TWI276474B - Manufacturing method for substrates with resist films - Google Patents
Manufacturing method for substrates with resist films Download PDFInfo
- Publication number
- TWI276474B TWI276474B TW093121119A TW93121119A TWI276474B TW I276474 B TWI276474 B TW I276474B TW 093121119 A TW093121119 A TW 093121119A TW 93121119 A TW93121119 A TW 93121119A TW I276474 B TWI276474 B TW I276474B
- Authority
- TW
- Taiwan
- Prior art keywords
- coating
- substrate
- nozzle
- liquid
- coated
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
- H10P14/6326—Deposition processes
- H10P14/6342—Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Coating Apparatus (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003276256 | 2003-07-17 | ||
| JP2004200516A JP2005051220A (ja) | 2003-07-17 | 2004-07-07 | レジスト膜付基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200507950A TW200507950A (en) | 2005-03-01 |
| TWI276474B true TWI276474B (en) | 2007-03-21 |
Family
ID=34277588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093121119A TWI276474B (en) | 2003-07-17 | 2004-07-15 | Manufacturing method for substrates with resist films |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2005051220A (https=) |
| KR (1) | KR20050009241A (https=) |
| CN (1) | CN1577741A (https=) |
| TW (1) | TWI276474B (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006294820A (ja) * | 2005-04-08 | 2006-10-26 | Hoya Corp | 塗布装置及びフォトマスクブランクの製造方法 |
| JP4260135B2 (ja) * | 2005-04-08 | 2009-04-30 | Hoya株式会社 | レジスト塗布方法及びレジスト塗布装置、並びにフォトマスクブランクの製造方法 |
| JP5164088B2 (ja) * | 2006-03-30 | 2013-03-13 | Hoya株式会社 | マスクブランク及びフォトマスク |
| JP5073375B2 (ja) * | 2007-06-13 | 2012-11-14 | Hoya株式会社 | マスクブランクの製造方法及びフォトマスクの製造方法 |
| JP5086714B2 (ja) * | 2007-07-13 | 2012-11-28 | Hoya株式会社 | マスクブランクの製造方法及びフォトマスクの製造方法 |
| JP2009258152A (ja) * | 2008-04-11 | 2009-11-05 | Hoya Corp | マスクブランクの製造方法及びフォトマスクの製造方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4397349D2 (de) * | 1993-05-05 | 1996-11-14 | Steag Micro Tech Gmbh | Vorrichtung zur Belackung oder Beschichtung von Platten oder Scheiben |
| DE4445985A1 (de) * | 1994-12-22 | 1996-06-27 | Steag Micro Tech Gmbh | Verfahren und Vorrichtung zur Belackung oder Beschichtung eines Substrats |
| JP2001293417A (ja) * | 2000-04-14 | 2001-10-23 | Sharp Corp | 塗布装置 |
| JP2003173015A (ja) * | 2001-09-28 | 2003-06-20 | Hoya Corp | グレートーンマスクの製造方法 |
| JP3658355B2 (ja) * | 2001-10-03 | 2005-06-08 | Hoya株式会社 | 塗布膜の乾燥方法、塗布膜の形成方法、及び塗布膜形成装置 |
| JP4017372B2 (ja) * | 2001-10-15 | 2007-12-05 | 住友化学株式会社 | 薄膜形成方法 |
-
2004
- 2004-07-07 JP JP2004200516A patent/JP2005051220A/ja active Pending
- 2004-07-15 TW TW093121119A patent/TWI276474B/zh not_active IP Right Cessation
- 2004-07-16 CN CNA2004100709264A patent/CN1577741A/zh active Pending
- 2004-07-16 KR KR1020040055669A patent/KR20050009241A/ko not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| TW200507950A (en) | 2005-03-01 |
| KR20050009241A (ko) | 2005-01-24 |
| CN1577741A (zh) | 2005-02-09 |
| JP2005051220A (ja) | 2005-02-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |