TW312080B - - Google Patents
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- Publication number
- TW312080B TW312080B TW085106335A TW85106335A TW312080B TW 312080 B TW312080 B TW 312080B TW 085106335 A TW085106335 A TW 085106335A TW 85106335 A TW85106335 A TW 85106335A TW 312080 B TW312080 B TW 312080B
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- patent application
- dielectric
- item
- conductive
- Prior art date
Links
- 238000000034 method Methods 0.000 claims description 104
- 230000008569 process Effects 0.000 claims description 68
- 229910052802 copper Inorganic materials 0.000 claims description 39
- 239000010949 copper Substances 0.000 claims description 39
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 37
- 239000000758 substrate Substances 0.000 claims description 35
- 238000001465 metallisation Methods 0.000 claims description 32
- 229920002120 photoresistant polymer Polymers 0.000 claims description 30
- 239000004020 conductor Substances 0.000 claims description 21
- 239000003989 dielectric material Substances 0.000 claims description 16
- 238000005530 etching Methods 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 9
- 238000011049 filling Methods 0.000 claims description 7
- 238000005553 drilling Methods 0.000 claims description 5
- 239000000654 additive Substances 0.000 claims description 4
- 230000000996 additive effect Effects 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 3
- 238000007772 electroless plating Methods 0.000 claims description 3
- 239000003822 epoxy resin Substances 0.000 claims description 3
- 238000007654 immersion Methods 0.000 claims description 3
- 238000010297 mechanical methods and process Methods 0.000 claims description 3
- 230000005226 mechanical processes and functions Effects 0.000 claims description 3
- 229920000647 polyepoxide Polymers 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 2
- 239000003365 glass fiber Substances 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 description 71
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 11
- 229910052763 palladium Inorganic materials 0.000 description 9
- 230000008030 elimination Effects 0.000 description 8
- 238000003379 elimination reaction Methods 0.000 description 8
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 230000002079 cooperative effect Effects 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- -1 polypropylene Polymers 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- KXZJHVJKXJLBKO-UHFFFAOYSA-N chembl1408157 Chemical compound N=1C2=CC=CC=C2C(C(=O)O)=CC=1C1=CC=C(O)C=C1 KXZJHVJKXJLBKO-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 150000001879 copper Chemical class 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920006267 polyester film Polymers 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- JYLNVJYYQQXNEK-UHFFFAOYSA-N 3-amino-2-(4-chlorophenyl)-1-propanesulfonic acid Chemical compound OS(=O)(=O)CC(CN)C1=CC=C(Cl)C=C1 JYLNVJYYQQXNEK-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- 241001670157 Gymnura Species 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004115 Sodium Silicate Substances 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000001994 activation Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 239000000908 ammonium hydroxide Substances 0.000 description 1
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 1
- 239000012964 benzotriazole Substances 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000002940 palladium Chemical class 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000008262 pumice Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0263—High current adaptations, e.g. printed high current conductors or using auxiliary non-printed means; Fine and coarse circuit patterns on one circuit board
- H05K1/0265—High current adaptations, e.g. printed high current conductors or using auxiliary non-printed means; Fine and coarse circuit patterns on one circuit board characterized by the lay-out of or details of the printed conductors, e.g. reinforced conductors, redundant conductors, conductors having different cross-sections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/425—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern
- H05K3/428—Plated through-holes or plated via connections characterised by the sequence of steps for plating the through-holes or via connections in relation to the conductive pattern initial plating of through-holes in substrates having a metal pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0263—High current adaptations, e.g. printed high current conductors or using auxiliary non-printed means; Fine and coarse circuit patterns on one circuit board
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0347—Overplating, e.g. for reinforcing conductors or bumps; Plating over filled vias
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/09727—Varying width along a single conductor; Conductors or pads having different widths
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0353—Making conductive layer thin, e.g. by etching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0703—Plating
- H05K2203/072—Electroless plating, e.g. finish plating or initial plating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/14—Related to the order of processing steps
- H05K2203/1407—Applying catalyst before applying plating resist
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/064—Photoresists
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/901—Printed circuit
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24273—Structurally defined web or sheet [e.g., overall dimension, etc.] including aperture
- Y10T428/24322—Composite web or sheet
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/566,363 US5707893A (en) | 1995-12-01 | 1995-12-01 | Method of making a circuitized substrate using two different metallization processes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW312080B true TW312080B (enExample) | 1997-08-01 |
Family
ID=24262573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW085106335A TW312080B (enExample) | 1995-12-01 | 1996-05-28 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US5707893A (enExample) |
| KR (1) | KR100240915B1 (enExample) |
| CN (1) | CN1088321C (enExample) |
| SG (1) | SG44058A1 (enExample) |
| TW (1) | TW312080B (enExample) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6013417A (en) * | 1998-04-02 | 2000-01-11 | International Business Machines Corporation | Process for fabricating circuitry on substrates having plated through-holes |
| US6296897B1 (en) * | 1998-08-12 | 2001-10-02 | International Business Machines Corporation | Process for reducing extraneous metal plating |
| IT1312433B1 (it) * | 1999-05-14 | 2002-04-17 | Cadif Srl | Pannello con tessuto elettro-termico,ad alto isolamento elettrico |
| US6869750B2 (en) * | 1999-10-28 | 2005-03-22 | Fujitsu Limited | Structure and method for forming a multilayered structure |
| JP3736607B2 (ja) * | 2000-01-21 | 2006-01-18 | セイコーエプソン株式会社 | 半導体装置及びその製造方法、回路基板並びに電子機器 |
| EP1990831A3 (en) * | 2000-02-25 | 2010-09-29 | Ibiden Co., Ltd. | Multilayer printed circuit board and multilayer printed circuit board manufacturing method |
| US6753483B2 (en) * | 2000-06-14 | 2004-06-22 | Matsushita Electric Industrial Co., Ltd. | Printed circuit board and method of manufacturing the same |
| US6617239B1 (en) * | 2000-08-31 | 2003-09-09 | Micron Technology, Inc. | Subtractive metallization structure and method of making |
| WO2002027786A1 (en) * | 2000-09-25 | 2002-04-04 | Ibiden Co., Ltd. | Semiconductor element, method of manufacturing semiconductor element, multi-layer printed circuit board, and method of manufacturing multi-layer printed circuit board |
| DE10126734B4 (de) * | 2001-05-31 | 2009-02-26 | Qimonda Ag | Umverdrahtungsverfahren und damit hergestelltes Bauelement |
| US20040188257A1 (en) * | 2001-08-31 | 2004-09-30 | John Klocke | Methods for processing micro-feature workpieces, patterned structures on micro-feature workpieces, and integrated tools for processing micro-feature workpieces |
| JP3807312B2 (ja) * | 2002-01-18 | 2006-08-09 | 富士通株式会社 | プリント基板とその製造方法 |
| JP4285629B2 (ja) * | 2002-04-25 | 2009-06-24 | 富士通株式会社 | 集積回路を搭載するインターポーザ基板の作製方法 |
| KR100499004B1 (ko) * | 2002-12-18 | 2005-07-01 | 삼성전기주식회사 | 광비아홀을 구비하는 인쇄회로기판 및 가공 공정 |
| US7179738B2 (en) * | 2004-06-17 | 2007-02-20 | Texas Instruments Incorporated | Semiconductor assembly having substrate with electroplated contact pads |
| US7411303B2 (en) * | 2004-11-09 | 2008-08-12 | Texas Instruments Incorporated | Semiconductor assembly having substrate with electroplated contact pads |
| US6964884B1 (en) * | 2004-11-19 | 2005-11-15 | Endicott Interconnect Technologies, Inc. | Circuitized substrates utilizing three smooth-sided conductive layers as part thereof, method of making same, and electrical assemblies and information handling systems utilizing same |
| KR100643496B1 (ko) * | 2004-12-23 | 2006-11-10 | 삼성전자주식회사 | 노말 오픈/클로즈 타입 겸용 광센서 보드 |
| US7808013B2 (en) * | 2006-10-31 | 2010-10-05 | Cree, Inc. | Integrated heat spreaders for light emitting devices (LEDs) and related assemblies |
| KR100990618B1 (ko) | 2008-04-15 | 2010-10-29 | 삼성전기주식회사 | 랜드리스 비아홀을 갖는 인쇄회로기판 및 그 제조방법 |
| US8186053B2 (en) * | 2008-11-14 | 2012-05-29 | Fujitsu Limited | Circuit board and method of manufacturing the same |
| JP5565950B2 (ja) * | 2010-08-23 | 2014-08-06 | 京セラＳｌｃテクノロジー株式会社 | 配線基板の製造方法 |
| CN104053305B (zh) * | 2013-03-13 | 2017-06-16 | 北大方正集团有限公司 | 一种印制线路板及其制作方法 |
| US10537027B2 (en) | 2013-08-02 | 2020-01-14 | Orbotech Ltd. | Method producing a conductive path on a substrate |
| CN104703409B (zh) * | 2013-12-09 | 2018-03-16 | 深南电路有限公司 | 电路板加工方法和相关装置 |
| US10356906B2 (en) * | 2016-06-21 | 2019-07-16 | Abb Schweiz Ag | Method of manufacturing a PCB including a thick-wall via |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3568312A (en) * | 1968-10-04 | 1971-03-09 | Hewlett Packard Co | Method of making printed circuit boards |
| US4383363A (en) * | 1977-09-01 | 1983-05-17 | Sharp Kabushiki Kaisha | Method of making a through-hole connector |
| GB8500906D0 (en) * | 1985-01-15 | 1985-02-20 | Prestwick Circuits Ltd | Printed circuit boards |
| DE3576900D1 (de) * | 1985-12-30 | 1990-05-03 | Ibm Deutschland | Verfahren zum herstellen von gedruckten schaltungen. |
| US5314788A (en) * | 1986-01-24 | 1994-05-24 | Canon Kabushiki Kaisha | Matrix printed board and process of forming the same |
| US4866008A (en) * | 1987-12-11 | 1989-09-12 | Texas Instruments Incorporated | Methods for forming self-aligned conductive pillars on interconnects |
| JPH01260886A (ja) * | 1988-04-11 | 1989-10-18 | Minolta Camera Co Ltd | プリント基板の製造方法 |
| US4810332A (en) * | 1988-07-21 | 1989-03-07 | Microelectronics And Computer Technology Corporation | Method of making an electrical multilayer copper interconnect |
| FR2649578B1 (fr) * | 1989-07-10 | 1991-09-20 | Alcatel Business Systems | Dispositif de dissipation thermique pour composant de type cms monte sur plaque de circuit imprime |
| US4920639A (en) * | 1989-08-04 | 1990-05-01 | Microelectronics And Computer Technology Corporation | Method of making a multilevel electrical airbridge interconnect |
| US5358907A (en) * | 1990-01-30 | 1994-10-25 | Xerox Corporation | Method of electrolessly depositing metals on a silicon substrate by immersing the substrate in hydrofluoric acid containing a buffered metal salt solution |
| US5079065A (en) * | 1990-04-02 | 1992-01-07 | Fuji Xerox Co., Ltd. | Printed-circuit substrate and method of making thereof |
| US5098860A (en) * | 1990-05-07 | 1992-03-24 | The Boeing Company | Method of fabricating high-density interconnect structures having tantalum/tantalum oxide layers |
| JPH0636472B2 (ja) * | 1990-05-28 | 1994-05-11 | インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン | 多層配線基板の製造方法 |
| US5252195A (en) * | 1990-08-20 | 1993-10-12 | Mitsubishi Rayon Company Ltd. | Process for producing a printed wiring board |
| JPH04100294A (ja) * | 1990-08-20 | 1992-04-02 | Mitsubishi Rayon Co Ltd | プリント配線板の製造方法 |
| US5017271A (en) * | 1990-08-24 | 1991-05-21 | Gould Inc. | Method for printed circuit board pattern making using selectively etchable metal layers |
| JPH05218618A (ja) * | 1992-01-30 | 1993-08-27 | Cmk Corp | プリント配線板の製造方法 |
| JP2773578B2 (ja) * | 1992-10-02 | 1998-07-09 | 日本電気株式会社 | 半導体装置の製造方法 |
| CA2082771C (en) * | 1992-11-12 | 1998-02-10 | Vu Quoc Ho | Method for forming interconnect structures for integrated circuits |
| US5421083A (en) * | 1994-04-01 | 1995-06-06 | Motorola, Inc. | Method of manufacturing a circuit carrying substrate having coaxial via holes |
-
1995
- 1995-12-01 US US08/566,363 patent/US5707893A/en not_active Expired - Fee Related
-
1996
- 1996-05-28 TW TW085106335A patent/TW312080B/zh active
- 1996-10-14 SG SG1996010841A patent/SG44058A1/en unknown
- 1996-10-15 KR KR1019960046024A patent/KR100240915B1/ko not_active Expired - Fee Related
- 1996-11-20 CN CN96119259A patent/CN1088321C/zh not_active Expired - Fee Related
-
1997
- 1997-02-04 US US08/795,180 patent/US5817405A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US5707893A (en) | 1998-01-13 |
| KR100240915B1 (ko) | 2000-01-15 |
| CN1156948A (zh) | 1997-08-13 |
| KR970058406A (ko) | 1997-07-31 |
| US5817405A (en) | 1998-10-06 |
| CN1088321C (zh) | 2002-07-24 |
| SG44058A1 (en) | 1997-11-14 |
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