TW200600966A - Ultraviolet-ray irradiation device - Google Patents

Ultraviolet-ray irradiation device

Info

Publication number
TW200600966A
TW200600966A TW094105291A TW94105291A TW200600966A TW 200600966 A TW200600966 A TW 200600966A TW 094105291 A TW094105291 A TW 094105291A TW 94105291 A TW94105291 A TW 94105291A TW 200600966 A TW200600966 A TW 200600966A
Authority
TW
Taiwan
Prior art keywords
ultraviolet
ray
irradiation device
condensing
ray irradiation
Prior art date
Application number
TW094105291A
Other languages
Chinese (zh)
Other versions
TWI345133B (en
Inventor
Akihiko Sugitani
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200600966A publication Critical patent/TW200600966A/en
Application granted granted Critical
Publication of TWI345133B publication Critical patent/TWI345133B/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/12Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/18Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent
    • H01J61/20Selection of substances for gas fillings; Specified operating pressure or temperature having a metallic vapour as the principal constituent mercury vapour
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J11/00Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
    • B41J11/0015Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
    • B41J11/002Curing or drying the ink on the copy materials, e.g. by heating or irradiating
    • B41J11/0021Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation
    • B41J11/00214Curing or drying the ink on the copy materials, e.g. by heating or irradiating using irradiation using UV radiation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21VFUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00Reflectors for light sources
    • F21V7/04Optical design
    • F21V7/09Optical design with a combination of different curvatures
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2002Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2004Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058Mask illumination systems
    • G03F7/7015Details of optical elements
    • G03F7/70175Lamphouse reflector arrangements or collector mirrors, i.e. collecting light from solid angle upstream of the light source
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/30Vessels; Containers
    • H01J61/302Vessels; Containers characterised by the material of the vessel
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/84Lamps with discharge constricted by high pressure
    • H01J61/86Lamps with discharge constricted by high pressure with discharge additionally constricted by close spacing of electrodes, e.g. for optical projection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/84Lamps with discharge constricted by high pressure
    • H01J61/88Lamps with discharge constricted by high pressure with discharge additionally constricted by envelope

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)

Abstract

The objective of this invention is to provide an ultraviolet-ray irradiation device effectively irradiating an ultraviolet-ray of 300 to 400 nm on a target by efficiently condensing the ultraviolet-ray of 300 to 400 nm suitable for ultraviolet curing on a light incident opening of a micro-fiber of 5 mm φ or less without using a cut filter for cutting an ultraviolet-ray with a harmful wave length of 300 nm or shorter. To achieve the objective, the solution of this invention is to make a ultraviolet-ray irradiation device, characterized in that a pair of tungsten electrodes distant from each other by 0.5 to 1.8 mm are arranged in a discharge container made of quartz glass, and 0.08 to 0.30 mg/mm<SP>3</SP> of mercury, rare gas, and halogen are sealed in the discharge container. The ultraviolet-ray irradiation device is composed of a high pressure mercury lamp effectively irradiating ultraviolet-ray of 300 to 400 nm, and a light condensing means condensing light emitted from the high pressure mercury lamp, and irradiates the ultraviolet-ray of 300 to 400 nm on the object to be irradiated by condensing the ultraviolet-ray on an area of 5 mm φ or less by the light condensing means.
TW094105291A 2004-06-23 2005-02-22 Ultraviolet-ray irradiation device TW200600966A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004184853A JP4329632B2 (en) 2004-06-23 2004-06-23 Ultraviolet light irradiation device

Publications (2)

Publication Number Publication Date
TW200600966A true TW200600966A (en) 2006-01-01
TWI345133B TWI345133B (en) 2011-07-11

Family

ID=35779502

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094105291A TW200600966A (en) 2004-06-23 2005-02-22 Ultraviolet-ray irradiation device

Country Status (4)

Country Link
JP (1) JP4329632B2 (en)
KR (2) KR100885102B1 (en)
CN (1) CN1725432B (en)
TW (1) TW200600966A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007012644A1 (en) 2007-03-16 2008-09-18 Bayer Healthcare Ag Stabilization of vitamin B12
KR100859987B1 (en) * 2007-03-23 2008-09-25 주식회사 나래나노텍 A device for emitting ultra-violet rays having a variable focus length and a pattern electrode bonding device having the same
JP2009045742A (en) * 2007-08-13 2009-03-05 Ushio Inc Printer
JP2010040340A (en) * 2008-08-05 2010-02-18 Hoya Candeo Optronics株式会社 Light irradiation device
JP5493473B2 (en) 2009-05-29 2014-05-14 ソニー株式会社 Thermal transfer sheet and ink ribbon
JP5376409B2 (en) * 2010-01-07 2013-12-25 ウシオ電機株式会社 Light source device and light irradiation device
ITBO20120203A1 (en) * 2012-04-16 2013-10-17 Cefla Coop METHOD AND APPARATUS FOR THE DRYING OF PAINTS APPLIED TO MANUFACTURERS WITH PREVALENTLY FLAT EXTENSION
CN104216236B (en) * 2014-08-22 2016-08-17 深圳市大川光电设备有限公司 It is suitable for the film and the workpiece adherence method of image transfer exposure machine
WO2016068233A1 (en) * 2014-10-31 2016-05-06 ウシオ電機株式会社 Photocuring device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0322518A (en) * 1989-06-20 1991-01-30 Nikon Corp Illuminating optical device
CN1078358C (en) * 1995-03-08 2002-01-23 松下电器产业株式会社 Illuminator and exposure method using same
JP3204100B2 (en) * 1995-07-11 2001-09-04 ウシオ電機株式会社 Film quality modification method and light source for film quality modification
JP2980882B2 (en) * 1998-04-08 1999-11-22 ウシオ電機株式会社 High pressure mercury lamp
DE69926445T2 (en) * 1998-05-12 2006-03-30 Ushiodenki K.K. High-pressure discharge lamp
JP2002352772A (en) 2001-05-24 2002-12-06 Phoenix Denki Kk High-pressure discharge lamp
JP2004031153A (en) * 2002-06-26 2004-01-29 Matsushita Electric Ind Co Ltd High-pressure mercury lamp and lamp unit
JP2004119025A (en) * 2002-09-24 2004-04-15 Ushio Inc Ac lighting extra high-pressure mercury lamp

Also Published As

Publication number Publication date
JP2006012486A (en) 2006-01-12
CN1725432A (en) 2006-01-25
KR20090004826A (en) 2009-01-12
CN1725432B (en) 2011-06-29
KR100885102B1 (en) 2009-02-20
KR20060044491A (en) 2006-05-16
JP4329632B2 (en) 2009-09-09
KR100961325B1 (en) 2010-06-04
TWI345133B (en) 2011-07-11

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