TWI256097B - Time resolved non-invasive diagnostics system - Google Patents

Time resolved non-invasive diagnostics system

Info

Publication number
TWI256097B
TWI256097B TW091134678A TW91134678A TWI256097B TW I256097 B TWI256097 B TW I256097B TW 091134678 A TW091134678 A TW 091134678A TW 91134678 A TW91134678 A TW 91134678A TW I256097 B TWI256097 B TW I256097B
Authority
TW
Taiwan
Prior art keywords
optics
chip
light source
time resolved
diagnostics system
Prior art date
Application number
TW091134678A
Other languages
English (en)
Other versions
TW200301528A (en
Inventor
Daniel Murdoch Cotton
Nader Pakdaman
James Squire Vickers
Thomas Wong
Original Assignee
Optonics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25541938&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TWI256097(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Optonics Inc filed Critical Optonics Inc
Publication of TW200301528A publication Critical patent/TW200301528A/zh
Application granted granted Critical
Publication of TWI256097B publication Critical patent/TWI256097B/zh

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302Contactless testing
    • G01R31/308Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
TW091134678A 2001-11-28 2002-11-28 Time resolved non-invasive diagnostics system TWI256097B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/995,548 US6621275B2 (en) 2001-11-28 2001-11-28 Time resolved non-invasive diagnostics system

Publications (2)

Publication Number Publication Date
TW200301528A TW200301528A (en) 2003-07-01
TWI256097B true TWI256097B (en) 2006-06-01

Family

ID=25541938

Family Applications (1)

Application Number Title Priority Date Filing Date
TW091134678A TWI256097B (en) 2001-11-28 2002-11-28 Time resolved non-invasive diagnostics system

Country Status (7)

Country Link
US (3) US6621275B2 (zh)
EP (1) EP1448999A1 (zh)
JP (3) JP2005510737A (zh)
KR (1) KR20040071686A (zh)
CN (1) CN100381832C (zh)
TW (1) TWI256097B (zh)
WO (1) WO2003046593A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI803568B (zh) * 2018-01-26 2023-06-01 日商濱松赫德尼古斯股份有限公司 光檢測裝置

Families Citing this family (93)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6621275B2 (en) * 2001-11-28 2003-09-16 Optonics Inc. Time resolved non-invasive diagnostics system
US6594086B1 (en) * 2002-01-16 2003-07-15 Optonics, Inc. (A Credence Company) Bi-convex solid immersion lens
US6859031B2 (en) * 2002-02-01 2005-02-22 Credence Systems Corporation Apparatus and method for dynamic diagnostic testing of integrated circuits
US7123035B2 (en) 2002-04-10 2006-10-17 Credence Systems Corporation Optics landing system and method therefor
US6828811B2 (en) * 2002-04-10 2004-12-07 Credence Systems Corporation Optics landing system and method therefor
JP4251358B2 (ja) * 2002-04-10 2009-04-08 サーモ フィッシャー サイエンティフィック(アッシュビル)エルエルシー 自動化された蛋白質結晶化の画像化
US6836131B2 (en) * 2002-08-16 2004-12-28 Credence Systems Corp. Spray cooling and transparent cooling plate thermal management system
US7102374B2 (en) * 2002-08-16 2006-09-05 Credence Systems Corporation Spray cooling thermal management system and method for semiconductor probing, diagnostics, and failure analysis
US6943572B2 (en) * 2002-09-03 2005-09-13 Credence Systems Corporation Apparatus and method for detecting photon emissions from transistors
US6891363B2 (en) * 2002-09-03 2005-05-10 Credence Systems Corporation Apparatus and method for detecting photon emissions from transistors
EP1347280A1 (en) * 2002-11-13 2003-09-24 Agilent Technologies Inc. a Delaware Corporation Optical parameter measuring system with associated temperature data
US6976234B2 (en) * 2003-01-13 2005-12-13 Credence Systems Corporation Apparatus and method for measuring characteristics of dynamic electrical signals in integrated circuits
US7046449B2 (en) * 2003-03-20 2006-05-16 Hamamatsu Photonics K.K. Solid immersion lens and sample observation method using it
US7221502B2 (en) * 2003-03-20 2007-05-22 Hamamatsu Photonics K.K. Microscope and sample observation method
TWI328691B (en) * 2003-03-20 2010-08-11 Hamamatsu Photonics Kk Solid immersion lens and microscope
US20050002028A1 (en) * 2003-07-02 2005-01-06 Steven Kasapi Time resolved emission spectral analysis system
US6995980B2 (en) * 2003-08-21 2006-02-07 Unisys Corporation Temperature control system which sprays liquid coolant droplets against an IC-module and directs radiation against the IC-module
US7310230B2 (en) * 2003-08-21 2007-12-18 Delta Design, Inc. Temperature control system which sprays liquid coolant droplets against an IC-module at a sub-atmospheric pressure
US7339388B2 (en) * 2003-08-25 2008-03-04 Tau-Metrix, Inc. Intra-clip power and test signal generation for use with test structures on wafers
US7053642B2 (en) * 2003-10-01 2006-05-30 Russell Robert J Method and apparatus for enabling reliable testing of printed circuit assemblies using a standard flying prober system
US20050094258A1 (en) * 2003-10-31 2005-05-05 Hamamatsu Photonics K.K. Solid immersion lens moving device and microscope using the same
US7576928B2 (en) * 2003-10-31 2009-08-18 Hamamatsu Photonics K.K. Solid immersion lens holder
KR101110468B1 (ko) * 2003-10-31 2012-01-31 하마마츠 포토닉스 가부시키가이샤 시료 관찰 방법 및 현미경, 및 이것에 이용하는 고침 렌즈및 광학 밀착액
US7227580B2 (en) * 2003-11-20 2007-06-05 Credence Systems Corporation Knife edge tracking system and method
US7012537B2 (en) * 2004-02-10 2006-03-14 Credence Systems Corporation Apparatus and method for determining voltage using optical observation
EP1566617B1 (fr) * 2004-02-20 2015-11-11 Carestream Health, Inc. Equipement et procédé de mesure de teinte dentaire
US7312921B2 (en) * 2004-02-27 2007-12-25 Hamamatsu Photonics K.K. Microscope and sample observation method
JP4643994B2 (ja) * 2005-01-19 2011-03-02 浜松ホトニクス株式会社 固浸レンズホルダ
US7110172B2 (en) * 2004-02-27 2006-09-19 Hamamatsu Photonics K.K. Microscope and sample observation method
US20050220266A1 (en) * 2004-03-31 2005-10-06 Gregory Hirsch Methods for achieving high resolution microfluoroscopy
US7009173B2 (en) * 2004-06-22 2006-03-07 Credence Systems Corporation Lens mount integrated with a thermoelectrically cooled photodetector module
US7327452B2 (en) * 2004-08-09 2008-02-05 Credence Systems Corporation Light beam apparatus and method for orthogonal alignment of specimen
US7480051B2 (en) * 2005-02-10 2009-01-20 Dcg Systems, Inc. Apparatus and method for hard-docking a tester to a tiltable imager
US7259580B2 (en) * 2005-02-22 2007-08-21 International Business Machines Corporation Method and apparatus for temporary thermal coupling of an electronic device to a heat sink during test
US7202689B2 (en) * 2005-04-15 2007-04-10 International Business Machines Corporation Sensor differentiated fault isolation
US7314767B2 (en) * 2005-05-27 2008-01-01 Credence Systems Corporation Method for local wafer thinning and reinforcement
US7450245B2 (en) 2005-06-29 2008-11-11 Dcg Systems, Inc. Method and apparatus for measuring high-bandwidth electrical signals using modulation in an optical probing system
US7659981B2 (en) * 2005-08-26 2010-02-09 Dcg Systems, Inc. Apparatus and method for probing integrated circuits using polarization difference probing
US7616312B2 (en) 2005-06-29 2009-11-10 Dcg Systems, Inc. Apparatus and method for probing integrated circuits using laser illumination
US7733100B2 (en) * 2005-08-26 2010-06-08 Dcg Systems, Inc. System and method for modulation mapping
JP4731262B2 (ja) * 2005-09-22 2011-07-20 ルネサスエレクトロニクス株式会社 不揮発性半導体記憶装置および、不揮発性半導体記憶装置の製造方法
FR2891626B1 (fr) * 2005-09-30 2008-02-01 Cnes Epic Dispositif d'analyse d'un circuit integre.
US7141963B1 (en) * 2005-10-21 2006-11-28 Ford Motor Company Handheld switch measurement system
US7351966B1 (en) * 2006-05-23 2008-04-01 International Business Machines Corporation High-resolution optical channel for non-destructive navigation and processing of integrated circuits
US20070291361A1 (en) * 2006-06-19 2007-12-20 Credence Systems Corporation Lens housing with integrated thermal management
US20070290702A1 (en) * 2006-06-19 2007-12-20 Credence Systems Corporation System and method for thermal management and gradient reduction
US7956625B1 (en) * 2006-10-31 2011-06-07 Dcg Systems, Inc. Undoped silicon heat spreader window
US7373844B1 (en) * 2006-12-01 2008-05-20 Ford Global Technologies, Llc Switch feel measurement apparatus
KR100826764B1 (ko) * 2006-12-08 2008-04-30 동부일렉트로닉스 주식회사 프로브 카드 내의 시모스 이미지 센서 테스트용 어뎁터
TWI357723B (en) * 2007-12-04 2012-02-01 Ind Tech Res Inst Time to digital converter apparatus
US20090147255A1 (en) * 2007-12-07 2009-06-11 Erington Kent B Method for testing a semiconductor device and a semiconductor device testing system
US8424594B2 (en) * 2007-12-10 2013-04-23 Presto Engineering, Inc. Apparatus for thermal control in the analysis of electronic devices
US8131056B2 (en) 2008-09-30 2012-03-06 International Business Machines Corporation Constructing variability maps by correlating off-state leakage emission images to layout information
US8553322B2 (en) 2008-11-04 2013-10-08 Dcg Systems, Inc. Variable magnification optics with spray cooling
US8248097B2 (en) * 2009-04-02 2012-08-21 International Business Machines Corporation Method and apparatus for probing a wafer
US8754633B2 (en) * 2009-05-01 2014-06-17 Dcg Systems, Inc. Systems and method for laser voltage imaging state mapping
US9075106B2 (en) * 2009-07-30 2015-07-07 International Business Machines Corporation Detecting chip alterations with light emission
JP2011108734A (ja) * 2009-11-13 2011-06-02 Toshiba Corp ウエハプローバ、および当該ウエハプローバを用いた故障解析方法
US8312413B2 (en) * 2010-01-22 2012-11-13 International Business Machines Corporation Navigating analytical tools using layout software
JP5314634B2 (ja) * 2010-05-17 2013-10-16 株式会社アドバンテスト 試験装置、試験方法、およびデバイスインターフェイス
US9201096B2 (en) 2010-09-08 2015-12-01 Dcg Systems, Inc. Laser-assisted device alteration using synchronized laser pulses
EP2428807A3 (en) * 2010-09-08 2014-10-29 DCG Systems, Inc. Laser assisted fault localization using two-photon absorption
DE102010052701A1 (de) * 2010-11-26 2012-05-31 Universität Konstanz Vorrichtung zum Messen einer Ladungsträgerlebensdauer in einem Halbleitersubstrat
TWI448704B (zh) * 2011-10-12 2014-08-11 Advantest Corp 測試裝置、測試方法以及裝置介面
TWI456184B (zh) * 2011-12-19 2014-10-11 Ind Tech Res Inst 光譜檢測裝置及光譜檢測方法
US9714978B2 (en) * 2012-04-12 2017-07-25 Larry Ross At-speed integrated circuit testing using through silicon in-circuit logic analysis
JP5743958B2 (ja) * 2012-05-30 2015-07-01 キヤノン株式会社 計測方法、露光方法および装置
US9494518B2 (en) * 2012-07-18 2016-11-15 The Trustees Of Princeton University Multiscale spectral nanoscopy
US8749784B1 (en) 2012-10-18 2014-06-10 Checkpoint Technologies, Llc Probing circuit features in sub-32 nm semiconductor integrated circuit
US9404735B2 (en) * 2013-03-15 2016-08-02 United Technologies Corporation Multiple laser time of arrival probe
US10191111B2 (en) 2013-03-24 2019-01-29 Dcg Systems, Inc. Synchronized pulsed LADA for the simultaneous acquisition of timing diagrams and laser-induced upsets
US9030658B1 (en) 2013-05-07 2015-05-12 Checkpoint Technologies, Llc Multi-resolution optical probing system having reliable temperature control and mechanical isolation
US8873032B1 (en) 2013-05-07 2014-10-28 CheckPoint Technologies, LLC. Optical probing system having reliable temperature control
US9217855B1 (en) 2013-08-30 2015-12-22 Checkpoint Technologies, Llc Multi-magnification high sensitivity optical system for probing electronic devices
US9182580B1 (en) 2013-08-30 2015-11-10 Checkpoint Technologies, Llc Optical probe system having accurate positional and orientational adjustments for multiple optical objectives
US10345571B2 (en) 2014-01-30 2019-07-09 Karl Storz Endovision, Inc. Intelligent light source
CN106471412B (zh) * 2014-03-11 2020-04-21 Dcg系统有限公司 自校准的悬浮固体浸没透镜端部
US10041997B2 (en) 2014-03-13 2018-08-07 Fei Efa, Inc. System and method for fault isolation by emission spectra analysis
US9903824B2 (en) 2014-04-10 2018-02-27 Fei Efa, Inc. Spectral mapping of photo emission
CN104267272B (zh) * 2014-09-02 2017-06-16 机械工业仪器仪表综合技术经济研究所 一种基于故障插入平台的安全失效分数测试方法
US9417281B1 (en) 2014-09-30 2016-08-16 Checkpoint Technologies Llc Adjustable split-beam optical probing (ASOP)
GB201600812D0 (en) * 2016-01-15 2016-03-02 Randox Lab Ltd Chemiluminescence detector
KR102278371B1 (ko) * 2016-03-09 2021-07-19 하마마츠 포토닉스 가부시키가이샤 측정 장치, 관찰 장치 및 측정 방법
US10132861B2 (en) 2016-09-16 2018-11-20 Qualcomm Incorporated Visible laser circuit fault isolation
US9964589B1 (en) * 2016-11-08 2018-05-08 Globalfoundries Singapore Pte. Ltd. System for detection of a photon emission generated by a device and methods for detecting the same
JP7042071B2 (ja) * 2016-12-20 2022-03-25 エフ・イ-・アイ・カンパニー eビーム操作用の局部的に排気された容積を用いる集積回路解析システムおよび方法
TWI627517B (zh) 2017-05-11 2018-06-21 National Taiwan Normal University 超快時間解析數位全像之方法及其裝置
JP6954775B2 (ja) * 2017-06-29 2021-10-27 浜松ホトニクス株式会社 デバイス解析装置及びデバイス解析方法
CN109164773B (zh) * 2018-09-29 2020-03-27 厦门大学 一种基于LabVIEW的多功能光学测试系统及方法
JP6736651B2 (ja) * 2018-12-27 2020-08-05 浜松ホトニクス株式会社 冷却ユニット、対物レンズモジュール、半導体検査装置、半導体検査方法
CN109799421B (zh) * 2019-03-12 2021-03-23 北京卫星环境工程研究所 宇航光缆连接器的综合环境实验研究系统
JP7227193B2 (ja) * 2020-07-15 2023-02-21 浜松ホトニクス株式会社 冷却ユニット、対物レンズモジュール、半導体検査装置、半導体検査方法
KR102551250B1 (ko) * 2023-05-03 2023-07-03 부경대학교 산학협력단 1d 및 2d 이미지 획득 장치를 갖춘 잉크젯 잉크액적 고속 모니터링 시스템 및 이를 이용한 고속 모니터링 방법

Family Cites Families (68)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1472167A1 (de) 1965-11-26 1969-01-09 Leitz Ernst Gmbh Mikroskop-Immersionsobjektiv
GB1281611A (en) 1970-02-10 1972-07-12 Vickers Ltd Apochromatic microscope objectives
JPS5141355B2 (zh) 1973-02-08 1976-11-09
DE2848590A1 (de) 1978-11-09 1980-05-22 Leitz Ernst Gmbh Optische anordnung zur reflexionsmikroskopischen untersuchung biologischer gewebe und organoberflaechen
US4297032A (en) 1980-02-14 1981-10-27 The United States Of America As Represented By The Secretary Of The Navy Dark field surface inspection illumination technique
US4555767A (en) 1982-05-27 1985-11-26 International Business Machines Corporation Method and apparatus for measuring thickness of epitaxial layer by infrared reflectance
DD215640A1 (de) 1983-05-02 1984-11-14 Zeiss Jena Veb Carl Frontlinsengruppe fuer immersionsmikroskopobjektiv in hd-ausfuehrung mit hoher apertur
US4615620A (en) 1983-12-26 1986-10-07 Hitachi, Ltd. Apparatus for measuring the depth of fine engraved patterns
FR2564613B1 (fr) 1984-05-17 1987-04-30 Commissariat Energie Atomique Systeme de chronometrie electronique de haute resolution
GB2172166B (en) * 1985-03-07 1988-04-27 Marconi Company Bias lighting for telecine apparatus
US4625114A (en) 1985-07-15 1986-11-25 At&T Technologies, Inc. Method and apparatus for nondestructively determining the characteristics of a multilayer thin film structure
US4724322A (en) 1986-03-03 1988-02-09 Applied Materials, Inc. Method for non-contact xyz position sensing
US4758092A (en) 1986-03-04 1988-07-19 Stanford University Method and means for optical detection of charge density modulation in a semiconductor
US4680635A (en) 1986-04-01 1987-07-14 Intel Corporation Emission microscope
JPH065700B2 (ja) 1987-07-22 1994-01-19 株式会社日立製作所 電子回路デバイスの冷却装置
US4755874A (en) 1987-08-31 1988-07-05 Kla Instruments Corporation Emission microscopy system
US5087121A (en) 1987-12-01 1992-02-11 Canon Kabushiki Kaisha Depth/height measuring device
US4811090A (en) 1988-01-04 1989-03-07 Hypervision Image emission microscope with improved image processing capability
US4870355A (en) 1988-01-11 1989-09-26 Thermonics Incorporated Thermal fixture for testing integrated circuits
US4875006A (en) * 1988-09-01 1989-10-17 Photon Dynamics, Inc. Ultra-high-speed digital test system using electro-optic signal sampling
US5126569A (en) 1989-03-10 1992-06-30 Massachusetts Institute Of Technology Apparatus for measuring optical properties of materials
JPH0750129B2 (ja) * 1989-05-15 1995-05-31 日本電気株式会社 電位測定方法および装置
US5004307A (en) 1990-04-12 1991-04-02 The Board Of Trustees Of The Leland Stanford Junior University Near field and solid immersion optical microscope
US5057771A (en) 1990-06-18 1991-10-15 Tetronix, Inc. Phase-locked timebase for electro-optic sampling
US5270643A (en) 1990-11-28 1993-12-14 Schlumberger Technologies Pulsed laser photoemission electron-beam probe
JP3200894B2 (ja) * 1991-03-05 2001-08-20 株式会社日立製作所 露光方法及びその装置
US5208648A (en) 1991-03-11 1993-05-04 International Business Machines Corporation Apparatus and a method for high numerical aperture microscopic examination of materials
US5220403A (en) * 1991-03-11 1993-06-15 International Business Machines Corporation Apparatus and a method for high numerical aperture microscopic examination of materials
US5247392A (en) 1991-05-21 1993-09-21 Siemens Aktiengesellschaft Objective lens for producing a radiation focus in the inside of a specimen
US5220804A (en) 1991-12-09 1993-06-22 Isothermal Systems Research, Inc High heat flux evaporative spray cooling
US5282088A (en) 1992-10-19 1994-01-25 Mark Davidson Aplanatic microlens and method for making same
DE4244268A1 (de) 1992-12-28 1994-07-07 Max Planck Gesellschaft Hochauflösendes optisches System mit einer Tastspitze
JPH06281700A (ja) * 1993-03-26 1994-10-07 Nippon Telegr & Teleph Corp <Ntt> 半導体装置の故障解析方法及びその故障解析装置
US5515910A (en) 1993-05-03 1996-05-14 Micro Control System Apparatus for burn-in of high power semiconductor devices
JP3300479B2 (ja) * 1993-07-19 2002-07-08 浜松ホトニクス株式会社 半導体デバイス検査システム
US5314529A (en) 1993-09-13 1994-05-24 Tilton Donald E Entrained droplet separator
JP3478612B2 (ja) * 1993-11-16 2003-12-15 浜松ホトニクス株式会社 半導体デバイス検査システム
US5475316A (en) 1993-12-27 1995-12-12 Hypervision, Inc. Transportable image emission microscope
JPH09138243A (ja) 1995-10-25 1997-05-27 Hewlett Packard Co <Hp> 捕捉クロックの位相変調装置
US5729393A (en) 1996-04-03 1998-03-17 Digital Papyrus Corporation Optical flying head with solid immersion lens having raised central surface facing medium
US5719444A (en) 1996-04-26 1998-02-17 Tilton; Charles L. Packaging and cooling system for power semi-conductor
US6270696B1 (en) 1996-06-03 2001-08-07 Terastor Corporation Method of fabricating and integrating an optical assembly into a flying head
JPH1021166A (ja) * 1996-06-27 1998-01-23 Nec Corp 回覧電子メールの状況管理方式
US5940545A (en) * 1996-07-18 1999-08-17 International Business Machines Corporation Noninvasive optical method for measuring internal switching and other dynamic parameters of CMOS circuits
JP3308841B2 (ja) * 1997-01-29 2002-07-29 株式会社東芝 電磁波検出用カメラ装置
US5889593A (en) * 1997-02-26 1999-03-30 Kla Instruments Corporation Optical system and method for angle-dependent reflection or transmission measurement
US5905577A (en) * 1997-03-15 1999-05-18 Schlumberger Technologies, Inc. Dual-laser voltage probing of IC's
JPH113534A (ja) * 1997-04-14 1999-01-06 Toray Ind Inc 光記録装置および光記録媒体
EP0977192A4 (en) 1997-04-14 2000-11-15 Toray Industries OPTICAL RECORDING DEVICE AND OPTICAL RECORDING MEDIUM
KR100536105B1 (ko) 1997-10-06 2005-12-14 코닌클리케 필립스 일렉트로닉스 엔.브이. 구면수차 검출계 및 그것을 사용하는 광학장치
US6028952A (en) 1998-02-19 2000-02-22 International Business Machines Corporation System and method for compressing and analyzing time-resolved optical data obtained from operating integrated circuits
US6172512B1 (en) 1998-02-19 2001-01-09 International Business Machines Corporation Image processing methods for the optical detection of dynamic errors in integrated circuits
US6650768B1 (en) 1998-02-19 2003-11-18 International Business Machines Corporation Using time resolved light emission from VLSI circuit devices for navigation on complex systems
US5880931A (en) 1998-03-20 1999-03-09 Tilton; Donald E. Spray cooled circuit card cage
JPH11273132A (ja) 1998-03-25 1999-10-08 Hitachi Ltd 光ヘッド
US6447270B1 (en) 1998-09-17 2002-09-10 Walbro Corporation Brushless coolant pump and cooling system
US6608494B1 (en) 1998-12-04 2003-08-19 Advanced Micro Devices, Inc. Single point high resolution time resolved photoemission microscopy system and method
US6140141A (en) 1998-12-23 2000-10-31 Sun Microsystems, Inc. Method for cooling backside optically probed integrated circuits
JP2003502705A (ja) 1999-06-21 2003-01-21 トラスティーズ オブ ボストン ユニバーシティ 高解像度表面下画像作成用数値絞り増加レンズ(nail)技術
US6657446B1 (en) 1999-09-30 2003-12-02 Advanced Micro Devices, Inc. Picosecond imaging circuit analysis probe and system
US6571569B1 (en) 2001-04-26 2003-06-03 Rini Technologies, Inc. Method and apparatus for high heat flux heat transfer
US6621275B2 (en) * 2001-11-28 2003-09-16 Optonics Inc. Time resolved non-invasive diagnostics system
US6819117B2 (en) 2002-01-30 2004-11-16 Credence Systems Corporation PICA system timing measurement & calibration
US6961672B2 (en) * 2002-03-05 2005-11-01 Credence Systems Coporation Universal diagnostic platform for specimen analysis
US6788093B2 (en) 2002-08-07 2004-09-07 International Business Machines Corporation Methodology and apparatus using real-time optical signal for wafer-level device dielectrical reliability studies
US6880350B2 (en) 2002-09-13 2005-04-19 Isothermal Systems Research, Inc. Dynamic spray system
US6857283B2 (en) 2002-09-13 2005-02-22 Isothermal Systems Research, Inc. Semiconductor burn-in thermal management system
US6889509B1 (en) 2002-09-13 2005-05-10 Isothermal Systems Research Inc. Coolant recovery system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI803568B (zh) * 2018-01-26 2023-06-01 日商濱松赫德尼古斯股份有限公司 光檢測裝置
US11774283B2 (en) 2018-01-26 2023-10-03 Hamamatsu Photonics K.K. Photodetector device

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JP2005510737A (ja) 2005-04-21
JP5205531B2 (ja) 2013-06-05
KR20040071686A (ko) 2004-08-12
US6621275B2 (en) 2003-09-16
US20070206846A1 (en) 2007-09-06
WO2003046593A1 (en) 2003-06-05
US7466852B2 (en) 2008-12-16
CN100381832C (zh) 2008-04-16
JP2010014723A (ja) 2010-01-21
US7224828B2 (en) 2007-05-29
US20030098692A1 (en) 2003-05-29
CN1592854A (zh) 2005-03-09
US20030210057A1 (en) 2003-11-13
TW200301528A (en) 2003-07-01
EP1448999A1 (en) 2004-08-25
JP5140049B2 (ja) 2013-02-06
JP2012168191A (ja) 2012-09-06

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