CN218149480U

CN218149480U - Standard grid floor

Info

Publication number: CN218149480U
Application number: CN202222422825.5U
Authority: CN
Inventors: 黄建德
Original assignee: Shanghai Huiya Aluminum Alloy Products Co ltd
Current assignee: Shanghai Huiya Aluminum Alloy Products Co ltd
Priority date: 2022-09-13
Filing date: 2022-09-13
Publication date: 2022-12-27
Anticipated expiration: 2032-09-13

Abstract

A standard grid floor comprises an upper plate and a rib structure, wherein the rib structure and the upper plate are integrally cast by aluminum alloy, a plurality of through holes are formed in the upper plate to form ventilation of more than 50%, and therefore the requirement of semiconductor process cleanliness can be met.

Description

Standard grid floor

Technical Field

The utility model relates to a floor especially relates to a standard type grid floor with high ventilation rate.

Background

The existing raised floor, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent, TWM596253 patent and the like, can be used for the ventilated floor of the process area besides the factory floor of the semiconductor process, but the ventilation rate is less than twenty percent, and the requirement of the ventilation rate cannot be met.

However, the grid floor for the gutter cover is manufactured by welding, such as the TW536257 patent, which is easy to deform and to generate defects and cracks in the welding process.

Moreover, the ventilation quantity of the existing grid floor is too small, so that the air return quantity is insufficient, and the requirement of the cleanliness of a semiconductor process cannot be met.

In addition, the structural strength of the conventional grid floor is often insufficient, so that the grid floor is easily broken when heavy equipment in a semiconductor process is carried on the grid floor.

On the other hand, the conventional grid floor also has the problem of overweight, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the above problems of the prior art has become a problem to be overcome in the industry.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned drawbacks of the prior art, the present invention provides a standard type grid floor, which can at least partially solve the problems of the prior art.

The utility model discloses a standard type grid floor, include: an upper plate having a ground side and a honeycomb side opposite to each other, wherein the upper plate has a plurality of through holes formed therein to communicate the ground side with the honeycomb side, thereby forming a ventilation amount of 50% or more; and a plurality of rib structures which are cast integrally with the antenna plate by aluminum alloy and are arranged on the honeycomb side of the antenna plate to form a plurality of recesses, so that each recess is provided with three through holes, wherein the rib structures are sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the antenna plate to the middle, the height of the first rib, the third rib, the fifth rib and the seventh rib relative to the honeycomb side is at least 25 mm to serve as a main rib, and the height of the second rib, the fourth rib and the sixth rib relative to the honeycomb side is lower than 25 mm to serve as a middle rib.

In the above-mentioned standard type grid floor, the plurality of concave portions are arranged in an array to form a honeycomb structure on the honeycomb side.

In the standard type grating floor, the first rib is formed at the edge of the ceiling plate to serve as a side rib of the standard type grating floor, so as to serve as a frame of the standard type grating floor.

In the standard type grating floor, the sum of the height of the first rib with respect to the honeycomb side and the thickness of the top plate is 50mm, and the thickness of the top plate is 2 mm.

In the aforementioned standard type grating floor, the width of the first rib is 4.36 to 7.5 mm.

In the above-described standard type grating floor, the height of the third, fifth and seventh ribs with respect to the honeycomb side is 32 to 45 mm.

In the above-mentioned standard type grating floor, the width of the third rib, the fifth rib and the seventh rib is 3.2 to 5mm.

In the standard type grating floor, the height of the second rib, the fourth rib and the sixth rib with respect to the honeycomb side is 16 to 18 mm.

In the standard grid floor, the widths of the second rib, the fourth rib and the sixth rib are all 3.2 mm.

In the above-mentioned standard type grating floor, the rib structure forms a # -shaped rib by two seventh ribs in the longitudinal and transverse directions to divide the standard type grating floor into four regions, 25 sub-regions are formed between the adjacent second, third, fourth, fifth and sixth ribs in the four regions, each sub-region has a concave portion, another concave portion is formed at the central part of the # -shaped rib formed by the seventh rib, and each sub-region has three strip-shaped through holes to form a ventilation amount of more than 50%, and a wing plate is formed around the ceiling, so that the thickness of the wing plate is larger than that of the ceiling.

In the above-mentioned standard type grating floor, the rib structure further comprises a plurality of auxiliary ribs having a height lower than the middle rib, and each of the auxiliary ribs is formed in each of the recesses, so that two auxiliary ribs are disposed in a single recess. For example, the height of the auxiliary rib with respect to the honeycomb side is 10mm, and the width is 3mm.

In the above-mentioned standard type grating floor, the widths of the first rib and the seventh rib at the opposite two sides of the honeycomb side are respectively smaller than the widths of the first rib and the seventh rib at the middle of the honeycomb side, so as to reduce the weight of the standard type grating floor.

In the above-mentioned standard grid floor, the first ribs are formed with foot seats at four corners of the standard grid floor, and the foot seats are fixed on the supporting foot frames.

According to the above, the utility model discloses an in the standard type grid floor, mainly adopt aluminum alloy integrated into one piece casting through this day board and these a plurality of rib structures to can not produce the deformation when making this standard type grid floor, and be difficult for producing defect and fracture scheduling problem, so compare in prior art, the utility model discloses a reliability on standard type grid floor is splendid.

Furthermore, through the design of a plurality of through holes, the ventilation volume is more than 50%, so that the ventilation volume can be increased to meet the requirement of the cleanliness of the semiconductor process.

In addition, the height of the main ribs of the rib structure relative to the honeycomb side is at least 25 mm, so that the structural strength of the standard type grating floor is improved, and compared with the prior art, the standard type grating floor can bear heavier machine equipment in a semiconductor process, so that the problem that the standard type grating floor is cracked in use is avoided.

Drawings

Fig. 1A is a schematic perspective view of a standard grid floor according to the present invention.

Fig. 1B is a front plan view of fig. 1A.

FIG. 1C is a cross-sectional view taken along line C-C of FIG. 1B.

FIG. 1D is a cross-sectional view taken along line D-D of FIG. 1B.

Fig. 1E is a perspective view of fig. 1A from another viewing angle.

The reference numbers are as follows:

1. standard grid floor

1a Rib Structure

1b foot stool

1c thimble position

1d wing plate

10. Ceiling board

10a ground side

10b Honeycomb side

100. Perforation

11. First rib

12. Second rib

13. Third rib

14. The fourth rib

15. Fifth Rib

16. Sixth Rib

17. Seventh Rib

17a,18 auxiliary Ribs

Width of d1 to d8

Total height of H

h 1-h 8 height

Length of L

R, S concave part

Sum of T

t0, t1 thickness

w separation distance

Detailed Description

The following description of the embodiments of the present invention is provided by way of specific examples, and other advantages and effects of the present invention will be readily apparent to those skilled in the art from the disclosure of the present invention.

It should be understood that the structure, proportion, size and the like shown in the attached drawings are only used for matching with the content disclosed in the specification, so as to be understood and read by those skilled in the art, and are not used for limiting the limit conditions which can be implemented by the present invention, so that the present invention has no technical essential meaning, and any structure modification, proportion relation change or size adjustment should still fall within the scope which can be covered by the technical content disclosed in the present invention without affecting the function and achievable purpose of the present invention. Meanwhile, the terms "upper", "lower", "left", "right" and "one" used in the present specification are for convenience of description, and are not intended to limit the scope of the present invention, and the relative relationship between the terms and the modifications may be changed or adjusted without substantial technical changes.

Fig. 1A to 1E are schematic views of a standard type grating floor 1 according to the present invention. The standard type grating floor 1 of this embodiment is used to carry a general load, which is about 1000 kg.

The standard type grating floor 1 is provided with a top plate 10 and a plurality of rib structures 1a arranged on the top plate 10, so that the top plate 10 and the plurality of rib structures 1a are integrally formed and cast by adopting aluminum alloy, deformation is avoided when the standard type grating floor 1 is manufactured, and the problems of defects, breakage and the like are avoided.

The antenna panel 10 has a ground side 10a and a honeycomb side 10b opposite to each other, and the honeycomb side 10b is provided with a plurality of rib structures 1a in the longitudinal and transverse directions, respectively, to form a plurality of recesses S between the longitudinal and transverse rib structures 1a, wherein fig. 1C and 1D only show the longitudinal rib structures 1a, and the transverse rib structures 1a are arranged in the same manner as the longitudinal rib structures 1a to be symmetrical, so that the cross section of the transverse rib structures 1a is omitted.

In the present embodiment, the top plate 10 is substantially rectangular, such as a square plate, the length L of the top plate is 600mm and the thickness t0 of the top plate is 2mm, a wing plate 1d (the thickness t1 of which is 6mm and is greater than the thickness t0 of the top plate 10) is formed around the top plate 10, and feet 1b are formed at four corners of the standard grid floor 1, the bottom of the standard grid floor is L-shaped convex (or L-shaped concave), and the feet 1b are fixed on supporting feet (not shown). For example, the foot seats 1b are used to adjust the total height H of the standard type grating floor 1 so that a plurality of standard type grating floors 1 are positioned at the same level when they are spliced.

Furthermore, the ground side 10a is a flat surface and a plurality of recesses S are arranged in an array to form a honeycomb structure having a plurality of pin locations 1c (approximately at the corners of a square area consisting of every four recesses S) on the honeycomb side 10 b.

The rib structure 1a is formed by sequentially defining a first rib 11, a second rib 12, a third rib 13, a fourth rib 14, a fifth rib 15, a sixth rib 16 and a seventh rib 17 from the edge of the top plate 10 to the middle (or in the left-right lateral direction as shown in fig. 1C and 1D), wherein the first, third, fifth and

seventh ribs

11,13,15,17 have heights h1, h3, h5 and h7 of at least 25 mm relative to the honeycomb side 10B, and the second, fourth and

sixth ribs

12,14,16 have heights h2, h4 and h6 of less than 25 mm relative to the honeycomb side 10B, so that the first, third, fifth and

seventh ribs

11,13,15,17 are main ribs, and the second, fourth and

sixth ribs

12,14,16 are middle ribs, wherein the first to sixth ribs 11 to 16 are symmetrical about the seventh ribs 11 to 17, and the seventh ribs 11 to 17 are symmetrical about the distance between the fourth and sixth ribs 12, the sixth ribs 13 w 17 as shown in fig. 1B, the left-right-side and the middle.

In the present embodiment, the first rib 11 is formed at the edge of the top plate 10 to become the edge rib of the standard type grating floor 1, so as to be used as the frame of the standard type grating floor 1 for fixing the foot seat 1b. For example, the height H1 of the first rib 11 relative to the honeycomb side 10b is 48mm, which is greater than the heights H2-H7 of the second to seventh ribs 12-17 relative to the honeycomb side 10b, and the sum T of the height H1 of the first rib 11 relative to the honeycomb side 10b and the thickness to of the antenna board 10 of the embodiment is 50mm (i.e., T = H1+ T0), and the total height H of the base 1b, the height H1 of the first rib 11 relative to the honeycomb side 10b and the thickness T0 of the antenna board 10 is the leg height of the standard type grating floor 1, which is 60mm.

Furthermore, the heights h 2-h 7 of the second to seventh ribs 12-17 of the rib structure 1a may be the same or different according to the requirement, as shown in fig. 1C. For example, the height h3 of the third ribs 13 relative to the honeycomb side 10b is 32mm, the height h5 of the fifth ribs 15 relative to the honeycomb side 10b is 32mm, the height h7 of the seventh ribs 17 relative to the honeycomb side 10b is 45mm, the height h2 of the second ribs 12 relative to the honeycomb side 10b is 18mm, the height h4 of the fourth ribs 14 relative to the honeycomb side 10b is 16mm, and the height h6 of the sixth ribs 16 relative to the honeycomb side 10b is 16mm, wherein two longitudinal and transverse seventh ribs 17 form a grid pattern to divide the standard type grating floor 1 into four regions, 25 sub-regions are formed between the adjacent second ribs 12, third ribs 13, fourth ribs 14, fifth ribs 15, and sixth ribs 16 in each region, each sub-region has a recess S, and a recess R of another embodiment is formed at the central portion of the grid pattern. Further, the thickness of the top plate 10 in the recess R may be increased as required or the same as the thickness t0 of the top plate 10, and two parallel auxiliary ribs 17a are disposed in the recess R to improve the compression strength of the standard type grating floor 1 at the middle. For example, since the height h2 of the second ribs 12 with respect to the honeycomb side 10b is lower than the height h1 of the first ribs 11 with respect to the honeycomb side 10b, when the standard type grating floor 1 is fixed to a foot rest for an elevated floor, the four feet of the standard type grating floor 1 are supported by the bottoms of the first ribs 11.

In addition, the widths d 1-d 7 of the ribs may be the same or different as required, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 7.5mm, the width d2 of the second rib 12 is 3.2mm, the width d3 of the third rib 13 is 3.2mm, the width d4 of the fourth rib 14 is 3.2mm, the width d5 of the fifth rib 15 is 3.2mm, the width d6 of the sixth rib 16 is 3.2mm, and the width d7 of the seventh rib 17 is 5mm.

Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions where it extends, as desired. For example, the widths D1, D7 of the local ribs can be adjusted, and as shown in fig. 1D, the widths D1, D7 of the first rib 11 and the seventh rib 17 at two opposite sides of the honeycomb side 10b are smaller, wherein the width D1 of the first rib 11 is 4.36mm and the width D7 of the seventh rib 17 is 3.6mm, which are respectively smaller than the widths D1, D7 of the first rib 11 and the seventh rib 17 at the middle of the honeycomb side 10b shown in fig. 1C, so as to reduce the weight of the standard-type grid floor 1, and the widths D2, D3, D4, D5, D6 of the second, third, fourth, fifth and

sixth ribs

12,13,14,15,16 are not changed.

In addition, the rib structure 1a may be added with a plurality of

auxiliary ribs

17a,18 having a volume much smaller than that of other ribs as required, as shown in fig. 1C, wherein the height h8 (e.g. 10 mm) of the rib structure relative to the comb side 10b is lower than the heights h2, h4, h6 of the middle rib relative to the comb side 10b, and the width d8 is 3mm. For example, a plurality of

auxiliary ribs

17a,18 are formed in each of the recesses R, S to extend in a single direction without being staggered with respect to each other, and two parallel

auxiliary ribs

17a,18 are arranged in a single recess R, S as shown in fig. 1C.

Furthermore, the standard type grid floor 1 forms a plurality of through holes 100 communicating the ground side 10a and the honeycomb side 10b on the ceiling 10, and the seventh ribs 17 (the two seventh ribs 17 in the longitudinal and transverse directions form a # -shaped rib) divide the honeycomb side 10b into four regions (four corner regions), each region further forms 25 sub-regions (corresponding to the recess S position), and the # -shaped ribs extend outward (cross region), and 21 other sub-regions (corresponding to the recess R and S positions) can be separated by a plurality of ribs (the second ribs 12, the third ribs 13, the fourth ribs 14, the fifth ribs 15 and the sixth ribs 16) so that each sub-region has three elongated through holes 100 to form a ventilation amount of 50% or more.

In the present embodiment, the positions of the through holes 100 are arranged corresponding to the recesses R and S. For example, three through holes 100 are formed in each of the recesses R, S, and the three through holes 100 are spaced side by side, and the

auxiliary ribs

17a,18 separate the through holes 100; in addition, the recess S between the first and

second ribs

11,12 has only one through hole 100, i.e., no auxiliary rib 18 is disposed.

Therefore, the standard type grating floor 1 not only can increase ventilation amount, but also is advantageous to save materials and weight by the design of the through holes 100, and can increase bearing weight.

In addition, the thickness t0 of the ceiling 10 of the standard type grating floor 1 is smaller, and the heights h2, h4, and h6 of most of the rib structures 1a are also smaller, that is, the heights h2, h4, and h6 of the middle ribs (second, fourth, and

sixth ribs

12,14,16) are smaller than the heights h1, h3, h5, and h7 of the main ribs (first rib 11, third rib 13, fifth rib 15, and seventh rib 17), so as to save materials and reduce weight.

To sum up, the utility model discloses a standard type grid floor 1 mainly adopts aluminum alloy integrated into one piece casting through this day board 10 and this a plurality of rib structure 1a, and horizontal rib is the same and be the symmetry formula with the arrangement of vertical rib to can not produce the deformation when making this standard type grid floor 1, and be difficult for producing defect and fracture scheduling problem, so compare in prior art, the utility model discloses a standard type grid floor 1 not only the reliability is splendid, and is favorable to promoting the yield and saves the cost of manufacture.

Furthermore, the design of the through hole 100 can form more than 50% of ventilation volume, thus increasing the ventilation volume, meeting the requirement of higher air return volume around the semiconductor process equipment and in shower rooms, and improving the cleanliness of the semiconductor process.

In addition, the utility model discloses a standard type grid floor 1 is mainly through the height h1 of the main rib of this rib structure 1a for this honeycomb side 10b, h3, h5, h7 all are 25 millimeters at least to promote the structural strength of this standard type grid floor 1, so this standard type grid floor 1 can bear heavier board equipment in the semiconductor technology, takes place cracked problem in order to avoid this standard type grid floor 1 in using. Furthermore, the height h 1-h 7 and the width d 1-d 7 of the ribs are adjusted according to the load bearing capacity of the standard type grating floor 1, that is, the height h 1-h 7 and the width d 1-d 7 of the ribs are smaller when the load bearing capacity is small, so as to save the material of the standard type grating floor 1 and reduce the weight.

Further, the structural strength of the standard type grill floor 1 can be further improved by the design of the

auxiliary ribs

17a,18.

The above embodiments are merely illustrative of the principles and effects of the present invention, and are not to be construed as limiting the invention. Those skilled in the art can modify the above embodiments without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be as set forth in the claims.

Claims

1. A modular grid floor, comprising:

an upper plate having a ground side and a honeycomb side opposite to each other, wherein the upper plate has a plurality of through holes formed therein to communicate the ground side with the honeycomb side, thereby forming a ventilation amount of 50% or more; and

a plurality of rib structures, which are cast integrally with the top plate by aluminum alloy and are arranged on the honeycomb side of the top plate to form a plurality of recesses, so that each recess has three through holes, wherein the rib structure is sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the top plate to the middle, the height of the first rib, the third rib, the fifth rib and the seventh rib relative to the honeycomb side is at least 25 mm to serve as a main rib, and the height of the second rib, the fourth rib and the sixth rib relative to the honeycomb side is lower than 25 mm to serve as a middle rib.

2. The modular grid flooring as claimed in claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

3. The standard-type grating floor of claim 1, wherein the first rib is formed at an edge of the ceiling to become a side rib of the standard-type grating floor, to serve as a rim of the standard-type grating floor.

4. The standard type grill floor of claim 1, wherein the sum of the height of the first rib with respect to the honeycomb side and the thickness of the top plate is 50mm, and the thickness of the top plate is 2 mm.

5. The modular grill floor as recited in claim 1, wherein the width of the first rib is 4.36 to 7.5 mm.

6. The modular grill floor as recited in claim 1, wherein the third, fifth and seventh ribs have a height of 32 to 45mm with respect to the honeycomb side, and the width of the third, fifth and seventh ribs is 3.2 to 5mm.

7. The modular grill floor as recited in claim 1, wherein the height of the second, fourth and sixth ribs with respect to the honeycomb side is 16 to 18mm, and the width of the second, fourth and sixth ribs is 3.2 mm.

8. The modular grill floor as set forth in claim 1, wherein the rib structure forms a rib in a cross shape with two seventh ribs in longitudinal and transverse directions to divide the modular grill floor into four regions, 25 sub-regions are formed between adjacent second, third, fourth, fifth and sixth ribs among the four regions, each of the sub-regions has a recess, and another recess is formed at a central portion of the rib in the cross shape formed by the seventh rib, and each of the sub-regions has three elongated through holes to form a ventilation amount of 50% or more, and a wing plate is formed around the ceiling plate to have a thickness greater than that of the ceiling plate.

9. The modular grill floor as recited in claim 1, wherein the rib structure further comprises a plurality of auxiliary ribs having a height lower than the middle rib, and each of the auxiliary ribs is formed in each of the recesses, so that two auxiliary ribs are disposed in a single recess.

10. The modular grill floor as recited in claim 9, wherein the auxiliary rib has a height of 10mm and a width of 3mm with respect to the honeycomb side.

11. The standard-type grating floor of claim 1, wherein widths of the first rib and the seventh rib at opposite sides of the honeycomb side are respectively smaller than widths of the first rib and the seventh rib at a middle portion of the honeycomb side to reduce a weight of the standard-type grating floor.

12. The standard type grating floor of claim 1, wherein the first ribs have foot seats formed at four corners of the standard type grating floor, the foot seats being fixed to the supporting legs.