JP5205531B2 - 時間分解非侵入性判断システム - Google Patents
時間分解非侵入性判断システム Download PDFInfo
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- JP5205531B2 JP5205531B2 JP2012097735A JP2012097735A JP5205531B2 JP 5205531 B2 JP5205531 B2 JP 5205531B2 JP 2012097735 A JP2012097735 A JP 2012097735A JP 2012097735 A JP2012097735 A JP 2012097735A JP 5205531 B2 JP5205531 B2 JP 5205531B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
- G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
図4に、本発明の他の実施形態を示す。図4では、ナビゲーションおよびターゲット捕捉が、共焦点レーザ走査型顕微鏡(LSM)400を用いて行なわれる。走査型顕微鏡に関する一般的な情報は、「ヘテロダイン干渉分光計およびデジタル・フィルタリングによる共焦点顕微鏡の普及(Generalizing the Confocal Microscope via Heterodyne Interferometry and Digital Filtering)」:P.C.D.ホッブス(P.C.D.Hobbs)およびG.S.キノ(G.S.Kino)、ジャーナル・オブ・マイクロスコピィ(Journal of Microscopy)Vol.130、Pt.3、1990、pp245−264および米国特許第5,532,873号明細書で見つけることができる。キノの本を参照して、ホッブスは省いても良い。
105…自動テスト機器
110、260…DUT
115…テスト・ベンチ
120、685、996…集光光学部材
124…テスト・ヘッド
125…アダプタ
130、605…照明源
135、435、625、695、725、825、927、995、1255、1265…ミラー
140…フォーカシング・システム
145、1210…イメージャ
150、420、450、698、998、1280、1450…検出器
155…高速データ取得エレクトロニクス
160、160’…偏光子ミラー
162…波長板
165…ビーム・スプリッタ・ミラー
170、470、670、770、870…アパーチャ
175…ステージ
180、181…コントローラ
185…開口部
190…Zアクチュエータ
195、465、765…視野レンズ
210、220…冷却板
235…窓
240…出口
250…入口
265…周辺デバイス
280…Yアクチュエータ
370、460、560…液浸レンズ
375…センタ・マーキング
385…凸状底面
400…共焦点レーザ走査型顕微鏡
405…赤外レーザ・ダイオード
410…レンズ・システム
415…波長板
430…走査器
440…活性デバイス冷却システム
445、645、672、696、745、1125、1200…対物レンズ
455…収差補正リング
465…対物レンズ・タレット
505…対物レンズ・ハウジング
510…スリーブ
515、1175…バルブ
627、727…ダイクロイック・ミラー
628…カメラ
630…軸
665、1270、1324…レンズ
671、705、771、805、871、1250…光源
690、990…光ファイバ
697…マイクロ・クーラ
728、828、928…カメラ
1100…テスト・アダプタ
1110…Oリング
1115…DUT
1120…SIL
1135…間隙
1140…スプレイ・ハウジング
1145…配管
1150…熱交換器
1160、1165…ポンプ
1170…通路
1220…導体リング
1220a…ハーフ・ミラー
1220b…ソリッド・ミラー
1230…絶縁リング
1240…導電性シールド
1260…レーザ源
1400…ATE
1420…トリガリング回路
1430…遅延回路
1440…ゲート回路
1460…捕捉回路
1470…クエンチ
1500…ピコセカンド・タイミング・アナライザ
1510…時間デジタル変換器
1520…マルチチャネル・アナライザ
Claims (10)
- 集積回路チップをテストするための一体型システムであって、
前記チップは、前記チップに刺激信号を送って前記チップの動作条件をシミュレートするための自動テスト機器(ATE)に結合され、
前記ATEから同期信号を受け取るコントローラと、
前記チップの選択されたデバイスを選択的にイメージングするための光学イメージング・システムと、
前記チップからの光放出を集光して、前記光放出を示す時間分解信号を生成するための集光システムと、
前記光学イメージング・システムと前記集光システムとを、前記選択されたデバイスに対して配向するためのナビゲーション・システムと、
前記コントローラによって指定された温度まで前記チップを冷却するための冷却システムと、を備えるシステム。 - 前記光学イメージング・システムが、前記光学イメージング・システムによって規定される視野内から対象領域を選択するように動作可能な機械式アパーチャを備える請求項1に記載のシステム。
- 前記冷却システムがマイクロ・スプレイ冷却システムを備える請求項2に記載のシステム。
- 前記集光システムが液浸レンズを備える請求項3に記載のシステム。
- 前記液浸レンズが両凸の液浸レンズである請求項4に記載のシステム。
- 前記チップからの光放出を集光するための前記集光システムがさらに、前記光放出の周期的な集光に基づいてフォーカシング信号を与える請求項1に記載のシステム。
- 前記集光システムが両凸の液浸レンズを備える請求項6に記載のシステム。
- 前記冷却システムがマイクロ・スプレイ冷却システムを備える請求項7に記載のシステム。
- 前記光学イメージング・システムが、前記チップ上の選択されたデバイスを照明するための光ファイバ・ケーブルに結合された照明源を備える請求項8に記載のシステム。
- 前記照明源が、赤外スペクトルの光を与える請求項9に記載のシステム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/995,548 | 2001-11-28 | ||
US09/995,548 US6621275B2 (en) | 2001-11-28 | 2001-11-28 | Time resolved non-invasive diagnostics system |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2009202797A Division JP5140049B2 (ja) | 2001-11-28 | 2009-09-02 | 時間分解非侵入性判断システム |
Publications (2)
Publication Number | Publication Date |
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JP2012168191A JP2012168191A (ja) | 2012-09-06 |
JP5205531B2 true JP5205531B2 (ja) | 2013-06-05 |
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Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
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JP2003547980A Withdrawn JP2005510737A (ja) | 2001-11-28 | 2002-11-29 | 時間分解非侵入性診断システム |
JP2009202797A Expired - Fee Related JP5140049B2 (ja) | 2001-11-28 | 2009-09-02 | 時間分解非侵入性判断システム |
JP2012097735A Expired - Fee Related JP5205531B2 (ja) | 2001-11-28 | 2012-04-23 | 時間分解非侵入性判断システム |
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JP2003547980A Withdrawn JP2005510737A (ja) | 2001-11-28 | 2002-11-29 | 時間分解非侵入性診断システム |
JP2009202797A Expired - Fee Related JP5140049B2 (ja) | 2001-11-28 | 2009-09-02 | 時間分解非侵入性判断システム |
Country Status (7)
Country | Link |
---|---|
US (3) | US6621275B2 (ja) |
EP (1) | EP1448999A1 (ja) |
JP (3) | JP2005510737A (ja) |
KR (1) | KR20040071686A (ja) |
CN (1) | CN100381832C (ja) |
TW (1) | TWI256097B (ja) |
WO (1) | WO2003046593A1 (ja) |
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JP6736651B2 (ja) | 2018-12-27 | 2020-08-05 | 浜松ホトニクス株式会社 | 冷却ユニット、対物レンズモジュール、半導体検査装置、半導体検査方法 |
CN109799421B (zh) * | 2019-03-12 | 2021-03-23 | 北京卫星环境工程研究所 | 宇航光缆连接器的综合环境实验研究系统 |
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KR102551250B1 (ko) * | 2023-05-03 | 2023-07-03 | 부경대학교 산학협력단 | 1d 및 2d 이미지 획득 장치를 갖춘 잉크젯 잉크액적 고속 모니터링 시스템 및 이를 이용한 고속 모니터링 방법 |
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2001
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2002
- 2002-11-28 TW TW091134678A patent/TWI256097B/zh not_active IP Right Cessation
- 2002-11-29 WO PCT/US2002/038431 patent/WO2003046593A1/en not_active Application Discontinuation
- 2002-11-29 JP JP2003547980A patent/JP2005510737A/ja not_active Withdrawn
- 2002-11-29 KR KR10-2004-7007251A patent/KR20040071686A/ko not_active Application Discontinuation
- 2002-11-29 EP EP02797156A patent/EP1448999A1/en not_active Withdrawn
- 2002-11-29 CN CNB02823376XA patent/CN100381832C/zh not_active Expired - Fee Related
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TWI256097B (en) | 2006-06-01 |
JP2005510737A (ja) | 2005-04-21 |
US20070206846A1 (en) | 2007-09-06 |
US7224828B2 (en) | 2007-05-29 |
US7466852B2 (en) | 2008-12-16 |
EP1448999A1 (en) | 2004-08-25 |
WO2003046593A1 (en) | 2003-06-05 |
TW200301528A (en) | 2003-07-01 |
JP5140049B2 (ja) | 2013-02-06 |
JP2010014723A (ja) | 2010-01-21 |
CN100381832C (zh) | 2008-04-16 |
US20030210057A1 (en) | 2003-11-13 |
JP2012168191A (ja) | 2012-09-06 |
CN1592854A (zh) | 2005-03-09 |
US20030098692A1 (en) | 2003-05-29 |
US6621275B2 (en) | 2003-09-16 |
KR20040071686A (ko) | 2004-08-12 |
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