TW202411513A - Heavy grille floor - Google Patents

Abstract

A heavy grille floor includes a top plate and a rib structure, wherein the rib structure and the top plate are integrally formed with aluminum alloy, and the top plate is formed with a plurality of through holes to form more than 50% ventilation. Therefore, the heavy grille floor can meet the needs of cleanliness of semiconductor process.

Description

Heavy duty grid floor

The present invention relates to a floor, in particular to a heavy-duty grid floor with high ventilation rate.

It is known that elevated floors, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent and TWM596253 patent, can be used as ventilation floors in process areas in addition to being used as factory floors in semiconductor manufacturing processes. However, their ventilation rate is less than 20%, which cannot meet the ventilation rate requirements.

However, the grating floor used for gutter cover is currently manufactured by welding, such as the TW536257 patent. Due to the welding process, it is easy to deform, and it is easy to produce defects and cracks.

Furthermore, the ventilation volume of the existing grid floor is too small, resulting in insufficient return air volume, which makes it impossible to meet the cleanliness requirements of the semiconductor process.

Furthermore, it is known that the structural strength of the grid floor is often insufficient, so when the grid floor carries heavier equipment in the semiconductor manufacturing process, the grid floor is prone to breakage.

On the other hand, existing grid floors also have the problem of being too heavy, which not only wastes materials but also increases manufacturing costs.

Therefore, how to overcome the above-mentioned problems of the known technology has become a difficult problem that the industry needs to overcome urgently.

In view of the various deficiencies of the above-mentioned prior art, the present invention provides a heavy-duty grid floor, comprising: a top plate having a ground side and a honeycomb side opposite to each other, wherein a plurality of through holes connecting the ground side and the honeycomb side are formed on the top plate to form a ventilation volume of more than 50%; and a plurality of rib structures, which are integrally formed and cast with the top plate using an aluminum alloy, and a plurality of recesses are formed on the honeycomb side of the top plate, so that each of the recesses has three of the through holes, wherein the rib structure is defined in sequence from the edge of the top plate to the middle as a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib, and the first to seventh ribs are main ribs, and their height relative to the honeycomb side is at least 25 mm.

In the aforementioned heavy-duty grid floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

In the aforementioned heavy-duty grid floor, the first rib is formed at the edge of the top plate to become the side rib of the heavy-duty grid floor, so as to serve as the side frame of the heavy-duty grid floor.

In the aforementioned heavy-duty grid floor, the sum of the thickness of the first rib relative to the honeycomb side and the top plate is 59.5 mm, and the thickness of the top plate is 2 mm.

In the aforementioned heavy-duty grid floor, the width of the first rib is 7 to 9.5 mm.

In the aforementioned heavy-duty grid floor, the height of the first to seventh ribs relative to the honeycomb side is 50 to 57.5 mm.

In the aforementioned heavy-duty grid floor, the width of the second to seventh ribs is 3.5 to 7 mm.

In the aforementioned heavy-duty grille floor, the rib structure forms a tic-tac-toe rib with two seventh ribs in the longitudinal and transverse directions to divide the heavy-duty grille floor into four areas. 25 sub-areas are formed between the adjacent second ribs, third ribs, fourth ribs, fifth ribs and sixth ribs in the four areas. Each of the sub-areas has a recess, and another recess is formed in the central part of the tic-tac-toe rib formed by the seventh rib. Each sub-area has three long strips of perforations to form a ventilation volume of more than 50%, and a wing plate is formed around the top plate so that the thickness of the wing plate is greater than the thickness of the top plate.

In the aforementioned heavy-duty grid floor, the rib structure further includes a plurality of auxiliary ribs whose height is lower than the main rib, and each of the auxiliary ribs is formed in each of the recesses, so that two auxiliary ribs are arranged in a single recess. For example, the height of the auxiliary rib relative to the honeycomb side is 25 mm, and the width is 3 mm.

In the aforementioned heavy-duty grid floor, the widths of the first rib, the second rib and the seventh rib at the opposite sides of the honeycomb side are respectively smaller than the widths of the first rib, the second rib and the seventh rib at the middle part of the honeycomb side, so as to reduce the weight of the heavy-duty grid floor.

In the aforementioned heavy-duty grid floor, the first rib and the second rib are formed with footrests at the four corners of the heavy-duty grid floor, and the footrests are fixed on the supporting frame.

As can be seen from the above, in the heavy-duty grid floor of the present invention, the top plate and the plurality of rib structures are integrally formed and cast with aluminum alloy, so that deformation will not occur during the manufacture of the heavy-duty grid floor, and defects and cracks are not likely to occur. Therefore, compared with the prior art, the heavy-duty grid floor of the present invention has excellent reliability.

Furthermore, by designing the through holes, a ventilation rate of more than 50% is formed, thereby increasing the ventilation rate to meet the cleanliness requirements of the semiconductor process.

In addition, the height of the main ribs of the rib structure relative to the honeycomb side is at least 25 mm to enhance the structural strength of the heavy-duty grid floor (e.g., it can bear at least 3,000 kg of machine equipment). Therefore, compared with the prior art, the heavy-duty grid floor can withstand heavier machine equipment in the semiconductor process to avoid the problem of the heavy-duty grid floor being broken during use.

The following describes the implementation of the present invention by means of specific embodiments. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. depicted in the drawings attached to this specification are only used to match the contents disclosed in the specification for understanding and reading by people familiar with this technology, and are not used to limit the restrictive conditions for the implementation of the present invention. Therefore, they have no substantial technical significance. Any modification of the structure, change of the proportion relationship or adjustment of the size should still fall within the scope of the technical content disclosed by the present invention without affecting the effects and purposes that can be achieved by the present invention. At the same time, the terms such as "upper", "lower", "left", "right" and "one" cited in this specification are only for the convenience of description, and are not used to limit the scope of the invention. Changes or adjustments to their relative relationships should also be regarded as the scope of the invention without substantially changing the technical content.

1A to 1E are schematic diagrams of the heavy-duty grid floor 1 of the present invention. The heavy-duty grid floor 1 of this embodiment is used to bear a heavier load, and its bearing load is greater than 3000 kg.

The heavy-duty grid floor 1 has a top plate 10 and a plurality of rib structures 1a disposed on the top plate 10, so that the top plate 10 and the plurality of rib structures 1a are integrally formed and cast using an aluminum alloy, so that deformation will not occur during the manufacture of the heavy-duty grid floor 1, and defects and cracks are not likely to occur.

The top plate 10 has a ground side 10a and a honeycomb side 10b opposite to each other, and the honeycomb side 10b is provided with the rib structure 1a in the longitudinal and transverse directions respectively, so as to form a plurality of recesses S between the plurality of longitudinal and transverse rib structures 1a, wherein Figures 1C and 1D only show the longitudinal rib structure 1a, and the transverse rib structure 1a is arranged in the same manner as the longitudinal rib structure 1a to be symmetrical, and therefore the cross-section of the transverse rib structure 1a is omitted.

In this embodiment, the top plate 10 is roughly rectangular, such as a square plate, with a length L of 600 mm and a thickness t0 of 2 mm, and a wing plate 1d (with a thickness t1 of 6 mm, which is greater than the thickness t0 of the top plate 10) is formed around the top plate 10, and a footrest 1b is formed on the four corners of the heavy-duty grid floor 1, and its bottom is L-shaped convex (or L-shaped concave), and the footrest 1b is fixed on four supporting legs (omitted in the figure). For example, the footrest 1b is used to adjust the total height H of the heavy-duty grid floor 1 so that multiple heavy-duty grid floors 1 can be located on the same horizontal plane when splicing.

Furthermore, the ground side 10a is a flat surface, and the recesses S are arranged in an array to form a honeycomb structure having a plurality of top needle positions 1c (approximately at the corners of a square area formed by every four recesses S) on the honeycomb side 10b.

The rib structure 1a is defined in sequence from the edge of the top plate 10 to the middle (or the middle direction of the left and right sides as shown in Figures 1C and 1D), and the first rib 11, the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17, and the heights h1~h7 of the first rib 11 to the seventh rib 17 relative to the honeycomb side 10b are at least 25 millimeters (mm), so the first rib 11 to the seventh rib 17 are used as main ribs, wherein the first to the sixth ribs 11~16 are distributed symmetrically on the left and right (or symmetrically on the top and bottom as shown in Figure 1B) based on the seventh rib 17, so that the spacing w between the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17 is 48 mm.

In this embodiment, the first rib 11 is formed at the edge of the top plate 10 to become the side rib of the heavy-duty grid floor 1, so as to serve as the side frame of the heavy-duty grid floor 1 for fixing the footrest 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 57.5 mm (equal to the height h2 and h7 of the second and seventh ribs 12 and 17 relative to the honeycomb side 10b), which is greater than the height h3 to h7 of the third to sixth ribs 13 to 16 relative to the honeycomb side 10b, and the sum T of the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness t0 of the top plate 10 of the present embodiment is 59.5 mm (i.e., T=h1+t0), and the total height H of the height of the foot 1b, the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness t0 of the top plate 10 is the foot height of the heavy grid floor 1, and the total height H of the present embodiment is 60 mm.

Furthermore, the heights h2 to h7 of the second to seventh ribs of the rib structure 1a can be the same or different as required, and the arrangement of the main ribs (i.e., the second to seventh ribs 12 to 17) between the first rib 11 and the recess S in the middle is as shown in FIG. 1C. For example, the heights h2 of the first rib 11 and the second rib 12 relative to the honeycomb side 10b are both 57.5 mm, the height h3 of the third rib 13 relative to the honeycomb side 10b is 50 mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 50 mm, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 50 mm, the height h6 of the sixth rib 16 relative to the honeycomb side 10b is 50 mm, and the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 50 mm. The height h7 relative to the honeycomb side 10b is 57.5 mm, wherein the two seventh ribs 17 in the longitudinal and transverse directions form a well-shaped rib to divide the heavy-duty grid floor 1 into four regions, and 25 sub-regions are formed between the adjacent second ribs 12, third ribs 13, fourth ribs 14, fifth ribs 15 and sixth ribs 16 in each region, each sub-region has a recess S, and another type of recess R is formed in the central portion of the well-shaped rib. Further, the thickness of the top plate 10 in the recess R can be increased as required or be the same as the thickness t0 of the top plate 10, and two parallel auxiliary ribs 17a are arranged in the recess R to increase the compressive strength of the heavy-duty grid floor 1 in the middle. For example, since the height h2 of the second rib 12 relative to the honeycomb side 10b is equal to the height h1 of the first rib 11 relative to the honeycomb side 10b, when the heavy-duty grid floor 1 is fixed on a scaffold for an elevated floor, the four feet of the heavy-duty grid floor 1 are supported by the bottoms of the first rib 11 and the second rib 12.

Moreover, the widths d1 to d7 of the ribs may be the same or different as required, as shown in FIG1C . For example, the width d1 of the first rib 11 is 9.5 mm, the width d2 of the second rib 12 is 7 mm, the width d3 of the third rib 13 is 3.5 mm, the width d4 of the fourth rib 14 is 3.5 mm, the width d5 of the fifth rib 15 is 3.5 mm, the width d6 of the sixth rib 16 is 3.5 mm, and the width d7 of the seventh rib 17 is 6 mm.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib may have different widths at different positions of its extension as required. For example, the width d1, d2, d7 of the local ribs can be adjusted, such as the width d1, d2, d7 of the first rib 11, the second rib 12 and the seventh rib 17 at the opposite sides of the honeycomb side 10b shown in FIG. 1D are smaller, wherein the width d1 of the first rib 11 is 7 mm, the width d2 of the second rib 12 is 4 mm, and the width d7 of the seventh rib 17 is 4.2 mm, which are respectively smaller than the width d1, d2, d7 of the first rib 11, the second rib 12 and the seventh rib 17 at the middle part of the honeycomb side 10b shown in FIG. 1C, so as to reduce the weight of the heavy grid floor 1, while the width d3, d4, d5, d6 of the third, fourth, fifth and sixth ribs 13, 14, 15, 16 remain unchanged.

In addition, the rib structure 1a can be equipped with a plurality of auxiliary ribs 17a, 18 whose volume is much smaller than the main ribs as required, as shown in FIG1C , whose height h8 (e.g., at least 25 mm) relative to the honeycomb side 10b is lower than the height h1-h7 of the main rib relative to the honeycomb side 20b, and whose width d8 is 3 mm. For example, the auxiliary ribs 18 are formed in each of the recesses S correspondingly, and extend in a single direction without interlacing each other, as shown in FIG1C , where two parallel auxiliary ribs 18 are arranged in a single recess S.

Furthermore, the heavy-duty grid floor 1 is formed with a plurality of through holes 100 on the top plate 10, connecting the ground side 10a and the honeycomb side 10b, and the honeycomb side 10b is divided into four areas (four corner areas) by the seventh rib 17 (a tic-tac-toe rib formed by two longitudinal and transverse seventh ribs 17), each of which is further divided into 25 sub-areas (corresponding to the position of the recess S), and at the outward extension of the tic-tac-toe rib (cross area), 21 other sub-areas (corresponding to the position of the recess R, S) can be separated by these ribs (the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16), so that each sub-area has three long strip through holes 100 to form a ventilation rate of more than 50%.

In this embodiment, the positions of the through holes 100 are arranged corresponding to the recesses R, S. For example, three through holes 100 are formed on each recess R, S, and the three through holes 100 are spaced and arranged side by side, and the auxiliary ribs 17a, 18 separate the through holes 100; in addition, the recess S between the first and second ribs 11, 12 has only one through hole 100, that is, no auxiliary rib 18 is arranged.

Therefore, the heavy-duty grid floor 1 can increase ventilation through the design of the perforations 100, save materials, reduce weight, and increase the load-bearing capacity.

In addition, the thickness t0 of the top plate 10 of the heavy-duty grid floor 1 is relatively small, so as to save materials and reduce weight.

In addition, a concave surface is formed between the seventh rib 17 and the first rib 11 to reduce the weight of the heavy-duty grid floor 1 .

In summary, the heavy-duty grid floor 1 of the present invention is mainly formed by integrally casting the top plate 10 and the plurality of rib structures 1a with aluminum alloy, and the arrangement of the transverse ribs and the longitudinal ribs is the same and symmetrical, so that the heavy-duty grid floor 1 will not be deformed when it is manufactured, and it is not easy to produce defects and cracks. Therefore, compared with the prior art, the heavy-duty grid floor of the present invention is not only extremely reliable, but also conducive to improving the yield and saving the manufacturing cost.

Furthermore, the design of the through hole 100 can form a ventilation volume of more than 50%, thereby increasing the ventilation volume and meeting the demand for higher return air volume around the semiconductor process equipment and the shower room, so as to improve the cleanliness of the semiconductor process.

Furthermore, the heights h1-h7 of the rib structure 1a relative to the honeycomb side 10b are at least 25 mm, so as to enhance the structural strength of the heavy-duty grid floor 1, and the heights h1 and h2 of the adjacent first rib 11 and second rib 12 relative to the honeycomb side 10b are both 57.5 mm, so that the heavy-duty grid floor 1 can be supported on the scaffold at the same time, so that the heavy-duty grid floor 1 can withstand heavier equipment in the semiconductor manufacturing process to avoid the problem of the heavy-duty grid floor 1 being broken during use. Furthermore, the heights h1-h7 and widths d1-d7 of the ribs are adjusted according to the load of the heavy-duty grid floor 1, thereby saving the material of the heavy-duty grid floor 1 and reducing the weight.

In addition, the structural strength of the heavy-duty grid floor 1 can be further enhanced by the design of the auxiliary ribs 17a, 18.

The above embodiments are used to illustrate the principle and effect of the present invention, but not to limit the present invention. Anyone skilled in the art can modify the above embodiments without violating the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be as listed in the scope of the patent application described below.

1: Heavy-duty grid floor 1a: Rib structure 1b: Footrest 1c: Pin position 1d: Wing plate 10: Top plate 10a: Ground side 10b: Honeycomb side 100: Perforation 11: First rib 12: Second rib 13: Third rib 14: Fourth rib 15: Fifth rib 16: Sixth rib 17: Seventh rib 17a,18: Auxiliary rib d1~d8: Width H: Total height h1~h8: Height L: Length R,S: Recess T: Total t0,t1: Thickness w: Spacing distance

FIG. 1A is a three-dimensional schematic diagram of the heavy-duty grid floor of the present invention.

FIG. 1B is a front plan view of FIG. 1A .

FIG. 1C is a cross-sectional view of FIG. 1B along the C-C section line.

FIG1D is a cross-sectional view along the D-D line of FIG1B.

FIG. 1E is a three-dimensional schematic diagram of FIG. 1A from another viewing angle.

1: Heavy-duty grid floor

1a: Rib structure

1d: Wing plate

10: Top plate

10a: Ground side

10b: Honeycomb side

100: Perforation

11: First rib

12: Second rib

13: Third rib

14: Fourth rib

15: Fifth rib

16: Sixth rib

17: Seventh rib

17a,18: Auxiliary ribs

d1~d8: Width

H: Total height

h1~h8: height

R,S: concave part

T:Total

t0,t1: thickness

Claims (12)

A heavy-duty grid floor comprises: A top plate having a ground side and a honeycomb side opposite to each other, wherein a plurality of through holes connecting the ground side and the honeycomb side are formed on the top plate to form a ventilation volume of more than 50%; and A plurality of rib structures are integrally formed and cast with the top plate using an aluminum alloy, and a plurality of recesses are formed on the honeycomb side of the top plate, so that each of the recesses has three through holes, wherein the rib structure is defined in sequence from the edge of the top plate to the middle as a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib, and the first to seventh ribs are main ribs, and their height relative to the honeycomb side is at least 25 mm. A heavy-duty grid floor as described in claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side. The heavy-duty grid floor as described in claim 1, wherein the first rib is formed at the edge of the top plate to become the side rib of the heavy-duty grid floor, so as to serve as the side frame of the heavy-duty grid floor. A heavy-duty grid floor as described in claim 1, wherein the sum of the thickness of the first rib relative to the honeycomb side and the top plate is 59.5 mm, and the thickness of the top plate is 2 mm. A heavy-duty grille floor as described in claim 1, wherein the width of the first rib is 7 to 9.5 mm. A heavy-duty grid floor as described in claim 1, wherein the height of the first to seventh ribs relative to the side of the honeycomb is 50 to 57.5 mm. A heavy-duty grille floor as described in claim 1, wherein the width of the second to seventh ribs is 3.5 to 7 mm. A heavy-duty grille floor as described in claim 1, wherein the rib structure is formed into a tic-tac-toe rib with two seventh ribs in the longitudinal and transverse directions to divide the heavy-duty grille floor into four areas, 25 sub-areas are formed between the adjacent second ribs, third ribs, fourth ribs, fifth ribs and sixth ribs in the four areas, each of the sub-areas has a recess, and another recess is formed in the central part of the tic-tac-toe rib formed by the seventh rib, and each sub-area has three long strips of through holes to form a ventilation volume of more than 50%, and a wing plate is formed around the top plate so that the thickness of the wing plate is greater than the thickness of the top plate. A heavy-duty grille floor as described in claim 1, wherein the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the main rib, and each of the auxiliary ribs is formed in each of the recesses correspondingly so that two of the auxiliary ribs are arranged in a single recess. A heavy-duty grid floor as described in claim 9, wherein the auxiliary rib has a height of 25 mm relative to the honeycomb side and a width of 3 mm. The heavy-duty grille floor as described in claim 1, wherein the widths of the first rib, the second rib and the seventh rib at the opposite sides of the honeycomb side are respectively smaller than the widths of the first rib, the second rib and the seventh rib at the middle part of the honeycomb side, so as to reduce the weight of the heavy-duty grille floor. A heavy-duty grid floor as described in claim 1, wherein the first rib and the second rib are formed with feet on the four corners of the heavy-duty grid floor, and the feet are fixed on a supporting frame.