TW353630B - Apparatus and method for transferring objects, robot linkage and multi-chamber process system - Google Patents

Apparatus and method for transferring objects, robot linkage and multi-chamber process system

Info

Publication number
TW353630B
TW353630B TW086109913A TW86109913A TW353630B TW 353630 B TW353630 B TW 353630B TW 086109913 A TW086109913 A TW 086109913A TW 86109913 A TW86109913 A TW 86109913A TW 353630 B TW353630 B TW 353630B
Authority
TW
Taiwan
Prior art keywords
process system
transferring objects
rotatable
chamber process
robot linkage
Prior art date
Application number
TW086109913A
Other languages
English (en)
Inventor
Tony Kroeker
Ben Mooring
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of TW353630B publication Critical patent/TW353630B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20317—Robotic arm including electric motor

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Special Conveying (AREA)
TW086109913A 1996-07-15 1997-07-14 Apparatus and method for transferring objects, robot linkage and multi-chamber process system TW353630B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/679,868 US5789878A (en) 1996-07-15 1996-07-15 Dual plane robot

Publications (1)

Publication Number Publication Date
TW353630B true TW353630B (en) 1999-03-01

Family

ID=24728702

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086109913A TW353630B (en) 1996-07-15 1997-07-14 Apparatus and method for transferring objects, robot linkage and multi-chamber process system

Country Status (4)

Country Link
US (1) US5789878A (zh)
EP (1) EP0820090A3 (zh)
JP (1) JPH10175186A (zh)
TW (1) TW353630B (zh)

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US6530733B2 (en) 2000-07-27 2003-03-11 Nexx Systems Packaging, Llc Substrate processing pallet and related substrate processing method and machine
US6821912B2 (en) 2000-07-27 2004-11-23 Nexx Systems Packaging, Llc Substrate processing pallet and related substrate processing method and machine
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US6585478B1 (en) 2000-11-07 2003-07-01 Asm America, Inc. Semiconductor handling robot with improved paddle-type end effector
US6817640B2 (en) * 2001-06-28 2004-11-16 Applied Materials, Inc. Four-bar linkage wafer clamping mechanism
US7077619B2 (en) 2001-07-13 2006-07-18 3M Innovative Properties Company Continuous motion robotic manipulator
CN101894779B (zh) * 2003-08-29 2013-05-01 交叉自动控制公司 用于半导体处理的方法和装置
JP4515133B2 (ja) * 2004-04-02 2010-07-28 株式会社アルバック 搬送装置及びその制御方法並びに真空処理装置
JP4653419B2 (ja) * 2004-05-17 2011-03-16 芝浦メカトロニクス株式会社 真空処理装置
JP4653418B2 (ja) * 2004-05-17 2011-03-16 芝浦メカトロニクス株式会社 真空処理装置および光ディスクの製造方法
JP4727500B2 (ja) * 2006-05-25 2011-07-20 東京エレクトロン株式会社 基板搬送装置、基板処理システムおよび基板搬送方法
US7496423B2 (en) * 2007-05-11 2009-02-24 Applied Materials, Inc. Method of achieving high productivity fault tolerant photovoltaic factory with batch array transfer robots
US20080279658A1 (en) * 2007-05-11 2008-11-13 Bachrach Robert Z Batch equipment robots and methods within equipment work-piece transfer for photovoltaic factory
US20080279672A1 (en) * 2007-05-11 2008-11-13 Bachrach Robert Z Batch equipment robots and methods of stack to array work-piece transfer for photovoltaic factory
US20080292433A1 (en) * 2007-05-11 2008-11-27 Bachrach Robert Z Batch equipment robots and methods of array to array work-piece transfer for photovoltaic factory
US8760250B2 (en) 2009-06-02 2014-06-24 Correlated Magnetics Rsearch, LLC. System and method for energy generation
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JP2010253795A (ja) * 2009-04-24 2010-11-11 Seiko Epson Corp 記録装置
US9275783B2 (en) 2012-10-15 2016-03-01 Correlated Magnetics Research, Llc. System and method for demagnetization of a magnetic structure region
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JP2015514019A (ja) 2012-04-12 2015-05-18 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 独立して回転可能なウェストを有するロボットシステム、装置、および方法
US9298281B2 (en) 2012-12-27 2016-03-29 Correlated Magnetics Research, Llc. Magnetic vector sensor positioning and communications system
TWI614102B (zh) 2013-03-15 2018-02-11 應用材料股份有限公司 基板沉積系統、機械手臂運輸設備及用於電子裝置製造之方法
WO2014143846A1 (en) 2013-03-15 2014-09-18 Applied Materials, Inc Multi-position batch load lock apparatus and systems and methods including same
US9202738B2 (en) 2013-09-26 2015-12-01 Applied Materials, Inc. Pneumatic end effector apparatus and substrate transportation systems with annular flow channel
WO2015048470A1 (en) 2013-09-30 2015-04-02 Applied Materials, Inc Transfer chamber gas purge apparatus, electronic device processing systems, and purge methods
KR101483082B1 (ko) * 2014-04-02 2015-01-19 주식회사 로보스타 8 로봇암을 구비한 반송 로봇
TWI680040B (zh) * 2014-09-17 2019-12-21 美商法伯沃克斯分解股份有限公司 利於轂部移除的多組件機器人轂部安裝盤
JP6581831B2 (ja) * 2015-07-28 2019-09-25 東京エレクトロン株式会社 保持部の姿勢維持機構
US10119191B2 (en) 2016-06-08 2018-11-06 Applied Materials, Inc. High flow gas diffuser assemblies, systems, and methods
US10453725B2 (en) * 2017-09-19 2019-10-22 Applied Materials, Inc. Dual-blade robot including vertically offset horizontally overlapping frog-leg linkages and systems and methods including same
US10943805B2 (en) 2018-05-18 2021-03-09 Applied Materials, Inc. Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing
US11413744B2 (en) 2020-03-03 2022-08-16 Applied Materials, Inc. Multi-turn drive assembly and systems and methods of use thereof
CN114084674A (zh) * 2021-11-08 2022-02-25 天津新松机器人自动化有限公司 搬运型材的智能机器人

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Also Published As

Publication number Publication date
EP0820090A3 (en) 2001-08-01
EP0820090A2 (en) 1998-01-21
JPH10175186A (ja) 1998-06-30
US5789878A (en) 1998-08-04

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