TW533514B - Physical vapor deposition target/backing plate assemblies; and methods of forming physical vapor deposition target/backing plate assemblies - Google Patents
Physical vapor deposition target/backing plate assemblies; and methods of forming physical vapor deposition target/backing plate assemblies Download PDFInfo
- Publication number
- TW533514B TW533514B TW090126576A TW90126576A TW533514B TW 533514 B TW533514 B TW 533514B TW 090126576 A TW090126576 A TW 090126576A TW 90126576 A TW90126576 A TW 90126576A TW 533514 B TW533514 B TW 533514B
- Authority
- TW
- Taiwan
- Prior art keywords
- adhesive layer
- layer
- target
- component
- pvd
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 64
- 238000005240 physical vapour deposition Methods 0.000 title abstract description 29
- 238000000429 assembly Methods 0.000 title abstract 5
- 230000000712 assembly Effects 0.000 title abstract 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 46
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 46
- 239000010936 titanium Substances 0.000 claims abstract description 46
- 239000010949 copper Substances 0.000 claims abstract description 30
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 27
- 229910052802 copper Inorganic materials 0.000 claims abstract description 27
- 239000000203 mixture Substances 0.000 claims abstract description 19
- 238000009792 diffusion process Methods 0.000 claims abstract description 17
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 15
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000010410 layer Substances 0.000 claims description 110
- 239000012790 adhesive layer Substances 0.000 claims description 101
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 36
- 230000004907 flux Effects 0.000 claims description 30
- 229910052759 nickel Inorganic materials 0.000 claims description 17
- 229910052715 tantalum Inorganic materials 0.000 claims description 13
- 230000008021 deposition Effects 0.000 claims description 12
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 12
- 238000000576 coating method Methods 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 9
- 229910052742 iron Inorganic materials 0.000 claims description 9
- 229910052697 platinum Inorganic materials 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 229910019222 CoCrPt Inorganic materials 0.000 claims description 7
- 229910008651 TiZr Inorganic materials 0.000 claims description 7
- 229910052804 chromium Inorganic materials 0.000 claims description 7
- 229910052748 manganese Inorganic materials 0.000 claims description 7
- -1 AlCuFe Inorganic materials 0.000 claims description 6
- 229910018979 CoPt Inorganic materials 0.000 claims description 6
- 229910015372 FeAl Inorganic materials 0.000 claims description 6
- 229910015136 FeMn Inorganic materials 0.000 claims description 6
- 229910052758 niobium Inorganic materials 0.000 claims description 6
- 238000001020 plasma etching Methods 0.000 claims description 5
- 239000002904 solvent Substances 0.000 claims description 5
- 229910052718 tin Inorganic materials 0.000 claims description 5
- 229910052723 transition metal Inorganic materials 0.000 claims description 5
- 150000003624 transition metals Chemical class 0.000 claims description 5
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 229910052702 rhenium Inorganic materials 0.000 claims description 3
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 3
- 229910052735 hafnium Inorganic materials 0.000 claims description 2
- 239000004615 ingredient Substances 0.000 claims 4
- 229910052778 Plutonium Inorganic materials 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- OYEHPCDNVJXUIW-UHFFFAOYSA-N plutonium atom Chemical compound [Pu] OYEHPCDNVJXUIW-UHFFFAOYSA-N 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
- 238000009941 weaving Methods 0.000 claims 1
- 239000000463 material Substances 0.000 description 15
- 150000002500 ions Chemical class 0.000 description 10
- 230000007704 transition Effects 0.000 description 10
- 238000000151 deposition Methods 0.000 description 9
- 229910000679 solder Inorganic materials 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 229910000831 Steel Inorganic materials 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 230000032798 delamination Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000013077 target material Substances 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 239000002390 adhesive tape Substances 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 241000270295 Serpentes Species 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000012476 oxidizable substance Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052704 radon Inorganic materials 0.000 description 1
- SYUHGPGVQRZVTB-UHFFFAOYSA-N radon atom Chemical compound [Rn] SYUHGPGVQRZVTB-UHFFFAOYSA-N 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3435—Target holders (includes backing plates and endblocks)
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/2855—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by physical means, e.g. sputtering, evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Analytical Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Plasma & Fusion (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/699,899 US6376281B1 (en) | 2000-10-27 | 2000-10-27 | Physical vapor deposition target/backing plate assemblies |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW533514B true TW533514B (en) | 2003-05-21 |
Family
ID=24811389
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW090126576A TW533514B (en) | 2000-10-27 | 2001-10-26 | Physical vapor deposition target/backing plate assemblies; and methods of forming physical vapor deposition target/backing plate assemblies |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US6376281B1 (cg-RX-API-DMAC7.html) |
| EP (1) | EP1352104A2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2004523652A (cg-RX-API-DMAC7.html) |
| KR (1) | KR20030045138A (cg-RX-API-DMAC7.html) |
| CN (1) | CN1494601A (cg-RX-API-DMAC7.html) |
| AU (1) | AU2002249859A1 (cg-RX-API-DMAC7.html) |
| TW (1) | TW533514B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2002061167A2 (cg-RX-API-DMAC7.html) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3554835B2 (ja) * | 1997-08-19 | 2004-08-18 | 株式会社小松製作所 | バッキングプレートの製造方法 |
| US6619537B1 (en) * | 2000-06-12 | 2003-09-16 | Tosoh Smd, Inc. | Diffusion bonding of copper sputtering targets to backing plates using nickel alloy interlayers |
| JP3905295B2 (ja) * | 2000-10-02 | 2007-04-18 | 日鉱金属株式会社 | 高純度コバルトターゲットと銅合金製バッキングプレートとの拡散接合ターゲット組立体及びその製造方法 |
| WO2003106733A1 (en) * | 2002-06-14 | 2003-12-24 | Tosoh Smd, Inc. | Target and method of diffusion bonding target to backing plate |
| US6848608B2 (en) * | 2002-10-01 | 2005-02-01 | Cabot Corporation | Method of bonding sputtering target materials |
| WO2004094688A1 (en) * | 2003-04-02 | 2004-11-04 | Honeywell International Inc. | Pvd target/backing plate constructions; and methods of forming pvd target/backing plate constructions |
| US20050016833A1 (en) * | 2003-04-17 | 2005-01-27 | Shannon Lynn | Plasma sprayed indium tin oxide target for sputtering |
| WO2005019493A2 (en) * | 2003-08-11 | 2005-03-03 | Honeywell International Inc. | Target/backing plate constructions, and methods of forming them |
| US20090078570A1 (en) * | 2003-08-11 | 2009-03-26 | Wuwen Yi | Target/backing plate constructions, and methods of forming target/backing plate constructions |
| FR2883150B1 (fr) * | 2005-03-15 | 2007-04-20 | Seb Sa | Surface de cuisson facile a nettoyer et article electromenager comportant une telle surface |
| US20090186195A1 (en) * | 2006-09-08 | 2009-07-23 | Reactive Nanotechnologies, Inc. | Reactive Multilayer Joining With Improved Metallization Techniques |
| WO2008079461A2 (en) * | 2006-09-08 | 2008-07-03 | Reactive Nanotechnologies, Inc. | Reactive multilayer joining with improved metallization techniques |
| CN101542011B (zh) | 2007-02-09 | 2011-11-23 | Jx日矿日石金属株式会社 | 由高熔点难烧结物质构成的靶、靶-背衬板组件的制造方法 |
| US20110048954A1 (en) * | 2009-09-03 | 2011-03-03 | U.S. Government As Represented By The Secretary Of The Army | Enhanced solderability using a substantially pure nickel layer deposited by physical vapor deposition |
| CN103210116A (zh) * | 2010-11-17 | 2013-07-17 | 株式会社爱发科 | 背衬板、靶组件和溅射靶 |
| JP5779491B2 (ja) * | 2011-12-13 | 2015-09-16 | 株式会社アルバック | ターゲット装置、スパッタリング装置、ターゲット装置の製造方法 |
| US20160053365A1 (en) * | 2014-08-20 | 2016-02-25 | Honeywell International Inc. | Encapsulated composite backing plate |
| CN111424245B (zh) * | 2020-04-24 | 2022-07-01 | 先导薄膜材料（广东）有限公司 | 一种钴钽锆靶材的制备方法 |
| US10973908B1 (en) | 2020-05-14 | 2021-04-13 | David Gordon Bermudes | Expression of SARS-CoV-2 spike protein receptor binding domain in attenuated salmonella as a vaccine |
| CN113667948A (zh) * | 2021-07-26 | 2021-11-19 | 中信戴卡股份有限公司 | 一种铝合金车轮表面真空镀膜方法 |
| CN116275338A (zh) * | 2023-03-29 | 2023-06-23 | 宁波江丰电子材料股份有限公司 | 一种MoTaNb靶材与铜背板的焊接方法 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5936411A (ja) | 1982-08-23 | 1984-02-28 | Seiko Instr & Electronics Ltd | Ｇｔカツト水晶振動子 |
| JPS60181269A (ja) * | 1984-02-27 | 1985-09-14 | Matsushita Electric Ind Co Ltd | スパツタ−タ−ゲツト |
| JPS61163208A (ja) | 1985-01-11 | 1986-07-23 | Sumitomo Metal Ind Ltd | 熱間継目無鋼管圧延用工具の熱処理方法 |
| JPH0677805B2 (ja) * | 1986-07-10 | 1994-10-05 | 株式会社神戸製鋼所 | スパツタリング用タ−ゲツトのボンデイング方法 |
| JPH0786700B2 (ja) | 1987-03-14 | 1995-09-20 | コニカ株式会社 | 静電像現像用トナ− |
| JPH0273971A (ja) * | 1988-09-08 | 1990-03-13 | Hitachi Metals Ltd | スパッタリングターゲット |
| JPH0586465A (ja) * | 1991-06-28 | 1993-04-06 | Mitsubishi Materials Corp | スパツタリング用ターゲツト及びその製造方法 |
| US5282943A (en) * | 1992-06-10 | 1994-02-01 | Tosoh Smd, Inc. | Method of bonding a titanium containing sputter target to a backing plate and bonded target/backing plate assemblies produced thereby |
| US5693203A (en) * | 1992-09-29 | 1997-12-02 | Japan Energy Corporation | Sputtering target assembly having solid-phase bonded interface |
| US5522535A (en) * | 1994-11-15 | 1996-06-04 | Tosoh Smd, Inc. | Methods and structural combinations providing for backing plate reuse in sputter target/backing plate assemblies |
| US5962923A (en) * | 1995-08-07 | 1999-10-05 | Applied Materials, Inc. | Semiconductor device having a low thermal budget metal filling and planarization of contacts, vias and trenches |
| US5799860A (en) * | 1995-08-07 | 1998-09-01 | Applied Materials, Inc. | Preparation and bonding of workpieces to form sputtering targets and other assemblies |
| US5863398A (en) | 1996-10-11 | 1999-01-26 | Johnson Matthey Electonics, Inc. | Hot pressed and sintered sputtering target assemblies and method for making same |
| NL1008197C2 (nl) | 1998-02-04 | 1999-08-05 | Stork Screens Bv | Werkwijze voor het vervaardigen van een drager met een afscherming voor stoorstraling, alsmede afschermingsmateriaal. |
| US6183686B1 (en) * | 1998-08-04 | 2001-02-06 | Tosoh Smd, Inc. | Sputter target assembly having a metal-matrix-composite backing plate and methods of making same |
| US6071389A (en) * | 1998-08-21 | 2000-06-06 | Tosoh Smd, Inc. | Diffusion bonded sputter target assembly and method of making |
| US6113761A (en) | 1999-06-02 | 2000-09-05 | Johnson Matthey Electronics, Inc. | Copper sputtering target assembly and method of making same |
-
2000
- 2000-10-27 US US09/699,899 patent/US6376281B1/en not_active Expired - Fee Related
-
2001
- 2001-10-19 CN CNA018181201A patent/CN1494601A/zh active Pending
- 2001-10-19 EP EP01998103A patent/EP1352104A2/en not_active Withdrawn
- 2001-10-19 KR KR10-2003-7005724A patent/KR20030045138A/ko not_active Withdrawn
- 2001-10-19 JP JP2002561098A patent/JP2004523652A/ja not_active Withdrawn
- 2001-10-19 WO PCT/US2001/050345 patent/WO2002061167A2/en not_active Ceased
- 2001-10-19 AU AU2002249859A patent/AU2002249859A1/en not_active Abandoned
- 2001-10-26 TW TW090126576A patent/TW533514B/zh not_active IP Right Cessation
-
2002
- 2002-01-03 US US10/040,020 patent/US6649449B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP1352104A2 (en) | 2003-10-15 |
| KR20030045138A (ko) | 2003-06-09 |
| US6376281B1 (en) | 2002-04-23 |
| WO2002061167A3 (en) | 2003-07-24 |
| CN1494601A (zh) | 2004-05-05 |
| JP2004523652A (ja) | 2004-08-05 |
| US6649449B2 (en) | 2003-11-18 |
| US20020068386A1 (en) | 2002-06-06 |
| AU2002249859A1 (en) | 2002-08-12 |
| WO2002061167A2 (en) | 2002-08-08 |
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