TW352190U - Conductor track configuration for very large-scale integrated circuits - Google Patents

Conductor track configuration for very large-scale integrated circuits

Info

Publication number
TW352190U
TW352190U TW086214428U TW86214428U TW352190U TW 352190 U TW352190 U TW 352190U TW 086214428 U TW086214428 U TW 086214428U TW 86214428 U TW86214428 U TW 86214428U TW 352190 U TW352190 U TW 352190U
Authority
TW
Taiwan
Prior art keywords
conductor track
integrated circuits
scale integrated
track configuration
conductor tracks
Prior art date
Application number
TW086214428U
Other languages
English (en)
Chinese (zh)
Inventor
Dominique Savignac
Manfred Menke
Armin Kohlhase
Hanno Melzner
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of TW352190U publication Critical patent/TW352190U/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5226—Via connections in a multilevel interconnection structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/528—Layout of the interconnection structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Geometry (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Microwave Amplifiers (AREA)
TW086214428U 1991-05-15 1992-05-11 Conductor track configuration for very large-scale integrated circuits TW352190U (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4115909A DE4115909C1 (enExample) 1991-05-15 1991-05-15

Publications (1)

Publication Number Publication Date
TW352190U true TW352190U (en) 1999-02-01

Family

ID=6431725

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086214428U TW352190U (en) 1991-05-15 1992-05-11 Conductor track configuration for very large-scale integrated circuits

Country Status (7)

Country Link
US (1) US5289037A (enExample)
EP (1) EP0513715B1 (enExample)
JP (1) JP3129836B2 (enExample)
KR (1) KR100279954B1 (enExample)
AT (1) ATE195035T1 (enExample)
DE (2) DE4115909C1 (enExample)
TW (1) TW352190U (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3122297B2 (ja) * 1993-12-28 2001-01-09 株式会社東芝 半導体装置
JPH08306774A (ja) * 1995-05-01 1996-11-22 Oki Electric Ind Co Ltd 半導体装置及びその製造方法
US6577007B1 (en) * 1996-02-01 2003-06-10 Advanced Micro Devices, Inc. Manufacturing process for borderless vias with respect to underlying metal
JPH1092714A (ja) * 1996-09-11 1998-04-10 Mitsubishi Electric Corp 半導体装置およびその製造方法
US8350309B2 (en) 1998-03-30 2013-01-08 Kabushiki Kaisha Toshiba Nonvolatile semiconductor memory
US6353242B1 (en) 1998-03-30 2002-03-05 Kabushiki Kaisha Toshiba Nonvolatile semiconductor memory
JP4008629B2 (ja) * 1999-09-10 2007-11-14 株式会社東芝 半導体装置、その設計方法、及びその設計プログラムを格納したコンピュータ読み取り可能な記録媒体
US6522011B1 (en) * 2000-08-15 2003-02-18 Micron Technology, Inc. Low capacitance wiring layout and method for making same
DE10126566C1 (de) * 2001-05-31 2002-12-05 Infineon Technologies Ag Integrierte Schaltung
DE10259634B4 (de) * 2002-12-18 2008-02-21 Qimonda Ag Verfahren zur Herstellung von Kontakten auf einem Wafer
WO2006035877A1 (ja) * 2004-09-29 2006-04-06 Matsushita Electric Industrial Co., Ltd. 半導体装置
JP4599375B2 (ja) * 2007-07-17 2010-12-15 株式会社東芝 不揮発性半導体メモリ
JP4770930B2 (ja) * 2009-01-21 2011-09-14 ソニー株式会社 クロスポイント型半導体メモリ装置及びその製造方法
JP5571030B2 (ja) 2011-04-13 2014-08-13 株式会社東芝 集積回路装置及びその製造方法
US8441127B2 (en) * 2011-06-29 2013-05-14 Taiwan Semiconductor Manufacturing Company, Ltd. Bump-on-trace structures with wide and narrow portions
US20130026641A1 (en) * 2011-07-25 2013-01-31 United Microelectronics Corp. Conductor contact structure and forming method, and photomask pattern generating method for defining such conductor contact structure
US9184111B2 (en) * 2013-11-09 2015-11-10 Delta Electronics, Inc. Wafer-level chip scale package
US9911693B2 (en) * 2015-08-28 2018-03-06 Micron Technology, Inc. Semiconductor devices including conductive lines and methods of forming the semiconductor devices
US9754872B1 (en) 2016-05-16 2017-09-05 Micron Technology, Inc. Assemblies having shield lines of an upper wiring level electrically coupled with shield lines of a lower wiring level
KR102105785B1 (ko) * 2016-05-16 2020-06-29 마이크론 테크놀로지, 인크 하측 배선 레벨의 실드 라인에 전기적으로 결합된 상측 배선 레벨의 실드 라인을 갖는 어셈블리
US10304771B2 (en) 2017-03-10 2019-05-28 Micron Technology, Inc. Assemblies having shield lines of an upper wiring layer electrically coupled with shield lines of a lower wiring layer
US10818729B2 (en) * 2018-05-17 2020-10-27 Macronix International Co., Ltd. Bit cost scalable 3D phase change cross-point memory

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0048610B1 (en) * 1980-09-22 1986-01-15 Kabushiki Kaisha Toshiba Semiconductor device and its manufacture
JP2511415B2 (ja) * 1986-06-27 1996-06-26 沖電気工業株式会社 半導体装置
JPS6344742A (ja) * 1986-08-12 1988-02-25 Fujitsu Ltd 半導体装置
JP2765583B2 (ja) * 1988-10-20 1998-06-18 株式会社リコー 半導体メモリ装置
JPH0379059A (ja) * 1989-08-22 1991-04-04 Hitachi Ltd 半導体集積回路装置およびその製造方法
JP2856778B2 (ja) * 1989-09-07 1999-02-10 株式会社東芝 半導体装置の配線構造

Also Published As

Publication number Publication date
ATE195035T1 (de) 2000-08-15
KR100279954B1 (ko) 2001-03-02
DE4115909C1 (enExample) 1992-11-12
DE59209852D1 (de) 2000-08-31
US5289037A (en) 1994-02-22
EP0513715B1 (de) 2000-07-26
JP3129836B2 (ja) 2001-01-31
KR920022504A (ko) 1992-12-19
JPH05175337A (ja) 1993-07-13
EP0513715A1 (de) 1992-11-19

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