KR20260007047A - 접합체 - Google Patents

접합체

Info

Publication number
KR20260007047A
KR20260007047A KR1020247032189A KR20247032189A KR20260007047A KR 20260007047 A KR20260007047 A KR 20260007047A KR 1020247032189 A KR1020247032189 A KR 1020247032189A KR 20247032189 A KR20247032189 A KR 20247032189A KR 20260007047 A KR20260007047 A KR 20260007047A
Authority
KR
South Korea
Prior art keywords
plate
layer
joint
polishing
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247032189A
Other languages
English (en)
Korean (ko)
Inventor
도모키 나가에
다카히로 야마데라
고타 오제키
히로토모 다카하마
Original Assignee
엔지케이 인슐레이터 엘티디
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엔지케이 인슐레이터 엘티디 filed Critical 엔지케이 인슐레이터 엘티디
Publication of KR20260007047A publication Critical patent/KR20260007047A/ko
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/001—Joining burned ceramic articles with other burned ceramic articles or other articles by heating directly with other burned ceramic articles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/70—Other properties
    • B32B2307/732—Dimensional properties
    • B32B2307/737—Dimensions, e.g. volume or area
    • B32B2307/7375—Linear, e.g. length, distance or width
    • B32B2307/7376—Thickness
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/343—Alumina or aluminates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/52—Pre-treatment of the joining surfaces, e.g. cleaning, machining
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/55—Pre-treatments of a coated or not coated substrate other than oxidation treatment in order to form an active joining layer
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/60—Forming at the joining interface or in the joining layer specific reaction phases or zones, e.g. diffusion of reactive species from the interlayer to the substrate or from a substrate to the joining interface, carbide forming at the joining interface

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Ceramic Products (AREA)
  • Fuel Cell (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Laminated Bodies (AREA)
KR1020247032189A 2023-05-09 2024-03-14 접합체 Pending KR20260007047A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023077440 2023-05-09
JPJP-P-2023-077440 2023-05-09
PCT/JP2024/010094 WO2024232162A1 (ja) 2023-05-09 2024-03-14 接合体

Publications (1)

Publication Number Publication Date
KR20260007047A true KR20260007047A (ko) 2026-01-13

Family

ID=93431537

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247032189A Pending KR20260007047A (ko) 2023-05-09 2024-03-14 접합체

Country Status (6)

Country Link
US (1) US12539690B2 (https=)
JP (1) JPWO2024232162A1 (https=)
KR (1) KR20260007047A (https=)
CN (1) CN121057718A (https=)
TW (1) TW202445709A (https=)
WO (1) WO2024232162A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020102856A (ja) 2018-02-13 2020-07-02 日本碍子株式会社 圧電性材料基板と支持基板との接合体

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06247776A (ja) * 1993-02-24 1994-09-06 Isuzu Motors Ltd 多孔セラミックス接合体及びその製造方法
JP3023288B2 (ja) * 1995-03-29 2000-03-21 日本碍子株式会社 ガラス接合体およびその製造法
KR101511001B1 (ko) * 2012-11-14 2015-04-10 엔지케이 인슐레이터 엘티디 복합 기판
EP3557293A4 (en) * 2016-12-13 2020-08-05 NGK Insulators, Ltd. OPTICAL COMPONENT
JP6698954B2 (ja) * 2018-05-17 2020-05-27 日本碍子株式会社 圧電性単結晶基板と支持基板との接合体
DE112019002418B4 (de) * 2018-06-22 2022-06-15 Ngk Insulators, Ltd. Verbundener Körper und Elastikwellenelement
WO2019244471A1 (ja) * 2018-06-22 2019-12-26 日本碍子株式会社 接合体および弾性波素子
JP7069338B2 (ja) * 2018-10-17 2022-05-17 日本碍子株式会社 接合体および弾性波素子
KR102596121B1 (ko) * 2018-10-17 2023-10-30 엔지케이 인슐레이터 엘티디 접합체 및 탄성파 소자
JP7041648B2 (ja) * 2019-07-17 2022-03-24 信越化学工業株式会社 複合基板の製造方法
CN116348631A (zh) 2020-10-15 2023-06-27 日本碍子株式会社 13族元素氮化物结晶层的培养方法、氮化物半导体铸锭以及溅射靶

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020102856A (ja) 2018-02-13 2020-07-02 日本碍子株式会社 圧電性材料基板と支持基板との接合体

Also Published As

Publication number Publication date
US20250018690A1 (en) 2025-01-16
TW202445709A (zh) 2024-11-16
JPWO2024232162A1 (https=) 2024-11-14
WO2024232162A1 (ja) 2024-11-14
US12539690B2 (en) 2026-02-03
CN121057718A (zh) 2025-12-02

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