CN104684229A - Control system of high power supply used for supplying electricity to super-high pressure mercury lamp - Google Patents
Control system of high power supply used for supplying electricity to super-high pressure mercury lamp Download PDFInfo
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- CN104684229A CN104684229A CN201310621232.4A CN201310621232A CN104684229A CN 104684229 A CN104684229 A CN 104684229A CN 201310621232 A CN201310621232 A CN 201310621232A CN 104684229 A CN104684229 A CN 104684229A
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- mercury lamp
- pressure mercury
- power supply
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- control system
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Abstract
The invention discloses a control system of a high power supply used for supplying electricity to a super-high pressure mercury lamp. The control system comprises a trigger, which is connected to the super-high pressure mercury lamp and is used for triggering the super-high pressure mercury lamp, a power supply unit, which is connected to the trigger and the super-high pressure mercury lamp and is used for providing the continuous power supply for the super-high pressure mercury lamp, and a controller, which is used for configuring and controlling the output power of a connection mode of the power supply unit according to the power supply requirements and the normal working parameter requirements of the super-high pressure mercury lamp.
Description
Technical field
The present invention relates to a kind of integrated circuit equipment manufacturing field, particularly relate to a kind of control system of large power supply of powering for ultrahigh pressure mercury lamp.
Background technology
Its electric parameter of dissimilar ultrahigh pressure mercury lamp is also different, is mainly manifested on rated power, rated voltage, rated current, trigger voltage and startup energy.If multiple ultrahigh pressure mercury lamp (the interval 1000W-10000W of rated power) electric parameter, rated voltage minimum value 20V, maximum 100V, rated current minimum value 30A, maximum 250A.So require rated power at least more than the 25000W (250A*100V) of its power supply, its volume of such power supply and cost all very high.A kind of power supply joined by ultrahigh pressure mercury lamp to every type, so just needs a variety of power supply.And along with mask aligner user require increase, can get more and more.
In order to solve problems of the prior art, needing the power reguirements wanting a kind of new technical scheme can meet small-power ultrahigh pressure mercury lamp badly, the power reguirements of high-power ultrahigh pressure mercury lamp can be met again.
Summary of the invention
In order to overcome the defect existed in prior art, the invention provides a kind of control system of large power supply of powering for ultrahigh pressure mercury lamp, the power reguirements of small-power ultrahigh pressure mercury lamp can be met, the power reguirements of high-power ultrahigh pressure mercury lamp can be met again.
In order to realize foregoing invention object, the present invention discloses a kind of control system of large power supply of powering for ultrahigh pressure mercury lamp, and comprising: a trigger, described trigger is connected with described ultrahigh pressure mercury lamp, for triggering described ultrahigh pressure mercury lamp; One power supply unit, described power supply unit is connected with described trigger and described ultrahigh pressure mercury lamp, for providing constant current source for described ultrahigh pressure mercury lamp; One controller, described controller is used for according to the power demands normal operating parameters requirement of described ultrahigh pressure mercury lamp, for configuring and controlling the connected mode power output of described power supply unit.
Further, described power supply unit, is made up of several power modules.
Further, power module tandem compound described in several, less to make described power supply unit meet electric current, the parameter request of the described ultrahigh pressure mercury lamp that rated voltage is larger.
Further, power module parallel combination described in several, comparatively large to make described power supply unit meet electric current, the parameter request of the described ultrahigh pressure mercury lamp that rated voltage is less.
Further, power module connection in series-parallel combination described in several, comparatively large to make described power supply unit meet electric current, the parameter request of the described ultrahigh pressure mercury lamp that rated voltage is larger.
Further, described controller is made up of memory, main control unit, serial ports and control interface.
Further, the electric parameter of described ultrahigh pressure mercury lamp and described power supply unit preserved by described memory.
Further, also comprise protection switch, described protection switch is connected with affiliated controller, for when described ultrahigh pressure mercury lamp irregular working, cuts off the electricity supply.
The invention also discloses a kind of ultra high pressure mercury lamp lighting apparatus, it is characterized in that, comprise the control system using large power supply as claimed in claim 1.
The invention also discloses a kind of mask aligner, it is characterized in that, comprise and use ultra high pressure mercury lamp lighting apparatus as claimed in claim 9.
Compared with prior art, the invention provides a kind of control system of large power supply of powering for ultrahigh pressure mercury lamp, the power reguirements of small-power ultrahigh pressure mercury lamp can be met, the power reguirements of high-power ultrahigh pressure mercury lamp can be met again.Technical scheme of the present invention, had both met the power reguirements of the various ultrahigh pressure mercury lamps of small-power specification, met again the power reguirements of the various ultrahigh pressure mercury lamps of high-power specification.Meet big current again, the power reguirements of the ultrahigh pressure mercury lamp of all sizes such as small voltage and large voltage, small area analysis simultaneously.
Accompanying drawing explanation
Can be further understood by following detailed Description Of The Invention and institute's accompanying drawings about the advantages and spirit of the present invention.
Fig. 1 is the control system schematic diagram of ultrahigh pressure mercury lamp power control system;
Fig. 2 is power module rated voltage current diagram;
Fig. 3 is power-supply controller of electric component system block diagram provided by the present invention;
Fig. 4 is the configuration flow figure of power-supply controller of electric provided by the present invention;
Fig. 5 is power supply unit parallel combination mode control system provided by the present invention;
Fig. 6 is power supply unit tandem compound mode control system provided by the present invention;
Fig. 7 is power supply unit connection in series-parallel compound mode control system provided by the present invention;
Fig. 8 is the electric current and voltage schematic diagram of x type power module.
Embodiment
Specific embodiments of the invention are described in detail below in conjunction with accompanying drawing.
Fig. 1 is the control system schematic diagram of ultrahigh pressure mercury lamp power control system.As shown in fig. 1, ultrahigh pressure mercury lamp power module control system is primarily of this few part composition of controller 1, power supply unit 2, trigger 3 and mercury lamp 5.Operation principle is, first by trigger by the ionized inert gas in ultrahigh pressure mercury lamp, produce conduction charged particle.Power supply unit will maintain its conduction state, and continual and steady provide electric energy, make it light completely.In order to ensure the normal work of this ultrahigh pressure mercury lamp further, this control system also comprises a protection switch 4, and this protection switch 4 pairs of controllers 1 carry out state-detection.
In technical scheme of the present invention, its power supply unit is made up of two parts.Start-up course makes it maintain the startup power supply unit of its conduction and continue to provide the programmable power supply parts of regulated power.Wherein programmable power supply parts, are made up of multiple power output, control interface and mechanical dimension's same power supplies module.Voltage, range of current output are different.As shown in Figure 2, output voltage is according to descending, and output current, according to ascending, marks off n interval.
That is, output voltage Vn > Vn-1, output current In < In-1.And power output P=Vn-1* In-1=Vn* In.
In technical scheme of the present invention, its controller part is made up of the serial ports 305 of memory BOM301, main control unit MCU302, configuration parameter and control interface 303.Wherein memory BOM preserves the electric parameter of various types of ultrahigh pressure mercury lamp and programmable power supply parts.As shown in Figure 3, controller part supports m such programmable power supply to its theory diagram.Its hardware system like this, can be configured to m*n output.The theory diagram of layoutprocedure as shown in Figure 4.
As shown in Figure 4, first, host computer is by communication interface setting ultra high pressure mercury lamp type, and controller reads mercury lamp parameter according to mercury lamp type from BOM.Select ultra high pressure mercury lamp type, read mercury lamp parameter 401.Judge whether this ultrahigh pressure mercury lamp rated power is less than a power supply unit rated power 402.If judged result is "Yes", this ultrahigh pressure mercury lamp system configuration is become a power control system 403; If judged result is "No", then the power of this ultrahigh pressure mercury lamp is greater than the rated power of a power supply unit, and is less than the rated power of 2 power supply units, be then configured to the control system of 2 power supply units; The rest may be inferred, is configured to the control system 404 of multiple power supply unit.Judge whether ultrahigh pressure mercury lamp rated voltage is greater than single power supply unit rated voltage 405.If judged result is "Yes", judge whether ultrahigh pressure mercury lamp rated current is greater than single power supply unit rated current 407 further.If judged result is "No", judge whether ultrahigh pressure mercury lamp rated current is greater than single power supply unit rated current 406 further.If the operating voltage of ultrahigh pressure mercury lamp is comparatively large, and electric current is less.The rated voltage of a power supply can not meet, then take 2 or more power supply units, be configured to the power control system 409 of the mode that is one another in series.If the operating current of ultrahigh pressure mercury lamp is comparatively large, and voltage is less.The rated current of a power supply can not meet, then take 2 or more power supply units, be configured to the power control system 411 of the mode that is connected in parallel to each other.If the operating voltage of ultrahigh pressure mercury lamp and operating current are all comparatively large, the rated voltage of a power supply and rated current all can not meet, then take 4 or more power supply units, be configured to the power control system 410 of connection in series-parallel hybrid mode.
In a first embodiment, be small-power ultrahigh pressure mercury lamp power module and power, the power output of a power module can meet.Its X-type power module electric current and voltage figure as shown in Figure 8.This situation layoutprocedure is as follows:
The first step, to be saved to the electric parameter of 2 sections of ultrahigh pressure mercury lamps by serial ports in controller memory ROM inside.Its parameter is saved in Lamp-1 and Lamp-2 two storage areas respectively.
When second step, application, if use Lamp-1 ultrahigh pressure mercury lamp, be configured to the mercury lamp controller of Lamp-1 type by serial ports, then call Lamp-1 corresponding region electric parameter.If use Lamp-2 ultrahigh pressure mercury lamp, then be configured to the mercury lamp controller of Lamp-1 type by serial ports, then call Lamp-2 corresponding region electric parameter.
If the 3rd step truly uses Lamp-2 ultrahigh pressure mercury lamp, and has been configured to the mercury lamp controller of Lamp-1 type.Checked by parameter, note abnormalities, report an error.
If the 4th step has been configured to the mercury lamp controller of other type by serial ports, then by types of nuclear pair, does not find such ultrahigh pressure mercury lamp in memory, reported an error.
For small-power ultrahigh pressure mercury lamp power module is powered, the power output of a power module can meet.If x type power module or its rated voltage can not meet, or its rated current can not meet.In the second execution mode, its layoutprocedure is as follows:
The first step, the electric parameters such as the rated voltage of each model specification power module, electric current to be saved to inside the memory ROM in controller.
Second step, will need control ultrahigh pressure mercury lamp electric parameter inputed in controller by serial ports.
3rd step, carry out parameter matching, the object of this process is the power module selecting to meet the demands.Provide the model specification numbering of the power module that can meet the demands.
4th step, controller control according to the power module of coupling.
For high-power ultrahigh pressure mercury lamp power module is powered, the power output of the multiple power module of palpus could be able to meet.In this case, its layoutprocedure is as follows:
The first step, carry out power match, if the power of ultrahigh pressure mercury lamp is 5000W, the power of single power supply is 3000W.Then be configured to two power modules;
The rated current of second step, ultrahigh pressure mercury lamp is comparatively large, and rated voltage is less, two power module parallel connection configurations.
The rated current of the 3rd step, ultrahigh pressure mercury lamp is comparatively large, and rated voltage is less, two power module parallel connection configurations.
The rated current of the 4th step, ultrahigh pressure mercury lamp and rated voltage are all comparatively large, adopt four power modules to carry out connection in series-parallel mixed configuration.
If the configuration of the 5th step multiple power module can meet the power reguirements of multiple high-power ultrahigh pressure mercury lamp, its layoutprocedure is with embodiment 1.
In sum, technical scheme of the present invention, had both met the power reguirements of the various ultrahigh pressure mercury lamps of small-power specification, met again the power reguirements of the various ultrahigh pressure mercury lamps of high-power specification.Meet big current again, the power reguirements of the ultrahigh pressure mercury lamp of all sizes such as small voltage and large voltage, small area analysis simultaneously.
Just preferred embodiment of the present invention described in this specification, above embodiment is only in order to illustrate technical scheme of the present invention but not limitation of the present invention.All those skilled in the art, all should be within the scope of the present invention under this invention's idea by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (10)
1. a control system for the large power supply of powering for ultrahigh pressure mercury lamp, is characterized in that, comprising:
One trigger, described trigger is connected with described ultrahigh pressure mercury lamp, for triggering described ultrahigh pressure mercury lamp;
One power supply unit, described power supply unit is connected with described trigger and described ultrahigh pressure mercury lamp, for providing constant current source for described ultrahigh pressure mercury lamp;
One controller, described controller is used for according to the normal operating parameters requirement of described ultrahigh pressure mercury lamp, for configuring and controlling the power output of described power supply unit.
2. control system as claimed in claim 1, is characterized in that described power supply unit is made up of several power modules.
3. control system as claimed in claim 2, is characterized in that, power module tandem compound described in several, less to make described power supply unit meet electric current, the parameter request of the described ultrahigh pressure mercury lamp that rated voltage is larger.
4. control system as claimed in claim 2, is characterized in that, power module parallel combination described in several, comparatively large to make described power supply unit meet electric current, the parameter request of the described ultrahigh pressure mercury lamp that rated voltage is less.
5. control system as claimed in claim 2, is characterized in that, power module connection in series-parallel combination described in several, comparatively large to make described power supply unit meet electric current, the parameter request of the described ultrahigh pressure mercury lamp that rated voltage is larger.
6. control system as claimed in claim 2, it is characterized in that, described controller is made up of memory, main control unit, serial ports and control interface.
7. control system as claimed in claim 6, it is characterized in that, the electric parameter of described ultrahigh pressure mercury lamp and described power supply unit preserved by described memory.
8. as the control system as described in arbitrary in claim 1 to 7, it is characterized in that, also comprise protection switch, described protection switch is connected with affiliated controller, for when described ultrahigh pressure mercury lamp irregular working, cuts off the electricity supply.
9. a ultra high pressure mercury lamp lighting apparatus, is characterized in that, comprises the control system using large power supply as claimed in claim 1.
10. a mask aligner, is characterized in that, comprises and uses ultra high pressure mercury lamp lighting apparatus as claimed in claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310621232.4A CN104684229A (en) | 2013-11-29 | 2013-11-29 | Control system of high power supply used for supplying electricity to super-high pressure mercury lamp |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310621232.4A CN104684229A (en) | 2013-11-29 | 2013-11-29 | Control system of high power supply used for supplying electricity to super-high pressure mercury lamp |
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| CN104684229A true CN104684229A (en) | 2015-06-03 |
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| CN201310621232.4A Pending CN104684229A (en) | 2013-11-29 | 2013-11-29 | Control system of high power supply used for supplying electricity to super-high pressure mercury lamp |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107124808A (en) * | 2017-06-14 | 2017-09-01 | 重庆市威尔试验仪器有限公司 | A kind of xenon lamp energy regulating system of weather-resistant test box |
| TWI795397B (en) * | 2017-04-04 | 2023-03-11 | 日商Ｖ科技股份有限公司 | High pressure discharge lamp and its control method |
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| US20010012794A1 (en) * | 1997-02-10 | 2001-08-09 | Toshiyuki Nishihara | Apparatus for saving power consumption of a portable electronic device |
| CN101442259A (en) * | 2007-11-19 | 2009-05-27 | 王宏图 | DC parallel-serial transition electric power system |
| CN201373320Y (en) * | 2009-02-25 | 2009-12-30 | 石匀宁 | Solar energy lighting device |
| WO2011129171A1 (en) * | 2010-04-12 | 2011-10-20 | 株式会社マキタ | Electric power tool utilizing battery pack as power source, and adapter for same |
| CN202396068U (en) * | 2011-12-16 | 2012-08-22 | 泉州市本电照明电器有限公司 | Electronic ballast of metal halogen lamp |
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2013
- 2013-11-29 CN CN201310621232.4A patent/CN104684229A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20010012794A1 (en) * | 1997-02-10 | 2001-08-09 | Toshiyuki Nishihara | Apparatus for saving power consumption of a portable electronic device |
| CN101442259A (en) * | 2007-11-19 | 2009-05-27 | 王宏图 | DC parallel-serial transition electric power system |
| CN201373320Y (en) * | 2009-02-25 | 2009-12-30 | 石匀宁 | Solar energy lighting device |
| WO2011129171A1 (en) * | 2010-04-12 | 2011-10-20 | 株式会社マキタ | Electric power tool utilizing battery pack as power source, and adapter for same |
| CN202396068U (en) * | 2011-12-16 | 2012-08-22 | 泉州市本电照明电器有限公司 | Electronic ballast of metal halogen lamp |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI795397B (en) * | 2017-04-04 | 2023-03-11 | 日商Ｖ科技股份有限公司 | High pressure discharge lamp and its control method |
| CN107124808A (en) * | 2017-06-14 | 2017-09-01 | 重庆市威尔试验仪器有限公司 | A kind of xenon lamp energy regulating system of weather-resistant test box |
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Address after: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Applicant after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Shanghai Zhangjiang High Tech Park of Pudong New Area Zhang Road No. 1525 Applicant before: Shanghai Micro Electronics Equipment Co., Ltd. |
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Application publication date: 20150603 |
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