50. For example, it is possible to determine whether or not it is a new high-voltage discharge lamp 10, and when measuring the combined resistance value Rt of the resistor unit 50 of the new high-voltage discharge lamp 10, it is determined whether or not it is a genuine product. Further, when the combined resistance value Rt of the resistor unit 50 of the used high-voltage discharge lamp 10 is measured, the approximate cumulative lighting time of the high-voltage discharge lamp 10 can be known.

Therefore, as shown in FIG. 4, when a plurality of high-voltage discharge lamps 10 are mounted on the lamp holder 60 to serve as a light source unit for an exposure device, the combined resistance value Rt of the resistor unit 50 of each high-voltage discharge lamp 10 is measured. However, when determining whether the lamp is new or not, or when using the used high-voltage discharge lamp 10, each high-voltage discharge is performed by controlling the applied voltage so that the illuminance becomes a predetermined value according to the cumulative lighting time. The illuminance balance of the lamp 10 can be made uniform, and good exposure results can be obtained. Further, if the high-voltage discharge lamps 10 having the same history are mounted in combination, the applied voltage of the high-voltage discharge lamps 10 can be easily controlled.

As described above, according to the high-voltage discharge lamp 10 of the present embodiment, a plurality of resistance rows 60 (61,62,63,64) in which at least one or more resistors Rij are connected in series are connected in parallel. Therefore, since the combined resistance value Ri of each resistor row 60 (61,62,63,64) is provided with a different resistance unit 50, the combined resistance value Rt of the resistor unit 50 can be measured. , Whether the lamp is new or not, or the state of the lamp such as the cumulative lighting time can be known in detail.

Further, the resistance value R of all the resistors Rij is the same, and the number of the resistance Rijs of each resistor row 60 (61,62,63,64) is the resistance row 60 (61,62,63,64). ), Therefore, it is possible to easily manufacture the resistor unit 50 in which the resistor Rij sequentially melts when the current is gradually increased.

Further, since the history of the high-voltage discharge lamp 10 can be managed based on the combined resistance value Rt of the resistor unit 50, the reliability of the lighting device provided with the high-voltage discharge lamp 10 is improved.

The present invention is not limited to the above-described embodiment, and can be appropriately modified, improved, and the like. For example, the resistor Rij may be inside the insulator 40 of the high-voltage discharge lamp 10, or is a connector (not shown) that provides electrical contact between the wires 51 and 52 that supply power to the resistor unit 50 and the outside. It may be connected to the unit. In this case as well, the resistor Rij needs to be connected to a power supply unit of a system different from the pair of wires 26 and 27 that supply power to the pair of electrodes 21 and 22 of the high-voltage discharge lamp 10.

Further, in the above embodiment, it has been described that the arbitrary resistor Rij is blown by the current control, but the same effect can be obtained even if the arbitrary resistor Rij is blown by the voltage control.

10 High-voltage discharge lamp 20 Light emitting tube 30 Reflector 32 Reflector 40 碍 50 Resistor unit 60, 61, 62, 63, 64 Resistance row R Resistance resistance value of resistor Rij, R11 to R44 Combined resistance of resistor row Value Rt Combined resistance of the resistor unit

Claims (3)

A high-pressure discharge lamp including a light emitting tube as a light source, a reflector having a parabolic reflecting surface and reflecting light emitted from the light emitting tube, and an insulator to which the light emitting tube and the reflector are fixed. There,
A plurality of resistor trains in which at least one or more resistors are connected in series are connected in parallel, further comprising a resistor unit having a different combined resistance value in each of the resistor trains.
A high-voltage discharge lamp characterized in that the resistors in the resistor unit are selectively blown by changing the current or voltage of a power source that supplies electric power to the resistor unit . The resistance values of all the resistors are the same,
The high-voltage discharge lamp according to claim 1, wherein the number of the resistors in each resistor row is different for each resistor row. The high-voltage discharge lamp according to claim 1 or 2, wherein the history of the high-voltage discharge lamp can be managed based on the resistance value of the resistor unit.

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