JP4580246B2 - 紫外光源点灯装置および紫外線照射装置 - Google Patents

紫外光源点灯装置および紫外線照射装置 Download PDF

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Publication number
JP4580246B2
JP4580246B2 JP2005008097A JP2005008097A JP4580246B2 JP 4580246 B2 JP4580246 B2 JP 4580246B2 JP 2005008097 A JP2005008097 A JP 2005008097A JP 2005008097 A JP2005008097 A JP 2005008097A JP 4580246 B2 JP4580246 B2 JP 4580246B2
Authority
JP
Japan
Prior art keywords
ultraviolet light
light source
lamp
ultraviolet
lighting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005008097A
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English (en)
Japanese (ja)
Other versions
JP2006196370A (ja
Inventor
一郎 横関
和彦 吉川
崇行 小笠原
俊也 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Lighting and Technology Corp
Original Assignee
Harison Toshiba Lighting Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harison Toshiba Lighting Corp filed Critical Harison Toshiba Lighting Corp
Priority to JP2005008097A priority Critical patent/JP4580246B2/ja
Priority to TW095101465A priority patent/TW200641959A/zh
Priority to KR1020060003955A priority patent/KR100730451B1/ko
Priority to CN200610002108XA priority patent/CN1805639B/zh
Publication of JP2006196370A publication Critical patent/JP2006196370A/ja
Application granted granted Critical
Publication of JP4580246B2 publication Critical patent/JP4580246B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/56—One or more circuit elements structurally associated with the lamp
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Circuit Arrangements For Discharge Lamps (AREA)
  • Circuit Arrangement For Electric Light Sources In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
JP2005008097A 2005-01-14 2005-01-14 紫外光源点灯装置および紫外線照射装置 Expired - Fee Related JP4580246B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005008097A JP4580246B2 (ja) 2005-01-14 2005-01-14 紫外光源点灯装置および紫外線照射装置
TW095101465A TW200641959A (en) 2005-01-14 2006-01-13 Ultraviolet light source lighting device and ultraviolet irradiation device
KR1020060003955A KR100730451B1 (ko) 2005-01-14 2006-01-13 자외광원 점등장치 및 자외선 조사장치
CN200610002108XA CN1805639B (zh) 2005-01-14 2006-01-16 紫外光源点亮装置以及紫外线照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005008097A JP4580246B2 (ja) 2005-01-14 2005-01-14 紫外光源点灯装置および紫外線照射装置

Publications (2)

Publication Number Publication Date
JP2006196370A JP2006196370A (ja) 2006-07-27
JP4580246B2 true JP4580246B2 (ja) 2010-11-10

Family

ID=36802264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005008097A Expired - Fee Related JP4580246B2 (ja) 2005-01-14 2005-01-14 紫外光源点灯装置および紫外線照射装置

Country Status (4)

Country Link
JP (1) JP4580246B2 (enExample)
KR (1) KR100730451B1 (enExample)
CN (1) CN1805639B (enExample)
TW (1) TW200641959A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12374853B2 (en) 2019-05-22 2025-07-29 Cymer, Llc Control system for a plurality of deep ultraviolet optical oscillators
US12438334B2 (en) 2019-05-14 2025-10-07 Cymer, Llc Apparatus for and method of modulating a light source wavelength

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5010455B2 (ja) * 2007-12-25 2012-08-29 ハリソン東芝ライティング株式会社 誘電体バリア放電ランプ点灯装置
JP5186271B2 (ja) * 2008-04-24 2013-04-17 パナソニック株式会社 トンネル用照明システム
JP2010033826A (ja) * 2008-07-28 2010-02-12 Harison Toshiba Lighting Corp 誘電体バリア放電ランプ点灯装置
CN112540034B (zh) * 2020-11-27 2025-04-01 同济大学 一种水下膜渗透传感器的防生物附着装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH076886A (ja) * 1993-06-16 1995-01-10 Hitachi Lighting Ltd インバータ形放電灯点灯装置
JP3683461B2 (ja) * 2000-02-16 2005-08-17 Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 キセノンエキシマランプの光強度測定装置
JP2003197152A (ja) * 2001-12-25 2003-07-11 Harison Toshiba Lighting Corp 誘電体バリア放電ランプ、誘電体バリア放電ランプ部品、放電ランプ点灯装置及び光照射装置
JP4093065B2 (ja) * 2003-01-17 2008-05-28 ウシオ電機株式会社 エキシマランプ発光装置
JP4054699B2 (ja) * 2003-03-13 2008-02-27 ハリソン東芝ライティング株式会社 誘電体バリヤ放電ランプ照明装置および紫外線照射装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12438334B2 (en) 2019-05-14 2025-10-07 Cymer, Llc Apparatus for and method of modulating a light source wavelength
US12374853B2 (en) 2019-05-22 2025-07-29 Cymer, Llc Control system for a plurality of deep ultraviolet optical oscillators

Also Published As

Publication number Publication date
TWI303840B (enExample) 2008-12-01
KR20060083163A (ko) 2006-07-20
CN1805639B (zh) 2011-08-31
TW200641959A (en) 2006-12-01
KR100730451B1 (ko) 2007-06-19
CN1805639A (zh) 2006-07-19
JP2006196370A (ja) 2006-07-27

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