TWI276474B - Manufacturing method for substrates with resist films - Google Patents

Manufacturing method for substrates with resist films Download PDF

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Publication number
TWI276474B
TWI276474B TW093121119A TW93121119A TWI276474B TW I276474 B TWI276474 B TW I276474B TW 093121119 A TW093121119 A TW 093121119A TW 93121119 A TW93121119 A TW 93121119A TW I276474 B TWI276474 B TW I276474B
Authority
TW
Taiwan
Prior art keywords
coating
substrate
nozzle
liquid
coated
Prior art date
Application number
TW093121119A
Other languages
English (en)
Chinese (zh)
Other versions
TW200507950A (en
Inventor
Shuhou Motomura
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Publication of TW200507950A publication Critical patent/TW200507950A/zh
Application granted granted Critical
Publication of TWI276474B publication Critical patent/TWI276474B/zh

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326Deposition processes
    • H10P14/6342Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04Apparatus for manufacture or treatment
    • H10P72/0448Apparatus for applying a liquid, a resin, an ink or the like

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
TW093121119A 2003-07-17 2004-07-15 Manufacturing method for substrates with resist films TWI276474B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003276256 2003-07-17
JP2004200516A JP2005051220A (ja) 2003-07-17 2004-07-07 レジスト膜付基板の製造方法

Publications (2)

Publication Number Publication Date
TW200507950A TW200507950A (en) 2005-03-01
TWI276474B true TWI276474B (en) 2007-03-21

Family

ID=34277588

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093121119A TWI276474B (en) 2003-07-17 2004-07-15 Manufacturing method for substrates with resist films

Country Status (4)

Country Link
JP (1) JP2005051220A (https=)
KR (1) KR20050009241A (https=)
CN (1) CN1577741A (https=)
TW (1) TWI276474B (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006294820A (ja) * 2005-04-08 2006-10-26 Hoya Corp 塗布装置及びフォトマスクブランクの製造方法
JP4260135B2 (ja) * 2005-04-08 2009-04-30 Hoya株式会社 レジスト塗布方法及びレジスト塗布装置、並びにフォトマスクブランクの製造方法
JP5164088B2 (ja) * 2006-03-30 2013-03-13 Hoya株式会社 マスクブランク及びフォトマスク
JP5073375B2 (ja) * 2007-06-13 2012-11-14 Hoya株式会社 マスクブランクの製造方法及びフォトマスクの製造方法
JP5086714B2 (ja) * 2007-07-13 2012-11-28 Hoya株式会社 マスクブランクの製造方法及びフォトマスクの製造方法
JP2009258152A (ja) * 2008-04-11 2009-11-05 Hoya Corp マスクブランクの製造方法及びフォトマスクの製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4397349D2 (de) * 1993-05-05 1996-11-14 Steag Micro Tech Gmbh Vorrichtung zur Belackung oder Beschichtung von Platten oder Scheiben
DE4445985A1 (de) * 1994-12-22 1996-06-27 Steag Micro Tech Gmbh Verfahren und Vorrichtung zur Belackung oder Beschichtung eines Substrats
JP2001293417A (ja) * 2000-04-14 2001-10-23 Sharp Corp 塗布装置
JP2003173015A (ja) * 2001-09-28 2003-06-20 Hoya Corp グレートーンマスクの製造方法
JP3658355B2 (ja) * 2001-10-03 2005-06-08 Hoya株式会社 塗布膜の乾燥方法、塗布膜の形成方法、及び塗布膜形成装置
JP4017372B2 (ja) * 2001-10-15 2007-12-05 住友化学株式会社 薄膜形成方法

Also Published As

Publication number Publication date
TW200507950A (en) 2005-03-01
KR20050009241A (ko) 2005-01-24
CN1577741A (zh) 2005-02-09
JP2005051220A (ja) 2005-02-24

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MM4A Annulment or lapse of patent due to non-payment of fees