TW344899B - Semiconductor device and process for producing the same - Google Patents

Semiconductor device and process for producing the same

Info

Publication number
TW344899B
TW344899B TW086108609A TW86108609A TW344899B TW 344899 B TW344899 B TW 344899B TW 086108609 A TW086108609 A TW 086108609A TW 86108609 A TW86108609 A TW 86108609A TW 344899 B TW344899 B TW 344899B
Authority
TW
Taiwan
Prior art keywords
layer
conductive type
semiconductor layer
semiconductor
channel doping
Prior art date
Application number
TW086108609A
Other languages
English (en)
Chinese (zh)
Inventor
Syuichi Ueno
Yoshinori Okumura
Shigenobu Maeda
Shigeto Maekawa
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Application granted granted Critical
Publication of TW344899B publication Critical patent/TW344899B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
    • H10B41/42—Simultaneous manufacture of periphery and memory cells
    • H10B41/49—Simultaneous manufacture of periphery and memory cells comprising different types of peripheral transistor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
TW086108609A 1997-03-05 1997-06-19 Semiconductor device and process for producing the same TW344899B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9050312A JPH10247725A (ja) 1997-03-05 1997-03-05 半導体装置およびその製造方法

Publications (1)

Publication Number Publication Date
TW344899B true TW344899B (en) 1998-11-11

Family

ID=12855386

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086108609A TW344899B (en) 1997-03-05 1997-06-19 Semiconductor device and process for producing the same

Country Status (7)

Country Link
US (1) US6492690B2 (enExample)
JP (1) JPH10247725A (enExample)
KR (1) KR19980079317A (enExample)
CN (1) CN1162912C (enExample)
DE (1) DE19745249A1 (enExample)
FR (2) FR2760566B1 (enExample)
TW (1) TW344899B (enExample)

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JP4199338B2 (ja) 1998-10-02 2008-12-17 富士通マイクロエレクトロニクス株式会社 半導体装置及びその製造方法
US7220281B2 (en) 1999-08-18 2007-05-22 Intrinsic Therapeutics, Inc. Implant for reinforcing and annulus fibrosis
KR100513445B1 (ko) * 1999-09-10 2005-09-07 삼성전자주식회사 반도체 장치의 제조방법
JP2001110908A (ja) * 1999-10-06 2001-04-20 Nec Corp 半導体装置及びその製造方法
JP4823408B2 (ja) 2000-06-08 2011-11-24 ルネサスエレクトロニクス株式会社 不揮発性半導体記憶装置
US6833329B1 (en) 2000-06-22 2004-12-21 Micron Technology, Inc. Methods of forming oxide regions over semiconductor substrates
US6649543B1 (en) 2000-06-22 2003-11-18 Micron Technology, Inc. Methods of forming silicon nitride, methods of forming transistor devices, and transistor devices
US6956757B2 (en) 2000-06-22 2005-10-18 Contour Semiconductor, Inc. Low cost high density rectifier matrix memory
US6686298B1 (en) 2000-06-22 2004-02-03 Micron Technology, Inc. Methods of forming structures over semiconductor substrates, and methods of forming transistors associated with semiconductor substrates
US6660657B1 (en) 2000-08-07 2003-12-09 Micron Technology, Inc. Methods of incorporating nitrogen into silicon-oxide-containing layers
JP2002368144A (ja) * 2001-06-13 2002-12-20 Hitachi Ltd 不揮発性半導体記憶装置およびその製造方法
US6878585B2 (en) 2001-08-29 2005-04-12 Micron Technology, Inc. Methods of forming capacitors
US6723599B2 (en) 2001-12-03 2004-04-20 Micron Technology, Inc. Methods of forming capacitors and methods of forming capacitor dielectric layers
DE10209334A1 (de) * 2002-03-02 2003-10-09 Infineon Technologies Ag Füllverfahren für Mulden auf einer Halbleiterscheibe
US7112857B2 (en) * 2004-07-06 2006-09-26 Taiwan Semiconductor Manufacturing Co., Ltd. Devices with different electrical gate dielectric thicknesses but with substantially similar physical configurations
JP2006049365A (ja) * 2004-07-30 2006-02-16 Nec Electronics Corp 半導体装置
JP2006059880A (ja) * 2004-08-17 2006-03-02 Fujitsu Ltd 半導体装置及びその製造方法
KR100680488B1 (ko) * 2005-01-13 2007-02-08 주식회사 하이닉스반도체 플래쉬 메모리 소자의 제조방법
US20060237778A1 (en) * 2005-04-22 2006-10-26 Mu-Yi Liu Non-volatile semiconductor memory cell and method of manufacturing the same
US7485528B2 (en) * 2006-07-14 2009-02-03 Micron Technology, Inc. Method of forming memory devices by performing halogen ion implantation and diffusion processes
US8159895B2 (en) 2006-08-17 2012-04-17 Broadcom Corporation Method and system for split threshold voltage programmable bitcells
JP4421629B2 (ja) * 2007-04-25 2010-02-24 株式会社東芝 半導体装置の製造方法
US7718496B2 (en) * 2007-10-30 2010-05-18 International Business Machines Corporation Techniques for enabling multiple Vt devices using high-K metal gate stacks
US7933133B2 (en) * 2007-11-05 2011-04-26 Contour Semiconductor, Inc. Low cost, high-density rectifier matrix memory
WO2011074407A1 (en) 2009-12-18 2011-06-23 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for manufacturing the same
JP5778900B2 (ja) * 2010-08-20 2015-09-16 富士通セミコンダクター株式会社 半導体装置の製造方法
US9224475B2 (en) * 2012-08-23 2015-12-29 Sandisk Technologies Inc. Structures and methods for making NAND flash memory
JP5564588B2 (ja) * 2013-02-07 2014-07-30 ルネサスエレクトロニクス株式会社 半導体装置
US9443862B1 (en) 2015-07-24 2016-09-13 Sandisk Technologies Llc Select gates with select gate dielectric first
US9613971B2 (en) 2015-07-24 2017-04-04 Sandisk Technologies Llc Select gates with central open areas
CN107026192B (zh) * 2016-02-02 2020-05-29 中芯国际集成电路制造(上海)有限公司 半导体装置的制造方法
CN114005746B (zh) * 2021-10-29 2025-08-29 上海华力微电子有限公司 一种高压器件的栅氧层及其制造方法
CN116779615B (zh) * 2023-08-23 2023-11-07 合肥晶合集成电路股份有限公司 一种集成半导体器件及其制作方法

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US5340764A (en) * 1993-02-19 1994-08-23 Atmel Corporation Integration of high performance submicron CMOS and dual-poly non-volatile memory devices using a third polysilicon layer
JPH06342881A (ja) 1993-06-02 1994-12-13 Toshiba Corp 半導体装置およびその製造方法
EP0639856A1 (en) * 1993-08-20 1995-02-22 Texas Instruments Incorporated Method of doping a polysilicon layer and semiconductor device obtained
JPH07263680A (ja) * 1994-03-24 1995-10-13 Hitachi Ltd 半導体装置の製造方法
JP3444687B2 (ja) * 1995-03-13 2003-09-08 三菱電機株式会社 不揮発性半導体記憶装置
US5480830A (en) * 1995-04-04 1996-01-02 Taiwan Semiconductor Manufacturing Company Ltd. Method of making depleted gate transistor for high voltage operation
JP3243151B2 (ja) * 1995-06-01 2002-01-07 東芝マイクロエレクトロニクス株式会社 半導体装置の製造方法
DE69528971D1 (de) 1995-06-30 2003-01-09 St Microelectronics Srl Herstellungsverfahren eines Schaltkreises, der nichtflüchtige Speicherzellen und Randtransistoren von mindestens zwei unterschiedlichen Typen enthält, und entsprechender IC
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US5767558A (en) * 1996-05-10 1998-06-16 Integrated Device Technology, Inc. Structures for preventing gate oxide degradation

Also Published As

Publication number Publication date
CN1162912C (zh) 2004-08-18
FR2766617B1 (fr) 2003-08-01
KR19980079317A (ko) 1998-11-25
FR2760566B1 (fr) 2002-08-16
US6492690B2 (en) 2002-12-10
FR2766617A1 (fr) 1999-01-29
DE19745249A1 (de) 1998-09-10
FR2760566A1 (fr) 1998-09-11
JPH10247725A (ja) 1998-09-14
US20020130374A1 (en) 2002-09-19
CN1192586A (zh) 1998-09-09

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees