TWI303840B - - Google Patents
Download PDFInfo
- Publication number
- TWI303840B TWI303840B TW095101465A TW95101465A TWI303840B TW I303840 B TWI303840 B TW I303840B TW 095101465 A TW095101465 A TW 095101465A TW 95101465 A TW95101465 A TW 95101465A TW I303840 B TWI303840 B TW I303840B
- Authority
- TW
- Taiwan
- Prior art keywords
- ultraviolet light
- lighting
- light source
- lamp
- ultraviolet
- Prior art date
Links
- 230000004888 barrier function Effects 0.000 claims description 9
- 238000001514 detection method Methods 0.000 description 19
- 239000007789 gas Substances 0.000 description 14
- 238000006243 chemical reaction Methods 0.000 description 10
- 238000007789 sealing Methods 0.000 description 9
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 8
- 229910001507 metal halide Inorganic materials 0.000 description 8
- 150000005309 metal halides Chemical class 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 230000005856 abnormality Effects 0.000 description 6
- 238000001816 cooling Methods 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 150000004820 halides Chemical class 0.000 description 4
- 238000005286 illumination Methods 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 150000002894 organic compounds Chemical class 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000004575 stone Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- -1 X eCl Chemical class 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 235000011089 carbon dioxide Nutrition 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 230000002070 germicidal effect Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- LMYKTNLGBUMKNF-UHFFFAOYSA-N ruthenium(1+) Chemical compound [Ru+] LMYKTNLGBUMKNF-UHFFFAOYSA-N 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/56—One or more circuit elements structurally associated with the lamp
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Circuit Arrangements For Discharge Lamps (AREA)
- Circuit Arrangement For Electric Light Sources In General (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005008097A JP4580246B2 (ja) | 2005-01-14 | 2005-01-14 | 紫外光源点灯装置および紫外線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200641959A TW200641959A (en) | 2006-12-01 |
| TWI303840B true TWI303840B (enExample) | 2008-12-01 |
Family
ID=36802264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095101465A TW200641959A (en) | 2005-01-14 | 2006-01-13 | Ultraviolet light source lighting device and ultraviolet irradiation device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4580246B2 (enExample) |
| KR (1) | KR100730451B1 (enExample) |
| CN (1) | CN1805639B (enExample) |
| TW (1) | TW200641959A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5010455B2 (ja) * | 2007-12-25 | 2012-08-29 | ハリソン東芝ライティング株式会社 | 誘電体バリア放電ランプ点灯装置 |
| JP5186271B2 (ja) * | 2008-04-24 | 2013-04-17 | パナソニック株式会社 | トンネル用照明システム |
| JP2010033826A (ja) * | 2008-07-28 | 2010-02-12 | Harison Toshiba Lighting Corp | 誘電体バリア放電ランプ点灯装置 |
| TWI749546B (zh) | 2019-05-14 | 2021-12-11 | 美商希瑪有限責任公司 | 用於調變光源波長的裝置及方法 |
| US12374853B2 (en) | 2019-05-22 | 2025-07-29 | Cymer, Llc | Control system for a plurality of deep ultraviolet optical oscillators |
| CN112540034B (zh) * | 2020-11-27 | 2025-04-01 | 同济大学 | 一种水下膜渗透传感器的防生物附着装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH076886A (ja) * | 1993-06-16 | 1995-01-10 | Hitachi Lighting Ltd | インバータ形放電灯点灯装置 |
| JP3683461B2 (ja) * | 2000-02-16 | 2005-08-17 | Hoya Candeo Optronics株式会社 | キセノンエキシマランプの光強度測定装置 |
| JP2003197152A (ja) * | 2001-12-25 | 2003-07-11 | Harison Toshiba Lighting Corp | 誘電体バリア放電ランプ、誘電体バリア放電ランプ部品、放電ランプ点灯装置及び光照射装置 |
| JP4093065B2 (ja) * | 2003-01-17 | 2008-05-28 | ウシオ電機株式会社 | エキシマランプ発光装置 |
| JP4054699B2 (ja) * | 2003-03-13 | 2008-02-27 | ハリソン東芝ライティング株式会社 | 誘電体バリヤ放電ランプ照明装置および紫外線照射装置 |
-
2005
- 2005-01-14 JP JP2005008097A patent/JP4580246B2/ja not_active Expired - Fee Related
-
2006
- 2006-01-13 KR KR1020060003955A patent/KR100730451B1/ko not_active Expired - Fee Related
- 2006-01-13 TW TW095101465A patent/TW200641959A/zh not_active IP Right Cessation
- 2006-01-16 CN CN200610002108XA patent/CN1805639B/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR20060083163A (ko) | 2006-07-20 |
| CN1805639B (zh) | 2011-08-31 |
| TW200641959A (en) | 2006-12-01 |
| KR100730451B1 (ko) | 2007-06-19 |
| JP4580246B2 (ja) | 2010-11-10 |
| CN1805639A (zh) | 2006-07-19 |
| JP2006196370A (ja) | 2006-07-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9159545B2 (en) | Excimer lamp | |
| CN106252194A (zh) | 准分子灯 | |
| HU182651B (en) | Method for operating miniature high-pressure metal-vapour discharge lamp and miniature high-pressure lamp arrangement | |
| JP2002373625A (ja) | 放電灯および紫外線照射装置並びにその運用方法 | |
| TWI303840B (enExample) | ||
| CN103972040B (zh) | 准分子灯 | |
| JP2005216647A (ja) | 高放射輝度閃光放電ランプ | |
| TWI290332B (en) | Dielectric barrier discharge lamp and ultraviolet lighting device | |
| US20050236997A1 (en) | Dielectric barrier discharge lamp having outer electrodes and illumination system having this lamp | |
| JP3637697B2 (ja) | 紫外線ランプおよびその点灯装置 | |
| Golovitskiı̆ | Low-pressure inductive rf discharge in a rare gas-halogen mixture for economical mercury-free luminescence light sources. | |
| KR100840798B1 (ko) | 쇼트 아크형 방전램프 점등장치, 자외선 조사장치 및자외선 조사방법 | |
| JPH11283579A (ja) | 内外電極形蛍光ランプおよび照明装置 | |
| CN100423177C (zh) | 介质阻挡放电灯以及紫外线照射装置 | |
| JP4260493B2 (ja) | 高圧放電ランプおよび照明装置 | |
| JP2024104841A (ja) | 放電ランプ用点灯装置、および照射装置 | |
| CN102292793A (zh) | 金属卤化物灯 | |
| JPH11283578A (ja) | 放電ランプおよび放電ランプ装置 | |
| JPH1145684A (ja) | 放電ランプおよび処理装置 | |
| JP2002358924A5 (enExample) | ||
| JP2008077909A (ja) | 誘電体バリア放電ランプ装置および紫外線照射装置 | |
| CN1993007B (zh) | 短弧形放电灯点灯装置、紫外线照射装置以及紫外线照射方法 | |
| JP2006528409A (ja) | 高圧放電ランプのための作動方法 | |
| JP3111743B2 (ja) | 蛍光ランプ及びその製造方法 | |
| JPH10289791A (ja) | 外面電極希ガス蛍光ランプの点灯回路および照明装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |