TW202445709A - 接合體 - Google Patents

接合體 Download PDF

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Publication number
TW202445709A
TW202445709A TW113110080A TW113110080A TW202445709A TW 202445709 A TW202445709 A TW 202445709A TW 113110080 A TW113110080 A TW 113110080A TW 113110080 A TW113110080 A TW 113110080A TW 202445709 A TW202445709 A TW 202445709A
Authority
TW
Taiwan
Prior art keywords
plate
layer
joint
thickness
amorphous layer
Prior art date
Application number
TW113110080A
Other languages
English (en)
Chinese (zh)
Inventor
長江智毅
山寺喬紘
尾関宏太
高濱啓知
Original Assignee
日商日本碍子股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日本碍子股份有限公司 filed Critical 日商日本碍子股份有限公司
Publication of TW202445709A publication Critical patent/TW202445709A/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/001—Joining burned ceramic articles with other burned ceramic articles or other articles by heating directly with other burned ceramic articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/70—Other properties
    • B32B2307/732—Dimensional properties
    • B32B2307/737—Dimensions, e.g. volume or area
    • B32B2307/7375—Linear, e.g. length, distance or width
    • B32B2307/7376—Thickness
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/343—Alumina or aluminates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/52—Pre-treatment of the joining surfaces, e.g. cleaning, machining
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/55—Pre-treatments of a coated or not coated substrate other than oxidation treatment in order to form an active joining layer
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/60—Forming at the joining interface or in the joining layer specific reaction phases or zones, e.g. diffusion of reactive species from the interlayer to the substrate or from a substrate to the joining interface, carbide forming at the joining interface

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Ceramic Products (AREA)
  • Fuel Cell (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Laminated Bodies (AREA)
TW113110080A 2023-05-09 2024-03-19 接合體 TW202445709A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023077440 2023-05-09
JP2023-077440 2023-05-09

Publications (1)

Publication Number Publication Date
TW202445709A true TW202445709A (zh) 2024-11-16

Family

ID=93431537

Family Applications (1)

Application Number Title Priority Date Filing Date
TW113110080A TW202445709A (zh) 2023-05-09 2024-03-19 接合體

Country Status (6)

Country Link
US (1) US12539690B2 (https=)
JP (1) JPWO2024232162A1 (https=)
KR (1) KR20260007047A (https=)
CN (1) CN121057718A (https=)
TW (1) TW202445709A (https=)
WO (1) WO2024232162A1 (https=)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06247776A (ja) * 1993-02-24 1994-09-06 Isuzu Motors Ltd 多孔セラミックス接合体及びその製造方法
JP3023288B2 (ja) * 1995-03-29 2000-03-21 日本碍子株式会社 ガラス接合体およびその製造法
KR101511001B1 (ko) * 2012-11-14 2015-04-10 엔지케이 인슐레이터 엘티디 복합 기판
EP3557293A4 (en) * 2016-12-13 2020-08-05 NGK Insulators, Ltd. OPTICAL COMPONENT
KR102282238B1 (ko) 2018-02-13 2021-07-27 엔지케이 인슐레이터 엘티디 압전성 재료 기판과 지지 기판의 접합체
JP6698954B2 (ja) * 2018-05-17 2020-05-27 日本碍子株式会社 圧電性単結晶基板と支持基板との接合体
DE112019002418B4 (de) * 2018-06-22 2022-06-15 Ngk Insulators, Ltd. Verbundener Körper und Elastikwellenelement
WO2019244471A1 (ja) * 2018-06-22 2019-12-26 日本碍子株式会社 接合体および弾性波素子
JP7069338B2 (ja) * 2018-10-17 2022-05-17 日本碍子株式会社 接合体および弾性波素子
KR102596121B1 (ko) * 2018-10-17 2023-10-30 엔지케이 인슐레이터 엘티디 접합체 및 탄성파 소자
JP7041648B2 (ja) * 2019-07-17 2022-03-24 信越化学工業株式会社 複合基板の製造方法
CN116348631A (zh) 2020-10-15 2023-06-27 日本碍子株式会社 13族元素氮化物结晶层的培养方法、氮化物半导体铸锭以及溅射靶

Also Published As

Publication number Publication date
US20250018690A1 (en) 2025-01-16
JPWO2024232162A1 (https=) 2024-11-14
WO2024232162A1 (ja) 2024-11-14
US12539690B2 (en) 2026-02-03
KR20260007047A (ko) 2026-01-13
CN121057718A (zh) 2025-12-02

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