CN103052247B - The starting current limiting circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment - Google Patents
The starting current limiting circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment Download PDFInfo
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- CN103052247B CN103052247B CN201210480087.8A CN201210480087A CN103052247B CN 103052247 B CN103052247 B CN 103052247B CN 201210480087 A CN201210480087 A CN 201210480087A CN 103052247 B CN103052247 B CN 103052247B
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- mercury lamp
- pressure mercury
- current
- ultrahigh pressure
- circuit
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Abstract
The present invention relates to the starting current limiting circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment, comprise the pulse width controller that the current sensor of detection ultra high pressure mercury lamp current signal, current reference signal circuit, hysteresis loop comparator, transistor switching circuit and input are connected with hysteresis loop comparator output through transistor switching circuit; Hysteresis loop comparator by ultrahigh pressure mercury lamp current signal level that current sensor is sampled compared with the baseline signal level of current reference signal circuit configuration, controlling transistor switching circuit conducting or cut-off, to control pulse width controller in-phase input end level drop-down or recover, and controls ultrahigh pressure mercury lamp starting current in a safe range.The present invention reliably can control ultrahigh pressure mercury lamp inrush current in a safe range, and starting current is by current reference signal circuit configuration, ultrahigh pressure mercury lamp enters stable state from starting to, transient process is steady, ensure that ultrahigh pressure mercury lamp can clean boot, ensure that lithographic equipment reliability.
Description
Technical field
The present invention relates to the starting current limiting circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment.
Background technology
Microelectronics lithographic equipment adopts ultrahigh pressure mercury lamp as light emitting source, ultrahigh pressure mercury lamp utilizes mercuryvapour to conduct electricity and sends the luminescent device of ultraviolet light, high voltage startup is needed to light, light the two poles of the earth instantaneously and be in short-circuit condition, if do not have reliable current limiting measures, electric current out of handly can burn mercury lamp, leads to a disaster, therefore, starting current must be controlled a safe range; Starting current is too little, not easily lights, and then there is potential safety hazard too greatly.
At present, lithographic equipment ultrahigh pressure mercury lamp power supply many employings linear power supply or switch constant-current source; Linear power supply is heavy, and starting current not easily regulates, and is in superseded situation gradually; Switch constant-current source enters steady-state phase at ultrahigh pressure mercury lamp from starting to, and electric current falls after rise to operating current from maximum starting current, is that segmentation saltus step falls after rise, and transient process is very not steady, easily causes ultrahigh pressure mercury lamp to extinguish.
Summary of the invention
The object of the present invention is to provide ultrahigh pressure mercury lamp starting current limiting circuit in a kind of lithographic equipment reliably, be intended to solve existing ultrahigh pressure mercury lamp power supply starting current not easily regulate, start to and enter stable state, transient process electric current is not steady, the problem that ultrahigh pressure mercury lamp easily extinguishes.
For realizing above-mentioned object, the technical solution adopted in the present invention is as follows:
The starting current limiting circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment, comprise the current sensor for detecting ultra high pressure mercury lamp current signal, current reference signal circuit, hysteresis loop comparator, switching circuit and input to be connected with described hysteresis loop comparator output through described switching circuit, and for outputing control signals to the pulse width controller of drive circuit after the power control signal of received power control circuit output and the power reference signal of power reference circuit output; Described current sensor output connects described hysteresis loop comparator signal input part; Described current reference signal circuit output end connects described hysteresis loop comparator benchmark input end; Described hysteresis loop comparator by ultrahigh pressure mercury lamp current signal level that described current sensor is sampled compared with the baseline signal level of described current reference signal circuit configuration, control described transistor switching circuit conducting or cut-off control described pulse width controller in-phase input end level drop-down or recover, control described ultrahigh pressure mercury lamp starting current in a safe range.
Described current reference signal circuit comprises reference voltage source, potentiometer RP1, resistance R4, is connected on described reference voltage source output terminal after potentiometer RP1 swing arm is connected with its one end, and the other end is through resistance R4 ground connection.
Described hysteresis loop comparator comprises operational amplifier and resistance R1, R2, R3; Described operational amplifier in-phase input end connects described current sensor output through resistance R2, between the output that resistance R1 is connected on described current sensor and ground, resistance R3 is connected between described operational amplifier in-phase input end and output, described operational amplifier inverting input is connected on described reference voltage source output terminal through described potentiometer RP1, and resistance R4 is connected between described operational amplifier inverting input and ground.
Described transistor switching circuit comprises switch triode V1, resistance R5, electric capacity C1 and diode V2; Described triode V1 base stage is connected on described operational amplifier output terminal through resistance R5, and emitter connects diode V2 positive pole, diode V2 minus earth, and collector electrode connects described pulse width controller in-phase input end; Described electric capacity C1 is connected between described operational amplifier output terminal and ground.
Described current sensor adopts Hall magnetic balance transducer.
The ultrahigh pressure mercury lamp current signal level that current sensor is detected by stagnant comparator of whirling by the present invention compares with the baseline signal level of setting, and when electric current exceeds maximum safe current, namely current signal level be more than or equal to stagnant whirl comparator Upper threshold level time, by described stagnant comparator upset of whirling, make transistor switching circuit conducting, pulse width controller in-phase input end level is left behind rapidly, output pulse width narrows, power output sharply declines, and then ultra high pressure mercury lamp current is also reduced rapidly thereupon, when current signal level be reduced to stagnant whirl comparator Lower Threshold level time, ended by transistor switching circuit, make pulse width controller in-phase input end level return to power reference level, thus starting current reliably and is reposefully limited in a safe range, after this, along with the rising of luminous point temperature, lamp internal resistance increases gradually, modulating voltage raises gradually, electric current is reduced to operating current gradually, like this, the falling of electric current reduces with the increase of lamp internal resistance completely, transient process is very steady, and starting current is by current reference signal circuit configuration, solve existing ultrahigh pressure mercury lamp power supply starting current not easily to regulate, start to that to enter stable state transient process electric current not steady, the problem that ultrahigh pressure mercury lamp easily extinguishes, effectively ensure that ultrahigh pressure mercury lamp can clean boot, ensure that the reliability of lithographic equipment.
Accompanying drawing explanation
Figure 1 shows that the theory diagram of the starting current limiting circuit of the ultrahigh pressure mercury lamp that the embodiment of the present invention provides.
Figure 2 shows that the circuit theory diagrams of the starting current limiting circuit of the ultrahigh pressure mercury lamp that the embodiment of the present invention provides;
Figure 3 shows that the theory diagram of the Switching Power Supply of ultrahigh pressure mercury lamp in the lithographic equipment comprising the starting current limiting circuit that the embodiment of the present invention provides.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with accompanying drawing, the present invention is further elaborated.
See Fig. 1, the figure shows the principle of the starting current limiting circuit of the ultrahigh pressure mercury lamp that the embodiment of the present invention provides.For convenience of explanation, illustrate only the part relevant with the embodiment of the present invention.
The starting current limiting circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment, comprise the current sensor for detecting ultra high pressure mercury lamp current signal, current reference signal circuit, hysteresis loop comparator, switching circuit and input to be connected with described hysteresis loop comparator output through described switching circuit, and for outputing control signals to the pulse width controller of drive circuit after the power control signal of received power control circuit output and the power reference signal of power reference circuit output; Described current sensor output connects described hysteresis loop comparator signal input part; Described current reference signal circuit output end connects described hysteresis loop comparator benchmark input end;
Described hysteresis loop comparator is used for being compared with the baseline signal level of described current reference signal circuit configuration by the ultrahigh pressure mercury lamp current signal level of being sampled by described current sensor, current signal level be more than or equal to stagnant whirl comparator Upper threshold level time, overturn by described hysteresis loop comparator, make described transistor switching circuit conducting, the in-phase input end level of described pulse width controller is declined rapidly, when current signal level be less than or equal to stagnant whirl comparator Upper threshold level time, described transistor switching circuit cut-off, the in-phase input end level of described pulse width controller is made to return to the power reference level of setting again, thus achieve limiting starting current in a safe range.
Shown in Figure 2, described current reference signal circuit comprises reference voltage source A1, potentiometer RP1, resistance R4, and be connected on described reference voltage source A1 output M2 after potentiometer RP1 swing arm is connected with its one end, the other end is through resistance R4 ground connection.
Described hysteresis loop comparator comprises operational amplifier N1 and resistance R1, R2, R3; Described operational amplifier N1 in-phase input end meets described current sensor TA1 output M1 through resistance R2, between the output that resistance R1 is connected on described current sensor TA1 and ground, resistance R3 is connected between described operational amplifier N1 in-phase input end and output, described operational amplifier N1 inverting input is connected on described reference voltage source A1 output through described potentiometer RP1, and resistance R4 is connected between described operational amplifier N1 inverting input and ground.
Described switching circuit adopts transistor switching circuit, comprises switch triode V1, resistance R5, electric capacity C1 and diode V2; Described triode V1 base stage is connected on described operational amplifier N1 output through resistance R5, and emitter connects diode V2 positive pole, diode V2 minus earth, and its collector electrode connects described pulse width controller N2 in-phase input end; Described electric capacity C1 is connected between described operational amplifier N1 output and ground.
In the embodiment of the present invention, preferably, described current sensor TA1 adopts Hall magnetic balance transducer.
Preferably, the model of described reference voltage source A1 is AD586, and the model of described operational amplifier N1 is OP07, and the model of described switch triode V1 is 2SC9014, the model of described diode V2 is IN4148, and the model of described pulse width controller N2 is SG3524.
Shown in Figure 3, this Fig. 3 illustrates the annexation of the power control circuit of the starting current limiting circuit that the embodiment of the present invention of knowing clearly provides and ultra high pressure mercury lamp switch power, power reference circuit and drive circuit, power conversion circuit.
By the embodiment of the present invention is provided as Fig. 2 show starting current limiting circuit, after being connected by the circuit shown in Fig. 3 with described ultrahigh pressure mercury lamp, object of the present invention can be realized.
Operation principle of the present invention is as follows:
In ultrahigh pressure mercury lamp switching power source control circuit, high sensitivity Hall magnetic balance current sensor TA1 is adopted to detect ultrahigh pressure mercury lamp current signal level V
in, set maximum starting current signal criterion level V with reference voltage source A1, potentiometer RP1 and resistance R4
ref, by current signal level V
inwith the baseline signal level V of the corresponding maximum safe current of current reference signal circuit configuration
ref, compared by stagnant comparator of whirling.
When ultra high pressure mercury lamp current exceeds maximum safe current, that is current signal level V
inbe more than or equal to the stagnant comparator Upper threshold level V that whirls
tU(V
in>=V
tU) time, stagnant comparator upset of whirling, switching tube V1 conducting, pulse width controller PWM in-phase input end level IN+ is left behind rapidly, and output pulse width narrows, and power output sharply declines, and ultra high pressure mercury lamp current also reduces rapidly thereupon, V
inalso reduce thereupon; Work as V
inbe decreased to and be less than or equal to the stagnant comparator Lower Threshold level V that whirls
tL(V
in≤ V
tL) time, switching tube V1 ends, and the in-phase input end level IN+ of pulse width controller PWM returns to the power reference level of power reference circuit configuration, so just can limiting starting current a safe range.
Wherein, V
tUand V
tLdetermined by following formula:
V
hfor operational amplifier N1 exports maximum, V
lfor operational amplifier N1 exports minimum value.
The ultrahigh pressure mercury lamp current signal level that current sensor is detected by stagnant comparator of whirling by the present invention compares with the baseline signal level of setting, and when electric current exceeds maximum safe current, namely current signal level be more than or equal to stagnant whirl comparator Upper threshold level time, by described stagnant comparator upset of whirling, make transistor switching circuit conducting, pulse width controller in-phase input end level is left behind rapidly, output pulse width narrows, power output sharply declines, and then ultra high pressure mercury lamp current is also reduced rapidly thereupon; When current signal level be reduced to stagnant whirl comparator Lower Threshold level time, ended by transistor switching circuit, pulse width controller in-phase input end level is made to return to power reference level, thus starting current is reliably limited in a safe range, ensure that ultrahigh pressure mercury lamp can clean boot, thus ensure that the reliability of lithographic equipment.
Compared with prior art, the present invention not only achieve reliably limit ultrahigh pressure mercury lamp starting current in the scope of a safety, and enter stable state from starting to, transient process is more steady, solve existing ultrahigh pressure mercury lamp power supply starting current not easily to regulate, enter stable state from starting to, transient process electric current is not steady, causes the problem that ultrahigh pressure mercury lamp easily extinguishes.
Below be only the preferred embodiment of the present invention, for those skilled in the art, under the premise without departing from the principles of the invention, also can make some improvement, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (5)
1. the starting current limiting circuit of ultrahigh pressure mercury lamp in a lithographic equipment, it is characterized in that, comprise the current sensor for detecting ultra high pressure mercury lamp current signal, current reference signal circuit, hysteresis loop comparator, transistor switching circuit and input to be connected with described hysteresis loop comparator output through described transistor switching circuit, and for outputing control signals to the pulse width controller of drive circuit after the power control signal of received power control circuit output and the power reference signal of power reference circuit output; Described current sensor output connects described hysteresis loop comparator signal input part; Described current reference signal circuit output end connects described hysteresis loop comparator benchmark input end; Described hysteresis loop comparator by ultrahigh pressure mercury lamp current signal level that described current sensor is sampled compared with the baseline signal level of described current reference signal circuit configuration, control described transistor switching circuit conducting or cut-off control described pulse width controller in-phase input end level drop-down or recover, control described ultrahigh pressure mercury lamp starting current in a safe range;
Described current reference signal circuit comprises reference voltage source, potentiometer RP1, resistance R4.
2. the starting current limiting circuit of ultrahigh pressure mercury lamp in lithographic equipment according to claim 1, it is characterized in that, potentiometer RP1 swing arm is connected on described reference voltage source output terminal after being connected with one end of described potentiometer RP1, and the other end of described potentiometer RP1 is through resistance R4 ground connection.
3. the starting current limiting circuit of ultrahigh pressure mercury lamp in lithographic equipment according to claim 2, it is characterized in that, described hysteresis loop comparator comprises operational amplifier and resistance R1, R2, R3; Described operational amplifier in-phase input end connects described current sensor output through resistance R2, between the output that resistance R1 is connected on described current sensor and ground, resistance R3 is connected between described operational amplifier in-phase input end and output, described operational amplifier inverting input is connected on described reference voltage source output terminal through described potentiometer RP1, and resistance R4 is connected between described operational amplifier inverting input and ground.
4. the starting current limiting circuit of ultrahigh pressure mercury lamp in lithographic equipment according to claim 3, it is characterized in that, described transistor switching circuit comprises switch triode V1, resistance R5, electric capacity C1 and diode V2; Described triode V1 base stage is connected on described operational amplifier output terminal through resistance R5, and emitter connects diode V2 positive pole, diode V2 minus earth, and collector electrode connects described pulse width controller in-phase input end; Described electric capacity C1 is connected between described operational amplifier output terminal and ground.
5. in the lithographic equipment according to any one of claim 1 ~ 4, the starting current limiting circuit of ultrahigh pressure mercury lamp, is characterized in that, described current sensor adopts Hall magnetic balance transducer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210480087.8A CN103052247B (en) | 2012-11-23 | 2012-11-23 | The starting current limiting circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210480087.8A CN103052247B (en) | 2012-11-23 | 2012-11-23 | The starting current limiting circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment |
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| Publication Number | Publication Date |
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| CN103052247A CN103052247A (en) | 2013-04-17 |
| CN103052247B true CN103052247B (en) | 2016-04-27 |
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| CN201210480087.8A Expired - Fee Related CN103052247B (en) | 2012-11-23 | 2012-11-23 | The starting current limiting circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP7136467B2 (en) * | 2017-04-04 | 2022-09-13 | 株式会社ブイ・テクノロジー | High pressure discharge lamp and its control method |
| CN112093690B (en) * | 2020-09-11 | 2022-09-09 | 湖南三一中型起重机械有限公司 | Starting current optimization method and device, electronic equipment and storage medium |
| CN112433449A (en) * | 2020-11-18 | 2021-03-02 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Control system for safe starting of deep ultraviolet lamp |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2556778Y (en) * | 2002-07-05 | 2003-06-18 | 北京通力环电气股份有限公司 | Constand-current driven DC relay controller |
| CN101795075A (en) * | 2009-01-30 | 2010-08-04 | 电力集成公司 | Method and apparatus to regulate an output voltage of a power converter at light/no load conditions |
| CN201629673U (en) * | 2009-10-28 | 2010-11-10 | 中国电力科学研究院 | Current source based on hysteresis control principle |
| CN102377341A (en) * | 2010-08-24 | 2012-03-14 | 英特赛尔美国股份有限公司 | System and method for current limiting a dc-dc converter |
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2012
- 2012-11-23 CN CN201210480087.8A patent/CN103052247B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2556778Y (en) * | 2002-07-05 | 2003-06-18 | 北京通力环电气股份有限公司 | Constand-current driven DC relay controller |
| CN101795075A (en) * | 2009-01-30 | 2010-08-04 | 电力集成公司 | Method and apparatus to regulate an output voltage of a power converter at light/no load conditions |
| CN201629673U (en) * | 2009-10-28 | 2010-11-10 | 中国电力科学研究院 | Current source based on hysteresis control principle |
| CN102377341A (en) * | 2010-08-24 | 2012-03-14 | 英特赛尔美国股份有限公司 | System and method for current limiting a dc-dc converter |
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| CN103052247A (en) | 2013-04-17 |
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Granted publication date: 20160427 Termination date: 20171123 |