WO2018186371A1

WO2018186371A1 - High-voltage discharge lamp and method for controlling same

Info

Publication number: WO2018186371A1
Application number: PCT/JP2018/014178
Authority: WO
Inventors: 洋徳川島; 智紀原田; 芳幸吉本; 榎本　芳幸; 工富樫
Original assignee: 株式会社ブイ・テクノロジー
Priority date: 2017-04-04
Filing date: 2018-04-02
Publication date: 2018-10-11
Also published as: CN110547051A; CN110547051B; JP7136467B2; TW201839521A; KR20190134597A; JPWO2018186371A1; TWI795397B

Abstract

A high-voltage discharge lamp (1), provided with: a light-emitting tube (10); a reflector (20) having a spherical or non-spherical reflective surface (22) formed around the longitudinal axis of the light-emitting tube (10), and an insertion hole (23) into which the light-emitting tube (10) can be inserted so that a gap (s) is present; an insulator (30) to which each of the light-emitting tube (10) and the reflector (20) is fixed; and a plurality of resistors (37, 38) disposed in the insulator (30), the resistors (37, 38) having respectively different resistance values and being connected in parallel to each other. This makes it possible to determine the approximate usage time of a lamp, using the lamp itself.

Description

High pressure discharge lamp and control method thereof

The present invention relates to a high-pressure discharge lamp and a control method thereof, and more particularly, to a high-pressure discharge lamp and a control method thereof constituting a multi-light source part of an exposure apparatus.

2. Description of the Related Art In recent years, exposure devices used when manufacturing color filters for flat panel display devices and printed wiring boards have been required to increase the exposure area, and therefore, the output of the light source is also required to be increased. . For this reason, various types of light source units are known that use a plurality of high-pressure discharge lamps with relatively low illuminance, which are advantageous in terms of manufacturing costs (see, for example, Patent Document 1).

As shown in FIG. 7, a conventional high-pressure discharge lamp 100 includes an arc tube 110 that discharges and emits light, a reflector 120 that emits light from the arc tube 110 with directivity, and an arc tube 110. An insulator 130 for fixing the reflector 120 and a wire 140 electrically connected to the arc tube 110 are mainly provided. In the arc tube 110, a light emitting unit 111 having an internal space filled with halogen gas, mercury, starting argon, and the like, a pair of

sealing units

112 and 113 for sealing the internal space of the light emitting unit 111, and light emission A pair of

electrodes

114 and 115 are provided in the portion 111 so as to face each other.

In addition, in the light source device described in Patent Document 1, an incandescent lamp 131 is provided inside the insulator 130 so that whether or not the discharge lamp 100 is a genuine product can be inspected with high accuracy, in a short time, and at low cost. .

Japanese Patent No. 5869713

By the way, in the high pressure discharge lamp, in order to output the same illuminance, the electric power to be discharged is small at the initial stage of use, while the electric power to be discharged becomes larger as the usage time becomes longer. For this reason, in order for the high-pressure discharge lamp to output the same illuminance, it is necessary to increase the applied power as the usage time increases. For this reason, it is desired that the usage time can be confirmed by the lamp itself in order to apply the optimum power. In Patent Document 1, no consideration is given to grasping the usage time of the lamp itself.

The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a high-pressure discharge lamp capable of grasping the approximate usage time of the lamp by the lamp itself and a control method thereof.

The above object of the present invention can be achieved by the following constitution.
(1) arc tube,
A reflector having a spherical or aspherical reflecting surface formed around the longitudinal axis of the arc tube, and an insertion hole into which the arc tube can be inserted with a gap;
An insulator to which the arc tube and the reflector are respectively fixed;
A plurality of resistors arranged inside the insulator, each having a different resistance value, each connected in parallel;
A high-pressure discharge lamp comprising:
(2) The insulator has an open portion that communicates the space formed between the arc tube and the insertion hole of the reflector and the outside.
The high-pressure discharge lamp according to (1), wherein the accommodating space in which the plurality of resistors are arranged is formed by the insulator on a side opposite to the reflector with respect to the open portion.
(3) A method for controlling a high-pressure discharge lamp according to (1) or (2),
The method of controlling a high-pressure discharge lamp, wherein the plurality of resistors controls a voltage applied to the resistors so that the resistors are sequentially melted from the resistors having the lowest resistance values.
(4) The method for controlling a high pressure discharge lamp according to (3), wherein a voltage applied to the high pressure discharge lamp is controlled according to a combined resistance value of the plurality of resistors.
(5) A method for controlling a high-pressure discharge lamp according to (1) or (2),
While monitoring the combined resistance value of the plurality of resistors, current is applied to the plurality of resistors so that the resistors are blown in order from the low resistance value,
The method for controlling a high-pressure discharge lamp, wherein the applied current is stopped when the combined resistance value becomes large.

According to the high-pressure discharge lamp of the present invention, a plurality of resistors having different resistance values are connected in parallel and arranged inside the insulator, so that the resistors are blown by checking the combined resistance value. It is possible to grasp the approximate usage time of the lamp by the lamp itself.

It is a perspective view of the high-pressure discharge lamp concerning one embodiment of the present invention. It is a side view of the high pressure discharge lamp shown in FIG. It is sectional drawing of the high pressure discharge lamp shown in FIG. It is a figure which shows the cross-sectional view which cut | disconnected the high pressure discharge lamp shown in FIG. 1 in the position orthogonal to FIG. 3 with a control circuit. It is a perspective view which shows the state in which the high pressure discharge lamp of this embodiment was attached to the lamp holder. It is a figure which shows the circuit for managing the lifetime of a lamp. It is sectional drawing which shows the conventional high pressure discharge lamp.

Hereinafter, a high-pressure discharge lamp according to an embodiment of the present invention will be described in detail with reference to FIGS.
As shown in FIG. 1, the high-pressure discharge lamp 1 of the present embodiment includes a glass arc tube 10 that discharges and emits light, a reflector 20 that emits light from the arc tube 10 with directivity, and Mainly provided is an insulator 30 for fixing the arc tube 10 and the reflector 20 respectively, and wires 16 and 17 (see FIG. 4) electrically connected to the arc tube 10.

As shown in FIG. 3, the arc tube 10 includes an ellipsoidal arc tube portion 13 in which a pair of

electrodes

11 and 12 are arranged to face each other, and both ends of the arc tube portion 13 connected to each other. 11 and 12 and a pair of

side tube portions

14 and 15 extending along the longitudinal axis X. Further, halogen gas, mercury, starting argon and the like are sealed in the inner space of the arc tube portion 13, and the pair of

side tube portions

14 and 15 seal the internal space of the arc tube portion 13. The arc tube portion 13 may have a spherical shape.

The reflector 20 is provided on one side in the longitudinal axis X direction, the opening 21 from which one side tube portion 14 projects, a parabolic reflecting surface 22 formed around the longitudinal axis X, and the longitudinal axis X. It is formed on the other side of the direction, and the other side tube portion 15 has an insertion hole 23 that can be inserted with a gap. In addition, the reflecting surface 22 of the reflector 20 is not limited to a parabolic shape, but may be an elliptical shape or a spherical shape. That is, the reflecting surface of the reflector of the present invention may be spherical or aspherical.

The arc tube 10 has one electrode 11 extending into one side tube portion 14 as an anode (anode) and the other electrode 12 extending into the other side tube portion 15 as a cathode (cathode). The electric wires extending from the distal end portion of one side tube portion 14 and the proximal end portion of the other side tube portion 15 are respectively connected to a pair of

wires

16 and 17 used for power feeding. The pair of

wires

16 and 17 are connected to a lighting power source 35. Note that the wire 16 connected to the one side pipe portion 14 is led out to the outside through a cradle 24 attached to the reflector 20.

The reflector 20 covers the base 31 of the insulator 30 on the outer side of the bowl-shaped bottom, and the joint is fixed with an adhesive (see FIG. 4). The cylindrical central portion of the base portion 31 of the insulator 30 includes a holding portion 32 that holds the proximal end portion of the other side tube portion 15 that is inserted into the insertion hole 23 of the reflector 20. The other side tube portion 15 is fixed to the insulator 30 and the adhesive by the holding portion 32.
Therefore, the reflector 20 and the other side tube portion 15 of the arc tube 10 are respectively fixed to the insulator 30, and the reflector 20 and the arc tube 10 are not bonded, and the insertion hole of the other side tube portion 15 and the reflector 20 is inserted. The gap between 23 forms a space s.

The insulator 30 includes the base portion 31 described above and a cover portion 33 that includes the holding portion 32 and covers the back of the base portion 31. The bottom 33a of the cover 33 is formed flat.
For this reason, the lamp 1 may be fixed to the lamp holder 50 by bringing a lamp pressing cover (not shown) into contact with the flat bottom 33a and connecting the lamp pressing cover and the lamp holder 50 shown in FIG. .

Returning to FIG. 3, the base portion 31 of the insulator 30 communicates the space s between the other side tube portion 15 and the insertion hole 23 of the reflector 20 with the outside, and the other side tube portion 15 to the outside. It has two open parts 34 opened. Then, as shown in FIG. 5, when the lamp 1 is attached to the lamp holder 50, the air taken from the front of the lamp 1 is extracted from the space s by pulling and exhausting air behind the lamp holder 50. The arc tube 10 is cooled by passing through the opening 34. Therefore, the space s and the open part 34 form a cooling path.

The outer edge of the opening 21 of the reflector 20 is formed in a substantially square shape with chamfered corners. One of the four corners is a notch 26 for alignment. It has a different shape. Thereby, when the lamp 1 is attached to the lamp holder 50, the lamps 1 are all aligned in the same direction.

Since the temperature of the portion located on the upper side of the arc tube 10 is increased, the cooling efficiency increases if the amount of air passing through the upper side is increased.
For this reason, in the illuminating device in which the lamp holder 50 is incorporated, the lamp 1 is preferably aligned and attached to the lamp holder 50 so that the two open portions 34 formed in the insulator 30 are positioned in the vertical direction.

Further, the cooling efficiency may be further increased by making the shape of the insulator 30 asymmetric so that the opening area of the opening part 34 located on the upper side is larger than the opening area of the opening part 34 located on the lower side. For example, in the present embodiment, as shown in FIG. 1, the opening gap g of the opening 34 is defined by two planes passing through the longitudinal axis X, and the angle formed by the two planes is changed. The opening gap g and thus the opening area can be changed.

Here, in the lamp 1 of the present embodiment, as shown in FIG. 4, the accommodation spaces Sp surrounded by the base portion 31 and the cover portion 33 of the insulator 30 have different resistance values and are connected in parallel. A plurality of (in this embodiment, two)

resistors

37 and 38 are provided.
The

resistors

37 and 38 may be any one that generates a load when a current is passed, such as a filament of an incandescent lamp or a metal wire, a metal film resistor, a carbon resistor fuse, a bimetal, a thermocouple, or the like.

These

resistors

37, 38 are connected to a resistor power source 39 via an external power supply wire 36, and are also connected to a measuring unit 40 that measures a current flowing through the power supply wire 36.
The resistor power source 39 and the measuring unit 40 are connected to the control device 41 including the timer 42 together with the lighting power source 35 described above.

Since the

resistors

37 and 38 are connected in parallel, the voltages applied to both ends of each resistor are equal and the generated Joule heat P is V ² / R. Therefore, the smaller the resistance value, the greater the Joule heat. Become.

For example, if the

resistors

37 and 38 have the same material (ρ: resistivity) and thickness (S: cross-sectional area), but have different lengths d1 and d2 (> d1), the

resistors

37 and 38 are used. The resistance values R1 and R2 are R1 <R2. In this case, the generated Joule heat P1, P2 is
^{^{P1 = V 2 / R1 = V}} 2 / (ρd1 / S)
^{^{P2 = V 2 / R2 = V}} 2 / (ρd2 / S)
It becomes.
Therefore, since P1 / P2 = R1 / R2 = d2 / d1, the ratio of Joule heat is a ratio of length.

The

resistors

37 and 38 start to melt when the Joule heat generated per unit volume exceeds a certain value.
Since the cross-sectional area S is the same, as the Joule heat generated per unit volume, the resistor 37 is four times as large as the resistor 38, and the resistor 37 melts first and breaks. Therefore, when the lamp has been used for a predetermined time, a predetermined voltage is applied from the resistor power source 39, so that the resistors having lower resistance values are melted in order.

Specifically, as shown in FIG. 4, the timer 42 built in the control device 41 monitors the lighting power source 35 to measure the usage time of the lamp 1. Then, when the usage time of the lamp 1 becomes the first predetermined time, the resistor 37 having a low resistance value is blown by applying the first predetermined voltage from the resistor power source 39. In addition, by applying a second predetermined voltage higher than the first predetermined voltage from the resistor power source 39 when the lamp 1 has been used for a second predetermined time longer than the first required time, The resistor 38 having a high resistance value is fused.

Further, the combined resistance value of these

resistors

37 and 38 is grasped by measuring the current flowing through the feeding wire 36 by the measuring unit 40. Then, it is possible to confirm the approximate usage time of the lamp by checking which

resistor

37, 38 is blown. Note that the resistance value of each resistor is measured in advance, and the relationship with the usage time is converted into data. Further, this data may be stored in the control device 41 as a table.

Further, the control device 41 controls the voltage of the lighting power source 35 applied to the lamp 1 according to the usage time of the lamp 1, that is, the combined resistance value of the

resistors

37 and 38 measured by the measuring unit 40. .
The

resistors

37 and 38 may be not only voltage controlled but also current controlled or power controlled.

As shown in FIG. 5, the high-pressure discharge lamp 1 configured in this way is applied as a light source unit for an exposure apparatus by mounting a plurality of high-pressure discharge lamps 1 in the vertical and horizontal directions on the lamp holder 50. Therefore, by controlling the voltage applied to each lamp 1, it is possible to irradiate exposure light with uniform illuminance from each lamp 1.

Further, by exhausting air on the back side of the lamp holder 50 by an exhaust device (not shown), the air from the front side of the lamp holder 50 is taken into the lamp 1 using the space s of each high-pressure discharge lamp 1 as a cooling path. Thus, each lamp 1 can be cooled. In addition, the back side of the lamp holder 50 may constitute a sealed space in cooperation with the lamp pressing cover, and air may be exhausted from the sealed space.

In this case, air that cools the lamp 1 passes through the opening portion 34 of the insulator 30, but the accommodation space Sp in which the

resistors

37 and 38 are arranged is on the opposite side of the reflector 20 from the opening portion 34. The insulator 30 is formed. As a result, the fusing of the

resistors

37 and 38 can be prevented from being affected by the air passing through the opening 34.

As described above, according to the high-pressure discharge lamp 1 of the present embodiment, the plurality of

resistors

37 and 38 having different resistance values are respectively connected in parallel and arranged inside the insulator 30. By confirming the combined resistance value, it is possible to grasp whether or not the

resistors

37 and 38 are blown, and it is possible to grasp the approximate usage time of the lamp by the lamp itself.

Further, according to the control method of the high-pressure discharge lamp of the present embodiment, the plurality of

resistors

37 and 38 control the voltage applied to the resistor power source 39 so that the resistors 37 are blown in order from the resistor 37 having the lowest resistance value. Therefore, by checking the combined resistance value, it is possible to grasp whether or not the

resistors

37 and 38 are blown, and it is possible to grasp the approximate usage time of the lamp itself.

Furthermore, since the voltage applied to the high-pressure discharge lamp 1 is controlled in accordance with the combined resistance value of the plurality of

resistors

37 and 38, the exposure light with uniform illuminance is irradiated regardless of the usage time of the lamp 1. be able to.

In addition, this invention is not limited to embodiment mentioned above, A deformation | transformation, improvement, etc. are possible suitably.
For example, in the present invention, the method of connecting the arc tube and the wire and the configuration inside the arc tube are not limited to those of the present embodiment, and any conventional one can be applied.

In the present invention, the life time may be managed using a circuit as shown in FIG. That is, resistors ri and fuses Fi (i = 1, 2,..., N; n is an integer of 2 or more) arranged in series are arranged in n columns in parallel. The resistors ri have different resistance values, and the current values at which the fuse Fi is blown differ. When managing the lifetime, each fuse Fi is disconnected each time a predetermined time elapses by flowing different currents from the resistor power source 39. Note that r of the resistor power source 39 represents the internal resistance of the power source.
Further, the lifetime may be managed by controlling the voltage of the resistor power source 39 and sequentially cutting the fuses Fi.
Further, it is possible to determine the specification of the lamp 1 by determining the combined resistance value of all the resistors ri and the fuse Fi by the determination circuit. In this case, even when the lamps 1 having different specifications are lit, life management is possible and the lamps can be lit normally and safely.

In the above circuit, a plurality of resistors ri having different resistance values are arranged in parallel without providing the fuse Fi, and different currents are supplied from the resistor power source 39, whereby each resistor ri is predetermined. You may make it melt | disconnect in order whenever time passes.

Hereinafter, two embodiments will be described in which a current is passed through a circuit in which a plurality of resistors ri are connected in parallel to melt the resistor ri.

Example 1
In Example 1, two resistors having a resistor r1 made of a nichrome wire having a diameter of 0.2 mm and a length of 5 cm and a resistor r2 made of a nichrome wire having a diameter of 0.2 mm and a length of 10 cm were connected in parallel. A circuit was used. When a current was passed through the circuit, it was confirmed that only the resistor r1 having a length of about 4.5 A and a length of 5 cm could be melted.

(Example 2)
In Example 2, a resistor r1 made of a nichrome wire having a diameter of 0.2 mm and a length of 3 cm, a resistor r2 made of a nichrome wire having a diameter of 0.3 mm and a length of 3 cm, and a nichrome having a diameter of 0.4 mm and a length of 3 cm. A circuit in which three resistors having a resistor r3 made of a line are connected in parallel was used.
When a current was passed through the circuit, the resistor r3 began to heat red when 8A was passed, and the resistor r2 began to heat red at 10A and the resistor r1 started to heat red at 14A. Furthermore, when the current was continued to flow at 14 A, the resistor r3 was melted, and the combined resistance value monitored increased rapidly. At this time, only the resistor r3 could be melted by stopping the current flow.
That is, in this example, when an increase in the combined resistance value that is determined to be a blowout of the resistor is detected, the flow of current is temporarily stopped so that only one resistor is blown. Yes.
Thereafter, it was confirmed that the resistor r2 and the resistor r1 could be melted in this order by increasing the current in the same manner.

The present invention is based on a Japanese patent application (Japanese Patent Application No. 2017-074742) filed on April 4, 2017, the contents of which are incorporated herein by reference.

DESCRIPTION OF SYMBOLS 1 High pressure discharge lamp 10

Arc tube

11, 12 Electrode 13

Arc tube part

14, 15 Side pipe part 20 Reflector 21 Opening part 22 Reflecting surface 23 Insertion hole 30 Insulator 34

Opening part

37, 38, r1, r2, r3 Resistor 41 Control Device Sp accommodation space

Claims

Arc tube,
A reflector having a spherical or aspherical reflecting surface formed around the longitudinal axis of the arc tube, and an insertion hole into which the arc tube can be inserted with a gap;
An insulator to which the arc tube and the reflector are respectively fixed;
A plurality of resistors arranged inside the insulator, each having a different resistance value, each connected in parallel;
A high-pressure discharge lamp comprising:
The insulator has an open portion that communicates the space formed between the arc tube and the insertion hole of the reflector and the outside,
2. The high-pressure discharge lamp according to claim 1, wherein the accommodating space in which the plurality of resistors are arranged is formed by the insulator on a side opposite to the reflector with respect to the open portion.
A method for controlling a high-pressure discharge lamp according to claim 1 or 2,
The method of controlling a high-pressure discharge lamp, wherein the plurality of resistors controls a voltage applied to the resistors so that the resistors are sequentially melted from the resistors having the lowest resistance values.
4. The method of controlling a high pressure discharge lamp according to claim 3, wherein a voltage applied to the high pressure discharge lamp is controlled according to a combined resistance value of the plurality of resistors.
A method for controlling a high-pressure discharge lamp according to claim 1 or 2,
While monitoring the combined resistance value of the plurality of resistors, current is applied to the plurality of resistors so that the resistors are blown in order from the low resistance value,
The method for controlling a high-pressure discharge lamp, wherein the applied current is stopped when the combined resistance value becomes large.