JP5765622B2 - Light source device - Google Patents

Light source device Download PDF

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JP5765622B2
JP5765622B2 JP2011138210A JP2011138210A JP5765622B2 JP 5765622 B2 JP5765622 B2 JP 5765622B2 JP 2011138210 A JP2011138210 A JP 2011138210A JP 2011138210 A JP2011138210 A JP 2011138210A JP 5765622 B2 JP5765622 B2 JP 5765622B2
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sealing
reflecting mirror
light emitting
source device
temperature
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JP2013004503A (en
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伸彦 杉原
伸彦 杉原
哲治 平尾
哲治 平尾
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Ushio Denki KK
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Ushio Denki KK
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  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
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Description

この発明は、プロジェクター装置や露光装置用などの光源装置に関するものであり、特に、ショートアーク型放電ランプを用いた光源装置に係わるものである。   The present invention relates to a light source device for a projector device or an exposure device, and more particularly to a light source device using a short arc type discharge lamp.

プロジェクター装置用や露光装置用の光源装置として、ショートアーク型放電ランプを備えた光源装置が知られている。特開２００９−１９８６４０号公報などがこれであり、図５に該従来技術に係る光源装置が示されている。
ショートアーク型放電ランプ１０は、略球形の発光部１２の両端に枝状の封止部１３ａ、１３ｂが連続して形成された石英ガラスからなる発光管１１を備え、発光部１２の内部に一対の電極１４、１４が対向配置されて構成される。前記発光部１２の内部には、発光物質として水銀が封入されている。
前記電極１４は、材質としてはタングステンからなり、先端に形成された頭部１４ａと、外側に向かって延びる細長い軸部１４ｂとを備える。軸部１４ｂの端部は封止部１３ｂに埋設された金属箔１５に溶接により接続されている。
該金属箔１５は通常モリブデンにより構成されており、石英ガラスに対して溶着して気密を保持する。金属箔１５の端部には、電極軸部１４ｂおよび外部リード棒１６が溶接によって接続されている。なお、溶接の際は通常は低融点バインダを介さない抵抗溶接が好適に採用されている。 As a light source device for a projector device or an exposure device, a light source device including a short arc type discharge lamp is known. Japanese Patent Application Laid-Open No. 2009-198640 and the like, and FIG. 5 shows a light source device according to the related art.
The short arc type discharge lamp 10 includes a light emitting tube 11 made of quartz glass in which branch-shaped sealing portions 13 a and 13 b are continuously formed at both ends of a substantially spherical light emitting portion 12. The electrodes 14 and 14 are arranged to face each other. Mercury is enclosed in the light emitting unit 12 as a light emitting material.
The electrode 14 is made of tungsten as a material, and includes a head portion 14a formed at the tip and an elongated shaft portion 14b extending outward. The end of the shaft portion 14b is connected to the metal foil 15 embedded in the sealing portion 13b by welding.
The metal foil 15 is usually made of molybdenum, and is welded to quartz glass to keep it airtight. The electrode shaft portion 14b and the external lead rod 16 are connected to the end portion of the metal foil 15 by welding. In general, resistance welding without using a low-melting-point binder is suitably employed for welding.

反射鏡２０は、基体部分は耐熱性の良好な材質で構成され、例えば石英ガラス、結晶化ガラス、セラミックス等からなり、略椀型の凹面反射部２１の内面に誘電体多層膜からなる反射膜が形成されている。
そして、中心部に形成された首部２２が形成され、前面には開口２３が形成されていて、ランプ１０からの光が放射される。 The reflecting mirror 20 has a base portion made of a material having good heat resistance, and is made of, for example, quartz glass, crystallized glass, ceramics, etc., and is a reflecting film made of a dielectric multilayer film on the inner surface of a substantially bowl-shaped concave reflecting portion 21. Is formed.
And the neck part 22 formed in the center part is formed, the opening 23 is formed in the front surface, and the light from the lamp | ramp 10 is radiated | emitted.

前記ショートアーク型放電ランプ１０の一方の封止部１３ａが、前記反射鏡２０の首部２２に形成された貫通孔に挿入されて無機物質系接着剤３０により固定される。
なお、ここではランプ１０と反射鏡２０の固定部の構造として封止部１３を直接接着剤によって固定したものを示したが、このような形態に限定されず、当該接着部分に冷却風のための通気口を設けて固定するものや、ランプ１０の封止部１３に口金を装着した上で当該口金と反射鏡２０とを固定するものなど、実際には様々な形態がある。 One sealing portion 13 a of the short arc type discharge lamp 10 is inserted into a through hole formed in the neck portion 22 of the reflecting mirror 20 and is fixed by the inorganic material adhesive 30.
Here, the structure in which the sealing portion 13 is directly fixed by an adhesive is shown as the structure of the fixing portion of the lamp 10 and the reflecting mirror 20; however, the present invention is not limited to such a form, and cooling air is applied to the bonding portion. Actually, there are various forms such as the one that is provided with a vent and fixed, and the one that attaches the base to the sealing portion 13 of the lamp 10 and then fixes the base and the reflecting mirror 20.

以上のような光源装置は、ランプ動作中、発光管の温度が非常に高温になる一方、発光管内部の圧力が極めて高い状態になるので、ランプの到達温度が過熱状態とならないよう冷却手段を具備した状態で使用されることが多い。
この冷却の方法は様々であり、図６ではその一例として反射鏡２０の前面開口２３側からランプ１０に向かって流入させる形態が図示されている。この例では、光源装置を収容する筺体４０の、反射鏡２０の光出射側の前面開口２３側に設けられた前面流入口４１からランプ１０に向けて冷却風が流入され、ランプ１０を冷却した後に、反射鏡２０の前面開口２３における前記流入口４１と対向方向に形成された排気開口４２から排出される。 In the light source device as described above, the temperature of the arc tube becomes very high during the lamp operation, while the pressure inside the arc tube becomes extremely high, so that the cooling means is not used so that the ultimate temperature of the lamp is not overheated. Often used in the state of being equipped.
There are various cooling methods, and FIG. 6 shows an example in which the cooling mirror 20 flows from the front opening 23 side of the reflecting mirror 20 toward the lamp 10 as an example. In this example, cooling air is introduced into the lamp 10 from the front inlet 41 provided on the front opening 23 side on the light emitting side of the reflecting mirror 20 of the housing 40 that houses the light source device, thereby cooling the lamp 10. Thereafter, the gas is discharged from an exhaust opening 42 formed in a direction facing the inlet 41 in the front opening 23 of the reflecting mirror 20.

ところで、上述したようなランプの高温化を回避するように冷却条件が設定された光源装置においては、ショートアーク型放電ランプの封止部にクラックが入ることがある。
特に、電極軸部と金属箔との溶接部は、封止部のなかでもとりわけ発光部に近い部分にあり、このような破損が生じることで、発光管の気密が損なわれるという事態が生じたり、金属箔の酸化で導電性が損なわれたりして、ランプが不点灯になるといった事態に至る。
このようなランプの封止部、特に、前記した電極軸部と金属箔との溶接部の周囲でクラックが生じる理由は、ランプの点灯、消灯の温度変化で電極軸部が膨張するが、溶接部は金属箔に固定されているため、この部分において膨張・伸縮が規制され、その結果、ガラスに応力がかかることによって封止部が破損することによる。 By the way, in the light source device in which the cooling condition is set so as to avoid the high temperature of the lamp as described above, a crack may occur in the sealing portion of the short arc type discharge lamp.
In particular, the welded portion between the electrode shaft portion and the metal foil is in a portion close to the light emitting portion among the sealed portions, and the occurrence of such damage may cause a situation where the airtightness of the arc tube is impaired. Then, the conductivity of the metal foil is impaired and the lamp is turned off.
The reason why cracks occur around the sealed portion of such a lamp, in particular, the welded portion between the electrode shaft portion and the metal foil, is that the electrode shaft portion expands due to the temperature change of lighting and extinguishing of the lamp. Since the portion is fixed to the metal foil, expansion / extension is restricted in this portion, and as a result, stress is applied to the glass to break the sealing portion.

このような封止部でのクラックは、発光管の温度の関係でどちらかの一方の封止部に発生することが多い。これは、封止部の温度条件が両側の封止部で必ずしも一致せず相違するからである。両封止部で温度差ができる理由としては、様々なものがあり、例えば、図５に示すような構造においては、反射鏡２０の首部２２側に位置する封止部１３ａのほうが反射部２１に近接していて、その熱的影響を受けやすく、かつ、冷却風が当たり難いということもあって、その温度が高くなる。
このような条件のもとで、その首部２２側の封止部１３ａの温度を適正なものにするように冷却条件を設定すると、反射鏡２０の前面開口２３側の封止部１３ｂの温度が当該適正温度よりも低くなってしまう。
その温度分布の一例を記すと、首部２２側の封止部１３ａにおける溶接部近傍を熱電対で測定した場合の温度が、６８０〜７６０℃であって、このような温度範囲にあると封止部を構成するガラスは十分な粘性を有していて、電極軸部の膨張収縮に追随してクラックが生じることがない。
一方、この時、前面開口２４側の封止部１３ｂの溶接部近傍を、熱電対で測定したときの温度は６００〜６５０℃と低く、この封止部１３ｂにおいてガラスの粘度が低くなり、クラックが入りやすくなる。 Such a crack in the sealing portion often occurs in one of the sealing portions due to the temperature of the arc tube. This is because the temperature conditions of the sealing portions are not necessarily the same between the sealing portions on both sides and are different. There are various reasons for the temperature difference between the two sealing portions. For example, in the structure shown in FIG. 5, the sealing portion 13a located on the neck portion 22 side of the reflecting mirror 20 is more reflective. The temperature rises due to the fact that it is close to the heat sink and is easily affected by the heat, and the cooling air is difficult to hit.
Under such conditions, when the cooling condition is set so that the temperature of the sealing portion 13a on the neck 22 side is appropriate, the temperature of the sealing portion 13b on the front opening 23 side of the reflecting mirror 20 is It becomes lower than the appropriate temperature.
An example of the temperature distribution is as follows. When the vicinity of the welded portion in the sealing portion 13a on the neck 22 side is measured with a thermocouple, the temperature is 680 to 760 ° C, and sealing is performed in such a temperature range. The glass constituting the part has a sufficient viscosity and does not cause cracks following the expansion and contraction of the electrode shaft part.
On the other hand, at this time, when the vicinity of the welded portion of the sealing portion 13b on the front opening 24 side is measured with a thermocouple, the temperature is as low as 600 to 650 ° C., and the viscosity of the glass becomes low in this sealing portion 13b, and crack Is easier to enter.

また、本発明の実施例として後述するランプ構造として、前面開口側の封止部に反射部材を設けて、発光部からの放射光を当該発光部に戻してその有効利用を図るランプ構造の場合には、当該反射部材による反射光や保温効果、あるいは冷却風が遮断されることなどによって、当該封止部のほうがその温度が高くなる。
この場合には、この反射部材を設けた側の封止部温度を適正温度にするような冷却条件のもとでは、首部側の封止部温度が適正温度より低くなってしまい、当該封止部でクラックが入りやすくなる。 Further, as a lamp structure which will be described later as an embodiment of the present invention, a lamp structure in which a reflective member is provided in a sealing part on the front opening side, and radiated light from a light emitting part is returned to the light emitting part for effective use. For example, the temperature of the sealing portion becomes higher due to the light reflected by the reflecting member, the heat retaining effect, or the cooling air being blocked.
In this case, under the cooling conditions such that the temperature of the sealing portion on the side where the reflecting member is provided is set to an appropriate temperature, the temperature of the sealing portion on the neck side becomes lower than the appropriate temperature, and the sealing is performed. It becomes easy to crack at the part.

特開２００９−１９８６４０号公報JP 2009-198640 A

この発明は、上記従来技術の問題点に鑑みて、凹面反射鏡と、該反射鏡に固定されたショートアーク型放電ランプとを備え、該ショートアーク型放電ランプは、発光部とその両端の封止部とからなる発光管と、前記発光部内に配置された一対の電極とを有し、該電極の軸部が前記封止部内に埋設された金属箔に溶接接合されてなる光源装置において、前記封止部のどちらか一方が適正温度よりも低温となって、特に、電極軸部と金属箔の溶接部近傍でクラックが生じることのないようにした構造を提供するものである。   In view of the above-described problems of the prior art, the present invention includes a concave reflecting mirror and a short arc type discharge lamp fixed to the reflecting mirror. The short arc type discharge lamp includes a light emitting portion and sealing at both ends thereof. In a light source device having an arc tube composed of a stop portion and a pair of electrodes arranged in the light emitting portion, and a shaft portion of the electrode being welded to a metal foil embedded in the sealing portion, The present invention provides a structure in which either one of the sealing portions has a temperature lower than an appropriate temperature so that cracks are not generated particularly in the vicinity of the electrode shaft portion and the welded portion of the metal foil.

上記課題を解決するために、この発明に係る光源装置は、前記ショートアーク型放電ランプの発光部内の電極間の中心位置から、各電極軸部と金属箔との溶接部までの距離が、一方と他方の電極側で異なるようにすることにより、温度が低くなる側の封止部での前記距離を小さくして発光部に接近させて高温側の他方の封止部温度に近づけ、両封止部内の溶接部近傍での温度を近接させてその温度差を少なくして、両方の封止部の温度を適正温度とすることができるようにしたことを特徴とする。   In order to solve the above-described problems, the light source device according to the present invention has a distance from the center position between the electrodes in the light emitting portion of the short arc discharge lamp to the welded portion between each electrode shaft portion and the metal foil. And the other electrode side are made different so that the distance at the sealing portion on the temperature lowering side is reduced and brought closer to the light emitting portion so as to approach the temperature of the other sealing portion on the high temperature side. It is characterized in that the temperature in the vicinity of the welded portion in the stop portion is brought close to the temperature difference so that the temperature of both sealed portions can be set to an appropriate temperature.

本発明によれば、発光部両端の封止部のうち、封止部内の電極軸部と金属箔の溶接部の温度が低くなるほうの封止部における、電極間中心位置から溶接部までの距離を小さくしたので、発光部により接近することになってその温度が上昇し、高温側の他方の封止部における前記温度に近づけられ、両封止部内での溶接部近傍の温度を適正温度範囲内にすることができて、封止部を構成するガラスに十分な粘性が保たれて、当該部位でのクラックの発生を回避できるという効果を奏するものである。   According to the present invention, among the sealing parts at both ends of the light emitting part, the temperature between the electrode shaft part in the sealing part and the welded part of the metal foil decreases from the center position between the electrodes to the welded part. Since the distance has been reduced, the temperature of the light emitting part approaches and the temperature rises and can be brought close to the temperature at the other sealing part on the high temperature side, and the temperature in the vicinity of the welded part in both sealing parts is set to the appropriate temperature. It can be within the range, and the glass constituting the sealing portion is sufficiently viscous so that it is possible to avoid the occurrence of cracks at the site.

本発明に係る光源装置の断面図。Sectional drawing of the light source device which concerns on this invention. 図１のランプの要部の拡大断面図。The expanded sectional view of the principal part of the lamp | ramp of FIG. 本発明の他の実施例の断面図。Sectional drawing of the other Example of this invention. 本発明の更に他の実施例の断面図。Sectional drawing of other Example of this invention. 従来の光源装置の断面図。Sectional drawing of the conventional light source device. 図５の従来光源装置の冷却状態の説明図。Explanatory drawing of the cooling state of the conventional light source device of FIG.

図１は、本発明に係る光源装置を示す断面図である。光源装置１は、光源となるショートアーク型放電ランプ１０と凹面反射鏡２０とからなり、その基本的な構造は図５に示す従来技術構造と同様である。
前記ショートアーク型放電ランプ１０は、発光管１１を有し、該発光管１１は発光部１２と、その両端の封止部１３ａ、１３ｂとで構成され、前記発光部１２内には一対の電極１４、１４が配置されている。この電極１４は頭部１４ａと軸部１４ｂとからなり、該電極軸部１４ｂは封止部１３ｂ内で金属箔１５に溶接接合されている。
上記ショートアーク型放電ランプ１０の一方の封止部１３ａが反射鏡２０の首部２２を貫通し、接着剤２３によって固定されていて、他方の封止部１３ｂは反射鏡２０の反射部２１の前面開口２３側に延びている。
図２にその詳細が示されるように、発光部１２の電極間中心位置Ｏから、電極軸部１４ｂと金属箔１５との溶接部Ｘａ、Ｘｂまでの距離Ｌａ、Ｌｂが、両封止部１３ａ、１３ｂで異なっている。即ち、電極間中心位置Ｏから、反射鏡２０の首部２２側の封止部１３ａにおける溶接部Ｘａまでの距離Ｌａと、反射鏡２０の前面開口２３側の封止部１３ｂにおける溶接部Ｘｂまでの距離Ｌｂは異なっていて、距離Ｌｂのほうが距離Ｌａよりも小さい（Ｌａ＞Ｌｂ）。
つまり、前面側の封止部１３ｂでの溶接部Ｘｂは、後方側の封止部１３ａでの溶接部Ｘａに比べて、より発光部１２に接近した位置に置かれている。 FIG. 1 is a cross-sectional view showing a light source device according to the present invention. The light source device 1 includes a short arc type discharge lamp 10 and a concave reflecting mirror 20 as a light source, and the basic structure thereof is the same as the conventional structure shown in FIG.
The short arc type discharge lamp 10 has an arc tube 11, and the arc tube 11 is composed of a light emitting portion 12 and sealing portions 13a and 13b at both ends thereof. 14 and 14 are arranged. The electrode 14 includes a head portion 14a and a shaft portion 14b, and the electrode shaft portion 14b is welded to the metal foil 15 in the sealing portion 13b.
One sealing portion 13 a of the short arc type discharge lamp 10 penetrates the neck portion 22 of the reflecting mirror 20 and is fixed by an adhesive 23, and the other sealing portion 13 b is the front surface of the reflecting portion 21 of the reflecting mirror 20. It extends to the opening 23 side.
As shown in detail in FIG. 2, the distances La and Lb from the center position O between the electrodes of the light emitting portion 12 to the welded portions Xa and Xb between the electrode shaft portion 14b and the metal foil 15 are both sealed portions 13a. 13b. That is, the distance La from the center position O between the electrodes to the welded portion Xa in the sealing portion 13a on the neck 22 side of the reflecting mirror 20 and the welded portion Xb in the sealing portion 13b on the front opening 23 side of the reflecting mirror 20. The distance Lb is different, and the distance Lb is smaller than the distance La (La> Lb).
That is, the welding part Xb in the front-side sealing part 13b is placed at a position closer to the light emitting part 12 as compared with the welding part Xa in the rear-side sealing part 13a.

図２を参照して、このランプの一数値例をあげると以下の通りである。
発光部内径（ａ）：４．５ｍｍ
発光部外径（ｂ）：１０ｍｍ
電極長さ（ｃ）：８ｍｍ
電極長さ（ｄ）：７ｍｍ
電極間の中心位置Ｏから溶接部Ｘａまでの長さ（Ｌａ）：７．５ｍｍ
電極間の中心位置Ｏから溶接部Ｘｂまでの長さ（Ｌｂ）：６．５ｍｍ
電極間距離（ｆ）：１ｍｍ

すなわち、この実施例では、両者の電極１４の長さ（先端から軸部の後端部までの長さ）でいうと一方と他方の長さでは約１０〜１５％程度の差となる。
このランプ１０を反射鏡２０に組み込んだ場合、反射鏡２０の前面開口２３側の封止部１３ｂにおける溶接部Ｘｂは、他方の封止部１３ａでの溶接部Ｘａよりも発光部１２に近接されて、その温度の影響をより強く受ける。その状態で、冷却条件を適正に設定して点灯させると、両封止部１３ａ、１３ｂにおける溶接部Ｘａ、Ｘｂ近傍での温度を適正温度に保つことができた。ここで、適正温度に関して具体的な数値例を挙げると、熱電対によって測定された温度では６８０〜７６０℃程度となる。
なお、ここでは、溶接部Ｘの位置を１ｍｍだけ発光部１２側に近づけることにより、約７０℃程度の温度上昇を見込むことができた。 Referring to FIG. 2, a numerical example of this lamp is as follows.
Light emitting part inner diameter (a): 4.5 mm
Light emitting part outer diameter (b): 10 mm
Electrode length (c): 8mm
Electrode length (d): 7 mm
Length from center position O between electrodes to weld Xa (La): 7.5 mm
Length from center position O between electrodes to weld Xb (Lb): 6.5 mm
Distance between electrodes (f): 1 mm

That is, in this embodiment, the length of both electrodes 14 (the length from the front end to the rear end of the shaft portion) is about 10 to 15% difference between one and the other.
When the lamp 10 is incorporated in the reflecting mirror 20, the welded portion Xb in the sealing portion 13b on the front opening 23 side of the reflecting mirror 20 is closer to the light emitting portion 12 than the welded portion Xa in the other sealing portion 13a. More strongly affected by the temperature. In this state, when the cooling conditions were set appropriately and the lamps were turned on, the temperatures in the vicinity of the welded portions Xa and Xb in both the sealed portions 13a and 13b could be maintained at appropriate temperatures. Here, when a specific numerical example is given regarding the appropriate temperature, the temperature measured by the thermocouple is about 680 to 760 ° C.
In addition, the temperature rise of about 70 degreeC was able to be anticipated here by making the position of the welding part X close to the light emission part 12 side only 1 mm.

図３は、他の実施例であって、この実施例では反射鏡２０の前面開口２３側の封止部１３ｂに、副反射鏡２５を設けた構造である。
前記副反射鏡２５は、ランプ１０の発光部１２から前方に放射される光を反射して再び発光部１２内に戻すものであって、これにより光の有効利用が図られるものである。
この実施例の場合、副反射鏡２５の反射や、冷却風が該副反射鏡２５によって遮られるなどの理由で、副反射鏡２５を設けた側の封止部１３ｂのほうが高温となる。
従って、この副反射鏡２５を設けた封止部１３ｂの温度を冷却によって適正温度にすると、首部２２側の他方の封止部１３ａが適正温度よりも低くなってしまう。
そのため、首部２２側の封止部１３ａにおける溶接部Ｘａを発光部１２に近づけて、該封止部１３ａのほうの溶接部Ｘａまでの距離Ｌａを、反対側の封止部１３ｂでの溶接部Ｘｂまでの距離Ｌｂよりも小さくする（Ｌａ＜Ｌｂ）。
こうすることによって、両封止部１３ａ、１３ｂでの溶接部Ｘａ、Ｘｂ近傍の温度をほぼ近づけることができ、両者を適正温度領域に設定できて、ガラスに十分な粘性が保たれて、両封止部での電極軸部の膨張、収縮に由来して発生する応力に対して緩衝性を備えることになるので、封止部に生じるクラックの発生を抑えることができる。 FIG. 3 shows another embodiment. In this embodiment, the sub-reflecting mirror 25 is provided on the sealing portion 13b of the reflecting mirror 20 on the front opening 23 side.
The sub-reflecting mirror 25 reflects light emitted forward from the light emitting unit 12 of the lamp 10 and returns it to the light emitting unit 12 again, thereby effectively utilizing the light.
In the case of this embodiment, the sealing portion 13b on the side where the sub-reflecting mirror 25 is provided becomes hot because the sub-reflecting mirror 25 is reflected and cooling air is blocked by the sub-reflecting mirror 25.
Therefore, if the temperature of the sealing portion 13b provided with the sub-reflecting mirror 25 is set to an appropriate temperature by cooling, the other sealing portion 13a on the neck 22 side becomes lower than the appropriate temperature.
Therefore, the welding part Xa in the sealing part 13a on the neck part 22 side is brought close to the light emitting part 12, and the distance La to the welding part Xa on the sealing part 13a is set to a welding part in the sealing part 13b on the opposite side. It is made smaller than the distance Lb to Xb (La <Lb).
By doing so, the temperatures in the vicinity of the welded portions Xa and Xb at both the sealing portions 13a and 13b can be brought close to each other, both can be set to an appropriate temperature range, and sufficient viscosity can be maintained in the glass. Since it has buffering properties against stress generated due to expansion and contraction of the electrode shaft portion in the sealing portion, it is possible to suppress the occurrence of cracks generated in the sealing portion.

図４は本発明の他の実施例を説明する断面図である。
この実施例においてはショートアーク型放電ランプ１０の発光管１１に対して反射膜２６が具備された例である。
該反射膜２６は、反射鏡２０の前方開口２３側に配置された封止部１３ｂ上に設けられており、少なくとも可視光の光に対して反射特性を備えるものである。この反射膜２６は、例えば酸化タンタル（Ｔａ２Ｏ５）と二酸化ケイ素（ＳｉＯ２）とによる多層膜、アルミナ（Ａｌ２Ｏ３）の膜などにより構成されている。
この反射膜２６は、発光部１２及び封止部１３ｂ上に形成されることにより、保温の機能も具備している。その結果、反射膜２６が形成された側の封止部１３ｂと、これが形成されていない側（すなわち、冷却風により直接的に冷却される）側の封止部１３ａとの間で、温度に差異が生じることがある。
反射膜２６が形成された側（高温側）の封止部１３ｂが適切な温度となるよう、冷却は例えば反射鏡２０の前面開口２３側から発光管１１に向けて吹き付ける条件で行われる。
このように冷却状態を制御すると、反射膜を形成しない首部２２側の封止部１３ａが過冷却となるので、当該封止部１３ａ側の電極軸部の長さを短くし、電極軸部と金属箔との溶接部Ｘａの位置を、発光部１２側に近づけるよう構成する。即ち、該封止部１３ａのほうの溶接部Ｘａまでの距離Ｌａを、反対側の封止部１３ｂでの溶接部Ｘｂまでの距離Ｌｂよりも小さくする（Ｌａ＜Ｌｂ）。
こうすることによって、両封止部１３ａ、１３ｂでの溶接部Ｘａ、Ｘｂ近傍の温度をほぼ近づけることができ、両者を適正温度領域に設定できる。 FIG. 4 is a sectional view for explaining another embodiment of the present invention.
In this embodiment, a reflective film 26 is provided for the arc tube 11 of the short arc type discharge lamp 10.
The reflection film 26 is provided on the sealing portion 13b disposed on the front opening 23 side of the reflection mirror 20, and has a reflection characteristic for at least visible light. The reflective film 26 is composed of, for example, a multilayer film of tantalum oxide (Ta 2 O 5 ) and silicon dioxide (SiO 2 ), an alumina (Al 2 O 3 ) film, or the like.
The reflective film 26 has a heat retaining function by being formed on the light emitting unit 12 and the sealing unit 13b. As a result, the temperature between the sealing portion 13b on the side where the reflective film 26 is formed and the sealing portion 13a on the side where the reflective film 26 is not formed (that is, cooled directly by cooling air) Differences can occur.
Cooling is performed, for example, under a condition of blowing from the front opening 23 side of the reflecting mirror 20 toward the arc tube 11 so that the sealing portion 13b on the side where the reflecting film 26 is formed (high temperature side) has an appropriate temperature.
When the cooling state is controlled in this way, the sealing portion 13a on the neck portion 22 side that does not form the reflective film is overcooled, so the length of the electrode shaft portion on the sealing portion 13a side is shortened, and the electrode shaft portion and The position of the welded portion Xa with the metal foil is configured to approach the light emitting unit 12 side. That is, the distance La to the welding part Xa of the sealing part 13a is made smaller than the distance Lb to the welding part Xb in the sealing part 13b on the opposite side (La <Lb).
By carrying out like this, the temperature of the welding parts Xa and Xb vicinity in both the sealing parts 13a and 13b can be made substantially close, and both can be set to an appropriate temperature range.

しかして、両封止部内の電極軸部と金属箔との溶接部近傍での温度に相違ができるランプ構造は上記に限られず、トリガワイヤーを封止部に巻回する構造や始動補助ＵＶセルを設ける構造など種々の形態がある。これらの場合に、その構造に由来して低温側となる封止部での溶接部の位置を、反対側の高温側となる封止部での溶接部よりも発光部に近づけるように構成すればよい。
即ち、ショートアーク型放電ランプが反射鏡に組み込まれた状態で、両封止部内の電極中心位置から等距離位置において低温となる側の封止部において、前記電極中心位置から溶接部までの距離を小さくして、当該溶接部を発光部よりに近づければよい。
なお、上記においては、冷却風により冷却するものとして説明したが、ランプ構造や反射鏡構造、および点灯条件などによっては必ずしも冷却しなくとも、封止部温度が適正な温度領域にある場合もあり、冷却が必須なわけではない。 Therefore, the lamp structure that can vary the temperature in the vicinity of the welded portion between the electrode shaft portion and the metal foil in both sealing portions is not limited to the above, and a structure in which the trigger wire is wound around the sealing portion or a start-up auxiliary UV cell There are various forms such as a structure for providing the. In these cases, the position of the welded portion at the sealing portion on the low temperature side derived from the structure should be closer to the light emitting portion than the welded portion at the sealing portion on the high temperature side on the opposite side. That's fine.
That is, in the state where the short arc type discharge lamp is incorporated in the reflecting mirror, the distance from the electrode center position to the welded portion in the sealing portion on the side where the temperature is low at the equidistant position from the electrode center position in both sealing portions. The welding portion may be made closer to the light emitting portion.
In the above description, the cooling air is used for cooling. However, depending on the lamp structure, reflecting mirror structure, lighting conditions, etc., the sealing portion temperature may be in an appropriate temperature range without necessarily cooling. Cooling is not essential.

以上説明したように、本発明の光源装置では、ランプの電極間の中心位置から、各電極軸部と金属箔との溶接部までの距離が、一方と他方の電極側で異なるようにしたので、前記電極間の中心位置から等距離位置で温度が低い側にある封止部の溶接部までの距離のほうを小さくすることによって、当該低温側の溶接部を発光部に近づけて温度上昇をはかり、両封止部内の溶接部近傍の温度を適正な温度範囲内に設定できて、特に、低温側の封止部でのクラックの発生を回避できるものである。   As described above, in the light source device of the present invention, the distance from the center position between the electrodes of the lamp to the welded portion of each electrode shaft portion and the metal foil is made different between one and the other electrode side. By reducing the distance from the center position between the electrodes to the welded portion of the sealing portion on the lower temperature side at an equidistant position, the temperature is increased by bringing the welded portion on the low temperature side closer to the light emitting portion. The temperature in the vicinity of the welded portion in both the scale and the sealed portion can be set within an appropriate temperature range, and in particular, the occurrence of cracks in the sealed portion on the low temperature side can be avoided.

１ 光源装置
１０ ショートアーク型高圧水銀ランプ
１１ 発光管
１２ 発光部
１３ 封止部
１３ａ 反射鏡首部側の封止部
１３ｂ 反射鏡前面開口側の封止部
１４ 電極
１４ａ 電極頭部
１４ｂ 電極軸部
１５ 金属箔
２０ 凹面反射鏡
２１ 反射部
２２ 首部
２３ 前面開口
２５ 副反射鏡
２６ 反射膜
Ｏ 電極間の中心位置
Ｘａ、Ｘｂ 溶接部
Ｌａ、Ｌｂ 電極間の中心位置から溶接部までの距離


DESCRIPTION OF SYMBOLS 1 Light source device 10 Short arc type high pressure mercury lamp 11 Light emission tube 12 Light emission part 13 Sealing part 13a Sealing part 13b on the reflecting mirror neck part side Sealing part on the front side of the reflecting mirror 14 Electrode 14a Electrode head part 14b Electrode shaft part 15 Metal foil 20 Concave reflecting mirror 21 Reflecting portion 22 Neck portion 23 Front opening 25 Sub-reflecting mirror 26 Reflecting film O Center position between electrodes Xa, Xb Welding portion La, Lb Distance from center position between electrodes to welding portion


Claims (4)

凹面反射鏡と、該反射鏡に固定されたショートアーク型放電ランプとを備え、該ショートアーク型放電ランプは、発光部とその両端の封止部とからなる発光管と、前記発光部内に配置された一対の電極とを有し、該電極の軸部が前記封止部内に埋設された金属箔に溶接接合されてなる光源装置において、
前記電極間の中心位置から、各電極軸部と金属箔との溶接部までの距離が、一方と他方の電極側で異なり、
前記電極間の中心位置から等距離位置で温度が低い側にある封止部の溶接部までの距離のほうを小さくした
ことを特徴とする光源装置。 A concave reflecting mirror and a short arc type discharge lamp fixed to the reflecting mirror are provided, the short arc type discharge lamp being disposed in the light emitting part, an arc tube comprising a light emitting part and sealing parts at both ends thereof. A light source device having a pair of electrodes that are welded and joined to a metal foil embedded in the sealing portion.
From the center position between the electrodes, the distance to the welded portion between the electrode axis portion and the metal foil, depends on one and the other electrode side,
The light source device characterized in that the distance from the center position between the electrodes to the welded portion of the sealing portion on the low temperature side at the equidistant position is made smaller . 前記反射鏡の前面開口側の封止部における、前記電極間の中心位置から溶接部までの距離のほうを小さくしたことを特徴とする請求項１に記載の光源装置。 The light source device according to claim 1, characterized in that in the sealing portion of the front opening side of the reflector, it has a small towards the distance to the welded portion from the central position between the electrodes. 前記反射鏡の前面開口側の封止部に、前記発光部からの放射光の一部を該発光部戻す副反射鏡を備えてなり、前記電極間の中心位置から該副反射鏡を備えた封止部の溶接部までの距離のほうを大きくしたことを特徴とする請求項１に記載の光源装置。 The sealing part on the front opening side of the reflecting mirror is provided with a sub-reflecting mirror that returns a part of the emitted light from the light emitting part to the light emitting part, and the sub reflecting mirror is provided from the center position between the electrodes. The light source device according to claim 1 , wherein the distance of the sealing portion to the welded portion is increased . 前記反射鏡の前面開口側の封止部に、前記発光部からの放射光の一部を該発光部戻す反射膜を被覆してなり、前記電極間の中心位置から該反射膜を備えた封止部の溶接部までの距離のほうを大きくしたことを特徴とする請求項１に記載の光源装置。
The sealing part on the front opening side of the reflecting mirror is coated with a reflecting film that returns a part of the emitted light from the light emitting part to the light emitting part, and is provided with the reflecting film from the center position between the electrodes. The light source device according to claim 1 , wherein a distance from the stop portion to the welded portion is increased .
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