TWI416283B - 使用酸及氧化氣體之混合物以進行表面處理的方法及設備 - Google Patents

使用酸及氧化氣體之混合物以進行表面處理的方法及設備 Download PDF

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Publication number
TWI416283B
TWI416283B TW099140774A TW99140774A TWI416283B TW I416283 B TWI416283 B TW I416283B TW 099140774 A TW099140774 A TW 099140774A TW 99140774 A TW99140774 A TW 99140774A TW I416283 B TWI416283 B TW I416283B
Authority
TW
Taiwan
Prior art keywords
oxidizing
treating
oxidizing fluid
acid
gas
Prior art date
Application number
TW099140774A
Other languages
English (en)
Chinese (zh)
Other versions
TW201122739A (en
Inventor
Robert Kumnig
Reinhard Sellmer
Original Assignee
Lam Res Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Ag filed Critical Lam Res Ag
Publication of TW201122739A publication Critical patent/TW201122739A/zh
Application granted granted Critical
Publication of TWI416283B publication Critical patent/TWI416283B/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31127—Etching organic layers
    • H01L21/31133—Etching organic layers by chemical means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • G03F7/422—Stripping or agents therefor using liquids only
    • G03F7/423—Stripping or agents therefor using liquids only containing mineral acids or salts thereof, containing mineral oxidizing substances, e.g. peroxy compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical & Material Sciences (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW099140774A 2009-11-30 2010-11-25 使用酸及氧化氣體之混合物以進行表面處理的方法及設備 TWI416283B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/627,953 US20110130009A1 (en) 2009-11-30 2009-11-30 Method and apparatus for surface treatment using a mixture of acid and oxidizing gas

Publications (2)

Publication Number Publication Date
TW201122739A TW201122739A (en) 2011-07-01
TWI416283B true TWI416283B (zh) 2013-11-21

Family

ID=44067008

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099140774A TWI416283B (zh) 2009-11-30 2010-11-25 使用酸及氧化氣體之混合物以進行表面處理的方法及設備

Country Status (7)

Country Link
US (1) US20110130009A1 (de)
EP (1) EP2507817A4 (de)
JP (1) JP2013512559A (de)
KR (1) KR101765352B1 (de)
CN (1) CN102640256B (de)
TW (1) TWI416283B (de)
WO (1) WO2011064684A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8877075B2 (en) * 2012-02-01 2014-11-04 Infineon Technologies Ag Apparatuses and methods for gas mixed liquid polishing, etching, and cleaning
US9616451B2 (en) 2012-11-19 2017-04-11 Lam Research Ag Apparatus for processing wafer-shaped articles
US10510527B2 (en) * 2013-02-01 2019-12-17 Taiwan Semiconductor Manufacturing Co., Ltd. Single wafer cleaning tool with H2SO4 recycling
CN105826256B (zh) * 2015-01-06 2020-02-07 中芯国际集成电路制造(上海)有限公司 Cmos晶体管的形成方法
JP6985803B2 (ja) * 2017-03-01 2021-12-22 株式会社Ｓｃｒｅｅｎホールディングス 露光装置、基板処理装置、基板の露光方法および基板処理方法
CN109686664A (zh) * 2017-10-18 2019-04-26 无锡华瑛微电子技术有限公司 一种含有四烷基氢氧化铵的光刻胶去除液及光刻胶的去除方法
JP6979935B2 (ja) 2018-10-24 2021-12-15 三菱電機株式会社 半導体製造装置および半導体製造方法
JP2023046537A (ja) 2021-09-24 2023-04-05 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法、および、基板処理装置

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US20040154641A1 (en) * 2002-05-17 2004-08-12 P.C.T. Systems, Inc. Substrate processing apparatus and method

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ATE522926T1 (de) * 1997-02-14 2011-09-15 Imec Verfahren zur entfernung organischer kontamination von einer halbleiteroberfläche
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US6080531A (en) * 1998-03-30 2000-06-27 Fsi International, Inc. Organic removal process
US6286231B1 (en) * 2000-01-12 2001-09-11 Semitool, Inc. Method and apparatus for high-pressure wafer processing and drying
US6558477B1 (en) * 2000-10-16 2003-05-06 Micron Technology, Inc. Removal of photoresist through the use of hot deionized water bath, water vapor and ozone gas
JP4034519B2 (ja) * 2001-02-06 2008-01-16 株式会社東芝 ウェハ洗浄装置及びウェハ洗浄方法
KR100951898B1 (ko) * 2002-12-09 2010-04-09 삼성전자주식회사 포토레지스트 제거용 스트리핑 조성물 및 이를 사용한액정 표시 장치의 박막 트랜지스터 기판의 제조방법
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US20040154641A1 (en) * 2002-05-17 2004-08-12 P.C.T. Systems, Inc. Substrate processing apparatus and method
US20040046361A1 (en) * 2002-09-06 2004-03-11 Lewis Myron C. Cover, including hinged door, for trailer hitch receivers of multiple sizes and methods

Also Published As

Publication number Publication date
KR20120099245A (ko) 2012-09-07
WO2011064684A2 (en) 2011-06-03
TW201122739A (en) 2011-07-01
WO2011064684A3 (en) 2011-10-20
KR101765352B1 (ko) 2017-08-07
US20110130009A1 (en) 2011-06-02
CN102640256A (zh) 2012-08-15
CN102640256B (zh) 2015-03-18
EP2507817A2 (de) 2012-10-10
EP2507817A4 (de) 2012-10-17
JP2013512559A (ja) 2013-04-11

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