TWD200031S - 基板處理裝置用電氣爐 - Google Patents
基板處理裝置用電氣爐Info
- Publication number
- TWD200031S TWD200031S TW107302983F TW107302983F TWD200031S TW D200031 S TWD200031 S TW D200031S TW 107302983 F TW107302983 F TW 107302983F TW 107302983 F TW107302983 F TW 107302983F TW D200031 S TWD200031 S TW D200031S
- Authority
- TW
- Taiwan
- Prior art keywords
- electric furnace
- substrate processing
- processing equipment
- design
- article
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 4
- 238000001816 cooling Methods 0.000 abstract 1
- 239000003507 refrigerant Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2018-4004F JP1611565S (cs) | 2018-02-27 | 2018-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD200031S true TWD200031S (zh) | 2019-10-01 |
Family
ID=63169034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW107302983F TWD200031S (zh) | 2018-02-27 | 2018-05-28 | 基板處理裝置用電氣爐 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD860420S1 (cs) |
| JP (1) | JP1611565S (cs) |
| TW (1) | TWD200031S (cs) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP1731672S (cs) * | 2022-03-15 | 2022-12-08 | ||
| JP1731671S (cs) * | 2022-03-15 | 2022-12-08 | ||
| USD1058783S1 (en) | 2024-08-02 | 2025-01-21 | Shanghai Qidian Industry and Trade Co., Ltd. | Melting furnace |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD383525S (en) * | 1995-11-21 | 1997-09-09 | Purcell Steven J | Insulated water heater for hydrotherapy baths, spas, and skid packs |
| US20130192522A1 (en) * | 2010-12-30 | 2013-08-01 | Poole Ventura, Inc. | Thermal diffusion chamber with convection compressor |
| US20110249960A1 (en) * | 2011-01-28 | 2011-10-13 | Poole Ventura, Inc. | Heat Source Door For A Thermal Diffusion Chamber |
| JP5702657B2 (ja) * | 2011-04-18 | 2015-04-15 | 東京エレクトロン株式会社 | 熱処理装置 |
| US9171746B2 (en) * | 2011-09-06 | 2015-10-27 | Arsalan Emami | Heater elements with enhanced cooling |
| US9167630B2 (en) * | 2011-10-17 | 2015-10-20 | David E. Seitz | Tankless water heater |
| WO2014098943A1 (en) * | 2012-12-21 | 2014-06-26 | Eemax, Inc. | Next generation bare wire water heater |
| US10132525B2 (en) * | 2013-03-15 | 2018-11-20 | Peter Klein | High thermal transfer flow-through heat exchanger |
| USD754066S1 (en) * | 2014-03-12 | 2016-04-19 | Mitsubishi Electric Corporation | Turbine generator |
| USD753590S1 (en) * | 2014-03-12 | 2016-04-12 | Mitsubishi Electric Corporation | Turbine generator |
| USD790048S1 (en) * | 2015-05-15 | 2017-06-20 | Arsalan Emami | Industrial heater |
| JP1568552S (cs) * | 2016-02-12 | 2017-02-06 | ||
| JP1568553S (cs) * | 2016-02-12 | 2017-02-06 | ||
| WO2017218550A2 (en) * | 2016-06-13 | 2017-12-21 | Warren Engine Company, Inc. | Energy recovery system |
| WO2018027208A1 (en) * | 2016-08-05 | 2018-02-08 | Sandvik Thermal Process Inc. | Thermal process device with non-uniform insulation |
| JP1582475S (cs) | 2016-10-14 | 2017-07-31 | ||
| CN110709974B (zh) * | 2017-05-19 | 2023-08-01 | 应用材料公司 | 用于将液体和固体流出物收集并随后反应成气体流出物的设备 |
-
2018
- 2018-02-27 JP JPD2018-4004F patent/JP1611565S/ja active Active
- 2018-05-28 TW TW107302983F patent/TWD200031S/zh unknown
- 2018-07-12 US US29/656,369 patent/USD860420S1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP1611565S (cs) | 2018-08-20 |
| USD860420S1 (en) | 2019-09-17 |
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