CN103052247A - Starting current limiting circuit for ultrahigh-voltage mercury lamp in photoetching equipment - Google Patents
Starting current limiting circuit for ultrahigh-voltage mercury lamp in photoetching equipment Download PDFInfo
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- CN103052247A CN103052247A CN2012104800878A CN201210480087A CN103052247A CN 103052247 A CN103052247 A CN 103052247A CN 2012104800878 A CN2012104800878 A CN 2012104800878A CN 201210480087 A CN201210480087 A CN 201210480087A CN 103052247 A CN103052247 A CN 103052247A
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Abstract
The invention relates to a starting current limiting circuit for an ultrahigh-voltage mercury lamp in photoetching equipment. The circuit comprises a current sensor for detecting a current signal of the ultrahigh-voltage mercury lamp, a current reference signal circuit, a hysteresis comparator, a triode switching circuit and a pulse width controller, wherein the input end of the pulse width controller is connected with the output end of the hysteresis comparator through the triode switching circuit; and the hysteresis comparator compares an ultrahigh-voltage mercury lamp current signal level sampled by the current sensor with a reference signal level set by the current reference signal circuit, and controls the turning-on or turning-off of the triode switching circuit to control the pull-down or recovery of the input end level of the same phase of the pulse width controller to control the starting current of the ultrahigh-voltage mercury lamp within a safety range. The starting impulse current of the ultrahigh-voltage mercury lamp can be reliably controlled within the safety range, and the starting current can be set by the current reference signal circuit, and is stable in a transition process of the ultrahigh-voltage mercury lamp from a starting state to a stable state, so that the safety starting of the ultrahigh-voltage mercury lamp is ensured, and the reliability of the photoetching equipment is ensured.
Description
Technical field
The present invention relates to the inrush current limitation circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment.
Background technology
The microelectronics lithographic equipment adopts ultrahigh pressure mercury lamp as light emitting source, ultrahigh pressure mercury lamp is to utilize mercuryvapour conduction and the luminescent device that sends ultraviolet light, need high voltage startup to light, light moment the two poles of the earth and be in short-circuit condition, if there are not reliable current limiting measures, the electric current meeting mercury lamp that burns out of hand leads to a disaster, therefore, must control starting current a safe range; Starting current too little then being difficult for lights, and too greatly then has potential safety hazard.
At present, lithographic equipment ultrahigh pressure mercury lamp power supply adopts linear power supply or switch constant-current source more; Linear power supply is heavy, and starting current is difficult for regulating, and is in gradually superseded situation; Switch constant-current source enters the steady-state phase from starting at ultrahigh pressure mercury lamp, and electric current falls after rise to operating current from maximum starting current, is that the segmentation saltus step falls after rise, and transient process is very not steady, easily causes ultrahigh pressure mercury lamp to extinguish.
Summary of the invention
The object of the present invention is to provide ultrahigh pressure mercury lamp inrush current limitation circuit in a kind of reliable lithographic equipment, being intended to solve existing ultrahigh pressure mercury lamp power supply starting current is difficult for regulating, start to and enter stable state, the transient process electric current is not steady, the problem that ultrahigh pressure mercury lamp easily extinguishes.
For realizing above-mentioned purpose, the technical solution adopted in the present invention is as follows:
The inrush current limitation circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment, comprise that current sensor, current reference signal circuit, hysteresis loop comparator, switching circuit and input for detection of the ultra high pressure mercury lamp current signal are connected with described hysteresis loop comparator output through described switching circuit, and be used for outputing control signals to behind the power reference signal of the power control signal of received power control circuit output and the output of power reference circuit the pulse width controller of drive circuit; The described hysteresis loop comparator signal input part of described current sensor output termination; Described current reference signal circuit output end connects described hysteresis loop comparator benchmark input end; Described hysteresis loop comparator is by comparing the ultrahigh pressure mercury lamp current signal level of described current sensor sampling with the baseline signal level that described current reference signal circuit is set, controlling described transistor switching circuit conducting or cut-off, to control described pulse width controller in-phase input end level drop-down or recover, and controls described ultrahigh pressure mercury lamp starting current in a safe range.
Described current reference signal circuit comprises reference voltage source, potentiometer RP1, resistance R 4, potentiometer RP1 swing arm be connected on described reference voltage source output terminal after the one end is connected, the other end is through resistance R 4 ground connection.
Described hysteresis loop comparator comprises operational amplifier and resistance R 1, R2, R3; Described operational amplifier in-phase input end connects described current sensor output through resistance R 2, resistance R 1 is connected between the output and ground of described current sensor, resistance R 3 is connected between described operational amplifier in-phase input end and the output, described operational amplifier inverting input is connected on described reference voltage source output terminal through described potentiometer RP1, and resistance R 4 is connected between described operational amplifier inverting input and the ground.
Described transistor switching circuit comprises switch triode V1, resistance R 5, capacitor C 1 and diode V2; Described triode V1 base stage is connected on described operational amplifier output terminal through resistance R 5, and it is anodal that emitter meets diode V2, and diode V2 minus earth, collector electrode connect described pulse width controller in-phase input end; Described capacitor C 1 is connected between described operational amplifier output terminal and the ground.
Described current sensor adopts Hall magnetic balance transducer.
Whirl by the stagnating baseline signal level comparison of ultrahigh pressure mercury lamp current signal level that comparator detects current sensor and setting of the present invention, and when electric current exceeds maximum safe current, when to be current signal level more than or equal to stagnating whirl comparator Upper threshold level, by the described comparator upset of whirling that stagnates, make the transistor switching circuit conducting, pulse width controller in-phase input end level is left behind rapidly, output pulse width narrows down, power output sharply descends, and then the ultra high pressure mercury lamp current is also reduced rapidly thereupon; Stagnate when whirling comparator Lower Threshold level when current signal level is reduced to, by the transistor switching circuit cut-off, make pulse width controller in-phase input end level return to the power reference level, thereby starting current reliably and reposefully is limited in the safe range; After this, rising along with the luminous point temperature, the lamp internal resistance increases gradually, modulating voltage raises gradually, electric current is reduced to operating current gradually, like this, the falling of electric current reduces with the increase of lamp internal resistance fully, transient process is very steady, and starting current can by the setting of current reference signal circuit, solve existing ultrahigh pressure mercury lamp power supply starting current and be difficult for regulating, start to that to enter stable state transient process electric current not steady, the problem that ultrahigh pressure mercury lamp easily extinguishes has guaranteed that effectively ultrahigh pressure mercury lamp can clean boot, has guaranteed the reliability of lithographic equipment.
Description of drawings
Figure 1 shows that the theory diagram of the inrush current limitation circuit of the ultrahigh pressure mercury lamp that the embodiment of the invention provides.
Figure 2 shows that the circuit theory diagrams of the inrush current limitation circuit of the ultrahigh pressure mercury lamp that the embodiment of the invention provides;
Figure 3 shows that the theory diagram of the Switching Power Supply of ultrahigh pressure mercury lamp in the lithographic equipment that comprises the inrush current limitation circuit that the embodiment of the invention provides.
Embodiment
In order to make purpose of the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing, the present invention is further elaborated.
Referring to Fig. 1, the figure shows the principle of the inrush current limitation circuit of the ultrahigh pressure mercury lamp that the embodiment of the invention provides.For convenience of explanation, only show the part relevant with the embodiment of the invention.
The inrush current limitation circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment, comprise that current sensor, current reference signal circuit, hysteresis loop comparator, switching circuit and input for detection of the ultra high pressure mercury lamp current signal are connected with described hysteresis loop comparator output through described switching circuit, and be used for outputing control signals to behind the power reference signal of the power control signal of received power control circuit output and the output of power reference circuit the pulse width controller of drive circuit; The described hysteresis loop comparator signal input part of described current sensor output termination; Described current reference signal circuit output end connects described hysteresis loop comparator benchmark input end;
Described hysteresis loop comparator is used for comparing by the baseline signal level that ultrahigh pressure mercury lamp current signal level and the described current reference signal circuit of described current sensor sampling are set, when current signal level is whirled comparator Upper threshold level more than or equal to stagnating, by described hysteresis loop comparator upset, make described transistor switching circuit conducting, the in-phase input end level of described pulse width controller is descended rapidly, when current signal level is whirled comparator Upper threshold level less than or equal to stagnating, described transistor switching circuit cut-off, make the in-phase input end level of described pulse width controller return to again the power reference level of setting, thereby realized that limiting starting current is in a safe range.
Referring to shown in Figure 2, described current reference signal circuit comprises reference voltage source A1, potentiometer RP1, resistance R 4, potentiometer RP1 swing arm be connected on described reference voltage source A1 output M2 after the one end is connected, the other end is through resistance R 4 ground connection.
Described hysteresis loop comparator comprises operational amplifier N1 and resistance R 1, R2, R3; Described operational amplifier N1 in-phase input end meets described current sensor TA1 output M1 through resistance R 2, resistance R 1 is connected between the output and ground of described current sensor TA1, resistance R 3 is connected between described operational amplifier N1 in-phase input end and the output, described operational amplifier N1 inverting input is connected on described reference voltage source A1 output through described potentiometer RP1, and resistance R 4 is connected between described operational amplifier N1 inverting input and the ground.
Described switching circuit adopts transistor switching circuit, comprises switch triode V1, resistance R 5, capacitor C 1 and diode V2; Described triode V1 base stage is connected on described operational amplifier N1 output through resistance R 5, and it is anodal that emitter meets diode V2, and diode V2 minus earth, its collector electrode connect described pulse width controller N2 in-phase input end; Described capacitor C 1 is connected between described operational amplifier N1 output and the ground.
In the embodiment of the invention, preferred, described current sensor TA1 adopts Hall magnetic balance transducer.
Preferably, the model of described reference voltage source A1 is AD586, and the model of described operational amplifier N1 is OP07, and the model of described switch triode V1 is 2SC9014, the model of described diode V2 is IN4148, and the model of described pulse width controller N2 is SG3524.
Referring to shown in Figure 3, this Fig. 3 illustrates inrush current limitation circuit that the embodiment of the invention of knowing clearly provides and power control circuit, power reference circuit and the drive circuit of ultra high pressure mercury lamp switch power, the annexation of power conversion circuit.
By the embodiment of the invention is provided as Fig. 2 show the inrush current limitation circuit, after described ultrahigh pressure mercury lamp is connected by circuit shown in Figure 3, can realize purpose of the present invention.
Operation principle of the present invention is as follows:
In the ultrahigh pressure mercury lamp switching power source control circuit, adopt high sensitivity Hall magnetic balance current sensor TA1 to detect ultrahigh pressure mercury lamp current signal level V
In, set maximum starting current signal criterion level V with reference voltage source A1, potentiometer RP1 and resistance R 4
Ref, with current signal level V
InThe baseline signal level V of the corresponding maximum safe current of setting with the current reference signal circuit
Ref, the comparator of whirling by stagnating compares.
When the ultra high pressure mercury lamp current exceeds maximum safe current, that is current signal level V
InMore than or equal to the comparator Upper threshold level V that whirls that stagnates
TU(V
In〉=V
TU) time, the comparator upset of whirling that stagnates, switching tube V1 conducting, pulse width controller PWM in-phase input end level IN+ is left behind rapidly, and output pulse width narrows down, and power output sharply descends, and the ultra high pressure mercury lamp current also reduces rapidly thereupon, V
InAlso reduce thereupon; Work as V
InBe decreased to less than or equal to the comparator Lower Threshold level V that whirls that stagnates
TL(V
In≤ V
TL) time, switching tube V1 cut-off, the in-phase input end level IN+ of pulse width controller PWM returns to the power reference level that the power reference circuit is set, so just can limiting starting current a safe range.
Wherein, V
TUAnd V
TLDetermined by following formula:
V
HBe operational amplifier N1 output maximum, V
LBe operational amplifier N1 output minimum value.
Whirl by the stagnating baseline signal level comparison of ultrahigh pressure mercury lamp current signal level that comparator detects current sensor and setting of the present invention, and when electric current exceeds maximum safe current, when to be current signal level more than or equal to stagnating whirl comparator Upper threshold level, by the described comparator upset of whirling that stagnates, make the transistor switching circuit conducting, pulse width controller in-phase input end level is left behind rapidly, output pulse width narrows down, power output sharply descends, and then the ultra high pressure mercury lamp current is also reduced rapidly thereupon; When being reduced to, current signal level stagnates when whirling comparator Lower Threshold level, end by transistor switching circuit, make pulse width controller in-phase input end level return to the power reference level, thereby starting current is limited in the safe range reliably, guaranteed that ultrahigh pressure mercury lamp can clean boot, thereby guaranteed the reliability of lithographic equipment.
Compared with prior art, the present invention has not only realized limiting reliably the starting current of ultrahigh pressure mercury lamp in the scope of a safety, and enter stable state from starting to, transient process is more steady, having solved existing ultrahigh pressure mercury lamp power supply starting current is difficult for regulating, enter stable state from starting to, the transient process electric current is not steady, the problem that causes ultrahigh pressure mercury lamp easily to extinguish.
Below only be preferred implementation of the present invention, for those skilled in the art, under the prerequisite that does not break away from the principle of the invention, also can make some improvement, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (5)
1. the inrush current limitation circuit of ultrahigh pressure mercury lamp in the lithographic equipment, it is characterized in that, comprise that current sensor, current reference signal circuit, hysteresis loop comparator, transistor switching circuit and input for detection of the ultra high pressure mercury lamp current signal are connected with described hysteresis loop comparator output through described transistor switching circuit, and be used for outputing control signals to behind the power reference signal of the power control signal of received power control circuit output and the output of power reference circuit the pulse width controller of drive circuit; The described hysteresis loop comparator signal input part of described current sensor output termination; Described current reference signal circuit output end connects described hysteresis loop comparator benchmark input end; Described hysteresis loop comparator is by comparing the ultrahigh pressure mercury lamp current signal level of described current sensor sampling with the baseline signal level that described current reference signal circuit is set, controlling described transistor switching circuit conducting or cut-off, to control described pulse width controller in-phase input end level drop-down or recover, and controls described ultrahigh pressure mercury lamp starting current in a safe range.
2. the inrush current limitation circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment according to claim 1, it is characterized in that, described current reference signal circuit comprises reference voltage source, potentiometer RP1, resistance R 4, potentiometer RP1 swing arm be connected on described reference voltage source output terminal after the one end is connected, the other end is through resistance R 4 ground connection.
3. the inrush current limitation circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment according to claim 2 is characterized in that, described hysteresis loop comparator comprises operational amplifier and resistance R 1, R2, R3; Described operational amplifier in-phase input end connects described current sensor output through resistance R 2, resistance R 1 is connected between the output and ground of described current sensor, resistance R 3 is connected between described operational amplifier in-phase input end and the output, described operational amplifier inverting input is connected on described reference voltage source output terminal through described potentiometer RP1, and resistance R 4 is connected between described operational amplifier inverting input and the ground.
4. the inrush current limitation circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment according to claim 3 is characterized in that, described transistor switching circuit comprises switch triode V1, resistance R 5, capacitor C 1 and diode V2; Described triode V1 base stage is connected on described operational amplifier output terminal through resistance R 5, and it is anodal that emitter meets diode V2, and diode V2 minus earth, collector electrode connect described pulse width controller in-phase input end; Described capacitor C 1 is connected between described operational amplifier output terminal and the ground.
5. the inrush current limitation circuit of ultrahigh pressure mercury lamp in each described a kind of lithographic equipment is characterized in that according to claim 1 ~ 4, and described current sensor adopts Hall magnetic balance transducer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210480087.8A CN103052247B (en) | 2012-11-23 | 2012-11-23 | The starting current limiting circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210480087.8A CN103052247B (en) | 2012-11-23 | 2012-11-23 | The starting current limiting circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment |
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| CN103052247A true CN103052247A (en) | 2013-04-17 |
| CN103052247B CN103052247B (en) | 2016-04-27 |
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| CN201210480087.8A Expired - Fee Related CN103052247B (en) | 2012-11-23 | 2012-11-23 | The starting current limiting circuit of ultrahigh pressure mercury lamp in a kind of lithographic equipment |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112093690A (en) * | 2020-09-11 | 2020-12-18 | 湖南三一中型起重机械有限公司 | Starting current optimization method and device, electronic equipment and storage medium |
| CN112433449A (en) * | 2020-11-18 | 2021-03-02 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Control system for safe starting of deep ultraviolet lamp |
| TWI795397B (en) * | 2017-04-04 | 2023-03-11 | 日商Ｖ科技股份有限公司 | High pressure discharge lamp and its control method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2556778Y (en) * | 2002-07-05 | 2003-06-18 | 北京通力环电气股份有限公司 | Constand-current driven DC relay controller |
| CN101795075A (en) * | 2009-01-30 | 2010-08-04 | 电力集成公司 | Method and apparatus to regulate an output voltage of a power converter at light/no load conditions |
| CN201629673U (en) * | 2009-10-28 | 2010-11-10 | 中国电力科学研究院 | A Current Source Based on Hysteretic Control Principle |
| CN102377341A (en) * | 2010-08-24 | 2012-03-14 | 英特赛尔美国股份有限公司 | System and method for current limiting a dc-dc converter |
-
2012
- 2012-11-23 CN CN201210480087.8A patent/CN103052247B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2556778Y (en) * | 2002-07-05 | 2003-06-18 | 北京通力环电气股份有限公司 | Constand-current driven DC relay controller |
| CN101795075A (en) * | 2009-01-30 | 2010-08-04 | 电力集成公司 | Method and apparatus to regulate an output voltage of a power converter at light/no load conditions |
| CN201629673U (en) * | 2009-10-28 | 2010-11-10 | 中国电力科学研究院 | A Current Source Based on Hysteretic Control Principle |
| CN102377341A (en) * | 2010-08-24 | 2012-03-14 | 英特赛尔美国股份有限公司 | System and method for current limiting a dc-dc converter |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI795397B (en) * | 2017-04-04 | 2023-03-11 | 日商Ｖ科技股份有限公司 | High pressure discharge lamp and its control method |
| CN112093690A (en) * | 2020-09-11 | 2020-12-18 | 湖南三一中型起重机械有限公司 | Starting current optimization method and device, electronic equipment and storage medium |
| CN112433449A (en) * | 2020-11-18 | 2021-03-02 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Control system for safe starting of deep ultraviolet lamp |
| CN112433449B (en) * | 2020-11-18 | 2024-07-02 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Control system for safely starting deep ultraviolet lamp |
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| CN103052247B (en) | 2016-04-27 |
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