TWI382811B - A method of manufacturing a phase change type heat sink, a flow path structure, an electronic machine, and a phase change type heat sink - Google Patents

A method of manufacturing a phase change type heat sink, a flow path structure, an electronic machine, and a phase change type heat sink Download PDF

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Publication number
TWI382811B
TWI382811B TW097133914A TW97133914A TWI382811B TW I382811 B TWI382811 B TW I382811B TW 097133914 A TW097133914 A TW 097133914A TW 97133914 A TW97133914 A TW 97133914A TW I382811 B TWI382811 B TW I382811B
Authority
TW
Taiwan
Prior art keywords
heat
plate
phase change
heat sink
flow path
Prior art date
Application number
TW097133914A
Other languages
English (en)
Chinese (zh)
Other versions
TW200930278A (en
Inventor
Hiroyuki Nagai
Hiroyuki Ryoson
Takashi Yajima
Mitsuo Hashimoto
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of TW200930278A publication Critical patent/TW200930278A/zh
Application granted granted Critical
Publication of TWI382811B publication Critical patent/TWI382811B/zh

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/427Cooling by change of state, e.g. use of heat pipes
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/0233Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes the conduits having a particular shape, e.g. non-circular cross-section, annular
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D15/00Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
    • F28D15/02Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
    • F28D15/04Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
    • F28D15/046Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure characterised by the material or the construction of the capillary structure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/08Elements constructed for building-up into stacks, e.g. capable of being taken apart for cleaning
    • F28F3/086Elements constructed for building-up into stacks, e.g. capable of being taken apart for cleaning having one or more openings therein forming tubular heat-exchange passages
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/4935Heat exchanger or boiler making

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
TW097133914A 2007-09-20 2008-09-04 A method of manufacturing a phase change type heat sink, a flow path structure, an electronic machine, and a phase change type heat sink TWI382811B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007243891A JP2009076650A (ja) 2007-09-20 2007-09-20 相変化型ヒートスプレッダ、流路構造体、電子機器及び相変化型ヒートスプレッダの製造方法

Publications (2)

Publication Number Publication Date
TW200930278A TW200930278A (en) 2009-07-01
TWI382811B true TWI382811B (zh) 2013-01-11

Family

ID=40467752

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097133914A TWI382811B (zh) 2007-09-20 2008-09-04 A method of manufacturing a phase change type heat sink, a flow path structure, an electronic machine, and a phase change type heat sink

Country Status (5)

Country Link
US (1) US20100326632A1 (ja)
JP (1) JP2009076650A (ja)
KR (1) KR20100057038A (ja)
TW (1) TWI382811B (ja)
WO (1) WO2009037928A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11504863B2 (en) 2019-11-07 2022-11-22 Delta Electronics, Inc. Heat dissipation device and robot using same

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JP4557055B2 (ja) * 2008-06-25 2010-10-06 ソニー株式会社 熱輸送デバイス及び電子機器
US20100071880A1 (en) * 2008-09-22 2010-03-25 Chul-Ju Kim Evaporator for looped heat pipe system
JP2010243035A (ja) * 2009-04-03 2010-10-28 Sony Corp 熱輸送装置、電子機器及び熱輸送装置の製造方法
BR112012020282A2 (pt) * 2010-02-13 2016-05-03 Mcalister Technologies Llc dispositivo de transferência térmica, e sistemas e métodos associados
JP5180385B1 (ja) * 2012-03-08 2013-04-10 株式会社Welcon ベーパチャンバ
US20130291555A1 (en) 2012-05-07 2013-11-07 Phononic Devices, Inc. Thermoelectric refrigeration system control scheme for high efficiency performance
US8893513B2 (en) 2012-05-07 2014-11-25 Phononic Device, Inc. Thermoelectric heat exchanger component including protective heat spreading lid and optimal thermal interface resistance
JP6176433B2 (ja) * 2013-01-10 2017-08-09 株式会社Welcon ベーパチャンバ
JP6213807B2 (ja) * 2013-02-26 2017-10-18 株式会社Welcon ヒートパイプ
WO2014157147A1 (ja) * 2013-03-27 2014-10-02 古河電気工業株式会社 冷却装置
US9593871B2 (en) 2014-07-21 2017-03-14 Phononic Devices, Inc. Systems and methods for operating a thermoelectric module to increase efficiency
US10458683B2 (en) 2014-07-21 2019-10-29 Phononic, Inc. Systems and methods for mitigating heat rejection limitations of a thermoelectric module
FR3027379B1 (fr) 2014-10-15 2019-04-26 Euro Heat Pipes Caloduc plat avec fonction reservoir
WO2017037921A1 (ja) 2015-09-03 2017-03-09 富士通株式会社 ループヒートパイプ及びその製造方法並びに電子機器
JP6291000B2 (ja) * 2016-09-01 2018-03-07 新光電気工業株式会社 ループ型ヒートパイプ及びその製造方法
US10352626B2 (en) * 2016-12-14 2019-07-16 Shinko Electric Industries Co., Ltd. Heat pipe
JP2018173193A (ja) * 2017-03-31 2018-11-08 古河電気工業株式会社 ヒートシンク
US10976111B2 (en) * 2017-10-27 2021-04-13 Shinko Electric Industries Co., Ltd. Loop type heat pipe
JP6951267B2 (ja) * 2018-01-22 2021-10-20 新光電気工業株式会社 ヒートパイプ及びその製造方法
JP7015197B2 (ja) * 2018-03-26 2022-02-02 新光電気工業株式会社 ループ型ヒートパイプ及びその製造方法
JP7027253B2 (ja) * 2018-05-30 2022-03-01 新光電気工業株式会社 ループ型ヒートパイプ及びその製造方法
US10962301B2 (en) * 2018-07-23 2021-03-30 Shinko Electric Industries Co., Ltd. Loop heat pipe
JP6801698B2 (ja) * 2018-09-04 2020-12-16 セイコーエプソン株式会社 冷却装置及びプロジェクター
JP7153515B2 (ja) * 2018-09-25 2022-10-14 新光電気工業株式会社 ループ型ヒートパイプ
TWI690684B (zh) * 2019-01-31 2020-04-11 雙鴻科技股份有限公司 均溫板與具有該均溫板的散熱裝置
US20200376538A1 (en) * 2019-05-27 2020-12-03 Asia Vital Components (China) Co., Ltd. Manufacturing method of roll bond plate evaporator structure
CN110278696A (zh) * 2019-07-19 2019-09-24 深圳市英维克科技股份有限公司 重力热管散热器及电子设备
US11587798B2 (en) * 2020-01-03 2023-02-21 Rolls-Royce North American Technologies Inc. High heat flux power electronics cooling design
US11473849B2 (en) 2020-05-15 2022-10-18 Murata Manufacturing Co., Ltd. Vapor chamber
US11013145B1 (en) 2020-05-15 2021-05-18 Murata Manufacturing Co., Ltd. Vapor chamber
US11473850B2 (en) 2020-05-15 2022-10-18 Murata Manufacturing Co., Ltd. Vapor chamber
US11585606B2 (en) 2020-05-15 2023-02-21 Murata Manufacturing Co., Ltd. Vapor chamber
KR102605791B1 (ko) * 2021-12-13 2023-11-23 중앙대학교 산학협력단 반도체 소자 열관리 모듈 및 이의 제조 방법
CN115900404B (zh) * 2022-11-21 2023-07-21 上海交通大学 加热平板沸腾强化微结构改性表面及其实现方法
CN116914322B (zh) * 2023-09-13 2024-01-09 比亚迪股份有限公司 冷却系统、电池包箱体、电池包和车辆

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JPH1131768A (ja) * 1997-07-11 1999-02-02 Denso Corp 沸騰冷却装置
TWM245742U (en) * 2003-10-31 2004-10-01 Cpumate Inc Heat sink structure with multiple flowing paths

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JPS6267843A (ja) * 1985-09-20 1987-03-27 Hitachi Ltd 半導体冷却装置
JPS62105496A (ja) * 1985-11-01 1987-05-15 株式会社日立製作所 熱伝達装置
JP2002327993A (ja) * 2001-05-01 2002-11-15 Fujitsu Ltd 薄型ヒートパイプ、薄型ヒートシンク、熱制御システムおよび薄型ヒートパイプの製造方法
JP2004020116A (ja) * 2002-06-19 2004-01-22 Mitsubishi Electric Corp 平板型ヒートパイプ
JP2007266153A (ja) * 2006-03-28 2007-10-11 Sony Corp プレート型熱輸送装置及び電子機器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1131768A (ja) * 1997-07-11 1999-02-02 Denso Corp 沸騰冷却装置
TWM245742U (en) * 2003-10-31 2004-10-01 Cpumate Inc Heat sink structure with multiple flowing paths

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11504863B2 (en) 2019-11-07 2022-11-22 Delta Electronics, Inc. Heat dissipation device and robot using same

Also Published As

Publication number Publication date
WO2009037928A1 (ja) 2009-03-26
KR20100057038A (ko) 2010-05-28
JP2009076650A (ja) 2009-04-09
US20100326632A1 (en) 2010-12-30
TW200930278A (en) 2009-07-01

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