TW200744231A - Epitaxy structure and fabrication method thereof - Google Patents
Epitaxy structure and fabrication method thereofInfo
- Publication number
- TW200744231A TW200744231A TW095118829A TW95118829A TW200744231A TW 200744231 A TW200744231 A TW 200744231A TW 095118829 A TW095118829 A TW 095118829A TW 95118829 A TW95118829 A TW 95118829A TW 200744231 A TW200744231 A TW 200744231A
- Authority
- TW
- Taiwan
- Prior art keywords
- fabrication method
- epitaxy structure
- nanometer
- epitaxy
- growth
- Prior art date
Links
- 238000000407 epitaxy Methods 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 230000007547 defect Effects 0.000 abstract 1
- 238000001312 dry etching Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 abstract 1
- 238000001657 homoepitaxy Methods 0.000 abstract 1
- 238000009616 inductively coupled plasma Methods 0.000 abstract 1
- 239000002061 nanopillar Substances 0.000 abstract 1
- 239000011295 pitch Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW095118829A TW200744231A (en) | 2006-05-26 | 2006-05-26 | Epitaxy structure and fabrication method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW095118829A TW200744231A (en) | 2006-05-26 | 2006-05-26 | Epitaxy structure and fabrication method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200744231A true TW200744231A (en) | 2007-12-01 |
| TWI297959B TWI297959B (enExample) | 2008-06-11 |
Family
ID=45069254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095118829A TW200744231A (en) | 2006-05-26 | 2006-05-26 | Epitaxy structure and fabrication method thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200744231A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI457271B (zh) * | 2011-03-29 | 2014-10-21 | Hon Hai Prec Ind Co Ltd | 半導體外延結構的製備方法 |
| US9219193B2 (en) | 2011-01-12 | 2015-12-22 | Tsinghua University | Method for making epitaxial structure |
| TWI583787B (zh) * | 2013-08-16 | 2017-05-21 | 京華堂實業股份有限公司 | ㄧ種可降低酒精性脂肪肝的酒類飲品組合物 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI392116B (zh) * | 2008-08-05 | 2013-04-01 | Univ Nat Cheng Kung | Light emitting diode having a nanopore array and a method for manufacturing the same |
-
2006
- 2006-05-26 TW TW095118829A patent/TW200744231A/zh not_active IP Right Cessation
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9219193B2 (en) | 2011-01-12 | 2015-12-22 | Tsinghua University | Method for making epitaxial structure |
| US9559255B2 (en) | 2011-01-12 | 2017-01-31 | Tsinghua University | Epitaxial structure |
| US9905726B2 (en) | 2011-01-12 | 2018-02-27 | Tsinghua University | Semiconductor epitaxial structure |
| TWI457271B (zh) * | 2011-03-29 | 2014-10-21 | Hon Hai Prec Ind Co Ltd | 半導體外延結構的製備方法 |
| TWI583787B (zh) * | 2013-08-16 | 2017-05-21 | 京華堂實業股份有限公司 | ㄧ種可降低酒精性脂肪肝的酒類飲品組合物 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI297959B (enExample) | 2008-06-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |