TWI353894B - A spreading device and a method for spreading liqu - Google Patents

A spreading device and a method for spreading liqu Download PDF

Info

Publication number
TWI353894B
TWI353894B TW097131431A TW97131431A TWI353894B TW I353894 B TWI353894 B TW I353894B TW 097131431 A TW097131431 A TW 097131431A TW 97131431 A TW97131431 A TW 97131431A TW I353894 B TWI353894 B TW I353894B
Authority
TW
Taiwan
Prior art keywords
substrate
nozzle
gas ejection
coating
gas
Prior art date
Application number
TW097131431A
Other languages
English (en)
Chinese (zh)
Other versions
TW200924856A (en
Inventor
Yoshiaki Masu
Akihiro Shimizu
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW200924856A publication Critical patent/TW200924856A/zh
Application granted granted Critical
Publication of TWI353894B publication Critical patent/TWI353894B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0283—Flat jet coaters, i.e. apparatus in which the liquid or other fluent material is projected from the outlet as a cohesive flat jet in direction of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
    • B05B1/044—Slits, i.e. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
TW097131431A 2007-08-30 2008-08-18 A spreading device and a method for spreading liqu TWI353894B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007224692A JP4942589B2 (ja) 2007-08-30 2007-08-30 塗布装置及び塗布方法

Publications (2)

Publication Number Publication Date
TW200924856A TW200924856A (en) 2009-06-16
TWI353894B true TWI353894B (en) 2011-12-11

Family

ID=40555317

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097131431A TWI353894B (en) 2007-08-30 2008-08-18 A spreading device and a method for spreading liqu

Country Status (3)

Country Link
JP (1) JP4942589B2 (ja)
KR (1) KR101028685B1 (ja)
TW (1) TWI353894B (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5346643B2 (ja) * 2009-03-27 2013-11-20 大日本スクリーン製造株式会社 基板塗布装置および基板塗布方法
JP5081261B2 (ja) * 2010-02-24 2012-11-28 東京エレクトロン株式会社 塗布装置
JP5663297B2 (ja) * 2010-12-27 2015-02-04 東京応化工業株式会社 塗布装置
JP5486030B2 (ja) * 2012-02-15 2014-05-07 東京エレクトロン株式会社 塗布装置
KR102096947B1 (ko) * 2012-12-28 2020-05-27 세메스 주식회사 기판 처리 장치
JP6737649B2 (ja) * 2016-07-04 2020-08-12 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および塗布方法
KR101839345B1 (ko) * 2016-10-27 2018-03-16 세메스 주식회사 기판 플로팅 장치 및 기판 플로팅 방법
JP6846943B2 (ja) * 2017-02-10 2021-03-24 東京エレクトロン株式会社 塗布装置、および塗布方法
KR102134270B1 (ko) * 2018-04-02 2020-07-15 세메스 주식회사 기판 부상용 스테이지, 이를 포함하는 기판 처리 장치, 및 기판 처리 방법
JP6722723B2 (ja) * 2018-07-03 2020-07-15 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4049751B2 (ja) * 2004-02-05 2008-02-20 東京エレクトロン株式会社 塗布膜形成装置
JP4040025B2 (ja) * 2004-02-20 2008-01-30 東京エレクトロン株式会社 塗布膜形成装置
JP4443353B2 (ja) * 2004-08-31 2010-03-31 東京応化工業株式会社 基板載置ステージ及び基板の吸着・剥離方法
JP4413789B2 (ja) * 2005-01-24 2010-02-10 東京エレクトロン株式会社 ステージ装置および塗布処理装置
JP4554397B2 (ja) * 2005-02-23 2010-09-29 東京エレクトロン株式会社 ステージ装置および塗布処理装置
JP4429943B2 (ja) * 2005-03-17 2010-03-10 東京エレクトロン株式会社 基板処理装置及び基板処理方法
JP4553376B2 (ja) * 2005-07-19 2010-09-29 東京エレクトロン株式会社 浮上式基板搬送処理装置及び浮上式基板搬送処理方法

Also Published As

Publication number Publication date
JP2009059823A (ja) 2009-03-19
TW200924856A (en) 2009-06-16
KR101028685B1 (ko) 2011-04-12
KR20090023243A (ko) 2009-03-04
JP4942589B2 (ja) 2012-05-30

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