TW409322B - Probe end cleaning sheet - Google Patents

Probe end cleaning sheet Download PDF

Info

Publication number
TW409322B
TW409322B TW088102086A TW88102086A TW409322B TW 409322 B TW409322 B TW 409322B TW 088102086 A TW088102086 A TW 088102086A TW 88102086 A TW88102086 A TW 88102086A TW 409322 B TW409322 B TW 409322B
Authority
TW
Taiwan
Prior art keywords
probe
cleaning
sheet
probe tip
film
Prior art date
Application number
TW088102086A
Other languages
English (en)
Chinese (zh)
Inventor
Masao Okubo
Shunichiro Nishizaki
Shinichiro Furusaki
Teruhisa Sakata
Original Assignee
Japan Electronic Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Electronic Materials filed Critical Japan Electronic Materials
Application granted granted Critical
Publication of TW409322B publication Critical patent/TW409322B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • B24B29/04—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces for rotationally symmetrical workpieces, e.g. ball-, cylinder- or cone-shaped workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/22—Rubbers synthetic or natural

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Tests Of Electronic Circuits (AREA)
TW088102086A 1998-02-20 1999-02-10 Probe end cleaning sheet TW409322B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10056234A JPH11238768A (ja) 1998-02-20 1998-02-20 プローブ先端クリーニングシート

Publications (1)

Publication Number Publication Date
TW409322B true TW409322B (en) 2000-10-21

Family

ID=13021424

Family Applications (1)

Application Number Title Priority Date Filing Date
TW088102086A TW409322B (en) 1998-02-20 1999-02-10 Probe end cleaning sheet

Country Status (6)

Country Link
US (1) US20020028641A1 (ja)
EP (1) EP0937541A3 (ja)
JP (1) JPH11238768A (ja)
CN (1) CN1232288A (ja)
SG (1) SG71910A1 (ja)
TW (1) TW409322B (ja)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI417149B (zh) * 2009-12-03 2013-12-01 Int Test Solutions Inc 用以清除測試器界面接觸元件和支持硬體之設備、裝置與方法
US9825000B1 (en) 2017-04-24 2017-11-21 International Test Solutions, Inc. Semiconductor wire bonding machine cleaning device and method
US9833818B2 (en) 2004-09-28 2017-12-05 International Test Solutions, Inc. Working surface cleaning system and method
US10717618B2 (en) 2018-02-23 2020-07-21 International Test Solutions, Inc. Material and hardware to automatically clean flexible electronic web rolls
US10792713B1 (en) 2019-07-02 2020-10-06 International Test Solutions, Inc. Pick and place machine cleaning system and method
US11035898B1 (en) 2020-05-11 2021-06-15 International Test Solutions, Inc. Device and method for thermal stabilization of probe elements using a heat conducting wafer
US11211242B2 (en) 2019-11-14 2021-12-28 International Test Solutions, Llc System and method for cleaning contact elements and support hardware using functionalized surface microfeatures
US11318550B2 (en) 2019-11-14 2022-05-03 International Test Solutions, Llc System and method for cleaning wire bonding machines using functionalized surface microfeatures
US11756811B2 (en) 2019-07-02 2023-09-12 International Test Solutions, Llc Pick and place machine cleaning system and method

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19952183B4 (de) * 1999-10-29 2008-11-06 Micronas Gmbh Einrichtung zur Spitzenformung
JP2002326169A (ja) * 2001-05-02 2002-11-12 Nihon Micro Coating Co Ltd 接触子クリーニングシート及び方法
US6908364B2 (en) 2001-08-02 2005-06-21 Kulicke & Soffa Industries, Inc. Method and apparatus for probe tip cleaning and shaping pad
US7182672B2 (en) 2001-08-02 2007-02-27 Sv Probe Pte. Ltd. Method of probe tip shaping and cleaning
JP2005249409A (ja) 2004-03-01 2005-09-15 Oki Electric Ind Co Ltd プローブ針用クリーニングシート
JP4745814B2 (ja) * 2005-12-19 2011-08-10 東京エレクトロン株式会社 プローブの研磨部材
CN100504398C (zh) * 2005-12-22 2009-06-24 王志忠 安装在测试卡上的探针表面处理的方法
JP2008281413A (ja) * 2007-05-10 2008-11-20 Micronics Japan Co Ltd プローブのためのクリーニング装置
KR100893877B1 (ko) 2007-08-06 2009-04-20 윌테크놀러지(주) 프로브 카드용 니들 단부의 연마 방법
JP6279309B2 (ja) * 2013-12-20 2018-02-14 スリーエム イノベイティブ プロパティズ カンパニー 研磨用クッション、研磨装置、研磨方法、及び当該研磨方法により研磨された対象物を含む物品
JP6292397B2 (ja) * 2014-04-23 2018-03-14 富士紡ホールディングス株式会社 研磨パッド
JP6531344B2 (ja) * 2015-02-18 2019-06-19 株式会社東京精密 プローブ装置
DE102016119746B4 (de) * 2016-10-17 2024-02-08 Matuschek Meßtechnik GmbH Schleifscheibe
CN112720231B (zh) * 2020-12-30 2022-12-02 福建省佳美集团公司 一种陶瓷加工用抛光设备及抛光方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3135741B2 (ja) * 1993-05-07 2001-02-19 富士写真フイルム株式会社 研磨体
JP3305557B2 (ja) * 1995-04-10 2002-07-22 大日本印刷株式会社 研磨テープ、その製造方法および研磨テープ用塗工剤
JPH08294872A (ja) * 1995-04-27 1996-11-12 Fuji Photo Film Co Ltd 研磨体

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9833818B2 (en) 2004-09-28 2017-12-05 International Test Solutions, Inc. Working surface cleaning system and method
US10239099B2 (en) 2004-09-28 2019-03-26 International Test Solutions, Inc. Working surface cleaning system and method
US10406568B2 (en) 2004-09-28 2019-09-10 International Test Solutions, Inc. Working surface cleaning system and method
US10195648B2 (en) 2009-12-03 2019-02-05 International Test Solutions, Inc. Apparatuses, device, and methods for cleaning tester interface contact elements and support hardware
TWI417149B (zh) * 2009-12-03 2013-12-01 Int Test Solutions Inc 用以清除測試器界面接觸元件和支持硬體之設備、裝置與方法
US9825000B1 (en) 2017-04-24 2017-11-21 International Test Solutions, Inc. Semiconductor wire bonding machine cleaning device and method
US10361169B2 (en) 2017-04-24 2019-07-23 International Test Solutions, Inc. Semiconductor wire bonding machine cleaning device and method
US11155428B2 (en) 2018-02-23 2021-10-26 International Test Solutions, Llc Material and hardware to automatically clean flexible electronic web rolls
US10717618B2 (en) 2018-02-23 2020-07-21 International Test Solutions, Inc. Material and hardware to automatically clean flexible electronic web rolls
US10843885B2 (en) 2018-02-23 2020-11-24 International Test Solutions, Inc. Material and hardware to automatically clean flexible electronic web rolls
US11434095B2 (en) 2018-02-23 2022-09-06 International Test Solutions, Llc Material and hardware to automatically clean flexible electronic web rolls
US10792713B1 (en) 2019-07-02 2020-10-06 International Test Solutions, Inc. Pick and place machine cleaning system and method
US11756811B2 (en) 2019-07-02 2023-09-12 International Test Solutions, Llc Pick and place machine cleaning system and method
US11211242B2 (en) 2019-11-14 2021-12-28 International Test Solutions, Llc System and method for cleaning contact elements and support hardware using functionalized surface microfeatures
US11318550B2 (en) 2019-11-14 2022-05-03 International Test Solutions, Llc System and method for cleaning wire bonding machines using functionalized surface microfeatures
US11035898B1 (en) 2020-05-11 2021-06-15 International Test Solutions, Inc. Device and method for thermal stabilization of probe elements using a heat conducting wafer

Also Published As

Publication number Publication date
EP0937541A3 (en) 2002-07-10
EP0937541A2 (en) 1999-08-25
US20020028641A1 (en) 2002-03-07
SG71910A1 (en) 2000-04-18
CN1232288A (zh) 1999-10-20
JPH11238768A (ja) 1999-08-31

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MM4A Annulment or lapse of patent due to non-payment of fees