KR890700268A - 도전성 플러그로 집적회로상의 접점 및 비아를 충전하는 방법 - Google Patents

도전성 플러그로 집적회로상의 접점 및 비아를 충전하는 방법

Info

Publication number
KR890700268A
KR890700268A KR1019880701007A KR880701007A KR890700268A KR 890700268 A KR890700268 A KR 890700268A KR 1019880701007 A KR1019880701007 A KR 1019880701007A KR 880701007 A KR880701007 A KR 880701007A KR 890700268 A KR890700268 A KR 890700268A
Authority
KR
South Korea
Prior art keywords
vias
integrated circuits
conductive plugs
charging contacts
charging
Prior art date
Application number
KR1019880701007A
Other languages
English (en)
Other versions
KR910006975B1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of KR890700268A publication Critical patent/KR890700268A/ko
Application granted granted Critical
Publication of KR910006975B1 publication Critical patent/KR910006975B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
    • H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
KR1019880701007A 1986-12-19 1987-10-23 도전성 플러그로 집적 회로 상의 접점 및 비아를 충전하는 방법 KR910006975B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US94464186A 1986-12-19 1986-12-19
US944,641 1986-12-19
PCT/US1987/002767 WO1988004831A1 (en) 1986-12-19 1987-10-23 Conductive plug for contacts and vias on integrated circuits

Publications (2)

Publication Number Publication Date
KR890700268A true KR890700268A (ko) 1989-03-10
KR910006975B1 KR910006975B1 (ko) 1991-09-14

Family

ID=25481791

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880701007A KR910006975B1 (ko) 1986-12-19 1987-10-23 도전성 플러그로 집적 회로 상의 접점 및 비아를 충전하는 방법

Country Status (4)

Country Link
EP (1) EP0298110A1 (ko)
JP (1) JPH01501588A (ko)
KR (1) KR910006975B1 (ko)
WO (1) WO1988004831A1 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4961822A (en) * 1989-04-17 1990-10-09 Liao Kuan Y Fully recessed interconnection scheme with titanium-tungsten and selective CVD tungsten
JP2822208B2 (ja) * 1989-05-23 1998-11-11 ソニー株式会社 半導体装置の製造方法
JPH0382126A (ja) * 1989-08-25 1991-04-08 Hitachi Ltd 半導体集積回路装置の製造方法
US4987099A (en) * 1989-12-29 1991-01-22 North American Philips Corp. Method for selectively filling contacts or vias or various depths with CVD tungsten
US5387550A (en) * 1992-02-07 1995-02-07 Micron Technology, Inc. Method for making a fillet for integrated circuit metal plug
JP3014019B2 (ja) * 1993-11-26 2000-02-28 日本電気株式会社 半導体装置の製造方法
JPH09321137A (ja) * 1996-05-24 1997-12-12 Nec Corp 半導体装置およびその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59154040A (ja) * 1983-02-22 1984-09-03 Toshiba Corp 半導体装置の製造方法
FR2566181B1 (fr) * 1984-06-14 1986-08-22 Commissariat Energie Atomique Procede d'autopositionnement d'une ligne d'interconnexion sur un trou de contact electrique d'un circuit integre
DE3665961D1 (en) * 1985-07-29 1989-11-02 Siemens Ag Process for selectively filling contact holes made by etching in insulating layers with electrically conductive materials for the manufacture of high-density integrated semiconductor circuits, and apparatus used for this process

Also Published As

Publication number Publication date
WO1988004831A1 (en) 1988-06-30
EP0298110A1 (en) 1989-01-11
JPH01501588A (ja) 1989-06-01
KR910006975B1 (ko) 1991-09-14

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Legal Events

Date Code Title Description
A201 Request for examination
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
NORF Unpaid initial registration fee