TW202411509A - Light grille floor - Google Patents

Abstract

A light grille floor includes a top plate and a rib structure, wherein the rib structure and the top plate are integrally formed with aluminum alloy, and the top plate is formed with a plurality of through holes to form more than 50% ventilation. Therefore, the light grille floor can meet the needs of cleanliness of semiconductor process.

Description

Lightweight grating floor

The present invention relates to a floor, in particular to a light grid floor with high ventilation rate.

It is known that elevated floors, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent and TWM596253 patent, can be used as ventilation floors in process areas in addition to being used as factory floors in semiconductor manufacturing processes. However, their ventilation rate is less than 20%, which cannot meet the ventilation rate requirements.

However, the grating floor used for gutter cover is currently manufactured by welding, such as the TW536257 patent. Due to the welding process, it is easy to deform, and it is easy to produce defects and cracks.

Furthermore, the ventilation volume of the existing grid floor is too small, resulting in insufficient return air volume, which makes it impossible to meet the cleanliness requirements of the semiconductor process.

Furthermore, it is known that the structural strength of the grid floor is often insufficient, so when the grid floor carries heavier equipment in the semiconductor manufacturing process, the grid floor is prone to breakage.

On the other hand, existing grid floors also have the problem of being too heavy, which not only wastes materials but also increases manufacturing costs.

Therefore, how to overcome the above-mentioned problems of the known technology has become a difficult problem that the industry needs to overcome urgently.

In view of the various deficiencies of the above-mentioned prior art, the present invention provides a light grid floor, comprising: a top plate having a ground side and a honeycomb side opposite to each other, wherein a plurality of through holes connecting the ground side and the honeycomb side are formed on the top plate to form a ventilation volume of more than 50%; and a plurality of rib structures, which are integrally formed and cast with the top plate using an aluminum alloy and are arranged on the honeycomb side of the top plate to form a plurality of recesses, so that each of the recesses has three of the through holes, wherein the rib structures are provided on the top plate. In the embodiment, the rib structure is defined in sequence from the edge of the top plate to the middle as the first rib, the second rib, the third rib, the fourth rib, the fifth rib, the sixth rib and the seventh rib, and the heights of the first rib, the second rib and the seventh rib relative to the side of the honeycomb are at least 25 mm, so as to serve as main ribs, and the heights of the third rib, the fourth rib, the fifth rib and the sixth rib relative to the side of the honeycomb are less than 25 mm, so as to serve as middle ribs.

In the aforementioned light grid floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

In the aforementioned light grid floor, the first rib is formed at the edge of the top plate to become the side rib of the light grid floor, so as to serve as the side frame of the light grid floor.

In the aforementioned light grid floor, the sum of the height of the first rib relative to the honeycomb side and the thickness of the top plate is 50 mm, and the thickness of the top plate is 2 mm.

In the aforementioned light grid floor, the width of the first rib is 7 to 8 mm.

In the aforementioned light grid floor, the height of the second rib and the seventh rib relative to the honeycomb side is 48 mm.

In the aforementioned light grid floor, the width of the second rib and the seventh rib is 3.12 to 4.3 mm.

In the aforementioned light grid floor, the height of the third rib, the fourth rib, the fifth rib and the sixth rib relative to the honeycomb side is 12 to 22 mm.

In the aforementioned light grid floor, the widths of the third rib, the fourth rib, the fifth rib and the sixth rib are 3.5 to 3.8 mm.

In the aforementioned light grid floor, the rib structure forms a well-shaped rib with two seventh ribs in the longitudinal and transverse directions to divide the light grid floor into four areas. 25 sub-areas are formed between the adjacent second ribs, third ribs, fourth ribs, fifth ribs and sixth ribs in the four areas. Each of the sub-areas has a recess, and another recess is formed in the central part of the well-shaped rib formed by the seventh rib. Each sub-area has three long strips of perforations to form a ventilation volume of more than 50%, and a wing plate is formed around the top plate so that the thickness of the wing plate is greater than the thickness of the top plate.

In the aforementioned light grid floor, the rib structure further includes a plurality of auxiliary ribs whose height is lower than the main rib, and each of the auxiliary ribs is formed in each of the recesses, so that two auxiliary ribs are arranged in a single recess. For example, the height of the auxiliary rib relative to the honeycomb side is 8 mm, and the width is 3 mm.

In the aforementioned light grid floor, the widths of the first rib and the seventh rib at the opposite sides of the honeycomb side are respectively smaller than the widths of the first rib and the seventh rib at the middle part of the honeycomb side, so as to reduce the weight of the light grid floor.

In the aforementioned light grid floor, the first rib is formed with a footrest on the four corners of the light grid floor, and the footrest is fixed on the supporting frame.

As can be seen from the above, in the light-weight grid floor of the present invention, the top plate and the plurality of rib structures are integrally formed and cast with aluminum alloy, so that deformation will not occur during the manufacture of the light-weight grid floor, and defects and cracks are not likely to occur. Therefore, compared with the prior art, the light-weight grid floor of the present invention has excellent reliability.

Furthermore, by designing the through holes, a ventilation rate of more than 50% is formed, thereby increasing the ventilation rate to meet the cleanliness requirements of the semiconductor process.

In addition, the height of the main ribs of the rib structure relative to the honeycomb side is at least 25 mm to enhance the structural strength of the light grid floor. Therefore, compared with the prior art, the light grid floor can withstand heavier equipment in the semiconductor process to avoid the problem of the light grid floor breaking during use.

The following describes the implementation of the present invention by means of specific embodiments. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. depicted in the drawings attached to this specification are only used to match the contents disclosed in the specification for understanding and reading by people familiar with this technology, and are not used to limit the restrictive conditions for the implementation of the present invention. Therefore, they have no substantial technical significance. Any modification of the structure, change of the proportion relationship or adjustment of the size should still fall within the scope of the technical content disclosed by the present invention without affecting the effects and purposes that can be achieved by the present invention. At the same time, the terms such as "upper", "lower", "left", "right" and "one" etc. used in this specification are only used to facilitate the clarity of the description, and are not used to limit the scope of the present invention. Changes or adjustments to their relative relationships, without substantially changing the technical content, should also be regarded as the scope of the present invention.

1A to 1E are schematic diagrams of the light-type grid floor 1 of the present invention. The light-type grid floor 1 of this embodiment is used to bear a relatively light load, and its bearing load is about 500 kg.

The light grid floor 1 has a top plate 10 and a plurality of rib structures 1a arranged on the top plate 10, so that the top plate 10 and the plurality of rib structures 1a are integrally formed and cast using an aluminum alloy, so that deformation will not occur during the manufacture of the light grid floor 1, and defects and cracks are not likely to occur.

The top plate 10 has a ground side 10a and a honeycomb side 10b opposite to each other, and the honeycomb side 10b is provided with a plurality of rib structures 1a in the longitudinal and transverse directions, respectively, so as to form a plurality of recesses S between the longitudinal and transverse rib structures 1a, wherein Figures 1C and 1D only show the longitudinal rib structure 1a, and the transverse rib structure 1a is arranged in the same manner as the longitudinal rib structure 1a to be symmetrical, and therefore the cross-section of the transverse rib structure 1a is omitted.

In this embodiment, the top plate 10 is roughly rectangular, such as a square plate, with a length L of 600 mm and a thickness t0 of 2 mm, and a wing plate 1d (with a thickness t1 of 6 mm, which is greater than the thickness t0 of the top plate 10) is formed around the top plate 10, and a footrest 1b is formed on the four corners of the light grid floor 1, and the bottom thereof is in a mouth shape (the mouth shape can be concave or convex), and the footrest 1b is fixed on a supporting leg frame (not shown). For example, the footrest 1b is used to adjust the total height H of the light grid floor 1 so that multiple light grid floors 1 can be located on the same horizontal plane when splicing.

Furthermore, the ground side 10a is a flat surface, and the recesses S are arranged in an array to form a honeycomb structure having a plurality of top needle positions 1c (approximately at the corners of a square area formed by every four recesses S) on the honeycomb side 10b.

The rib structure 1a is defined in sequence from the edge of the top plate 10 to the middle (or the middle direction of the left and right sides as shown in FIG. 1C and FIG. 1D ) as a first rib 11, a second rib 12, a third rib 13, a fourth rib 14, a fifth rib 15, a sixth rib 16 and a seventh rib 17, and the heights h1, h2 and h7 of the first, second and seventh ribs 11, 12, 17 relative to the honeycomb side 10b are at least 25 mm, and the heights h1, h2 and h7 of the third, fourth, fifth and sixth ribs 13, 14, 15 and 16 relative to the honeycomb side 10b are at least 25 mm. The heights h3, h4, h5, and h6 of b are lower than 25 mm, so the first, second, and seventh ribs 11, 12, and 17 are used as main ribs, and the third, fourth, fifth, and sixth ribs 13, 14, 15, and 16 are used as middle ribs, wherein the first to sixth ribs 11 to 16 are distributed symmetrically with respect to the seventh rib 17 (or symmetrically with respect to each other as shown in FIG. 1B ), so that the spacing w between the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15, the sixth rib 16, and the seventh rib 17 is 48 mm.

In this embodiment, the first rib 11 is formed at the edge of the top plate 10 to become the side rib of the light grid floor 1, so as to serve as the side frame of the light grid floor 1 for fixing the footrest 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 48mm, which is the same height as the second and seventh ribs 12, 17, which are all greater than the heights h3~h6 of the third to sixth ribs 13~16 relative to the honeycomb side 10b, and the sum T of the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness t0 of the top plate 10 of the present embodiment is 50mm (i.e. T=h1+t0), and the end surface of the foot 1b is flush with the first rib 11, so that the total height H of the height of the foot 1b, the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness t0 of the top plate 10 (i.e. the foot height of the light grid floor 1) is 50㎜.

Furthermore, the heights h2-h7 of the second to seventh ribs 12-17 of the rib structure 1a can be the same or different as required, and the arrangement of the second to seventh ribs 12-17 between the first rib 11 and the recess R, S in the middle is as shown in FIG. 1C. For example, the height h2 of the second rib 12 relative to the honeycomb side 10b is 48 mm, the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 48 mm, the height h3 of the third rib 13 relative to the honeycomb side 10b is 22 mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 12 mm, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 22 mm, and the height h6 of the sixth rib 16 relative to the honeycomb side 10b is 22 mm. The height h6 of the nest side 10b is 12 mm, wherein the two seventh ribs 17 in the longitudinal and transverse directions form a well-shaped rib to divide the light grid floor 1 into four regions, and 25 sub-regions are formed between the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16 adjacent to each region, each sub-region has a recess S, and another type of recess R is formed in the central part of the well-shaped rib. Further, the thickness of the top plate 10 in the recess R can be increased as required or be the same as the thickness t0 of the top plate 10, and two parallel auxiliary ribs 17a are arranged in the recess R to improve the compressive strength of the light grid floor 1 in the middle. It should be understood that the heights h3-h6 of the third to sixth ribs 13-16 (middle ribs) are designed to be regular. For example, because the height h2 of the second rib 12 relative to the honeycomb side 10b is lower than the height h1 of the first rib 11 relative to the honeycomb side 10b, when the light grid floor 1 is fixed on a foot frame for an elevated floor, the four footrests of the light grid floor 1 are supported by the bottom of the first rib 11.

Moreover, the widths d1 to d7 of the ribs may be the same or different as required, as shown in FIG1C . For example, the width d1 of the first rib 11 is 7 to 8 mm (e.g., 7.5 mm), the width d2 of the second rib 12 is 3.8 mm, the width d3 of the third rib 13 is 3.8 mm, the width d4 of the fourth rib 14 is 3.5 mm, the width d5 of the fifth rib 15 is 3.8 mm, the width d6 of the sixth rib 16 is 3.5 mm, and the width d7 of the seventh rib 17 is 4.3 mm.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different positions of its extension according to needs. For example, the widths d1, d2, and d7 of the local ribs can be adjusted. For example, the widths d1, d2, and d7 of the first rib 11, the second rib 12, and the seventh rib 17 at the two opposite sides of the honeycomb side 10b shown in FIG. 1D are smaller, wherein the width d1 of the first rib 11 is 3.8 mm, the width d2 of the second rib 12 is 3.12 mm, and the width d7 of the seventh rib 17 is 4.8 mm. The width d7 of 17 is 3.6 mm, which is smaller than the widths d1, d2, d7 of the first rib 11, the second rib 12 and the seventh rib 17 in the middle portion of the honeycomb side 10b shown in FIG. 1C, respectively, to reduce the weight of the light grid floor 1, while the widths d3, d4, d5, d6 of the third, fourth, fifth and sixth ribs 13, 14, 15, 16 remain unchanged.

In addition, the rib structure 1a can be equipped with multiple auxiliary ribs 17a, 18 whose volume is much smaller than other ribs as required, as shown in FIG1C, whose height h8 (e.g., 8 mm) relative to the honeycomb side 10b is lower than the height h3, h4, h5, h6 of the middle rib relative to the honeycomb side 10b, and whose width d8 is 3 mm. For example, the auxiliary ribs 17a, 18 are formed in the respective recesses R, S, and extend in a single direction without intersecting each other, as shown in FIG1C, where two parallel auxiliary ribs 17a, 18 are arranged in a single recess R, S.

Furthermore, the light grid floor 1 is formed with a plurality of through holes 100 on the top plate 10 connecting the ground side 10a and the honeycomb side 10b, and the honeycomb side 10b is divided into four areas (four corner areas) by the seventh rib 17 (a tic-tac-toe rib formed by two longitudinal and transverse seventh ribs 17), each of which is further divided into 25 sub-areas (corresponding to the position of the recess S), and at the outward extension of the tic-tac-toe rib (cross area), 21 other sub-areas (corresponding to the position of the recess R, S) can be separated by the ribs (the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16), so that each sub-area has three long strip through holes 100 to form a ventilation rate of more than 50%.

In this embodiment, the positions of the through holes 100 are arranged corresponding to the recesses R, S. For example, three through holes 100 are formed on each recess R, S, and the three through holes 100 are spaced and arranged side by side, and the auxiliary ribs 17a, 18 separate the through holes 100; in addition, the recess S between the first and second ribs 11, 12 has only one through hole 100, that is, no auxiliary rib 18 is arranged.

Therefore, the light grid floor 1 can increase ventilation through the design of the perforations 100, save materials, reduce weight, and increase the load-bearing capacity.

In addition, the thickness t0 of the top plate 10 of the light grid floor 1 is smaller, and the heights h3, h4, h5, h6 of most of the rib structure 1a are also smaller, that is, the heights h3, h4, h5, h6 of the middle ribs (the third, fourth, fifth and sixth ribs 13, 14, 15, 16) are smaller than the heights h1, h2, h7 of the main ribs (the first rib 11, the second rib 12 and the seventh rib 17), so as to save materials and reduce weight.

In summary, the light grid floor 1 of the present invention is mainly formed by integrally casting the top plate 10 and the plurality of rib structures 1a with aluminum alloy, and the arrangement of the transverse ribs and the longitudinal ribs is the same and symmetrical, so that the light grid floor 1 will not be deformed when it is manufactured, and it is not easy to produce defects and cracks. Therefore, compared with the prior art, the light grid floor 1 of the present invention is not only extremely reliable, but also conducive to improving the yield and saving the manufacturing cost.

Furthermore, the design of the through hole 100 can form a ventilation volume of more than 50%, thereby increasing the ventilation volume and meeting the demand for higher return air volume around the semiconductor process equipment and the shower room, so as to improve the cleanliness of the semiconductor process.

In addition, the heights h1, h2, and h7 of the main ribs of the rib structure 1a relative to the honeycomb side 10b are at least 25 mm, so as to enhance the structural strength of the light grid floor 1, so that the light grid floor 1 can withstand heavier equipment in the semiconductor process, thereby avoiding the problem of the light grid floor 1 being broken during use. Furthermore, the heights h1 to h7 and the widths d1 to d7 of the ribs are adjusted according to the load of the light grid floor 1, thereby saving the material of the light grid floor 1 and reducing the weight.

In addition, the structural strength of the light grid floor 1 can be further improved by the design of the auxiliary ribs 17a, 18.

The above embodiments are used to illustrate the principle and effect of the present invention, but not to limit the present invention. Anyone skilled in the art can modify the above embodiments without violating the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be as listed in the scope of the patent application described below.

1: Lightweight grid floor 1a: Rib structure 1b: Footrest 1c: Top pin position 1d: Wing plate 10: Top plate 10a: Ground side 10b: Honeycomb side 100: Perforation 11: First rib 12: Second rib 13: Third rib 14: Fourth rib 15: Fifth rib 16: Sixth rib 17: Seventh rib 17a,18: Auxiliary rib d1~d8: Width h1~h8: Height L: Length R,S: Recess T: Total t0,t1: Thickness w: Spacing distance

FIG. 1A is a three-dimensional schematic diagram of the light grid floor of the present invention.

FIG. 1B is a front plan view of FIG. 1A .

FIG. 1C is a cross-sectional view of FIG. 1B along the C-C section line.

FIG1D is a cross-sectional view along the D-D line of FIG1B.

FIG. 1E is a three-dimensional schematic diagram of FIG. 1A from another viewing angle.

1: Lightweight grid floor

1a: Rib structure

1d: Wing plate

10: Top plate

10a: Ground side

10b: Honeycomb side

100: Perforation

11: First rib

12: Second rib

13: Third rib

14: Fourth rib

15: Fifth rib

16: Sixth rib

17: Seventh rib

17a,18: Auxiliary ribs

H: Total height

h1~h8: height

d1~d8: Width

T:Total

t0,t1: thickness

R,S: concave part

Claims (12)

A light grid floor comprises: A top plate having a ground side and a honeycomb side opposite to each other, wherein a plurality of through holes connecting the ground side and the honeycomb side are formed on the top plate to form a ventilation volume of more than 50%; and The plurality of rib structures are integrally formed and cast with the top plate using aluminum alloy, and are arranged on the honeycomb side of the top plate to form a plurality of recesses, so that each of the recesses has three through holes, wherein the rib structure defines the first rib, the second rib, the third rib, the fourth rib, the fifth rib, the sixth rib and the seventh rib in sequence from the edge of the top plate to the middle, and the height of the first rib, the second rib and the seventh rib relative to the honeycomb side is at least 25 mm, so as to serve as the main rib, and the height of the third rib, the fourth rib, the fifth rib and the sixth rib relative to the honeycomb side is less than 25 mm, so as to serve as the middle rib. A light grid floor as described in claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side. The light grid floor as described in claim 1, wherein the first rib is formed at the edge of the ceiling to become the side rib of the light grid floor, so as to serve as the side frame of the light grid floor. A light grid floor as described in claim 1, wherein the sum of the height of the first rib relative to the honeycomb side and the thickness of the top plate is 50 mm, and the thickness of the top plate is 2 mm. A light grid floor as described in claim 1, wherein the width of the first rib is 7 to 8 mm. The light grid floor as described in claim 1, wherein the height of the second rib and the seventh rib relative to the honeycomb side is 48 mm, and the width of the second rib and the seventh rib is 3.12 to 4.3 mm. The light grid floor as described in claim 1, wherein the height of the third rib, the fourth rib, the fifth rib and the sixth rib relative to the honeycomb side is 12 to 22 mm, and the width of the third rib, the fourth rib, the fifth rib and the sixth rib is 3.5 to 3.8 mm. The light grid floor as described in claim 1, wherein the rib structure is formed into a tic-tac-toe rib with two seventh ribs in the longitudinal and transverse directions to divide the light grid floor into four areas, 25 sub-areas are formed between the adjacent second ribs, third ribs, fourth ribs, fifth ribs and sixth ribs in the four areas, each of the sub-areas has a recess, and another recess is formed in the central part of the tic-tac-toe rib formed by the seventh rib, and each sub-area has three long strips of through holes to form a ventilation volume of more than 50%, and a wing plate is formed around the top plate so that the thickness of the wing plate is greater than the thickness of the top plate. A light grid floor as described in claim 1, wherein the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the main rib, and each of the auxiliary ribs is formed in each of the recesses correspondingly so that two of the auxiliary ribs are arranged in a single recess. A light grid floor as described in claim 9, wherein the height of the auxiliary rib relative to the honeycomb side is 8 mm and the width is 3 mm. As described in claim 1, the width of the first rib and the seventh rib at the opposite sides of the honeycomb side is respectively smaller than the width of the first rib and the seventh rib at the middle part of the honeycomb side, so as to reduce the weight of the lightweight grille floor. A light grid floor as described in claim 1, wherein the first rib is formed with a base on the four corners of the light grid floor, and the base is fixed on a supporting frame.

Images