CN121057718A - 接合体 - Google Patents

接合体

Info

Publication number
CN121057718A
CN121057718A CN202480001861.3A CN202480001861A CN121057718A CN 121057718 A CN121057718 A CN 121057718A CN 202480001861 A CN202480001861 A CN 202480001861A CN 121057718 A CN121057718 A CN 121057718A
Authority
CN
China
Prior art keywords
plate
layer
joint
modified layer
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202480001861.3A
Other languages
English (en)
Chinese (zh)
Inventor
长江智毅
山寺乔纮
尾关宏太
高滨启知
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of CN121057718A publication Critical patent/CN121057718A/zh
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/001—Joining burned ceramic articles with other burned ceramic articles or other articles by heating directly with other burned ceramic articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/70—Other properties
    • B32B2307/732—Dimensional properties
    • B32B2307/737—Dimensions, e.g. volume or area
    • B32B2307/7375—Linear, e.g. length, distance or width
    • B32B2307/7376—Thickness
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/343—Alumina or aluminates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/52—Pre-treatment of the joining surfaces, e.g. cleaning, machining
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/55—Pre-treatments of a coated or not coated substrate other than oxidation treatment in order to form an active joining layer
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/60—Forming at the joining interface or in the joining layer specific reaction phases or zones, e.g. diffusion of reactive species from the interlayer to the substrate or from a substrate to the joining interface, carbide forming at the joining interface

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Ceramic Products (AREA)
  • Fuel Cell (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Laminated Bodies (AREA)
CN202480001861.3A 2023-05-09 2024-03-14 接合体 Pending CN121057718A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023077440 2023-05-09
JP2023-077440 2023-05-09
PCT/JP2024/010094 WO2024232162A1 (ja) 2023-05-09 2024-03-14 接合体

Publications (1)

Publication Number Publication Date
CN121057718A true CN121057718A (zh) 2025-12-02

Family

ID=93431537

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202480001861.3A Pending CN121057718A (zh) 2023-05-09 2024-03-14 接合体

Country Status (6)

Country Link
US (1) US12539690B2 (https=)
JP (1) JPWO2024232162A1 (https=)
KR (1) KR20260007047A (https=)
CN (1) CN121057718A (https=)
TW (1) TW202445709A (https=)
WO (1) WO2024232162A1 (https=)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06247776A (ja) * 1993-02-24 1994-09-06 Isuzu Motors Ltd 多孔セラミックス接合体及びその製造方法
JP3023288B2 (ja) * 1995-03-29 2000-03-21 日本碍子株式会社 ガラス接合体およびその製造法
KR101511001B1 (ko) * 2012-11-14 2015-04-10 엔지케이 인슐레이터 엘티디 복합 기판
EP3557293A4 (en) * 2016-12-13 2020-08-05 NGK Insulators, Ltd. OPTICAL COMPONENT
KR102282238B1 (ko) 2018-02-13 2021-07-27 엔지케이 인슐레이터 엘티디 압전성 재료 기판과 지지 기판의 접합체
JP6698954B2 (ja) * 2018-05-17 2020-05-27 日本碍子株式会社 圧電性単結晶基板と支持基板との接合体
DE112019002418B4 (de) * 2018-06-22 2022-06-15 Ngk Insulators, Ltd. Verbundener Körper und Elastikwellenelement
WO2019244471A1 (ja) * 2018-06-22 2019-12-26 日本碍子株式会社 接合体および弾性波素子
JP7069338B2 (ja) * 2018-10-17 2022-05-17 日本碍子株式会社 接合体および弾性波素子
KR102596121B1 (ko) * 2018-10-17 2023-10-30 엔지케이 인슐레이터 엘티디 접합체 및 탄성파 소자
JP7041648B2 (ja) * 2019-07-17 2022-03-24 信越化学工業株式会社 複合基板の製造方法
CN116348631A (zh) 2020-10-15 2023-06-27 日本碍子株式会社 13族元素氮化物结晶层的培养方法、氮化物半导体铸锭以及溅射靶

Also Published As

Publication number Publication date
US20250018690A1 (en) 2025-01-16
TW202445709A (zh) 2024-11-16
JPWO2024232162A1 (https=) 2024-11-14
WO2024232162A1 (ja) 2024-11-14
US12539690B2 (en) 2026-02-03
KR20260007047A (ko) 2026-01-13

Similar Documents

Publication Publication Date Title
KR101386021B1 (ko) 정전 척
JP5154871B2 (ja) 静電チャック及びその製造方法
JP2012060106A (ja) 静電チャック及び静電チャックの製造方法
JP7388573B2 (ja) セラミックス接合体、静電チャック装置、セラミックス接合体の製造方法
CN121057718A (zh) 接合体
TWI686368B (zh) 半導體製造裝置用零件、及半導體製造裝置用零件之製造方法
JP5300363B2 (ja) 保持用治具およびそれを用いた搬送装置
CN116368727A (zh) 陶瓷接合体、静电卡盘装置
US20050128674A1 (en) Ceramic chuck
JPH1072249A (ja) アルミナ系セラミック焼結体及びアルミナ系セラミック部品
JPH09283607A (ja) 静電チャック
US20250158543A1 (en) Electrostatic chuck member, electrostatic chuck device, and method for manufacturing electrostatic chuck member
US20250183083A1 (en) Electrostatic chuck member and electrostatic chuck device
JP7203260B1 (ja) 静電チャック部材、静電チャック装置及び静電チャック部材の製造方法
JP7248167B1 (ja) 静電チャック部材及び静電チャック装置
JP2008244149A (ja) 静電チャック及びその製造方法
WO2024004778A1 (ja) 半導体製造装置用部材及び静電チャック装置
JPWO2024232162A5 (https=)
WO2025206256A1 (ja) 半導体製造装置用部材及びその再生方法
CN120418951A (zh) 静电卡盘部件及静电卡盘装置
TW202549000A (zh) 半導體製造設備用零件以及其再生方法
WO2023120258A1 (ja) 静電チャック部材、静電チャック装置、および静電チャック部材の製造方法
CN121909172A (zh) 接合体

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination