TW200717576A - Excimer lamp and ultraviolet rays illumination apparatus having the same - Google Patents

Excimer lamp and ultraviolet rays illumination apparatus having the same

Info

Publication number
TW200717576A
TW200717576A TW095129937A TW95129937A TW200717576A TW 200717576 A TW200717576 A TW 200717576A TW 095129937 A TW095129937 A TW 095129937A TW 95129937 A TW95129937 A TW 95129937A TW 200717576 A TW200717576 A TW 200717576A
Authority
TW
Taiwan
Prior art keywords
excimer lamp
discharger
same
ultraviolet rays
illumination apparatus
Prior art date
Application number
TW095129937A
Other languages
Chinese (zh)
Other versions
TWI369713B (en
Inventor
Kenichi Hirose
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200717576A publication Critical patent/TW200717576A/en
Application granted granted Critical
Publication of TWI369713B publication Critical patent/TWI369713B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/50—Auxiliary parts or solid material within the envelope for reducing risk of explosion upon breakage of the envelope, e.g. for use in mines
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/067—Main electrodes for low-pressure discharge lamps
    • H01J61/0672—Main electrodes for low-pressure discharge lamps characterised by the construction of the electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/067—Main electrodes for low-pressure discharge lamps
    • H01J61/0675—Main electrodes for low-pressure discharge lamps characterised by the material of the electrode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/302—Vessels; Containers characterised by the material of the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel

Abstract

The invention is to offer an excimer lamp not shorting the lifetime of excimer, and avoiding the glass fragment from the discharger which is damaged and broken by ultraviolet (UV) rays spread to the lamp or processing room to avoid pollution of excimer lamp in advance. The method of solving the problem is to offer an excimer lamp with a discharger composed of quartz glass, seal the discharge gas in the discharger, and an excimer lamp with at least one dielectric medium to deploy a pair of electrodes. Form a part with virtual temperature higher than that of the other part of the discharger.
TW095129937A 2005-09-28 2006-08-15 Excimer lamp and ultraviolet rays illumination apparatus having the same TW200717576A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005282004A JP4501830B2 (en) 2005-09-28 2005-09-28 Excimer lamp and ultraviolet irradiation device

Publications (2)

Publication Number Publication Date
TW200717576A true TW200717576A (en) 2007-05-01
TWI369713B TWI369713B (en) 2012-08-01

Family

ID=37980899

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095129937A TW200717576A (en) 2005-09-28 2006-08-15 Excimer lamp and ultraviolet rays illumination apparatus having the same

Country Status (3)

Country Link
JP (1) JP4501830B2 (en)
KR (1) KR100961316B1 (en)
TW (1) TW200717576A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI402884B (en) * 2008-04-10 2013-07-21 Ushio Electric Inc An excimer lamp and a lamp unit with its lamp unit
TWI417933B (en) * 2007-09-20 2013-12-01 Ushio Electric Inc Method for manufacturing excimer lamp and excimer lamp

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4998832B2 (en) 2008-03-19 2012-08-15 ウシオ電機株式会社 Excimer lamp
KR101424572B1 (en) * 2013-05-22 2014-08-01 주식회사 원익큐엔씨 Excimer lamp with separable reflector and electrode
KR102116867B1 (en) 2018-05-08 2020-05-29 주식회사 원익큐엔씨 Surface treatment device for implant

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3358883B2 (en) * 1994-07-19 2002-12-24 信越石英株式会社 Ultraviolet absorbing visible light transmitting silica glass for high pressure discharge lamp and method for producing the same
JP3666407B2 (en) 2001-04-19 2005-06-29 ウシオ電機株式会社 Dielectric barrier discharge lamp
JP3582500B2 (en) * 2001-05-23 2004-10-27 ウシオ電機株式会社 Ultra high pressure mercury lamp
JP4294533B2 (en) 2003-12-19 2009-07-15 株式会社フジクラ Excimer lamp glass, excimer lamp discharge vessel and excimer lamp
JP2005193088A (en) 2003-12-26 2005-07-21 Japan Storage Battery Co Ltd Excimer lamp irradiation apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI417933B (en) * 2007-09-20 2013-12-01 Ushio Electric Inc Method for manufacturing excimer lamp and excimer lamp
TWI402884B (en) * 2008-04-10 2013-07-21 Ushio Electric Inc An excimer lamp and a lamp unit with its lamp unit

Also Published As

Publication number Publication date
JP4501830B2 (en) 2010-07-14
KR20070035957A (en) 2007-04-02
TWI369713B (en) 2012-08-01
KR100961316B1 (en) 2010-06-04
JP2007095449A (en) 2007-04-12

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