KR101045195B1 - 집적 회로에 형성된 인덕터 - Google Patents

집적 회로에 형성된 인덕터 Download PDF

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KR101045195B1
KR101045195B1 KR1020040078024A KR20040078024A KR101045195B1 KR 101045195 B1 KR101045195 B1 KR 101045195B1 KR 1020040078024 A KR1020040078024 A KR 1020040078024A KR 20040078024 A KR20040078024 A KR 20040078024A KR 101045195 B1 KR101045195 B1 KR 101045195B1
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conductive
conductive line
spiral
metallization layer
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KR20050032009A (ko
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해리스에드워드벨덴
머천트세일레쉬맨신
스테이너컬트조지
비트카비지수잔클레이
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에이저 시스템즈 인크
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    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/30105Capacitance
    • HELECTRICITY
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    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/301Electrical effects
    • H01L2924/30107Inductance
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y10T29/4902Electromagnet, transformer or inductor

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Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4948756B2 (ja) * 2003-09-30 2012-06-06 アギア システムズ インコーポレーテッド 集積回路内に形成されたインダクタ及びその製造方法
US7786836B2 (en) * 2005-07-19 2010-08-31 Lctank Llc Fabrication of inductors in transformer based tank circuitry
TWI304261B (en) 2005-10-12 2008-12-11 Realtek Semiconductor Corp Integrated inductor
US8669637B2 (en) * 2005-10-29 2014-03-11 Stats Chippac Ltd. Integrated passive device system
US7851257B2 (en) * 2005-10-29 2010-12-14 Stats Chippac Ltd. Integrated circuit stacking system with integrated passive components
US8409970B2 (en) 2005-10-29 2013-04-02 Stats Chippac, Ltd. Semiconductor device and method of making integrated passive devices
US8158510B2 (en) 2009-11-19 2012-04-17 Stats Chippac, Ltd. Semiconductor device and method of forming IPD on molded substrate
US8791006B2 (en) 2005-10-29 2014-07-29 Stats Chippac, Ltd. Semiconductor device and method of forming an inductor on polymer matrix composite substrate
US8188590B2 (en) * 2006-03-30 2012-05-29 Stats Chippac Ltd. Integrated circuit package system with post-passivation interconnection and integration
JP2008016502A (ja) * 2006-07-03 2008-01-24 Sharp Corp Rf集積回路及びその製造方法
US7791199B2 (en) * 2006-11-22 2010-09-07 Tessera, Inc. Packaged semiconductor chips
US8569876B2 (en) 2006-11-22 2013-10-29 Tessera, Inc. Packaged semiconductor chips with array
US8410578B2 (en) * 2006-12-29 2013-04-02 Semiconductor Components Industries, Llc Method of manufacturing a semiconductor component and structure
US7602027B2 (en) * 2006-12-29 2009-10-13 Semiconductor Components Industries, L.L.C. Semiconductor component and method of manufacture
JP5584474B2 (ja) * 2007-03-05 2014-09-03 インヴェンサス・コーポレイション 貫通ビアによって前面接点に接続された後面接点を有するチップ
US8212155B1 (en) * 2007-06-26 2012-07-03 Wright Peter V Integrated passive device
US8193615B2 (en) 2007-07-31 2012-06-05 DigitalOptics Corporation Europe Limited Semiconductor packaging process using through silicon vias
JP5578797B2 (ja) 2009-03-13 2014-08-27 ルネサスエレクトロニクス株式会社 半導体装置
US8395233B2 (en) * 2009-06-24 2013-03-12 Harris Corporation Inductor structures for integrated circuit devices
TWI389260B (zh) * 2009-09-30 2013-03-11 Inotera Memories Inc 半導體記憶體之電容下電極的製備方法
US8179221B2 (en) * 2010-05-20 2012-05-15 Harris Corporation High Q vertical ribbon inductor on semiconducting substrate
US8860390B2 (en) 2010-06-04 2014-10-14 Apple Inc. Switching power supply opposite polarity inductor arrangement
US8796135B2 (en) 2010-07-23 2014-08-05 Tessera, Inc. Microelectronic elements with rear contacts connected with via first or via middle structures
US9640437B2 (en) 2010-07-23 2017-05-02 Tessera, Inc. Methods of forming semiconductor elements using micro-abrasive particle stream
US8791575B2 (en) 2010-07-23 2014-07-29 Tessera, Inc. Microelectronic elements having metallic pads overlying vias
US8304855B2 (en) 2010-08-04 2012-11-06 Harris Corporation Vertical capacitors formed on semiconducting substrates
US8847380B2 (en) 2010-09-17 2014-09-30 Tessera, Inc. Staged via formation from both sides of chip
US8610259B2 (en) 2010-09-17 2013-12-17 Tessera, Inc. Multi-function and shielded 3D interconnects
US8310328B2 (en) * 2010-10-07 2012-11-13 Touch Micro-System Technology Corp. Planar coil and method of making the same
KR101059490B1 (ko) * 2010-11-15 2011-08-25 테세라 리써치 엘엘씨 임베드된 트레이스에 의해 구성된 전도성 패드
US8736066B2 (en) 2010-12-02 2014-05-27 Tessera, Inc. Stacked microelectronic assemby with TSVS formed in stages and carrier above chip
US8637968B2 (en) 2010-12-02 2014-01-28 Tessera, Inc. Stacked microelectronic assembly having interposer connecting active chips
US8587126B2 (en) 2010-12-02 2013-11-19 Tessera, Inc. Stacked microelectronic assembly with TSVs formed in stages with plural active chips
US8610264B2 (en) 2010-12-08 2013-12-17 Tessera, Inc. Compliant interconnects in wafers
KR101218985B1 (ko) * 2011-05-31 2013-01-04 삼성전기주식회사 칩형 코일 부품
US9159711B2 (en) * 2011-07-29 2015-10-13 GlobalFoundries, Inc. Integrated circuit systems including vertical inductors
US20130146345A1 (en) * 2011-12-12 2013-06-13 Kazuki KAJIHARA Printed wiring board and method for manufacturing the same
US9001031B2 (en) 2012-07-30 2015-04-07 Qualcomm Mems Technologies, Inc. Complex passive design with special via implementation
US8859419B2 (en) 2013-02-01 2014-10-14 Globalfoundries Inc. Methods of forming copper-based nitride liner/passivation layers for conductive copper structures and the resulting device
US9263405B2 (en) * 2013-12-05 2016-02-16 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor device
US10032850B2 (en) * 2016-05-11 2018-07-24 Texas Instruments Incorporated Semiconductor die with back-side integrated inductive component
US10263064B2 (en) * 2017-06-30 2019-04-16 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor devices and methods of forming the same
US11495555B2 (en) * 2018-03-14 2022-11-08 Intel Corporation Magnetic bilayer structure for a cored or coreless semiconductor package
US11270959B2 (en) * 2018-03-23 2022-03-08 Intel Corporation Enabling magnetic films in inductors integrated into semiconductor packages
US11355459B2 (en) * 2018-05-17 2022-06-07 Intel Corpoation Embedding magnetic material, in a cored or coreless semiconductor package
US10748810B2 (en) 2018-05-29 2020-08-18 Taiwan Semiconductor Manufacturing Co., Ltd. Method of manufacturing an integrated inductor with protections caps on conductive lines
US10756161B2 (en) * 2018-06-27 2020-08-25 Intel Corporation Package-embedded thin-film capacitors, package-integral magnetic inductors, and methods of assembling same
US11049820B2 (en) * 2018-07-30 2021-06-29 Texas Instruments Incorporated Crack suppression structure for HV isolation component
CN113364337A (zh) * 2021-06-24 2021-09-07 洛阳理工学院 一种柔性单电极摩擦纳米发电机
CN114360842B (zh) * 2021-12-28 2022-11-22 中国人民解放军海军工程大学 一种应用于高功率微波源的轻型化周期性磁场线圈

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002005298A2 (en) 2000-07-12 2002-01-17 Koninklijke Philips Electronics N.V. Semiconductor inductor and methods for making the same

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5610433A (en) 1995-03-13 1997-03-11 National Semiconductor Corporation Multi-turn, multi-level IC inductor with crossovers
US5446311A (en) * 1994-09-16 1995-08-29 International Business Machines Corporation High-Q inductors in silicon technology without expensive metalization
JPH09162357A (ja) * 1995-12-08 1997-06-20 Hitachi Ltd 高周波半導体装置
JP2904086B2 (ja) * 1995-12-27 1999-06-14 日本電気株式会社 半導体装置およびその製造方法
US5793272A (en) 1996-08-23 1998-08-11 International Business Machines Corporation Integrated circuit toroidal inductor
FR2771843B1 (fr) 1997-11-28 2000-02-11 Sgs Thomson Microelectronics Transformateur en circuit integre
KR100279753B1 (ko) * 1997-12-03 2001-03-02 정선종 반도체 집적회로 제조공정을 이용한 인덕터 제조방법
US6008102A (en) 1998-04-09 1999-12-28 Motorola, Inc. Method of forming a three-dimensional integrated inductor
US6472285B1 (en) 1999-04-30 2002-10-29 Winbond Electronics Corporation Method for fabricating high-Q inductance device in monolithic technology
JP3578644B2 (ja) * 1998-10-12 2004-10-20 Necエレクトロニクス株式会社 半導体装置
US6083802A (en) * 1998-12-31 2000-07-04 Winbond Electronics Corporation Method for forming an inductor
US6037649A (en) 1999-04-01 2000-03-14 Winbond Electronics Corp. Three-dimension inductor structure in integrated circuit technology
JP4005762B2 (ja) * 1999-06-30 2007-11-14 株式会社東芝 集積回路装置及びその製造方法
JP4200631B2 (ja) * 2000-03-29 2008-12-24 沖電気工業株式会社 オンチップ・コイルとその製造方法
US6429504B1 (en) 2000-05-16 2002-08-06 Tyco Electronics Corporation Multilayer spiral inductor and integrated circuits incorporating the same
US6329234B1 (en) * 2000-07-24 2001-12-11 Taiwan Semiconductor Manufactuirng Company Copper process compatible CMOS metal-insulator-metal capacitor structure and its process flow
US6847066B2 (en) * 2000-08-11 2005-01-25 Oki Electric Industry Co., Ltd. Semiconductor device
US6342424B1 (en) 2001-04-06 2002-01-29 National Semiconductor Corp. High-Q spiral inductor structure and methods of manufacturing the structure
US6830984B2 (en) * 2002-02-15 2004-12-14 Lsi Logic Corporation Thick traces from multiple damascene layers
US6650220B2 (en) * 2002-04-23 2003-11-18 Chartered Semiconductor Manufacturing Ltd. Parallel spiral stacked inductor on semiconductor material
US7135951B1 (en) * 2003-07-15 2006-11-14 Altera Corporation Integrated circuit inductors
JP4948756B2 (ja) * 2003-09-30 2012-06-06 アギア システムズ インコーポレーテッド 集積回路内に形成されたインダクタ及びその製造方法
US7167072B2 (en) * 2004-03-25 2007-01-23 United Microelectronics Corp. Method of fabricating inductor and structure formed therefrom

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002005298A2 (en) 2000-07-12 2002-01-17 Koninklijke Philips Electronics N.V. Semiconductor inductor and methods for making the same

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US7541238B2 (en) 2009-06-02
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US7678639B2 (en) 2010-03-16
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