TWI297959B - - Google Patents
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- Publication number
- TWI297959B TWI297959B TW95118829A TW95118829A TWI297959B TW I297959 B TWI297959 B TW I297959B TW 95118829 A TW95118829 A TW 95118829A TW 95118829 A TW95118829 A TW 95118829A TW I297959 B TWI297959 B TW I297959B
- Authority
- TW
- Taiwan
- Prior art keywords
- epitaxial layer
- epitaxial
- layer
- substrate
- nano
- Prior art date
Links
- 238000000034 method Methods 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 27
- 238000000407 epitaxy Methods 0.000 claims description 18
- 239000002061 nanopillar Substances 0.000 claims description 16
- 230000007547 defect Effects 0.000 claims description 13
- 229910052594 sapphire Inorganic materials 0.000 claims description 9
- 239000010980 sapphire Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- 238000005253 cladding Methods 0.000 claims description 7
- 238000001020 plasma etching Methods 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000009616 inductively coupled plasma Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 229910002704 AlGaN Inorganic materials 0.000 claims description 3
- 230000005496 eutectics Effects 0.000 claims description 3
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims description 3
- 229910003468 tantalcarbide Inorganic materials 0.000 claims description 3
- 238000001039 wet etching Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 claims 29
- 229910017083 AlN Inorganic materials 0.000 claims 1
- 229910002601 GaN Inorganic materials 0.000 claims 1
- 239000011247 coating layer Substances 0.000 claims 1
- 229910021478 group 5 element Inorganic materials 0.000 claims 1
- 229910052746 lanthanum Inorganic materials 0.000 claims 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims 1
- 239000011148 porous material Substances 0.000 description 7
- 238000001312 dry etching Methods 0.000 description 5
- 229910052770 Uranium Inorganic materials 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 210000002784 stomach Anatomy 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000001748 luminescence spectrum Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Led Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW095118829A TW200744231A (en) | 2006-05-26 | 2006-05-26 | Epitaxy structure and fabrication method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW095118829A TW200744231A (en) | 2006-05-26 | 2006-05-26 | Epitaxy structure and fabrication method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200744231A TW200744231A (en) | 2007-12-01 |
| TWI297959B true TWI297959B (enExample) | 2008-06-11 |
Family
ID=45069254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095118829A TW200744231A (en) | 2006-05-26 | 2006-05-26 | Epitaxy structure and fabrication method thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200744231A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI392116B (zh) * | 2008-08-05 | 2013-04-01 | Univ Nat Cheng Kung | Light emitting diode having a nanopore array and a method for manufacturing the same |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9024310B2 (en) | 2011-01-12 | 2015-05-05 | Tsinghua University | Epitaxial structure |
| CN102723408B (zh) * | 2011-03-29 | 2015-04-15 | 清华大学 | 半导体外延结构的制备方法 |
| TWI583787B (zh) * | 2013-08-16 | 2017-05-21 | 京華堂實業股份有限公司 | ㄧ種可降低酒精性脂肪肝的酒類飲品組合物 |
-
2006
- 2006-05-26 TW TW095118829A patent/TW200744231A/zh not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI392116B (zh) * | 2008-08-05 | 2013-04-01 | Univ Nat Cheng Kung | Light emitting diode having a nanopore array and a method for manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200744231A (en) | 2007-12-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |