TWM636872U - Standard grille floor - Google Patents

Abstract

A standard grille floor includes a top plate and a rib structure, wherein the rib structure and the top plate are integrally formed with aluminum alloy, and the top plate is formed with a plurality of through holes to form more than 50% ventilation. Therefore, the standard grille floor can meet the needs of cleanliness of semiconductor process.

Description

Standard grid floor

This work relates to a floor, especially a standard grille floor with a high ventilation rate.

Known raised floors, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent and TWM596253 patent, etc., can be used in the semiconductor manufacturing process of the building area, as well as the factory The ventilated floor in the process area, but its ventilation rate is less than 20%, which cannot meet the demand for ventilation rate.

However, the grid floor used for the gutter cover is currently manufactured by welding, such as the TW536257 patent, which is prone to deformation, defects and fractures during the welding forming process.

Furthermore, the ventilation volume of the existing grid floor is too small, so that the return air volume is not enough, so that the cleanliness requirement of the semiconductor manufacturing process cannot be met.

In addition, the structural strength of the conventional grid floor is often insufficient, so when the grid floor carries heavy equipment in the semiconductor manufacturing process, the grid floor is prone to cracking.

On the other hand, the existing grid floor also has the problem of being too heavy, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the various problems of the above-mentioned conventional technologies has become a difficult problem to be overcome urgently in the industry at present.

In view of the various deficiencies of the above-mentioned conventional technologies, this invention provides a standard grid floor, which includes: a top plate with opposite ground sides and honeycomb sides, wherein a plurality of grids connecting the ground side and the honeycomb side are formed on the top plate. The perforation on the side is to form more than 50% of the ventilation; and the multiple rib structures are integrally cast with the aluminum alloy on the top plate, and are set on the honeycomb side of the top plate to form multiple concave parts, so that each There are three perforations in the recess, wherein the rib structure is defined in sequence from the edge of the top plate to the middle with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, and a sixth rib and the seventh rib, and the height of the first rib, the third rib, the fifth rib and the seventh rib relative to the side of the hive is at least 25 mm to serve as the main rib, and the second rib, The heights of the fourth rib and the sixth rib relative to the sides of the honeycomb are lower than 25 mm to serve as middle ribs.

In the aforementioned standard grid floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the side of the honeycomb.

In the aforementioned standard grid floor, the first ribs are formed on the edge of the top plate to become the side ribs of the standard grid floor, and serve as the frame of the standard grid floor.

In the aforementioned standard grid floor, the sum of the height of the first rib relative to the honeycomb side and the thickness of the top plate is 50 mm, and the thickness of the top plate is 2 mm.

In the aforementioned standard grid floor, the width of the first rib is 4.36 to 7.5 mm.

In the aforementioned standard grid floor, the heights of the third rib, the fifth rib and the seventh rib relative to the honeycomb side are 32 to 45 mm.

In the aforementioned standard grid floor, the width of the third rib, the fifth rib and the seventh rib is 3.2 to 5 mm.

In the aforementioned standard grid floor, the height of the second rib, the fourth rib and the sixth rib relative to the side of the honeycomb is 16 to 18 mm.

In the aforementioned standard grid floor, the widths of the second rib, the fourth rib and the sixth rib are all 3.2 mm.

In the above-mentioned standard grid floor, the rib structure forms a well-shaped rib with two seventh ribs in the longitudinal and horizontal directions, so as to divide the standard grid floor into four areas. Among the four areas 25 subregions are formed between the adjacent second ribs, third ribs, fourth ribs, fifth ribs and sixth ribs, and each subregion has a concave portion, and the well formed on the seventh rib Another recess formed in the central part of the shaped rib, and each sub-region has three elongated perforations to form more than 50% of the ventilation, and a wing plate is formed around the top plate, so that the wing The thickness of the plates is greater than that of the top plate.

In the aforementioned standard grid floor, the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the middle rib, and each of the auxiliary ribs is correspondingly formed in each of the recesses, so that two of the ribs are arranged in a single recess. Auxiliary ribs. For example, the height of the auxiliary rib relative to the side of the honeycomb is 10 mm, and the width is 3 mm.

In the aforementioned standard grid floor, the widths of the first rib and the seventh rib at the opposite sides of the honeycomb side are respectively smaller than the widths of the first rib and the seventh rib at the middle part of the honeycomb side , to reduce the weight of the standard grid floor.

In the aforesaid standard grid floor, the first rib is formed with feet on the four corners of the standard grid floor, and the feet are fixed on the supporting legs.

It can be seen from the above that in the standard grid floor of this creation, the top plate and the plurality of rib structures are integrally cast with aluminum alloy, so that no deformation will occur during the production of the standard grid floor, and it is not easy to produce Defects and fractures, so compared with the conventional technology, the reliability of the standard grid floor of this creation is excellent.

Furthermore, through the design of these perforations, more than 50% of the ventilation rate can be formed, so the ventilation rate can be increased to meet the cleanliness requirement of the semiconductor manufacturing process.

Also, the height of the main ribs of the rib structure relative to the side of the honeycomb is at least 25 mm to enhance the structural strength of the standard grid floor, so compared with the prior art, the standard grid floor can withstand Heavy machine equipment in semiconductor manufacturing process to avoid the problem of the standard grid floor being broken during use.

The implementation of this creation is described below through specific specific examples, and those who are familiar with the art can easily understand other advantages and effects of this creation from the content disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this manual are only used to match the content disclosed in the manual, for the understanding and reading of those familiar with this technology, and are not used to limit the implementation of this creation Therefore, it has no technical substantive meaning. Any modification of structure, change of proportional relationship or adjustment of size shall still fall within the scope of this creation without affecting the effect and purpose of this creation. The technical content revealed by the creation must be within the scope covered. At the same time, terms such as "upper", "lower", "left", "right" and "one" quoted in this manual are only for the convenience of description, and are not used to limit the scope of implementation of this creation. The scope, the change or adjustment of its relative relationship, without substantive changes in the technical content, should also be regarded as the scope of the creation that can be implemented.

1A to 1E are schematic diagrams of a standard grid floor 1 of the present invention. The standard grid floor 1 of the present embodiment is used for bearing general loads, and its bearing load is about 1000 kilograms.

The standard grid floor 1 has a top plate 10 and a plurality of rib structures 1a on the top plate 10, so that the top plate 10 and the plurality of rib structures 1a are integrally cast with aluminum alloy, so as to The standard grid floor 1 will not be deformed when manufactured, and problems such as defects and fractures will not easily occur.

Said top plate 10 has opposite ground side 10a and honeycomb side 10b, and said honeycomb side 10b is respectively provided with a plurality of said rib structures 1a in longitudinal and transverse directions, so as to be between said longitudinal and transverse rib structures 1a A plurality of recesses S are formed, wherein Fig. 1C and Fig. 1D only show the longitudinal rib structure 1a, and the transverse rib structure 1a is arranged in the same manner as the longitudinal rib structure 1a to be symmetrical, so the section of the transverse rib structure 1a is omitted.

In this embodiment, the top plate 10 is roughly rectangular, such as a square plate, its length L is 600mm and thickness t0 is 2mm, and a wing plate 1d is formed around the top plate 10 (thickness t1 is 6mm, It is greater than the thickness t0 of the top plate 10), and a foot seat 1b is formed on the four corners of the standard grid floor 1, the bottom of which is L-shaped convex (also can be L-shaped concave), the foot Seat 1b is fixed on the support tripod (not shown). For example, the foot 1 b is used to adjust the total height H of the standard grid floor 1 , so that multiple standard grid floors 1 can be located at the same level when spliced.

Furthermore, the ground side 10a is a flat surface, and the recesses S are arranged in an array to form a plurality of thimble positions 1c (approximately in a square area formed by every four recesses S) on the honeycomb side 10b. The corner of the above) honeycomb structure.

The rib structure 1a is defined in sequence from the edge of the top plate 10 to the middle (or from the left and right side to the middle as shown in Figure 1C and Figure 1D ) with a first rib 11, a second rib 12, and a third rib 13. The fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17, and the first, third, fifth and seventh ribs 11, 13, 15, 17 are relative to the honeycomb side 10b The heights h1, h3, h5, h7 are at least 25 millimeters (mm), and the heights h2, h4, h6 of the second, fourth and sixth ribs 12, 14, 16 relative to the hive side 10b are less than 25 mm, so the first, third, fifth and seventh ribs 11, 13, 15, 17 are the main ribs, and the second, fourth and sixth ribs 12, 14, 16 are the middle ribs , wherein, the first to sixth ribs 11-16 are symmetrically distributed on the basis of the seventh rib 17 (or symmetrical up and down as shown in Figure 1B), so that the second rib 12, the third rib 13, The distance w between the fourth rib 14 , the fifth rib 15 , the sixth rib 16 and the seventh rib 17 is 48 mm.

In this embodiment, the first ribs 11 are formed on the edge of the top plate 10 to become the side ribs of the standard grid floor 1, as the frame of the standard grid floor 1, for fixing the feet 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 48mm, which is greater than the height h2-h7 of the second to seventh ribs 12-17 relative to the honeycomb side 10b, and the The sum T of the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness to of the top plate 10 is 50mm (that is, T=h1+t0), and the height of the foot 1b, the first rib 11 relative to The total height H of the height h1 of the honeycomb side 10b and the thickness t0 of the top plate 10 is the foot height of the standard grid floor 1, which is 60mm.

Furthermore, the heights h2-h7 of the second to seventh ribs 12-17 of the rib structure 1a can be the same or different according to requirements, as shown in FIG. 1C. For example, the height h3 of the third rib 13 relative to the honeycomb side 10b is 32mm, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 32mm, the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 45mm, The height h2 of the second rib 12 relative to the honeycomb side 10b is 18mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 16mm, and the height h6 of the sixth rib 16 relative to the honeycomb side 10b is 16mm, wherein , the two seventh ribs 17 in the vertical and horizontal directions form a well-shaped rib, so that the standard grid floor 1 is divided into four areas, and the second rib 12, the third rib 13, and the second rib adjacent to each area Between the four ribs 14, the fifth rib 15 and the sixth rib 16, 25 sub-regions are formed, each sub-region has a concave portion S, and another kind of concave portion R is formed at the center of the well-shaped rib. Further, the thickness of the top plate 10 in the recess R can be increased according to requirements or be the same as the thickness t0 of the top plate 10, and two parallel auxiliary ribs 17a are arranged in the recess R to enhance the standard grid floor 1 The compressive strength at the middle. For example, because the height h2 of the second rib 12 relative to the honeycomb side 10b is lower than the height h1 of the first rib 11 relative to the honeycomb side 10b, when the standard grid floor 1 is fixed on a foot frame for a raised floor , the four feet of the standard grid floor 1 are supported by the bottom of the first rib 11.

In addition, the widths d1-d7 of the ribs can be the same or different according to requirements, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 7.5 mm, the width d2 of the second rib 12 is 3.2 mm, the width d3 of the third rib 13 is 3.2 mm, the width d4 of the fourth rib 14 is 3.2 mm, and the width d4 of the fifth rib 15 The width d5 of the sixth rib 16 is 3.2 mm, the width d6 of the sixth rib 16 is 3.2 mm, and the width d7 of the seventh rib 17 is 5 mm.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different positions where it extends. For example, the widths d1 and d7 of the local ribs can be adjusted. The widths d1 and d7 of the first rib 11 and the seventh rib 17 on the opposite sides of the honeycomb side 10b shown in FIG. 1D are smaller, wherein, The width d1 of the first rib 11 is 4.36mm, and the width d7 of the seventh rib 17 is 3.6mm, which is respectively smaller than the width of the first rib 11 and the seventh rib 17 in the middle of the honeycomb side 10b shown in Figure 1C d1, d7, to reduce the weight of the standard grid floor 1, and the width d2, d3, d4, d5 of the second, third, fourth, fifth and sixth ribs 12, 13, 14, 15, 16 , d6 remains unchanged.

In addition, the rib structure 1a can add a plurality of auxiliary ribs 17a, 18 whose volume is much smaller than other ribs, as shown in Figure 1C, the height h8 (eg 10mm) of the rib structure 1a relative to the honeycomb side 10b is lower than that of the middle rib. The height h2, h4, h6 on the honeycomb side 10b, and its width d8 is 3 mm. For example, these auxiliary ribs 17a, 18 are correspondingly formed in each of the recesses R, S, and extend along a single direction without interlacing each other. A single recess R, S as shown in FIG. 1C is configured with two parallel auxiliary ribs 17a ,18.

Moreover, the standard grid floor 1 forms a plurality of perforations 100 connecting the ground side 10a and the honeycomb side 10b on the top plate 10, and the seventh ribs 17 (two seventh ribs 17 in the vertical and horizontal directions) The formed well-shaped ribs) divide the honeycomb side 10b into four areas (four corner areas), and each area forms 25 sub-areas (corresponding to the position of the concave part S), and the outward extension of the well-shaped ribs ( Cross region), by these ribs (the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16), 21 other sub-regions (corresponding to the recess R , S position), so that each sub-region has three elongated perforations 100 to form more than 50% of the ventilation.

In this embodiment, the positions of the through holes 100 are arranged corresponding to the recesses R, S. For example, three perforations 100 are formed on each recess R, S, and the three perforations 100 are spaced side by side, and each perforation 100 is separated by the auxiliary ribs 17a, 18; in addition, the first and second ribs 11, The recess S between 12 has only one perforation 100 , ie no auxiliary rib 18 is provided.

Therefore, the design of the perforation 100 on the standard grid floor 1 can not only increase the ventilation rate, but also help to save materials and reduce weight, and can also increase the bearing weight.

Also, the thickness t0 of the top plate 10 of the standard grid floor 1 is small, and the heights h2, h4, and h6 of most of the rib structure 1a are also small, that is, the middle ribs (the second, fourth and third The heights h2, h4, h6 of the six ribs (12, 14, 16) are smaller than the heights h1, h3, h5, h7 of the main ribs (the first rib 11, the third rib 13, the fifth rib 15 and the seventh rib 17), In order to save material and reduce weight.

To sum up, the standard grid floor 1 of this creation is mainly because the top plate 10 and the plurality of rib structures 1a are integrally casted with aluminum alloy, and the arrangement of the transverse ribs and the longitudinal ribs is the same, so that it is symmetrical. When the standard grid floor 1 is produced, it will not be deformed, and it is not easy to produce defects and fractures. Therefore, compared with the conventional technology, the standard grid floor 1 of this creation is not only extremely reliable, but also beneficial to Improve yield and save production cost.

Furthermore, through the design of the perforation 100, more than 50% of the ventilation volume can be formed, so the ventilation volume can be increased, which can meet the demand for higher return air volume around the semiconductor process equipment and the shower room, so as to improve the efficiency of the semiconductor process. cleanliness.

In addition, the standard grid floor 1 of the present creation is mainly based on the fact that the heights h1, h3, h5, and h7 of the main ribs of the rib structure 1a relative to the honeycomb side 10b are at least 25 mm to enhance the standard grid Due to the structural strength of the floor 1, the standard grid floor 1 can withstand heavy machine equipment in the semiconductor manufacturing process, so as to avoid the problem of the standard grid floor 1 being broken during use. Further, adjust the height h1~h7 and width d1~d7 of the ribs according to the bearing load of the standard grid floor 1, that is, if the bearing load is small, the height h1~h7 and width d1~d7 of the ribs will also be Smaller, to save the material and weight of the standard grid floor 1.

Furthermore, through the design of the auxiliary ribs 17a, 18, the structural strength of the standard grid floor 1 can be further improved.

The above-mentioned embodiments are used to illustrate the principle and effect of the invention, but not to limit the invention. Any person familiar with this art can modify the above-mentioned embodiments without departing from the spirit and scope of this creation. Therefore, the scope of protection of the rights of this creation should be listed in the scope of the patent application described later.

1: Standard grid floor 1a: Rib structure 1b: foot seat 1c: thimble position 1d: wing plate 10:Top plate 10a: Ground side 10b: Honeycomb side 100: perforation 11: First rib 12: Second rib 13: Third rib 14: Fourth rib 15: Fifth rib 16: Sixth rib 17: seventh rib 17a,18: Auxiliary ribs d1~d8: width H: total height h1~h8: height L: Length R, S: concave part T: sum t0, t1: thickness w: interval distance

Fig. 1A is the three-dimensional schematic diagram of the standard grid floor of this creation.

FIG. 1B is a front plan view of FIG. 1A.

Fig. 1C is a sectional view of Fig. 1B along line C-C.

FIG. 1D is a cross-sectional view of FIG. 1B along line D-D.

FIG. 1E is a three-dimensional schematic diagram of another viewing angle of FIG. 1A .

1: Standard grid floor

1a: Rib structure

1d: wing plate

10:Top plate

10a: Ground side

10b: Honeycomb side

100: perforation

11: First rib

12: Second rib

13: Third rib

14: Fourth rib

15: Fifth rib

16: Sixth rib

17: seventh rib

17a,18: Auxiliary ribs

H: total height

h1~h8: height

d1~d8: width

T: sum

t0, t1: thickness

R, S: concave part

Claims (12)

A standard grating floor, consisting of: The top plate has opposite ground side and honeycomb side, wherein a plurality of perforations connecting the ground side and the honeycomb side are formed on the top plate to form more than 50% of the ventilation rate; and A plurality of rib structures are integrally molded and cast with the top plate using aluminum alloy, and are arranged on the honeycomb side of the top plate to form a plurality of recesses, so that each recess has three perforations. Among them, the rib structure The first rib, the second rib, the third rib, the fourth rib, the fifth rib, the sixth rib and the seventh rib are defined in sequence from the edge of the top plate to the middle, and the first rib, the third rib the height of the ribs, the fifth rib and the seventh rib relative to the side of the hive is at least 25 mm as main ribs, and the height of the second rib, the fourth rib and the sixth rib relative to the side of the hive The height is less than 25 mm to serve as the middle rib. The standard grid floor according to claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the side of the honeycomb. The standard grid floor according to claim 1, wherein the first rib is formed on the edge of the top plate to become the side rib of the standard grid floor, and serves as a frame of the standard grid floor. The standard grid floor as claimed in claim 1, wherein the sum of the height of the first rib relative to the side of the honeycomb and the thickness of the top plate is 50 mm, and the thickness of the top plate is 2 mm . The standard grid floor as claimed in claim 1, wherein the width of the first rib is 4.36 to 7.5 mm. The standard grid floor as described in claim 1, wherein the height of the third rib, the fifth rib and the seventh rib relative to the side of the honeycomb is 32 to 45 mm, and the third rib, the fifth rib The width of the ribs and the seventh rib is 3.2 to 5 mm. The standard grid floor as described in Claim 1, wherein the height of the second rib, the fourth rib and the sixth rib relative to the side of the honeycomb is 16 to 18 mm, and the second rib, the fourth rib And the width of the sixth rib is 3.2 mm. The standard grid floor according to claim 1, wherein the rib structure is formed with two seventh ribs in the vertical and horizontal directions to form a well-shaped rib, so as to divide the standard grid floor into four regions 25 subregions are formed between the adjacent second ribs, third ribs, fourth ribs, fifth ribs and sixth ribs in the four regions, each of which has a concave part, and in the seventh Another concave part formed by the central part of the well-shaped ribs formed by the ribs, and has three elongated perforations in each sub-region to form more than 50% of the ventilation, and is formed around the top plate A wing plate, the thickness of the wing plate is greater than the thickness of the top plate. The standard grid floor as described in claim 1, wherein the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the middle rib, and each of the auxiliary ribs is correspondingly formed in each of the recesses, so that a single recess The midline is equipped with two such auxiliary ribs. The standard grid floor according to claim 9, wherein the height of the auxiliary rib relative to the side of the honeycomb is 10 mm, and the width is 3 mm. The standard grid floor according to claim 1, wherein the widths of the first rib and the seventh rib at the opposite sides of the honeycomb side are respectively smaller than the first rib and the seventh rib at the middle part of the honeycomb side The width of the seventh rib is to reduce the weight of the standard grid floor. The standard grid floor according to claim 1, wherein the first ribs are connected to four corners of the standard grid floor to form feet, and the feet are fixed on the supporting legs.

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