TWI345133B - - Google Patents

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Publication number
TWI345133B
TWI345133B TW094105291A TW94105291A TWI345133B TW I345133 B TWI345133 B TW I345133B TW 094105291 A TW094105291 A TW 094105291A TW 94105291 A TW94105291 A TW 94105291A TW I345133 B TWI345133 B TW I345133B
Authority
TW
Taiwan
Prior art keywords
light
ultraviolet
lamp
mercury lamp
pressure mercury
Prior art date
Application number
TW094105291A
Other languages
English (en)
Chinese (zh)
Other versions
TW200600966A (en
Inventor
Akihiko Sugitani
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200600966A publication Critical patent/TW200600966A/zh
Application granted granted Critical
Publication of TWI345133B publication Critical patent/TWI345133B/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/12Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/18Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
    • H01J61/20Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J11/00Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
    • B41J11/0015Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
    • B41J11/002Curing or drying the ink on the copy materials, e.g. by heating or irradiating
    • B41J11/0021Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation
    • B41J11/00214Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation using UV radiation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21VFUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00Reflectors for light sources
    • F21V7/04Optical design
    • F21V7/09Optical design with a combination of different curvatures
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2002Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2004Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058Mask illumination systems
    • G03F7/7015Details of optical elements
    • G03F7/70175Lamphouse reflector arrangements or collector mirrors, i.e. collecting light from solid angle upstream of the light source
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/30Vessels; Containers
    • H01J61/302Vessels; Containers characterised by the material of the vessel
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/84Lamps with discharge constricted by high pressure
    • H01J61/86Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/84Lamps with discharge constricted by high pressure
    • H01J61/88Lamps with discharge constricted by high pressure with discharge additionally constricted by envelope

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
TW094105291A 2004-06-23 2005-02-22 Ultraviolet-ray irradiation device TW200600966A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004184853A JP4329632B2 (ja) 2004-06-23 2004-06-23 紫外光照射装置

Publications (2)

Publication Number Publication Date
TW200600966A TW200600966A (en) 2006-01-01
TWI345133B true TWI345133B (ko) 2011-07-11

Family

ID=35779502

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094105291A TW200600966A (en) 2004-06-23 2005-02-22 Ultraviolet-ray irradiation device

Country Status (4)

Country Link
JP (1) JP4329632B2 (ko)
KR (2) KR100885102B1 (ko)
CN (1) CN1725432B (ko)
TW (1) TW200600966A (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007012644A1 (de) 2007-03-16 2008-09-18 Bayer Healthcare Ag Stabilisierung von Vitamin B12
KR100859987B1 (ko) * 2007-03-23 2008-09-25 주식회사 나래나노텍 가변 초점길이를 갖는 자외선 조사장치 및 이를 구비한 패턴 전극 본딩장치
JP2009045742A (ja) * 2007-08-13 2009-03-05 Ushio Inc プリンタ
JP2010040340A (ja) * 2008-08-05 2010-02-18 Hoya Candeo Optronics株式会社 光照射装置
JP5493473B2 (ja) 2009-05-29 2014-05-14 ソニー株式会社 熱転写シートおよびインクリボン
JP5376409B2 (ja) * 2010-01-07 2013-12-25 ウシオ電機株式会社 光源装置および光照射装置
ITBO20120203A1 (it) * 2012-04-16 2013-10-17 Cefla Coop Metodo e apparecchiatura per la essiccazione di vernici applicate su manufatti a prevalente estensione piana
CN104216236B (zh) * 2014-08-22 2016-08-17 深圳市大川光电设备有限公司 适合影像转移曝光机的菲林与工件密着方法
WO2016068233A1 (ja) * 2014-10-31 2016-05-06 ウシオ電機株式会社 光硬化装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0322518A (ja) * 1989-06-20 1991-01-30 Nikon Corp 照明光学装置
CN1078358C (zh) * 1995-03-08 2002-01-23 松下电器产业株式会社 照明装置、包含它的曝光装置及曝光方法
JP3204100B2 (ja) * 1995-07-11 2001-09-04 ウシオ電機株式会社 膜質改質方法および膜質改質用光源
JP2980882B2 (ja) * 1998-04-08 1999-11-22 ウシオ電機株式会社 高圧水銀ランプ
US6181064B1 (en) * 1998-05-12 2001-01-30 Ushiodenki Kabushiki Kaisha High pressure discharge lamp
JP2002352772A (ja) 2001-05-24 2002-12-06 Phoenix Denki Kk 超高圧放電灯
JP2004031153A (ja) * 2002-06-26 2004-01-29 Matsushita Electric Ind Co Ltd 高圧水銀ランプおよびランプユニット
JP2004119025A (ja) * 2002-09-24 2004-04-15 Ushio Inc 交流点灯型超高圧水銀ランプ

Also Published As

Publication number Publication date
KR100961325B1 (ko) 2010-06-04
CN1725432B (zh) 2011-06-29
JP2006012486A (ja) 2006-01-12
TW200600966A (en) 2006-01-01
CN1725432A (zh) 2006-01-25
JP4329632B2 (ja) 2009-09-09
KR20090004826A (ko) 2009-01-12
KR100885102B1 (ko) 2009-02-20
KR20060044491A (ko) 2006-05-16

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