TW373242B - Chamber design with isolation valve to preserve vacuum during maintenance - Google Patents
Chamber design with isolation valve to preserve vacuum during maintenanceInfo
- Publication number
- TW373242B TW373242B TW087104734A TW87104734A TW373242B TW 373242 B TW373242 B TW 373242B TW 087104734 A TW087104734 A TW 087104734A TW 87104734 A TW87104734 A TW 87104734A TW 373242 B TW373242 B TW 373242B
- Authority
- TW
- Taiwan
- Prior art keywords
- chamber
- isolation valve
- during maintenance
- vacuum
- vacuum during
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
- C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/04—Pressure vessels, e.g. autoclaves
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Pressure Vessels And Lids Thereof (AREA)
- Cold Air Circulating Systems And Constructional Details In Refrigerators (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/828,250 US6103069A (en) | 1997-03-31 | 1997-03-31 | Chamber design with isolation valve to preserve vacuum during maintenance |
Publications (1)
Publication Number | Publication Date |
---|---|
TW373242B true TW373242B (en) | 1999-11-01 |
Family
ID=25251275
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW087104734A TW373242B (en) | 1997-03-31 | 1998-03-30 | Chamber design with isolation valve to preserve vacuum during maintenance |
Country Status (6)
Country | Link |
---|---|
US (1) | US6103069A (zh) |
EP (1) | EP0869199A1 (zh) |
JP (1) | JPH1150229A (zh) |
KR (1) | KR19980080903A (zh) |
SG (1) | SG54623A1 (zh) |
TW (1) | TW373242B (zh) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG90171A1 (en) * | 2000-09-26 | 2002-07-23 | Inst Data Storage | Sputtering device |
AU2002230793A1 (en) * | 2000-10-31 | 2002-05-15 | Applied Materials, Inc. | Method and apparatus for cleaning a deposition chamber |
GB0127251D0 (en) * | 2001-11-13 | 2002-01-02 | Nordiko Ltd | Apparatus |
DE10215040B4 (de) * | 2002-04-05 | 2019-02-21 | Leybold Optics Gmbh | Vorrichtung und Verfahren zum Be- und Entladen einer Vakuumkammer |
JP4294976B2 (ja) * | 2003-02-27 | 2009-07-15 | 東京エレクトロン株式会社 | 基板処理装置 |
US7300558B2 (en) * | 2003-10-21 | 2007-11-27 | Seagate Technology Llc | Rapid cycle time gas burster |
US20050092253A1 (en) * | 2003-11-04 | 2005-05-05 | Venkat Selvamanickam | Tape-manufacturing system having extended operational capabilites |
KR100530335B1 (ko) * | 2003-12-24 | 2005-11-22 | 재단법인 포항산업과학연구원 | 플라즈마 멜트 스피너용 전극봉 연마 장치 |
DE202004005216U1 (de) * | 2004-03-15 | 2004-07-15 | Applied Films Gmbh & Co. Kg | Umsetzbares Wartungsventil |
DE102004036170B4 (de) * | 2004-07-26 | 2007-10-11 | Schott Ag | Vakuumbeschichtungsanlage und Verfahren zur Vakuumbeschichtung und deren Verwendung |
US7780821B2 (en) * | 2004-08-02 | 2010-08-24 | Seagate Technology Llc | Multi-chamber processing with simultaneous workpiece transport and gas delivery |
KR100626791B1 (ko) * | 2004-12-17 | 2006-09-25 | 두산메카텍 주식회사 | 진공장치용 히터 |
JP4923450B2 (ja) * | 2005-07-01 | 2012-04-25 | 富士ゼロックス株式会社 | バッチ処理支援装置および方法、プログラム |
US20070084720A1 (en) * | 2005-07-13 | 2007-04-19 | Akihiro Hosokawa | Magnetron sputtering system for large-area substrates having removable anodes |
US20070012558A1 (en) * | 2005-07-13 | 2007-01-18 | Applied Materials, Inc. | Magnetron sputtering system for large-area substrates |
US8617672B2 (en) | 2005-07-13 | 2013-12-31 | Applied Materials, Inc. | Localized surface annealing of components for substrate processing chambers |
US20070012663A1 (en) * | 2005-07-13 | 2007-01-18 | Akihiro Hosokawa | Magnetron sputtering system for large-area substrates having removable anodes |
US20070012559A1 (en) * | 2005-07-13 | 2007-01-18 | Applied Materials, Inc. | Method of improving magnetron sputtering of large-area substrates using a removable anode |
DE102005037822A1 (de) * | 2005-08-08 | 2007-02-15 | Systec System- Und Anlagentechnik Gmbh & Co.Kg | Vakuumbeschichtung mit Kondensatentfernung |
US20070051616A1 (en) * | 2005-09-07 | 2007-03-08 | Le Hienminh H | Multizone magnetron assembly |
US20070056850A1 (en) * | 2005-09-13 | 2007-03-15 | Applied Materials, Inc. | Large-area magnetron sputtering chamber with individually controlled sputtering zones |
US20070056843A1 (en) * | 2005-09-13 | 2007-03-15 | Applied Materials, Inc. | Method of processing a substrate using a large-area magnetron sputtering chamber with individually controlled sputtering zones |
US7588668B2 (en) | 2005-09-13 | 2009-09-15 | Applied Materials, Inc. | Thermally conductive dielectric bonding of sputtering targets using diamond powder filler or thermally conductive ceramic fillers |
DE102005056324A1 (de) * | 2005-11-25 | 2007-06-06 | Aixtron Ag | CVD-Reaktor mit auswechselbarer Prozesskammerdecke |
US7981262B2 (en) | 2007-01-29 | 2011-07-19 | Applied Materials, Inc. | Process kit for substrate processing chamber |
US7942969B2 (en) | 2007-05-30 | 2011-05-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |
US20120152727A1 (en) * | 2010-11-24 | 2012-06-21 | Applied Materials, Inc. | Alkali Metal Deposition System |
CN102945788B (zh) * | 2011-08-16 | 2015-04-15 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 遮蔽装置及具有其的半导体处理设备 |
CN103031514B (zh) * | 2011-09-30 | 2015-09-02 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 遮蔽装置、具有其的pvd设备及pvd设备的控制方法 |
JP5787793B2 (ja) * | 2012-03-05 | 2015-09-30 | 株式会社東芝 | イオン源 |
WO2016040547A1 (en) * | 2014-09-11 | 2016-03-17 | Massachusetts Institute Of Technology | Processing system for small substrates |
BE1022682B1 (nl) * | 2015-01-11 | 2016-07-14 | Soleras Advanced Coatings Bvba | Een deksel met een sensorsysteem voor een configureerbaar meetsysteem voor een configureerbaar sputtersysteem |
EP3091561B1 (en) * | 2015-05-06 | 2019-09-04 | safematic GmbH | Sputter unit |
CN105047521B (zh) * | 2015-09-21 | 2017-05-17 | 北京凯尔科技发展有限公司 | 一种保持质谱内部真空条件下更换离子源的质谱仪 |
US11802340B2 (en) * | 2016-12-12 | 2023-10-31 | Applied Materials, Inc. | UHV in-situ cryo-cool chamber |
JP7061896B2 (ja) | 2018-03-02 | 2022-05-02 | 株式会社日立製作所 | 粒子線治療システムおよび粒子線治療システムの設備更新方法 |
US20200194234A1 (en) * | 2018-12-17 | 2020-06-18 | Lam Research Corporation | Vacuum chamber opening system |
KR102229688B1 (ko) * | 2019-02-13 | 2021-03-18 | 프리시스 주식회사 | 밸브모듈 및 이를 포함하는 기판처리장치 |
TWI762230B (zh) * | 2021-03-08 | 2022-04-21 | 天虹科技股份有限公司 | 遮擋機構及具有遮擋機構的基板處理腔室 |
US11933416B2 (en) | 2021-07-16 | 2024-03-19 | Changxin Memory Technologies, Inc. | Gate valve device, cleaning method and mechanical apparatus |
CN115621110A (zh) * | 2021-07-16 | 2023-01-17 | 长鑫存储技术有限公司 | 一种门阀装置、清洁方法和机械设备 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3206322A (en) * | 1960-10-31 | 1965-09-14 | Morgan John Robert | Vacuum deposition means and methods for manufacture of electronic components |
US3641973A (en) * | 1970-11-25 | 1972-02-15 | Air Reduction | Vacuum coating apparatus |
US3921572A (en) * | 1974-02-25 | 1975-11-25 | Ibm | Vacuum coating apparatus |
DE2940064A1 (de) * | 1979-10-03 | 1981-04-16 | Leybold-Heraeus GmbH, 5000 Köln | Vakuumaufdampfanlage mir einer ventilkammer, einer bedampfungskammer und einer verdampferkammer |
US4294678A (en) * | 1979-11-28 | 1981-10-13 | Coulter Systems Corporation | Apparatus and method for preventing contamination of sputtering targets |
US4519885A (en) * | 1983-12-27 | 1985-05-28 | Shatterproof Glass Corp. | Method and apparatus for changing sputtering targets in a magnetron sputtering system |
JPS60262969A (ja) * | 1984-06-11 | 1985-12-26 | Tdk Corp | スパツタタ−ゲツト装置 |
JP2859632B2 (ja) * | 1988-04-14 | 1999-02-17 | キヤノン株式会社 | 成膜装置及び成膜方法 |
IT1232241B (it) * | 1989-09-11 | 1992-01-28 | Cetev Cent Tecnolog Vuoto | Dispositivo per il caricamento veloce di substrati in impianti da vuoto |
JPH0733576B2 (ja) * | 1989-11-29 | 1995-04-12 | 株式会社日立製作所 | スパツタ装置、及びターゲツト交換装置、並びにその交換方法 |
DE4040856A1 (de) * | 1990-12-20 | 1992-06-25 | Leybold Ag | Zerstaeubungsanlage |
US5223112A (en) * | 1991-04-30 | 1993-06-29 | Applied Materials, Inc. | Removable shutter apparatus for a semiconductor process chamber |
DE4313353C2 (de) * | 1993-04-23 | 1997-08-28 | Leybold Ag | Vakuum-Beschichtungsanlage |
US5380414A (en) * | 1993-06-11 | 1995-01-10 | Applied Materials, Inc. | Shield and collimator pasting deposition chamber with a wafer support periodically used as an acceptor |
DE4408947C2 (de) * | 1994-03-16 | 1997-03-13 | Balzers Hochvakuum | Vakuumbehandlungsanlage |
JPH07335552A (ja) * | 1994-06-08 | 1995-12-22 | Tel Varian Ltd | 処理装置 |
-
1997
- 1997-03-31 US US08/828,250 patent/US6103069A/en not_active Expired - Fee Related
-
1998
- 1998-03-30 TW TW087104734A patent/TW373242B/zh active
- 1998-03-31 SG SG1998000676A patent/SG54623A1/en unknown
- 1998-03-31 EP EP98302504A patent/EP0869199A1/en not_active Withdrawn
- 1998-03-31 KR KR1019980011127A patent/KR19980080903A/ko not_active Application Discontinuation
- 1998-03-31 JP JP10125161A patent/JPH1150229A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
US6103069A (en) | 2000-08-15 |
EP0869199A1 (en) | 1998-10-07 |
JPH1150229A (ja) | 1999-02-23 |
KR19980080903A (ko) | 1998-11-25 |
SG54623A1 (en) | 1998-11-16 |
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