TWI246731B - Wirebonding insulated wire - Google Patents

Wirebonding insulated wire Download PDF

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Publication number
TWI246731B
TWI246731B TW093104133A TW93104133A TWI246731B TW I246731 B TWI246731 B TW I246731B TW 093104133 A TW093104133 A TW 093104133A TW 93104133 A TW93104133 A TW 93104133A TW I246731 B TWI246731 B TW I246731B
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TW
Taiwan
Prior art keywords
wire
electrical connection
insulated
welding
offset
Prior art date
Application number
TW093104133A
Other languages
English (en)
Other versions
TW200416915A (en
Inventor
Fuaida Harun
Kong Bee Tiu
Original Assignee
Freescale Semiconductor Inc
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Filing date
Publication date
Application filed by Freescale Semiconductor Inc filed Critical Freescale Semiconductor Inc
Publication of TW200416915A publication Critical patent/TW200416915A/zh
Application granted granted Critical
Publication of TWI246731B publication Critical patent/TWI246731B/zh

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    • H—ELECTRICITY
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • B23K20/004—Wire welding
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    • H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
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Description

1246731 玖、發明說明·· 【發明所屬之技術領域】 更特定言之，其係與一 種絕 本發明係與線及絲焊有關 緣線絲焊方法有關。 【先前技術】 日和體f路（integmed eireuit ; IC)晶粒為形成於一諸如 =晶0之半導體晶圓上的—小型裝置。此晶粒通常係從該 切割下來，並附著於一基板或基礎载體上用於互連 2分佈。接著，晶粒上的焊墊藉由絲焊與該載體上的引線 電性連接。不斷需要有更密集的積體電路⑽，且該IC之印 跡的尺寸不應有相應之增加。還需要有更多㈣入及輸 出，使晶片與其封裝之間具有高密度的連接，並需要有精 細的間距與超精細間距的絲焊。由於已將焊塾之間的間隔 減j來今納更多數$的焊墊，故焊線直徑亦應減小。例 如，在63 _間距之應用中使用了直徑25 _的線，而在兄 叫與44叫間距之應用中要使用直徑20.3 _的線。現在已 經發展到能在37μηι間距之應用中使用直徑17_的線。 線直徑的減小給操作及絲焊造成困難。在模造階段，使 用更小直徑線的零件容易遭到更多線掃除拒絕，這會造成 線短路。此等線掃除及短路可藉由使用絕緣或塗佈線來減 少。然而，當使用塗佈線，特別是為該第二焊接使用時， 很難獲得良好的焊接品質。即’一絲焊機要在裝置焊墊處 進行第一焊接，並在載體焊墊處進行第二焊接。使用絕緣 線的一普遍問題是在該第二焊接上不能黏合。
O:\91\91206.DOC 1246731 【發明内容】 、本^ ^提供-種使用標準超聲波絲烊機的方法，其可 善5亥第—焊接的痒接品質，产而、隹 ^ 應用中的使用。 ★而進一步提高絕緣線在絲谭 【實施方式】 /文中參考附圖所作的詳細說明旨在說明本發明目前的 較佳具體實施例，並非代表 、 ^ 非代表本鲞明的唯一實施形式。應明 白，藉由包含在本發明之精φ ^ 精神及乾彆内的不同具體實施 例，可貫現相同或相當的功能。 為方便說明’圖式中的某些特徵被放大，圖式及直中的 兀件不—定為正確的比例。然而，熟習此項技 明白此類細節。圖式中，相鬥沾私谷易 α式甲相同的數字係用來表示相同的元 件。 树明為—電性連接，用於連接U置之—焊塾及 一第二裳置之-焊墊。該電性連接包括一第一絲焊，用於 將-絕緣焊線之-第一部分固定至該第一裝置焊塾。一第 二絲焊將該絕緣焊線之—第二部分固定至該第二裝置焊 墊。—凸起形成於該第二絲焊之上，其可提高該第二絲焊 的剝離強度。該凸起係從該第二絲焊之一中心處偏移，偏 移距離較佳應約為凸起之一直徑的一半。在一較佳具體實 施例中，該凸起係由金形成。 、 壯本發明亦提供一種用於將一第一裝置電性連接至一第二 j的方法。該方法包括形成一第一焊接、一第二焊接及 4第一#接上之一凸起的步驟。該第一焊接係藉由將一絕
0:^1\912〇6.D〇C 1246731 2之-第_部分料至該第—裝置之—焊塾上而形成， =性連接該焊線㈣第—裝置。該第二焊接储由將該 :緣線之一第二部分絲焊至該第二裝置之-焊塾上而形 、’其電性連接該第—裝置與第二裝置。形成於該第二焊 妾上的凸起係、從該第二焊接之—中心處偏移。 現在參考圖卜其顯示依據本發明之—電性連接的—放大 :視圖：該電性連接使一第一裝置之—焊塾ι〇與—第二裝 之…焊塾12連接，從而使該等第-與第二裝置電性連 。该第-裝置可以為一半導體裝置，諸如形成於—矽基 :上的-積體電路。該第二裝置亦可以為一半導體震置， =° 一堆疊晶粒組態中-底部或下部晶粒。然而在目前的 季父仏具體貫施例中兮楚— J T W亥弟一I置為一載體，且第二裝置焊 W2為該載體之—引線。該等第_與第二袭置及其焊塾之 類型已為熟習此項技術者所瞭解，且無須為完全理解本發 明而做詳細說明。 該電性連接包括—絕緣焊線14，其具有-第-絲焊16, 將絕緣坪線14之一第-部分或端部固定至第-裝置焊塾10 ^。:第二絲焊18將絕緣焊線14之一第二部分固定至第二 ^置焊塾12上。在目前的較佳具體實施例中，第-絲焊16 為一球形焊接’第二絲焊18為一針腳形焊接。 々桁Π°絲丈干」公涊為指晶片與基板經由線之互連。將該 等線接合至¥墊取常用的方法或是經由熱超聲波焊接或是 =波焊接。超聲波料使用振動與力的組合來摩擦線盘 文干墊間的介面，造成届邱、、w^ I风局邛Μ度升回，從而促進橫跨邊界之
O:\91\91206.DOC 1246731 -子的擴散。而熱超聲波焊接除振 其進一步促進了材料的移動。在球形焊接中^了熱， 保持線。使形成於該線之H球體 =細管 受壓。該球體可以氫焰或火花方弋开 "細官表面 隨後’當其對著該第，保持該球趙: 二=波振動，將球雜焊接至該晶粒上。此舉稱為 干接至曰曰粒上，將仍保持線的該毛細 e私至―弟二烊墊之上’料墊將與第-料電性連接。 要形成-針腳形焊接，需使線正對第二焊墊受壓，形成_ ，形燁接。錢再:欠施加H皮能量，直至將線焊接至 第一 4墊。隨後將毛細管提g，從該焊接移開，折斷線。 此針腳形焊接稱為第二焊接。針腳形焊接與球形焊接均為 熟S此項技術者所熟知。 雖然針腳形焊接已為吾人所熟知，但在使用絕緣線時， 很難獲得一良好的第二絲焊。通常，不牢固的第二焊接係 由於在線與焊接引線之間仍存在線絕緣，阻止了良好黏 合。即在線與引線之間僅有少量接觸區域，其位於第二焊 接之尾部區域。在該線對面，將該絕緣體之一更大部分在 楔形構造過程中拿掉。該不牢固的黏合在線剝離測試結果 中顯而易見。在一線剝離測試中，將一鉤置於最接近第二 焊接的線之下，並施加一提升力，藉此測試第二焊接的強 度。絕緣精細線及絕緣超精細線通常顯示出甚低的線剝離 強度。為克服低線剝離強度問題，於第二絲焊18上形成一 凸起20。
O:\91\91206.DOC 1246731 見在多考圖2 ’其顯示該第二絲焊1 8之一大幅放大的示意 圖。可以看到，凸起2〇係從第二絲焊丨8處偏移。在本發明 目刖之一較佳具體實施例中，凸起2〇偏移的距離約為其直 桎「d」的一半。凸起2〇的直徑在相當程度上需依據其得以 形成的線14的直徑。對於直徑為25 μιη的線，凸起2〇的直徑 可以為約40至約50 μηι。例如，就乃μπι〇密爾）線而言，凸 起20的直徑可控制在約45與55 之間。為提供良好黏合， 凸起20較佳應由與線14之導電材料相同的材料形成。例 如，若線14具有一金質導電核心，則凸起2〇較佳應由金形 成。在本發明之-具體實施例中，—⑼㈣塗佈金線係絲谭 至一 76 μιη X 76 μηι的焊墊上。形成於該焊墊上之凸起的直 徑約為3 5 μηι。 凸起20可以與形成第一絲焊16相同之方式，諸如採用氫 焰或高壓電火花的方式形成或沈積於第二裝置焊墊丨之之 上。更特定言之，一球體係形成於該絲焊機中之線14的一 鈿形成的球體正對絲焊機毛細管的表面受壓。該毛細管 對著第二絲焊18推動球體，隨後，當其對著焊墊12保持該 球體時，施加超聲波振動，將球體焊接至第二絲焊Μ及焊 墊12。一旦球體已洋接至焊墊12 ’即可在上提毛細管時， 藉由夾住毛細管上的線來切斷已焊接球體上的線^球體上 方的線區域最不牢固，將其空出，僅留下凸起2〇。凸起2〇 可採用目前可利用的絲焊機，諸如Kulicke與s〇ffa 8〇6〇絲烊 機來形成，而無須修改毛細管。 圖3為圖1之焊線14之放大斷面圖。通常，金與鋁為製造
O:\91\91206.DOC -10- 1246731 谭線最常用的元件。金盘扭的 四 金，、鋁均有硬度及延展性，並在多數 ^兄下”有類似的電阻。為加強穩定性’有時用諸如鈹、 約等摻雜劑對金線摻雜。直徑較小的銘線常常用石夕或有時 用鎂來4 #，以改善其折斷負荷及延長參數。除金與銘之 外，亦已知有銅、把合金、翻或銀質烊線。本發明之焊線 14包括塗佈有電絕緣材料24的一導電核心22，適用於精細 間距及超精細間距之絲嬋。谭線14具有小於約55 μηι且可小 ;μπι之直徑。核心22較佳應包括金或銅，且絕緣材料 2/為一有機絕緣塗層，厚度為約〇5至約2〇 _，在流通空 氣球體形成過程中可纟曹夸献八4力 狂Y J延又熱刀解。而且，焊線14較佳應具 有約180。至260οΓ66 —、、四侖τ 朴丄 王C的/皿度丁g，其中，丁g指軟化溫度，亦稱 為玻璃轉變溫度。 參考圖4,其顯示不同線與絲谭之剝離強度的曲線圖。點 4〇表示採用標準楔形焊接的一標準2〇㈣直徑(未塗佈)線的 制離強度約為7 gm。點42表示依據本發明採用標準楔形焊 接與凸起20的-標準2〇 μιη直徑（未塗佈）線的剝離強度約為 6.5gm，比無凸起的焊接小〇 5gm。點44表示採用標準楔形 知接的一 23 μιη直徑塗佈線的剝離強度。該剝離強度僅約為 2 gm此強度甚低。與此相反，點46表示依據本發明採用 標準楔形焊接與凸起2〇的該23 μιη直徑塗佈線的剝離強 度。包括凸起20的該塗佈線與谭接具有約51㈣的剝離強 度，與無凸起焊接相比，此係、—重大改善。然@，其結果 卻有些令人吃驚，因為事實發現，當該絲焊包括一凸起時， 未塗佈線的剝離強度降低了。
O:\91\91206.DOC -11 - 1246731 業已發現本發明能提供以下好處：⑷當以一標準絲焊機 使用絕緣線時，由於該第二焊接處的「未能在引線上黏 合」，零件拒絕現象幾乎可以消除；（b)以一增加的線拉動/ 線剝離強度來提高位於第二焊接處的絕緣線的邊界性；⑷ 热須採用新的或修改過的絲焊設備，且在執行該第二焊接 刼作則亦不需要進行任何額外的升級來移除該線上的絕緣 層，（d)減少了模造處的線短路拒絕現象；（e)無須使用具有 甚精細之填充劑的昂貴模造化合物；⑴使用的精細塗佈線 能夠橫向焊接；以及（g)焊墊/晶粒設計規則無須僅限於周邊 焊墊。 本發明較佳具體實施例之說明係為了說明及描述本發 月並不希望包攬無遺或將本發明限於所揭露的形式。熟 習此項技術者應明白，可對上述具體實施例進行修改，而 不背離本發明之寬廣的發明概念。本發明適用於所有絲焊 封裝類型，包括但不限於BGA、qfn、QFp、π%、 CUEBGA、TBG^TS〇p封裝。因此，應明瞭本發明不限 定於所揭示的特定具體實施例，而是涵蓋由所附申請專利 範圍定義的本發明之精神及範疇内的修改。 【圖式簡單說明】 當配合附圖詳讀前面的發明内容及上文中的本發明一較 佳具體實施例之詳細說明時，將可更明白本發明。基於解 。兒本毛月之目的，圖式中顯示本發明目前的較佳具體實施 例。但是，應明白，本發明不限定於如圖所示的精確配置 及機構。圖式中： O:\91\91206.DOC -12- 1246731 圖1為依據本發明之一電性連接的放大侧視圖，· 圖2為圖1之第二絲焊之一放大側視圖； 圖3為圖1之焊線的放大斷面圖，·以及 圖4為使用各種線及絲焊的該第二焊接之剝離強度的曲 線圖。 【圖式代表符號說明】 10 焊墊 12 焊墊 14 絕緣焊線 16 第一絲焊 18 弟二絲焊 20 凸起 22 導電核心 24 絕緣材料 40 、 42 、 44 、 46 點 d 直徑
O:\91\91206.DOC 13

Claims (1)

  1. 1^4^7(3^33 號專利申請案 中文申請專利範圍替換本(94年7月） 拾、申請專利範圍·· 1· 一種將一第一裝置與一第二裝置電性連接之方法，該方 法包括如下步驟： 藉由將一絕緣線之一第一部分絲焊至該第一裝置之一 焊塾上而形力-第-焊#，從❿電性連接該焊線與該第 一裝置； X 藉由將該絕緣線之一第二部分絲焊至該第二裝置之一 焊墊上而形成一第二焊接，從而電性連接該第一裝置盥 該第二裝置；以及 ^ 於該第二焊接上形成^一 /L Jbp , 心成凸起，其中該凸起係從該第二 焊接之一中心處偏移。 2. ^申請專利範圍P項之電性連接方法，其中位於該第二 焊接上的該凸起偏移的距離約為該凸起之一直徑的一 其中該凸起具有 其中該凸起係由 3·如申請專利範圍第1項之電性連接方法 約40至50 μπι的一直徑。 4·如申請專利範圍第1項之電性連接方法 金形成。 5.如申請專利範圍第i項之 &目士 逆接方法，其中該絕緣線 括八有—有機絕緣塗層的-金或鋼線之… 6·如申請專利範圍第5 .? 电性連接方法，其中該絕緣線 有小於或專於約2 5 μχη的一直彳里。 7·如申請專利範圍第6項之 ^ ^ , Λ 連接方法，其中該絕緣塗 具有約為〇·5 μπι至2.0 的一 O:\91\91206-940727.DOC 1246731 8. 9. 10. 11. 12. 13. 14. 15. 如申請專利範圍第7項之電性連接方法，其中該絕緣塗層 具有約為180。至260°C的一温度Tg。 如申請專利項之電性連接方法，其中該第一焊接 包括一球形焊接。 如申請專利範圍第1項之電性連接方法，#中該第二焊接 包括一針腳形焊接。 如申請專利範圍第丨項之電性連接方法，其中該第二裝置 包括一載體。 種提形焊接至-引線的_塗佈線之—第二絲焊之 強度之方法，該方法包括如下步驟： β於該第二焊接上形成一凸起，其中該凸起係從該第二 焊接之一中心處偏移。 種用於連接-第一農置之一悍塾及一第二裝置之一焊 塾之電性連接，該電性連接包括： 一弟一絲谭，其係將一絕緣焊線之一第一部分固定至 該第一裝置焊墊上； :第二絲焊，其係將該絕緣焊線之一第二部分固定至 遠第二裝置焊塾上；以及 -凸起’其係形成於該第二絲焊之上，其中該凸起係 從該第二絲焊處偏移。 如申請專利範圍第13項之電性連接，其中位於該第二焊 接上的該凸起偏移的距離約為該凸起之一直徑的一半。 如申請專利範圍第13項之電性連接，其中該凸起具有約 40至50 μηι的一直徑。 0:\91\91206-940727.DOC
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