CN112420483A - Discharge lamp, light source unit, light source device, and method for lighting discharge lamp - Google Patents

Discharge lamp, light source unit, light source device, and method for lighting discharge lamp Download PDF

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CN112420483A
CN112420483A CN202010801580.XA CN202010801580A CN112420483A CN 112420483 A CN112420483 A CN 112420483A CN 202010801580 A CN202010801580 A CN 202010801580A CN 112420483 A CN112420483 A CN 112420483A
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discharge lamp
light source
internal space
emitting tube
light emitting
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池田富彦
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Phoenix Electric Co Ltd
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Phoenix Electric Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • H01J61/366—Seals for leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/067—Main electrodes for low-pressure discharge lamps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
    • H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Discharge Lamp (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

The invention provides a discharge lamp, a light source unit, a light source device and a lighting method of the discharge lamp, which can meet the requirement service life of the discharge lamp, namely 1500 hours. A discharge lamp (10) is configured from a light-emitting tube (12) having a light-emitting tube section (20) having an internal space (24) and a sealing section (22), a pair of electrodes (14), a foil (16) embedded in the sealing section (22), and a lead bar (18) having the other end extending outward from the sealing section (22). And, a pair of electrodes is used(14) The distance between the electrodes is 1.1mm to 1.7mm, and the amount of mercury (26) sealed in the internal space (24) is 0.03mg/mm3Above and 0.14mg/mm3Hereinafter, iodine is sealed in the internal space (24) so that the sealed concentration of iodine is 6X 10‑5μmol/mm3Above and 1.4X 10‑3μmol/mm3The following.

Description

Discharge lamp, light source unit, light source device, and method for lighting discharge lamp
Technical Field
The present invention relates to a discharge lamp, a light source unit, a light source device, and a method of lighting a discharge lamp, which are used for ultraviolet irradiation in, for example, an exposure apparatus or the like.
Background
Conventionally, as a light source device of an exposure apparatus, a large mercury lamp (a discharge lamp using mercury as a light-emitting substance; hereinafter, simply referred to as "discharge lamp") has been used. This is to allow a large-sized discharge lamp to emit various kinds of light of k-line (302nm), j-line (313nm), i-line (365nm), h-line (405nm), and g-line (436nm) relatively efficiently.
However, in the case of a large-sized discharge lamp, since the distance between the pair of electrodes is as long as approximately 10mm to 20mm, the ratio of light emitted from a position deviated from the focal point of a paraboloid, an ellipsoid or the like of a reflecting surface of a predetermined reflector is increased, and as a result, the light collecting efficiency is deteriorated and the light propagation is increased, and therefore, there is a problem that it is not suitable for high-definition exposure.
Further, the number of large discharge lamps used in 1 exposure apparatus is 1 to 4, and even if 1 lamp fails, the exposure amount is insufficient, and therefore, there is a problem that a production line including the exposure apparatus must be stopped, and damage due to failure of 1 lamp is extremely large.
In view of such problems, an exposure apparatus using a multi-lamp light source apparatus using a small discharge lamp has been recently developed.
When a multi-lamp light source device is used, the distance between a pair of electrodes in a small discharge lamp used is 1.1mm to 1.7mm, and therefore, the problems of light collection efficiency and light propagation in the case of using a large discharge lamp can be solved, thereby realizing more precise exposure.
Further, since the number of small discharge lamps used in 1 exposure apparatus is as large as several tens, even if a plurality of small discharge lamps fail, for example, a necessary exposure amount can be secured, and thus, a stop of a production line including the exposure apparatus can be avoided.
Documents of the prior art
Patent document
Patent document 1: japanese laid-open patent publication No. 11-283898
Disclosure of Invention
Problems to be solved by the invention
However, the small discharge lamp has a problem that the inside of the arc tube tends to be blackened early, and thus the life tends to be short.
The present invention has been made in view of the above problems, and an object thereof is to provide a small-sized low-pressure discharge lamp, a light source unit, and a light source device, which have a short inter-electrode distance and can satisfy 1500 hours, which is a required lifetime of the discharge lamp.
Means for solving the problems
According to one aspect of the present invention, there is provided a discharge lamp including:
a light emitting tube including a light emitting tube portion having an inner space and a sealing portion extending from the light emitting tube portion;
a pair of electrodes arranged in the internal space so that one ends thereof face each other;
a foil connected to the other end of the electrode and embedded in the sealing portion; and
a lead bar having one end connected to the foil and the other end extending outward from the sealing portion,
the distance between the pair of electrodes is 1.1mm to 1.7mm,
the amount of mercury sealed in the internal space is 0.03mg/mm3Above and 0.14mg/mm3In the following, the following description is given,
iodine is enclosed in the inner space,
the iodine encapsulation concentration is 6 × 10-5μmol/mm3Above and 1.4X 10-3μmol/mm3The following.
According to another aspect of the present invention, there is provided a discharge lamp including:
a light emitting tube including a light emitting tube portion having an inner space and a sealing portion extending from the light emitting tube portion;
a pair of electrodes arranged in the internal space so that one ends thereof face each other;
a foil connected to the other end of the electrode and embedded in the sealing portion; and
a lead bar having one end connected to the foil and the other end extending outward from the sealing portion,
the distance between the pair of electrodes is 1.1mm to 1.7mm,
the amount of mercury sealed in the internal space is 0.03mg/mm3Above and 0.14mg/mm3In the following, the following description is given,
bromine is enclosed in the inner space,
the enclosed concentration of bromine is 7.1X 10-7μmol/mm3Above and 1.1X 10-4μmol/mm3The following.
According to another aspect of the present invention, there is provided a discharge lamp including:
a light emitting tube including a light emitting tube portion having an inner space and a sealing portion extending from the light emitting tube portion;
a pair of electrodes arranged in the internal space so that one ends thereof face each other;
a foil connected to the other end of the electrode and embedded in the sealing portion; and
a lead bar having one end connected to the foil and the other end extending outward from the sealing portion,
the distance between the pair of electrodes is 1.1mm to 1.7mm,
the amount of mercury sealed in the internal space is 0.03mg/mm3Above and 0.14mg/mm3In the following, the following description is given,
a substance obtained by mixing iodine and bromine is sealed in the internal space,
the enclosed concentrations of the iodine and the bromine (. mu.mol/mm)3) Satisfies the following formula:
-8.156×10-2×I+0.11×10-4≤Br≤-8.156×10-2×I+1.72×10-4。
preferably, the first and second electrodes are formed of a metal,
the electrode load is 0.6W/mg or less at the maximum power.
Preferably, the first and second electrodes are formed of a metal,
at the maximum power of use, the tube wall load is 1.35W/mm2Above and 1.91W/mm2The following.
According to another aspect of the present invention, there is provided a lamp including:
the above discharge lamp; and
a reflector that reflects light from the discharge lamp in a given direction.
According to another aspect of the present invention, there is provided a light source unit including:
the above-mentioned lamp; and
a lamp socket mounting the lamp.
Preferably, the first and second electrodes are formed of a metal,
the number of the lamps is a plurality of,
a plurality of the lamps are mounted in the lamp socket.
According to another aspect of the present invention, there is provided a light source device including:
the light source unit described above; and
a power supply unit that supplies power to the light source unit.
According to another aspect of the present invention, there is provided the above-mentioned discharge lamp lighting method, wherein,
the constant illuminance operation is started from a power lower than the rated power.
Effects of the invention
According to the present invention, a small low-pressure discharge lamp, a light source unit, and a light source device can be provided, in which the distance between electrodes is short, and which can satisfy the required lifetime of the discharge lamp, that is, 1500 hours.
Drawings
Fig. 1 is a sectional view showing a discharge lamp 10 according to an embodiment.
Fig. 2 is a front view showing a reflector 50 according to the embodiment.
Fig. 3 is a front view showing the light source unit 130 according to the embodiment.
Detailed Description
(Structure of discharge Lamp 10)
As shown in fig. 1, the discharge lamp 10 of the present embodiment is roughly composed of a light-emitting tube 12, a pair of electrodes 14, a pair of foils 16, and a pair of lead bars 18.
The arc tube 12 is formed of, for example, quartz glass, and includes an arc tube portion 20 and a pair of sealing portions 22 extending from the arc tube portion 20. An internal space 24 sealed by the pair of sealing portions 22 is formed in the light emitting tube portion 20.
The pair of electrodes 14 are substantially rod-shaped members made of tungsten, and are disposed in the internal space 24 such that one ends thereof face each other. The other end of each electrode 14 is electrically connected to one end of each molybdenum foil 16 embedded in each sealing portion 22.
The discharge lamp 10 according to the present embodiment is of a type that is lit by a direct current, and therefore the anode (anode)40 is formed to be larger than the cathode (cathode).
The pair of lead bars 18 are substantially rod-shaped members made of molybdenum, and one end of each lead bar is electrically connected to the other end of each foil 16. The other end of each of the pair of lead bars 18 extends outward from each of the sealing portions 22.
In addition, mercury 26 and a halogen (iodine, bromine, or a mixture of iodine and bromine) are sealed in a predetermined amount in the inner space 24 of the bulb section 20.
When a predetermined high voltage is applied to a pair of lead bars 18 provided in the discharge lamp 10, a glow discharge that starts between a pair of electrodes 14 arranged in an internal space 24 of the light-emitting tube portion 20 is converted into an arc discharge, and light (mainly ultraviolet rays) is emitted by mercury 26 evaporated and excited by the arc.
(Structure of Reflector 50)
As shown in fig. 2, the reflector 50 used in combination with the discharge lamp 10 described above is roughly provided with a main body portion 52 and a reflection surface 54. The lamp 100 is constituted by combining the discharge lamp 10 with the reflector 50.
The body portion 52 is a bowl-shaped portion having a recess 56 therein. A bowl-shaped reflecting surface 54 that reflects a part of light emitted from the discharge lamp 10 used in combination with the reflector 50 is formed on an inner surface of the concave portion 56. In the present embodiment, the reflecting surface 54 is defined by a paraboloid of revolution, but the shape of the reflecting surface 54 is not limited thereto, and may be an ellipsoid of revolution, or may be another surface of revolution, or the reflecting surface 54 may be configured by a plurality of facets (small regions). The rotation axis of the paraboloid of revolution defining the reflecting surface 54 is referred to as the center axis CL of the reflector 50.
Further, a part of the light emitted from the discharge lamp 10 is reflected by the reflecting surface 54 as described above and then emitted to the outside from the opening 58 of the reflector 50, and the remaining light is not reflected by the reflecting surface 54 and emitted directly to the outside from the opening 58.
As shown in fig. 3, the lamp socket 120 for setting the plurality of lamps 100 at the correct positions and directions in the light source device 110 includes a plurality of mounting holes 122 for mounting the lamps 100 (more specifically, end surfaces on the opening 58 side of the reflector 50). The light source unit 130 is configured by combining a plurality of lamps 100 in the lamp socket 120.
Further, the light source unit 130 and the power supply unit 140 that supplies power to the light source unit 130 constitute a light source device 150. The light source device 150 is used for an exposure device, for example.
(parameters relating to discharge Lamp 10)
In the case of a relatively small-sized discharge lamp such as the discharge lamp 10, the inner surface of the light-emitting tube portion 20 tends to be blackened at an early stage, which leads to a problem of a short life.
Here, a mechanism of blackening the inner surface of the light-emitting tube portion 20 in the discharge lamp 10 will be briefly described. When power is supplied to the pair of lead bars 18 to start light emission of the discharge lamp 10, tungsten constituting the electrode 14 is sublimated from the electrode 14 which becomes high temperature. The sublimated tungsten is combined with halogen (e.g., iodine) in the vicinity of the inner wall surface of the light emitting tube portion 20 to form tungsten halide (e.g., tungsten iodide). The tungsten halide returns to the vicinity of the electrode 14 in a vaporized state. When the tungsten halide returned to the vicinity of the electrode 14 is heated to above 1400 ℃, the tungsten and the halogen are separated from each other. The separated tungsten is returned to the electrode 14 again. The separated halogen again returns to the vicinity of the inner wall surface of the light-emitting tube portion 20, and is combined with other sublimated tungsten. This is the so-called "halogen cycle".
If tungsten sublimated from the electrode 14 adheres to the inner wall surface of the light emitting tube portion 20 in the middle of the halogen cycle, the inner surface of the light emitting tube portion 20 is blackened. The electrode 14 is also consumed while blackening.
In order to reduce the degree of progress of such blackening so as to satisfy 1500 hours, which is a required lifetime of the discharge lamp 10, the following parameters are found to be important.
The distance of the electrodes 14 from each other (i.e., the inter-electrode distance. also referred to as "arc length")
The amount of mercury 26 enclosed in the internal space 24 of the bulb section 20
The kind of halogen sealed in the internal space 24 of the light-emitting tube part 20
Concentration of halogen sealed in the internal space 24 of the luminescent tube part 20
For the measurement of the required lifetime, that is, 1500 hours, "constant illuminance operation" was used. The life determination of the discharge lamp 10 based on the "constant illuminance operation" is as follows. When a new discharge lamp 10 is selected to emit light at a rated power, the discharge lamp 10 emits light at a required illuminance or more, and the discharge lamp 10 is first caused to emit light at a power of, for example, 70% or 60% of the rated power (i.e., a power lower than the rated power), thereby obtaining the required illuminance. Then, as the operation time elapses, the light emission amount (or the exposure amount [ unit J (joule) ] of the exposure object) decreases, the electric power supplied to the discharge lamp 10 increases, and the time point at which the required illuminance cannot be finally emitted even if the maximum use power (for example, the power of 115% of the rated power) is supplied is regarded as the "life" of the discharge lamp 10.
The power to be supplied to the discharge lamp 10, which is a new product, is preferably not less than 50% of the rated power. This is because, if the power is lower than 50% of the rated power, flickering may occur or blackening may occur due to a decrease in the lamp temperature.
Of course, the "constant illuminance operation" may be replaced with the "constant power operation". In the case of the "constant power operation", since light of the illuminance equal to or higher than the required illuminance is emitted when the discharge lamp 10 is new, the exposure time is adjusted so that the exposure amount of the exposure object becomes constant. Further, other operation methods that are neither "constant illuminance operation" nor "constant power operation" may be used.
When the halogen enclosed in the internal space 24 of the light-emitting tube section 20 is "iodine", the results of acceptance or rejection when the parameters are changed are shown in tables 1 to 5. If the distance between the electrodes is longer than 1.8mm, the irradiated surface becomes too dark, and thus cannot be used. In addition, the determination of the acceptability is regarded as acceptable by the following criteria: the circuit pattern on the exposure object formed by exposure was visually confirmed to be free from defects, free from blackening or devitrification which would otherwise affect the illuminance due to constant illuminance operation, and had a lifetime of 1500 hours or more.
[ TABLE 1 ]
Figure BDA0002627582740000091
[ TABLE 2 ]
Figure BDA0002627582740000101
[ TABLE 3 ]
Figure BDA0002627582740000111
[ TABLE 4 ]
Figure BDA0002627582740000121
[ TABLE 5 ]
Figure BDA0002627582740000131
According to the results of acceptability shown in tables 1 to 5, the amount of mercury 26 sealed in the internal space 24 was set to 0.03mg/mm by setting the distance between the electrodes to 1.1mm to 1.7mm3Above and 0.14mg/mm3The halogen (iodine) sealed in the internal space 24 is set to have a concentration of 6X 10-5μmol/mm3Above and 1.4X 10-3μmol/mm3The required lifetime of the discharge lamp 10, that is, 1500 hours, can be satisfied as follows.
Next, when the halogen enclosed in the internal space 24 of the light-emitting tube section 20 is "bromine", the results of acceptance or rejection when the parameters are changed are shown in tables 6 to 10. If the distance between the electrodes is longer than 1.8mm, the irradiated surface becomes too dark, and thus cannot be used. The determination of the pass/fail is the same as in tables 1 to 5 described above.
[ TABLE 6 ]
Figure BDA0002627582740000141
[ TABLE 7 ]
Figure BDA0002627582740000151
[ TABLE 8 ]
Figure BDA0002627582740000161
[ TABLE 9 ]
Figure BDA0002627582740000171
[ TABLE 10 ]
Figure BDA0002627582740000181
According to the results of acceptability shown in tables 6 to 10, the amount of mercury 26 sealed in the internal space 24 was set to 0.03mg/mm by setting the distance between the electrodes to 1.1mm to 1.7mm3Above and 0.14mg/mm3And enclosed in the internal space 24The concentration of halogen (bromine) is 7.1X 10-7μmol/mm3Above and 1.1X 10-4μmol/mm3The required lifetime of the discharge lamp 10, that is, 1500 hours, can be satisfied as follows.
Further, when the halogen enclosed in the internal space 24 of the light-emitting tube section 20 is a mixture of "iodine" and "bromine", the results of the acceptance or rejection when the parameters are changed are shown in tables 11 to 13. If the distance between the electrodes is longer than 1.8mm, the irradiated surface becomes too dark, and thus cannot be used. The determination of the pass/fail is the same as in tables 1 to 5 described above.
[ TABLE 11 ]
Figure BDA0002627582740000191
[ TABLE 12 ]
Figure BDA0002627582740000192
[ TABLE 13 ]
Figure BDA0002627582740000201
According to the results of acceptability shown in tables 11 to 13, the amount of mercury 26 sealed in the internal space 24 was set to 0.03mg/mm by setting the distance between the electrodes to 1.1mm to 1.7mm3Above and 0.14mg/mm3The halogen (iodine [ I ]) enclosed in the internal space 24 is as follows]+ bromine [ Br]) Concentration of (u mol/mm)3) The following equation is satisfied, and the required lifetime of the discharge lamp 10, that is, 1500 hours can be satisfied.
-8.156×10-2×I+0.11×10-4≤Br≤-8.156×10-2×I+1.72×10-4
(additional parameter 1)
The results of acceptance or rejection when the parameter "electrode load" was changed under the acceptance conditions shown in tables 1 to 5 using "iodine" as the halogen enclosed in the internal space 24 are shown in tables 14 and 15. Note that the "electrode load" is calculated based on the following expression.
Electrode load [ W/mg ]/(mass of anode 40 [ mg ] + mass of cathode 42 [ mg ])
[ TABLE 14 ]
Figure BDA0002627582740000211
[ TABLE 15 ]
Figure BDA0002627582740000221
From the results of pass or fail shown in tables 14 and 15, the required lifetime of the discharge lamp 10, that is, 1500 hours, can be satisfied by setting the electrode load to 0.6W/mg or less.
The ratio of the mass of the anode 40 to the mass of the cathode 42 (i.e., the mass of the anode 40 [ mg ]/[ mg ] of the cathode 42) is preferably 2.77 or more. This is because if the ratio is less than 2.77, the temperature at the tip of the cathode 42 does not rise, and therefore flickering tends to occur, and in the worst case, the base point of arc discharge does not shift to the tip of the electrode.
In addition, the results of acceptance or rejection when the parameter "electrode load" was changed under the acceptance conditions shown in tables 6 to 10 using "bromine" as the halogen enclosed in the internal space 24 are shown in tables 16 and 17.
[ TABLE 16 ]
Figure BDA0002627582740000231
[ TABLE 17 ]
Figure BDA0002627582740000241
From the results of pass or fail shown in tables 16 and 17, the required lifetime of the discharge lamp 10, that is, 1500 hours, can be satisfied by setting the electrode load to 0.6W/mg or less.
Further, the results of acceptance or rejection when the parameter "electrode load" was changed under the acceptance conditions shown in tables 11 and 13 using a mixture of "iodine" and "bromine" as the halogen enclosed in the internal space 24 are shown in tables 18 and 19.
[ TABLE 18 ]
Figure BDA0002627582740000251
[ TABLE 19 ]
Figure BDA0002627582740000261
From the results of pass or fail shown in tables 18 and 19, the required lifetime of the discharge lamp 10, that is, 1500 hours, can be satisfied by setting the electrode load to 0.6W/mg or less.
(additional parameter 2)
The results of acceptability when the parameter "wall load" was changed under the acceptability conditions shown in tables 1 to 5 using "iodine" as the halogen enclosed in the internal space 24 are shown in tables 20 and 21. Note that the "tube wall load" is calculated based on the following equation.
Pipe wall load [ W/mm2]Maximum power [ W ]]Inner surface area of luminous tube portion 20 [ mm ]2]
[ TABLE 20 ]
Figure BDA0002627582740000271
[ TABLE 21 ]
Figure BDA0002627582740000281
According to the results of eligibility shown in tables 20 and 21By setting the wall load at 1.35W/mm2Above and 1.91W/mm2The required lifetime of the discharge lamp 10, that is, 1500 hours, can be satisfied as follows.
In addition, the results of acceptance or rejection when the parameter "wall load" was changed under the acceptance conditions shown in tables 6 to 10 using "bromine" as the halogen enclosed in the internal space 24 are shown in tables 22 and 23.
[ TABLE 22 ]
Figure BDA0002627582740000291
[ TABLE 23 ]
Figure BDA0002627582740000301
According to the results of acceptability shown in tables 22 and 23, the tube wall load was set to 1.35W/mm2Above and 1.91W/mm2The required lifetime of the discharge lamp 10, that is, 1500 hours, can be satisfied as follows.
Further, the results of acceptance or rejection when the parameter "wall load" was changed under the acceptance conditions shown in tables 11 and 13 using a mixture of "iodine" and "bromine" as the halogen enclosed in the internal space 24 are shown in tables 24 and 25.
[ TABLE 24 ]
Figure BDA0002627582740000311
[ TABLE 25 ]
Figure BDA0002627582740000321
According to the results of acceptability shown in tables 24 and 25, the tube wall load was adjusted to 1.35W/mm2Above and 1.91W/mm2The required lifetime of the discharge lamp 10, that is, 1500 hours, can be satisfied as follows。
The presently disclosed embodiments are illustrative in all respects and should not be considered restrictive. The scope of the present invention is defined not by the above description but by the appended claims, and is intended to include all changes within the meaning and range equivalent to the claims.
Description of the symbols
10 … discharge lamp, 12 … luminous tube, 14 … electrode, 16 … foil, 18 … lead bar, 20 … luminous tube part, 22 … sealing part, 24 … internal space, 26 … mercury, 40 … anode (anode), 42 … cathode (cathode),
50 … reflector, 52 … main body, 54 … reflecting surface, 56 … recess, 58 … opening,
100 … lamp,
110 … light source device,
120 … lamp holder, 122 … mounting hole,
130 … light source unit, 140 … power supply unit, 150 … light source device.

Claims (10)

1. A discharge lamp is provided with:
a light emitting tube including a light emitting tube portion having an inner space and a sealing portion extending from the light emitting tube portion;
a pair of electrodes arranged in the internal space so that one ends thereof face each other;
a foil connected to the other end of the electrode and embedded in the sealing portion; and
a lead bar having one end connected to the foil and the other end extending outward from the sealing portion,
the distance between the pair of electrodes is 1.1mm to 1.7mm,
the amount of mercury sealed in the internal space is 0.03mg/mm3Above and 0.14mg/mm3In the following, the following description is given,
iodine is enclosed in the inner space,
the iodine encapsulation concentration is 6 × 10-5μmol/mm3Above and 1.4X 10-3μmol/mm3The following.
2. A discharge lamp is provided with:
a light emitting tube including a light emitting tube portion having an inner space and a sealing portion extending from the light emitting tube portion;
a pair of electrodes arranged in the internal space so that one ends thereof face each other;
a foil connected to the other end of the electrode and embedded in the sealing portion; and
a lead bar having one end connected to the foil and the other end extending outward from the sealing portion,
the distance between the pair of electrodes is 1.1mm to 1.7mm,
the amount of mercury sealed in the internal space is 0.03mg/mm3Above and 0.14mg/mm3In the following, the following description is given,
bromine is enclosed in the inner space,
the enclosed concentration of bromine is 7.1X 10-7μmol/mm3Above and 1.1X 10-4μmol/mm3The following.
3. A discharge lamp is provided with:
a light emitting tube including a light emitting tube portion having an inner space and a sealing portion extending from the light emitting tube portion;
a pair of electrodes arranged in the internal space so that one ends thereof face each other;
a foil connected to the other end of the electrode and embedded in the sealing portion; and
a lead bar having one end connected to the foil and the other end extending outward from the sealing portion,
the distance between the pair of electrodes is 1.1mm to 1.7mm,
the amount of mercury sealed in the internal space is 0.03mg/mm3Above and 0.14mg/mm3In the following, the following description is given,
a substance obtained by mixing iodine and bromine is sealed in the internal space,
in μmol/mm of said iodine and said bromine3The enclosed concentration in units satisfies the following formula:
-8.156×10-2×I+0.11×10-4≤Br≤-8.156×10-2×I+1.72×10-4。
4. a discharge lamp as claimed in any one of the claims 1 to 3,
the electrode load is 0.6W/mg or less at the maximum power.
5. A discharge lamp as claimed in any one of the claims 1 to 3,
at the maximum power of use, the tube wall load is 1.35W/mm2Above and 1.91W/mm2The following.
6. A lamp is provided with:
the discharge lamp of any one of claims 1 to 5; and
a reflector that reflects light from the discharge lamp in a given direction.
7. A light source unit is provided with:
the lamp of claim 6; and
a lamp socket mounting the lamp.
8. The light source unit according to claim 7,
the number of the lamps is a plurality of,
a plurality of the lamps are mounted in the lamp socket.
9. A light source device is provided with:
the light source unit of claim 7 or 8; and
a power supply unit that supplies power to the light source unit.
10. A method of lighting a discharge lamp according to any one of claims 1 to 5,
the constant illuminance operation is started from a power lower than the rated power.
CN202010801580.XA 2019-08-22 2020-08-11 Discharge lamp, light source unit, light source device, and method for lighting discharge lamp Pending CN112420483A (en)

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JPH0539564Y2 (en) * 1988-12-27 1993-10-07
JP2732457B2 (en) * 1990-04-20 1998-03-30 ウシオ電機株式会社 Short arc type mercury vapor discharge lamp
JP3517583B2 (en) 1998-03-27 2004-04-12 キヤノン株式会社 Exposure apparatus, device manufacturing method, and discharge lamp
JP2001266798A (en) * 2000-03-15 2001-09-28 Nec Corp High-pressure discharge lamp
JP4765414B2 (en) * 2005-06-01 2011-09-07 ウシオ電機株式会社 Light irradiation device
JP2007012777A (en) * 2005-06-29 2007-01-18 Ushio Inc Light irradiation apparatus
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