KR100885102B1 - 자외광 조사 장치 - Google Patents
자외광 조사 장치 Download PDFInfo
- Publication number
- KR100885102B1 KR100885102B1 KR1020050023310A KR20050023310A KR100885102B1 KR 100885102 B1 KR100885102 B1 KR 100885102B1 KR 1020050023310 A KR1020050023310 A KR 1020050023310A KR 20050023310 A KR20050023310 A KR 20050023310A KR 100885102 B1 KR100885102 B1 KR 100885102B1
- Authority
- KR
- South Korea
- Prior art keywords
- light
- ultraviolet
- ultraviolet light
- less
- pressure mercury
- Prior art date
Links
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
- H01J61/18—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
- H01J61/20—Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
- B41J11/002—Curing or drying the ink on the copy materials, e.g. by heating or irradiating
- B41J11/0021—Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation
- B41J11/00214—Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation using UV radiation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V7/00—Reflectors for light sources
- F21V7/04—Optical design
- F21V7/09—Optical design with a combination of different curvatures
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/7015—Details of optical elements
- G03F7/70175—Lamphouse reflector arrangements or collector mirrors, i.e. collecting light from solid angle upstream of the light source
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/302—Vessels; Containers characterised by the material of the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/86—Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/84—Lamps with discharge constricted by high pressure
- H01J61/88—Lamps with discharge constricted by high pressure with discharge additionally constricted by envelope
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Abstract
Description
Claims (3)
- 석영 글래스로 이루어지는 방전 용기에 한 쌍의 텅스텐 전극이 대향 배치되어 있고, 이 방전 용기에 0.13㎎/㎣초과 0.25㎎/㎣이하의 수은과, 희가스와, 2 × 10-4∼7 × 10-3μ㏖/㎣ 의 할로겐을 봉입하며, 전극간 거리가 0.5∼1.5㎜이고, 300∼400㎚의 자외광을 효율적으로 조사하는 고압 수은 램프와,상기 고압 수은 램프로부터의 광을 집광하는 집광 수단을 갖고,상기 집광 수단에 의해 Ф5㎜ 이하의 영역에 300∼400㎚의 자외광을 집광하여 피조사물에 조사하는 것을 특징으로 하는 자외광 조사 장치.
- 삭제
- 삭제
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004184853A JP4329632B2 (ja) | 2004-06-23 | 2004-06-23 | 紫外光照射装置 |
JPJP-P-2004-00184853 | 2004-06-23 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020080127111A Division KR100961325B1 (ko) | 2004-06-23 | 2008-12-15 | 자외광 조사 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060044491A KR20060044491A (ko) | 2006-05-16 |
KR100885102B1 true KR100885102B1 (ko) | 2009-02-20 |
Family
ID=35779502
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020050023310A KR100885102B1 (ko) | 2004-06-23 | 2005-03-21 | 자외광 조사 장치 |
KR1020080127111A KR100961325B1 (ko) | 2004-06-23 | 2008-12-15 | 자외광 조사 장치 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020080127111A KR100961325B1 (ko) | 2004-06-23 | 2008-12-15 | 자외광 조사 장치 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4329632B2 (ko) |
KR (2) | KR100885102B1 (ko) |
CN (1) | CN1725432B (ko) |
TW (1) | TW200600966A (ko) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007012644A1 (de) | 2007-03-16 | 2008-09-18 | Bayer Healthcare Ag | Stabilisierung von Vitamin B12 |
KR100859987B1 (ko) * | 2007-03-23 | 2008-09-25 | 주식회사 나래나노텍 | 가변 초점길이를 갖는 자외선 조사장치 및 이를 구비한 패턴 전극 본딩장치 |
JP2009045742A (ja) * | 2007-08-13 | 2009-03-05 | Ushio Inc | プリンタ |
JP2010040340A (ja) * | 2008-08-05 | 2010-02-18 | Hoya Candeo Optronics株式会社 | 光照射装置 |
JP5493473B2 (ja) | 2009-05-29 | 2014-05-14 | ソニー株式会社 | 熱転写シートおよびインクリボン |
JP5376409B2 (ja) * | 2010-01-07 | 2013-12-25 | ウシオ電機株式会社 | 光源装置および光照射装置 |
ITBO20120203A1 (it) * | 2012-04-16 | 2013-10-17 | Cefla Coop | Metodo e apparecchiatura per la essiccazione di vernici applicate su manufatti a prevalente estensione piana |
CN104216236B (zh) * | 2014-08-22 | 2016-08-17 | 深圳市大川光电设备有限公司 | 适合影像转移曝光机的菲林与工件密着方法 |
WO2016068233A1 (ja) * | 2014-10-31 | 2016-05-06 | ウシオ電機株式会社 | 光硬化装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0322518A (ja) * | 1989-06-20 | 1991-01-30 | Nikon Corp | 照明光学装置 |
JPH0980435A (ja) * | 1995-07-11 | 1997-03-28 | Ushio Inc | 膜質改質方法および膜質改質用光源 |
KR0185798B1 (en) * | 1995-03-08 | 1999-04-01 | Matsushita Electric Ind Co Ltd | Illumination device and exposure method using the same |
KR19990083058A (ko) * | 1998-04-08 | 1999-11-25 | 다나카 아키히로 | 고압 수은 램프 |
JP2002352772A (ja) | 2001-05-24 | 2002-12-06 | Phoenix Denki Kk | 超高圧放電灯 |
JP2004119025A (ja) * | 2002-09-24 | 2004-04-15 | Ushio Inc | 交流点灯型超高圧水銀ランプ |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69926445T2 (de) * | 1998-05-12 | 2006-03-30 | Ushiodenki K.K. | Hochdruck-Entladungslampe |
JP2004031153A (ja) * | 2002-06-26 | 2004-01-29 | Matsushita Electric Ind Co Ltd | 高圧水銀ランプおよびランプユニット |
-
2004
- 2004-06-23 JP JP2004184853A patent/JP4329632B2/ja active Active
-
2005
- 2005-02-22 TW TW094105291A patent/TW200600966A/zh unknown
- 2005-03-21 KR KR1020050023310A patent/KR100885102B1/ko active IP Right Grant
- 2005-06-23 CN CN2005100786212A patent/CN1725432B/zh active Active
-
2008
- 2008-12-15 KR KR1020080127111A patent/KR100961325B1/ko active IP Right Grant
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0322518A (ja) * | 1989-06-20 | 1991-01-30 | Nikon Corp | 照明光学装置 |
KR0185798B1 (en) * | 1995-03-08 | 1999-04-01 | Matsushita Electric Ind Co Ltd | Illumination device and exposure method using the same |
JPH0980435A (ja) * | 1995-07-11 | 1997-03-28 | Ushio Inc | 膜質改質方法および膜質改質用光源 |
KR19990083058A (ko) * | 1998-04-08 | 1999-11-25 | 다나카 아키히로 | 고압 수은 램프 |
JP2002352772A (ja) | 2001-05-24 | 2002-12-06 | Phoenix Denki Kk | 超高圧放電灯 |
JP2004119025A (ja) * | 2002-09-24 | 2004-04-15 | Ushio Inc | 交流点灯型超高圧水銀ランプ |
Also Published As
Publication number | Publication date |
---|---|
KR100961325B1 (ko) | 2010-06-04 |
TWI345133B (ko) | 2011-07-11 |
CN1725432B (zh) | 2011-06-29 |
CN1725432A (zh) | 2006-01-25 |
JP2006012486A (ja) | 2006-01-12 |
KR20090004826A (ko) | 2009-01-12 |
KR20060044491A (ko) | 2006-05-16 |
JP4329632B2 (ja) | 2009-09-09 |
TW200600966A (en) | 2006-01-01 |
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