TWI455763B - 糊劑塗布裝置及塗布方法 - Google Patents

糊劑塗布裝置及塗布方法 Download PDF

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Publication number
TWI455763B
TWI455763B TW099105661A TW99105661A TWI455763B TW I455763 B TWI455763 B TW I455763B TW 099105661 A TW099105661 A TW 099105661A TW 99105661 A TW99105661 A TW 99105661A TW I455763 B TWI455763 B TW I455763B
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Taiwan
Prior art keywords
paste
substrate
mounting stage
frame
substrate mounting
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TW099105661A
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English (en)
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TW201043342A (en
Inventor
Shinji Maehara
Masanobu Kamio
Michiyuki Uchimura
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Hitachi Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Coating Apparatus (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Claims (7)

  1. 一種糊劑塗布裝置，是在架台上設置框架，在框架上可移動地設置一或複數個塗布頭，該塗布頭具備：填充有糊劑之糊劑收納筒、從該糊劑收納筒吐出糊劑之噴嘴吐出口，於設置在該架台上之基板載置載台上裝載基板，使該框架相對於該基板移動，並從該噴嘴吐出口朝基板上吐出該糊劑；其特徵在於：該基板載置載台，係將設有複數個吸附孔之複數個第1構件和複數個第2構件以正交的方式組合而形成井狀構造的載台；且在該基板載置載台的中心部用旋轉構件支承，在該基板載置載台的中心部以外的該第1構件和該第2構件的正交位置具備有複數個XYθ軸移動機構，該XYθ軸移動機構是用由旋轉構件和正交軸承所組合成之複數個移動構件支承而一邊旋轉一邊進行XY軸方向移動，讓該基板載置載台移動及旋轉，以調整該基板載置載台上所載置的該基板的位置、姿勢。
  2. 一種糊劑塗布裝置，是在架台上設置框架，在框架上可移動地設置一或複數個塗布頭，該塗布頭具備：填充有糊劑之糊劑收納筒、從該糊劑收納筒吐出糊劑之噴嘴吐出口，於設置在該架台上之基板載置載台上裝載基板，使該框架相對於該基板移動，並從該噴嘴吐出口朝基板上吐出該糊劑；其特徵在於：在該基板載置載台的中心設置：用來定位θ軸方向的 旋轉方向之交叉滾子軸承所構成的θ軸移動機構；該基板載置載台，係將內部形成空洞之複數個第1構件和複數個第2構件以正交的方式組合而形成井狀構造的載台；在該第1構件與該第2構件正交的位置設置：由用來定位該基板載置載台的X、Y軸方向之正交軸承和用來定位θ軸方向的旋轉方向之交叉滾子軸承所構成的XYθ軸移動機構。
  3. 如申請專利範圍第2項記載之糊劑塗布裝置，其中，前述框架和設置在前述架台側而用來支承讓前述框架移動的機構之架台側支承構件，可在前述基板載置載台的外側分離。
  4. 如申請專利範圍第2或3項記載之糊劑塗布裝置，其中，具有移動手段，可讓載置有基板之前述基板載置載台移動至設置於前述框架之一或複數個前述塗布頭之糊劑塗布可能範圍的外側。
  5. 一種糊劑塗布方法，是在架台上設置框架，在框架上可移動地設置一或複數個塗布頭，該塗布頭具備：填充有糊劑之糊劑收納筒、從該糊劑收納筒吐出糊劑之噴嘴吐出口，於設置在該架台上之基板載置載台上裝載基板，使該框架相對於該基板移動，並從該噴嘴吐出口朝基板上吐出該糊劑；其特徵在於：該基板載置載台，係將內部形成空洞之複數個第1構件和複數個第2構件以正交的方式組合而形成井狀構造的 載台；在該基板載置載台的中心部，具備用來定位θ軸方向的旋轉方向之交叉滾子軸承所構成的θ軸移動機構；在該基板載置載台的中心部以外的位置，具備正交軸承和交叉滾子軸承所構成的複數個XYθ軸移動機構；當繞該基板載置載台的中心部進行旋轉定位時，在該中心部以外，藉由設置在該第1構件與該第2構件正交的位置之該正交軸承來將該基板載置載台定位於X、Y軸方向，藉由設置在該第1構件與該第2構件正交的位置之該交叉滾子軸承來將該基板載置載台定位於θ軸方向的旋轉方向。
  6. 如申請專利範圍第5項記載之糊劑塗布方法，其中，前述框架和設置在前述架台側而用來支承讓前述框架移動的機構之架台側支承構件是可分離的。
  7. 如申請專利範圍第5或6項記載之糊劑塗布方法，其中，可讓載置有前述基板之前述基板載置載台，移動至：設置於前述框架之前述塗布頭之糊劑塗布可能範圍的外側。
TW099105661A 2009-05-14 2010-02-26 糊劑塗布裝置及塗布方法 TWI455763B (zh)

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JP2009117891A JP5525182B2 (ja) 2009-05-14 2009-05-14 ペースト塗布装置及び塗布方法

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TW201043342A TW201043342A (en) 2010-12-16
TWI455763B true TWI455763B (zh) 2014-10-11

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CN103399433B (zh) * 2013-08-14 2016-05-25 深圳市华星光电技术有限公司 液晶滴灌装置
KR101741087B1 (ko) * 2015-09-09 2017-05-29 씨티에스(주) 정전기 발생을 최소화 할 수 있는 세정장치용 스테이지
CN111151425B (zh) * 2019-12-31 2022-06-03 延康汽车零部件如皋有限公司 一种汽车上、下格栅组合表面处理方法

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KR100746304B1 (ko) * 2006-08-10 2007-08-03 주식회사 탑 엔지니어링 평판 디스플레이용 디스펜서
CN101082742A (zh) * 2006-05-30 2007-12-05 株式会社东芝 中间基座、xy工作台、密封剂涂敷装置及液晶面板的制造方法
TW200836840A (en) * 2006-11-28 2008-09-16 Tokyo Electron Ltd Coating method and coating apparatus

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JP2609386B2 (ja) * 1991-12-06 1997-05-14 株式会社日立製作所 基板組立装置
JP3701882B2 (ja) * 2001-05-25 2005-10-05 株式会社 日立インダストリイズ ペースト塗布機
JP2003139709A (ja) * 2001-11-05 2003-05-14 Olympus Optical Co Ltd ホルダ装置
JP4197238B2 (ja) * 2002-05-24 2008-12-17 大日本スクリーン製造株式会社 基板処理装置
KR100552092B1 (ko) * 2003-06-28 2006-02-13 주식회사 탑 엔지니어링 평판표시장치 제조용 페이스트 도포장치
JP2006187736A (ja) * 2005-01-07 2006-07-20 Hitachi Industries Co Ltd ペースト塗布機
JP4815872B2 (ja) * 2005-05-20 2011-11-16 株式会社日立プラントテクノロジー ペースト塗布機
US20090092467A1 (en) * 2006-03-06 2009-04-09 Yasuzou Tanaka Stage apparatus
JP4911761B2 (ja) * 2006-08-31 2012-04-04 武蔵エンジニアリング株式会社 変形可能なガントリー型作業装置

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Publication number Priority date Publication date Assignee Title
CN101082742A (zh) * 2006-05-30 2007-12-05 株式会社东芝 中间基座、xy工作台、密封剂涂敷装置及液晶面板的制造方法
KR100746304B1 (ko) * 2006-08-10 2007-08-03 주식회사 탑 엔지니어링 평판 디스플레이용 디스펜서
TW200836840A (en) * 2006-11-28 2008-09-16 Tokyo Electron Ltd Coating method and coating apparatus

Also Published As

Publication number Publication date
KR101159947B1 (ko) 2012-06-26
JP2010266685A (ja) 2010-11-25
KR20100123591A (ko) 2010-11-24
CN101887193B (zh) 2012-05-09
TW201043342A (en) 2010-12-16
JP5525182B2 (ja) 2014-06-18
CN101887193A (zh) 2010-11-17

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