TWI408107B - 超純水製造裝置及其運轉方法 - Google Patents

超純水製造裝置及其運轉方法 Download PDF

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Publication number
TWI408107B
TWI408107B TW094110197A TW94110197A TWI408107B TW I408107 B TWI408107 B TW I408107B TW 094110197 A TW094110197 A TW 094110197A TW 94110197 A TW94110197 A TW 94110197A TW I408107 B TWI408107 B TW I408107B
Authority
TW
Taiwan
Prior art keywords
catalyst
ultrapure water
exchange resin
anion exchange
liquid
Prior art date
Application number
TW094110197A
Other languages
English (en)
Chinese (zh)
Other versions
TW200538401A (en
Inventor
Katsunobu Kitami
Ikunori Yokoi
Masayoshi Oinuma
Original Assignee
Kurita Water Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kurita Water Ind Ltd filed Critical Kurita Water Ind Ltd
Publication of TW200538401A publication Critical patent/TW200538401A/zh
Application granted granted Critical
Publication of TWI408107B publication Critical patent/TWI408107B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/14—Ultrafiltration; Microfiltration
    • B01D61/145—Ultrafiltration
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F9/00—Multistage treatment of water, waste water or sewage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D19/00—Degasification of liquids
    • B01D19/0031—Degasification of liquids by filtration
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/20—Treatment of water, waste water, or sewage by degassing, i.e. liberation of dissolved gases
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/30—Treatment of water, waste water, or sewage by irradiation
    • C02F1/32—Treatment of water, waste water, or sewage by irradiation with ultraviolet light
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/72—Treatment of water, waste water, or sewage by oxidation
    • C02F1/725—Treatment of water, waste water, or sewage by oxidation by catalytic oxidation
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C02F2001/422—Treatment of water, waste water, or sewage by ion-exchange using anionic exchangers
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C02F2001/425—Treatment of water, waste water, or sewage by ion-exchange using cation exchangers
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C02F2001/427—Treatment of water, waste water, or sewage by ion-exchange using mixed beds
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water

Landscapes

  • Water Supply & Treatment (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Hydrology & Water Resources (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Water Treatments (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Removal Of Specific Substances (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Degasification And Air Bubble Elimination (AREA)
TW094110197A 2004-03-31 2005-03-31 超純水製造裝置及其運轉方法 TWI408107B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004106438 2004-03-31

Publications (2)

Publication Number Publication Date
TW200538401A TW200538401A (en) 2005-12-01
TWI408107B true TWI408107B (zh) 2013-09-11

Family

ID=35063665

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094110197A TWI408107B (zh) 2004-03-31 2005-03-31 超純水製造裝置及其運轉方法

Country Status (4)

Country Link
US (1) US20070221581A1 (enExample)
JP (2) JP5045099B2 (enExample)
TW (1) TWI408107B (enExample)
WO (1) WO2005095280A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI573765B (zh) * 2014-09-17 2017-03-11 Zetech Engineering And Services Ltd Catalyst for removing hydrogen peroxide in water and its preparation method

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005095280A1 (ja) * 2004-03-31 2005-10-13 Kurita Water Industries Ltd. 超純水製造装置
JP5124946B2 (ja) * 2006-01-12 2013-01-23 栗田工業株式会社 超純水製造装置における超純水中の過酸化水素の除去方法
US7851406B2 (en) * 2007-06-12 2010-12-14 Korea Institute Of Chemical Technology Nano-sized palladium-doped cation exchange resin catalyst, preparation method thereof and method of removing dissolved oxygen in water using the same
JP5280038B2 (ja) * 2007-11-06 2013-09-04 野村マイクロ・サイエンス株式会社 超純水製造装置
WO2009082008A1 (ja) * 2007-12-26 2009-07-02 Organo Corporation 過酸化水素除去方法およびその装置、オゾン水製造方法およびその装置、並びに洗浄方法およびその装置
JP4920019B2 (ja) * 2008-09-22 2012-04-18 オルガノ株式会社 過酸化水素低減方法、過酸化水素低減装置及び超純水製造装置並びに洗浄方法
JP5499753B2 (ja) * 2010-02-18 2014-05-21 栗田工業株式会社 水処理方法及び装置
WO2011149730A2 (en) * 2010-05-24 2011-12-01 Baxter International Inc. Systems and methods for removing hydrogen peroxide from water purification systems
US20140112999A1 (en) * 2012-08-31 2014-04-24 Water Star, Inc. Method and apparatus for increasing the concentration of dissolved oxygen in water and aqueous solutions
KR102092441B1 (ko) * 2013-10-04 2020-03-23 쿠리타 고교 가부시키가이샤 초순수 제조 장치
JP2015093226A (ja) * 2013-11-11 2015-05-18 栗田工業株式会社 純水製造方法及び装置
JP6529793B2 (ja) * 2015-03-16 2019-06-12 オルガノ株式会社 被処理液の処理方法及び被処理液の処理装置
JP2016191619A (ja) * 2015-03-31 2016-11-10 株式会社荏原製作所 復水脱塩装置及び復水脱塩方法
JP6439777B2 (ja) * 2016-12-05 2018-12-19 栗田工業株式会社 超純水製造装置及び超純水製造装置の運転方法
JP7213006B2 (ja) * 2017-02-09 2023-01-26 栗田工業株式会社 導電性水溶液の製造装置及び導電性水溶液の製造方法
JP2018127383A (ja) * 2017-02-09 2018-08-16 栗田工業株式会社 アンモニア水溶液の製造装置及びアンモニア水溶液の製造方法
JP7012196B1 (ja) * 2020-06-23 2022-01-27 オルガノ株式会社 水処理装置、超純水製造装置、水処理方法及び再生型イオン交換塔
US11618702B1 (en) * 2020-06-26 2023-04-04 Kyosuke Kanno Vital water
JP2024160768A (ja) * 2023-05-02 2024-11-15 オルガノ株式会社 水処理設備及び水処理方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW332783B (en) * 1996-12-05 1998-06-01 Organo Kk The apparatus for manufacturing ultra-pure water
TW446687B (en) * 1996-02-20 2001-07-21 Nomura Micro Science Kk Method and apparatus for producing ultra pure water
TW200301227A (en) * 2001-12-21 2003-07-01 Organo Corp Hydrogen peroxide containing water discharge treatment device

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DE3120213A1 (de) * 1981-05-21 1982-12-09 Bayer Ag, 5090 Leverkusen Verfahren zur durchfuehrung katalytischer reaktionen in waessrigen medien
JPS6071085A (ja) * 1983-09-28 1985-04-22 Kurita Water Ind Ltd 過酸化水素の除去方法
JPS60257840A (ja) * 1984-06-04 1985-12-19 Kurita Water Ind Ltd イオン交換装置
JPS61101292A (ja) * 1984-10-24 1986-05-20 Kurita Water Ind Ltd 純水製造装置
JPH0818040B2 (ja) * 1991-05-17 1996-02-28 株式会社荏原総合研究所 純水又は超純水の精製方法及び装置
JP2500968B2 (ja) * 1991-11-20 1996-05-29 栗田工業株式会社 純水製造装置
US5302356A (en) * 1992-03-04 1994-04-12 Arizona Board Of Reagents Acting On Behalf Of University Of Arizona Ultrapure water treatment system
JPH09192658A (ja) * 1996-01-19 1997-07-29 Nomura Micro Sci Co Ltd 超純水製造装置
JP3525623B2 (ja) * 1996-05-16 2004-05-10 栗田工業株式会社 復水処理法
JP3867944B2 (ja) * 1998-03-27 2007-01-17 オルガノ株式会社 酸化性物質を低減した純水の製造方法及び超純水製造装置
CN1192817C (zh) * 1999-04-27 2005-03-16 栗田工业株式会社 用于制造含有溶解的臭氧的水的设备
JP2000308815A (ja) * 1999-04-27 2000-11-07 Kurita Water Ind Ltd オゾン溶解水の製造装置
JP2001062454A (ja) * 1999-08-27 2001-03-13 Kurita Water Ind Ltd 電解水の製造装置
JP2001179252A (ja) * 1999-12-22 2001-07-03 Japan Organo Co Ltd 酸化性物質低減純水製造方法及び装置
JP4552327B2 (ja) * 2001-01-18 2010-09-29 栗田工業株式会社 超純水製造装置
JP4109455B2 (ja) * 2002-01-15 2008-07-02 オルガノ株式会社 水素溶解水製造装置
JP4219664B2 (ja) * 2002-12-03 2009-02-04 野村マイクロ・サイエンス株式会社 超純水製造装置
WO2005095280A1 (ja) * 2004-03-31 2005-10-13 Kurita Water Industries Ltd. 超純水製造装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW446687B (en) * 1996-02-20 2001-07-21 Nomura Micro Science Kk Method and apparatus for producing ultra pure water
TW332783B (en) * 1996-12-05 1998-06-01 Organo Kk The apparatus for manufacturing ultra-pure water
TW200301227A (en) * 2001-12-21 2003-07-01 Organo Corp Hydrogen peroxide containing water discharge treatment device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI573765B (zh) * 2014-09-17 2017-03-11 Zetech Engineering And Services Ltd Catalyst for removing hydrogen peroxide in water and its preparation method

Also Published As

Publication number Publication date
US20070221581A1 (en) 2007-09-27
JP5649520B2 (ja) 2015-01-07
WO2005095280A1 (ja) 2005-10-13
JP2011194402A (ja) 2011-10-06
TW200538401A (en) 2005-12-01
JPWO2005095280A1 (ja) 2008-02-21
JP5045099B2 (ja) 2012-10-10

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