TWI362098B - Method for forming an inductor in a semiconductor integrated circuit and integrated circuit therefor - Google Patents

Method for forming an inductor in a semiconductor integrated circuit and integrated circuit therefor Download PDF

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Publication number
TWI362098B
TWI362098B TW093129464A TW93129464A TWI362098B TW I362098 B TWI362098 B TW I362098B TW 093129464 A TW093129464 A TW 093129464A TW 93129464 A TW93129464 A TW 93129464A TW I362098 B TWI362098 B TW I362098B
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Taiwan
Prior art keywords
conductive
forming
layer
integrated circuit
inductor
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TW093129464A
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English (en)
Chinese (zh)
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TW200520195A (en
Inventor
Edward Belden Harris
Sailesh Mansinh Merchant
Kurt George Steiner
Susan Clay Vitkavage
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Agere Systems Inc
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Publication of TW200520195A publication Critical patent/TW200520195A/zh
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Publication of TWI362098B publication Critical patent/TWI362098B/zh

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    • H01L2924/1901—Structure
    • H01L2924/1904—Component type
    • H01L2924/19042—Component type being an inductor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/30105—Capacitance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/30107—Inductance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor

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  • Engineering & Computer Science (AREA)
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  • Microelectronics & Electronic Packaging (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
TW093129464A 2003-09-30 2004-09-29 Method for forming an inductor in a semiconductor integrated circuit and integrated circuit therefor TWI362098B (en)

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GB2406720A (en) 2005-04-06
US20060192647A1 (en) 2006-08-31
JP4948756B2 (ja) 2012-06-06
US7068139B2 (en) 2006-06-27
US7541238B2 (en) 2009-06-02
GB0421662D0 (en) 2004-10-27
KR101045195B1 (ko) 2011-06-30
KR20050032009A (ko) 2005-04-06
TW200520195A (en) 2005-06-16
US7678639B2 (en) 2010-03-16
GB2406720B (en) 2006-09-13
US20050099259A1 (en) 2005-05-12
JP2005175434A (ja) 2005-06-30
US20090100668A1 (en) 2009-04-23

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