CN117738416A - Standard grid floor - Google Patents

Abstract

A standard grid floor comprises a top plate and a rib structure, wherein the rib structure and the top plate are integrally molded and cast by adopting aluminum alloy, and a plurality of penetrating through holes are formed on the top plate to form ventilation quantity of more than 50%, so that the requirement of the semiconductor process cleanliness can be met.

Description

Standard grid floor

Technical Field

The present invention relates to a floor, and more particularly, to a standard type grill floor having a high ventilation rate.

Background

Existing raised floors, such as the TWM626914 patent, the TWM626915 patent, the TWM626017 patent, the TWM626032 patent, the TWM625241 patent, the TWM625242 patent, the TWM625267 patent, the TWM625270 patent, the TWM625289 patent, and the TWM596253 patent, can be used for ventilation floors of process areas in addition to factory floor floors for semiconductor processes, but the ventilation rate is less than twenty percent, which cannot meet the requirement of the ventilation rate.

However, the grid floor for ditch covers is currently manufactured by welding, such as the TW536257 patent, and is easily deformed and easily defective and broken due to the welding molding process.

Furthermore, the ventilation quantity of the existing grid floor is too small, so that the return air quantity is insufficient, and the requirement of the semiconductor process cleanliness cannot be met.

In addition, the existing grid floor often has insufficient structural strength, so that the grid floor is easy to crack when carrying heavy machine equipment in the semiconductor process.

On the other hand, the existing grid floor has the problem of being too heavy, not only wasting materials, but also increasing the manufacturing cost.

Therefore, how to overcome the above problems in the prior art has become a major challenge in the industry.

Disclosure of Invention

In view of the above-mentioned shortcomings of the prior art, the present invention provides a standard grid floor which at least partially solves the problems of the prior art.

The standard grid floor of the invention comprises: a ceiling plate having a ground side and a honeycomb side opposite to each other, wherein the ceiling plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to form a ventilation amount of 50% or more; and a plurality of rib structures which are integrally molded with the antenna board by adopting aluminum alloy and are arranged on the honeycomb side of the antenna board to form a plurality of concave parts so as to enable three through holes to be formed in each concave part, wherein the rib structures are sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the antenna board to the middle, the heights of the first rib, the third rib, the fifth rib and the seventh rib relative to the honeycomb side are at least 25 mm, and the heights of the second rib, the fourth rib and the sixth rib relative to the honeycomb side are lower than 25 mm, so that the rib structures are used as middle ribs.

In the standard grid floor, the plurality of concave portions are arranged in an array to form a honeycomb structure on the honeycomb side.

In the standard type grid floor, the first rib is formed at the edge of the ceiling plate to form a side rib of the standard type grid floor, so as to be used as a frame of the standard type grid floor.

In the standard grid floor, the sum of the height of the first ribs relative to the honeycomb side and the thickness of the ceiling plate is 50mm, and the thickness of the ceiling plate is 2 mm.

In the standard grid floor, the width of the first rib is 4.36 to 7.5 mm.

In the standard grid floor, the heights of the third ribs, the fifth ribs and the seventh ribs relative to the honeycomb side are 32 to 45 mm.

In the standard grid floor, the widths of the third ribs, the fifth ribs and the seventh ribs are 3.2 to 5mm.

In the standard grid floor, the heights of the second ribs, the fourth ribs and the sixth ribs relative to the honeycomb side are 16 to 18 mm.

In the standard grid floor, the widths of the second rib, the fourth rib and the sixth rib are all 3.2 mm.

In the standard grid floor, the rib structure forms a cross rib with two seventh ribs in the longitudinal direction and the transverse direction so as to divide the standard grid floor into four areas, 25 subregions are formed between the adjacent second ribs, the third ribs, the fourth ribs, the fifth ribs and the sixth ribs in the four areas, each subregion is provided with a concave part, the central part of the cross rib formed by the seventh ribs is provided with another concave part, each subregion is provided with three strip-shaped through holes so as to form ventilation volume of more than 50%, and a wing plate is formed around the top plate so that the thickness of the wing plate is larger than that of the top plate.

In the standard grid floor, the rib structure further comprises a plurality of auxiliary ribs lower than the middle ribs, and each of the auxiliary ribs is correspondingly formed in each of the concave parts, so that two auxiliary ribs are arranged in a single concave part. For example, the auxiliary rib has a height of 10mm with respect to the honeycomb side and a width of 3mm.

In the standard grid floor, the widths of the first ribs and the seventh ribs at the two opposite sides of the honeycomb side are respectively smaller than the widths of the first ribs and the seventh ribs at the middle part of the honeycomb side, so that the weight of the standard grid floor is reduced.

In the standard grid floor, the first rib is formed with a foot seat at four corners of the standard grid floor, and the foot seat is fixed on the supporting foot frame.

As can be seen from the above, in the standard grid floor, the antenna plate and the rib structures are integrally molded and cast by aluminum alloy, so that the standard grid floor is free from deformation, defects, breakage and the like during manufacturing, and thus the reliability of the standard grid floor is excellent compared with that of the prior art.

Furthermore, the ventilation quantity is increased by more than 50% through the design of the plurality of through holes, so that the requirement of the semiconductor process cleanliness can be met.

In addition, the height of the main rib of the rib structure relative to the honeycomb side is at least 25 mm so as to improve the structural strength of the standard grid floor, so that compared with the prior art, the standard grid floor can bear heavier machine equipment in the semiconductor process, and the problem that the standard grid floor is cracked in use is avoided.

Drawings

Fig. 1A is a perspective view of a standard grid floor of the present invention.

Fig. 1B is a front plan view of fig. 1A.

FIG. 1C is a cross-sectional view of FIG. 1B taken along line C-C.

FIG. 1D is a cross-sectional view of FIG. 1B taken along line D-D.

Fig. 1E is a schematic perspective view of the other view of fig. 1A.

The reference numerals are as follows:

1. standard grid floor

1a rib structure

1b foot stand

1c thimble position

1d wing plate

10. Ceiling board

10a floor side

10b honeycomb side

100. Perforation

11. First rib

12. Second rib

13. Third rib

14. Fourth rib

15. Fifth rib

16. Sixth rib

17. Seventh rib

17a,18 auxiliary ribs

d1 to d8 width

H total height

height of h1 to h8

L length

R, S recess

Sum of T

t0, t1 thickness

Distance w of interval

Detailed Description

Other advantages and effects of the present invention will become readily apparent to those skilled in the art from the present disclosure, as illustrated by the following specific examples.

It should be understood that the structures, proportions, sizes, etc. shown in the drawings attached hereto are for the purpose of understanding and reading only and are not intended to limit the scope of the invention, which is defined by the appended claims, but rather by the appended claims. Also, the terms such as "upper", "lower", "left", "right" and "a" and the like are used in the present specification for convenience of description, but are not intended to limit the scope of the present invention, and the relative changes or modifications thereof are considered to be within the scope of the present invention without substantial modification of the technical content.

Fig. 1A to 1E are schematic views of a standard type grid floor 1 of the present invention. The standard grid floor 1 of the present embodiment is used to carry a general load, which carries a load of about 1000 kg.

The standard grid floor 1 is provided with a day plate 10 and a plurality of rib structures 1a arranged on the day plate 10, so that the day plate 10 and the rib structures 1a are integrally molded and cast by adopting aluminum alloy, and the standard grid floor 1 is not deformed, and is not easy to cause defects, fracture and other problems when being manufactured.

The antenna board 10 has opposite ground sides 10a and honeycomb sides 10b, and the honeycomb sides 10b are respectively provided with a plurality of rib structures 1a in the longitudinal direction and the transverse direction to form a plurality of concave portions S between the longitudinal rib structures 1a and the transverse rib structures 1a, wherein fig. 1C and 1D only show the longitudinal rib structures 1a, and the transverse rib structures 1a and the longitudinal rib structures 1a are arranged in the same manner to be symmetrical, so that the cross section of the transverse rib structures 1a is omitted.

In this embodiment, the top board 10 is a rectangular body, such as a square board, with a length L of 600mm and a thickness t0 of 2mm, and a wing board 1d (with a thickness t1 of 6mm, greater than the thickness t0 of the top board 10) is formed around the top board 10, and the four corners of the standard grid floor 1 are formed with feet 1b, the bottoms of which are L-shaped convex (or L-shaped concave), and the feet 1b are fixed on supporting legs (not shown). For example, the foot stand 1b is used to adjust the overall height H of the standard type grill floor 1 so that a plurality of standard type grill floors 1 are aligned on the same horizontal plane when they are spliced.

Furthermore, the ground side 10a is a flat surface, and a plurality of recesses S are arranged in an array to form a honeycomb structure having a plurality of ejector pins 1c (at about the corners of the square area formed by every four recesses S) on the honeycomb side 10 b.

The rib structure 1a is defined with a first rib 11, a second rib 12, a third rib 13, a fourth rib 14, a fifth rib 15, a sixth rib 16 and a seventh rib 17 sequentially from the edge of the ceiling 10 to the middle (or from the left to the right to the middle as shown in fig. 1C and 1D), and the heights h1, h3, h5, h7 of the first, third, fifth and seventh ribs 11,13,15,17 relative to the honeycomb side 10B are at least 25 millimeters (mm), and the heights h2, h4, h6 of the second, fourth and sixth ribs 12,14,16 relative to the honeycomb side 10B are lower than 25 millimeters, so that the first, third, fifth and seventh ribs 11,13,15,17 serve as main ribs, and the second, fourth and sixth ribs 12,14,16 serve as middle ribs, wherein the first to the sixth ribs 11 to 16 are symmetrically distributed with respect to the seventh rib 17 as a reference (or from the upper to the lower of fig. 1B, and the fourth ribs are symmetrically distributed with respect to the fifth ribs 12,13, 15,17 at a distance of the fifth and the fifth ribs 15,16 are symmetrically distributed with respect to the fifth ribs 12, 16 w, 17 as shown in fig. 1B, and the fifth ribs are symmetrically distributed between the fifth ribs 12, 16 and 17.

In this embodiment, the first rib 11 is formed at the edge of the ceiling board 10 to form a side rib of the standard grid floor 1, so as to serve as a frame of the standard grid floor 1 for fixing the foot stand 1b. For example, the height H1 of the first rib 11 relative to the honeycomb side 10b is 48mm and is greater than the heights H2 to H7 of the second to seventh ribs 12 to 17 relative to the honeycomb side 10b, and the sum T of the height H1 of the first rib 11 relative to the honeycomb side 10b and the thickness to of the ceiling 10 in the present embodiment is 50mm (i.e. t=h1+t0), and the height of the foot rest 1b, the total height H of the height H1 of the first rib 11 relative to the honeycomb side 10b and the thickness T0 of the ceiling 10 are 60mm of the foot height of the standard grid floor 1.

Furthermore, the heights h2 to h7 of the second to seventh ribs 12 to 17 of the rib structure 1a may be the same or different as required, as shown in fig. 1C. For example, the height h3 of the third rib 13 relative to the honeycomb side 10b is 32mm, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 32mm, the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 45mm, the height h2 of the second rib 12 relative to the honeycomb side 10b is 18mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 16mm, and the height h6 of the sixth rib 16 relative to the honeycomb side 10b is 16mm, wherein the two seventh ribs 17 in the longitudinal and transverse directions form a groined rib to divide the standard grid floor 1 into four regions, 25 sub-regions are formed between the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16 adjacent to each other, each sub-region has a recess S, and a recess R of another embodiment is formed at the central portion of the groined rib. Further, the thickness of the top plate 10 in the recess R may be increased or the same as the thickness t0 of the top plate 10 as required, and two parallel auxiliary ribs 17a are disposed in the recess R to increase the compressive strength of the standard grid floor 1 at the middle. For example, since the height h2 of the second rib 12 relative to the honeycomb side 10b is lower than the height h1 of the first rib 11 relative to the honeycomb side 10b, when the standard grid floor 1 is fixed to a foot stand for an elevated floor, the four foot drops of the standard grid floor 1 are supported by the bottoms of the first ribs 11.

In addition, the widths d 1-d 7 of the ribs may be the same or different as desired, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 7.5mm, the width d2 of the second rib 12 is 3.2mm, the width d3 of the third rib 13 is 3.2mm, the width d4 of the fourth rib 14 is 3.2mm, the width d5 of the fifth rib 15 is 3.2mm, the width d6 of the sixth rib 16 is 3.2mm, and the width d7 of the seventh rib 17 is 5mm.

Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions of its extension, as desired. For example, the widths D1, D7 of the partial ribs can be adjusted, as shown in fig. 1D, the widths D1, D7 of the first rib 11 and the seventh rib 17 at the opposite sides of the honeycomb side 10b are smaller, wherein the width D1 of the first rib 11 is 4.36mm and the width D7 of the seventh rib 17 is 3.6mm, which are smaller than the widths D1, D7 of the first rib 11 and the seventh rib 17 at the middle of the honeycomb side 10b shown in fig. 1C, respectively, to reduce the weight of the standard grid floor 1, and the widths D2, D3, D4, D5, D6 of the second, third, fourth, fifth and sixth ribs 12,13,14,15,16 are unchanged.

In addition, the rib structure 1a may be added with a plurality of auxiliary ribs 17a,18 with a volume much smaller than other ribs, as shown in fig. 1C, wherein the height h8 (e.g. 10 mm) of the rib structure relative to the honeycomb side 10b is lower than the heights h2, h4, h6 of the middle rib structure relative to the honeycomb side 10b, and the width d8 is 3mm. For example, a plurality of auxiliary ribs 17a,18 are formed in each of the recesses R, S so as to extend in a single direction without being staggered with each other, and two parallel auxiliary ribs 17a,18 are arranged in a single recess R, S as shown in fig. 1C.

Furthermore, the standard grid floor 1 forms a plurality of through holes 100 on the ceiling 10, which are connected to the ground side 10a and the honeycomb side 10b, and the seventh rib 17 (the cross rib formed by the two longitudinal and transverse seventh ribs 17) divides the honeycomb side 10b into four areas (four corner areas), each of which forms 25 sub-areas (corresponding to the recess S position), and the cross rib extends outwards (cross area), and 21 other sub-areas (corresponding to the recess R, S position) are separated by a plurality of ribs (the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16), so that each sub-area has three elongated through holes 100 to form ventilation volume of 50% or more.

In the present embodiment, the positions of the plurality of through holes 100 are configured corresponding to the plurality of recesses R, S. For example, three through holes 100 are formed in each recess R, S, and the three through holes 100 are arranged side by side at intervals, and the auxiliary ribs 17a,18 separate the through holes 100; in addition, the recess S between the first and second ribs 11,12 has only one perforation 100, i.e. no auxiliary rib 18 is arranged.

Therefore, the design of the standard grid floor 1 through the through holes 100 not only increases ventilation, but also facilitates saving materials and weight, and increases load-bearing weight.

In addition, the thickness t0 of the ceiling 10 of the standard grid floor 1 is smaller, and the heights h2, h4, h6 of the majority of the rib structures 1a are also smaller, i.e., the heights h2, h4, h6 of the middle ribs (second, fourth and sixth ribs 12,14, 16) are smaller than the heights h1, h3, h5, h7 of the main ribs (first rib 11, third rib 13, fifth rib 15 and seventh rib 17), so as to facilitate saving materials and reducing weight.

In summary, the standard grid floor 1 of the present invention is mainly cast by integrally molding the top plate 10 and the rib structures 1a with aluminum alloy, and the arrangement of the transverse ribs and the longitudinal ribs is the same and symmetrical, so that the standard grid floor 1 is not deformed and is not easily broken and defective when being manufactured, and thus, compared with the prior art, the standard grid floor 1 of the present invention has excellent reliability, is beneficial to improving yield and saving manufacturing cost.

Furthermore, the ventilation volume is increased by more than 50% through the design of the through hole 100, so that the ventilation volume can be increased, and the requirements of high air return volume on the periphery of semiconductor process equipment and shower rooms can be met, thereby improving the cleanliness of the semiconductor process.

In addition, the standard grid floor 1 of the present invention mainly uses the heights h1, h3, h5, h7 of the main ribs of the rib structure 1a relative to the honeycomb side 10b to be at least 25 mm, so as to improve the structural strength of the standard grid floor 1, so that the standard grid floor 1 can bear heavier equipment in the semiconductor process, and avoid the problem of cracking of the standard grid floor 1 during use. Further, according to the load-bearing capacity of the standard grid floor 1, the heights h1 to h7 and the widths d1 to d7 of the ribs are adjusted, that is, the load-bearing capacity is small, so that the heights h1 to h7 and the widths d1 to d7 of the ribs are also small, and the material and the weight of the standard grid floor 1 are saved.

Furthermore, the structural strength of the standard type grid floor 1 can be further improved by the design of the auxiliary ribs 17a,18.

The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications to the above would be obvious to those of ordinary skill in the art, without departing from the spirit and scope of the present invention. The scope of the invention is therefore intended to be indicated by the appended claims.

Claims (12)

1. A standard grid floor comprising:

a ceiling plate having a ground side and a honeycomb side opposite to each other, wherein the ceiling plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to form a ventilation amount of 50% or more; and

the rib structures are formed by integrally molding and casting aluminum alloy with the top plate, and are arranged on the honeycomb side of the top plate to form a plurality of concave parts, so that three through holes are formed in each concave part, wherein the rib structures are sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the top plate to the middle, the heights of the first rib, the third rib, the fifth rib and the seventh rib relative to the honeycomb side are at least 25 mm to serve as main ribs, and the heights of the second rib, the fourth rib and the sixth rib relative to the honeycomb side are lower than 25 mm to serve as middle ribs.

2. The standard grid floor of claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

3. The standard type grille floor of claim 1, wherein the first rib is formed at the edge of the ceiling to be a side rib of the standard type grille floor to be a rim of the standard type grille floor.

4. The standard grid floor of claim 1, wherein the sum of the height of the first ribs relative to the honeycomb side and the thickness of the ceiling is 50 millimeters and the thickness of the ceiling is 2 millimeters.

5. The standard grid floor of claim 1, wherein the first ribs have a width of 4.36 to 7.5 millimeters.

6. The standard grid floor of claim 1, wherein the third, fifth and seventh ribs have a height of 32 to 45 millimeters relative to the honeycomb side and a width of 3.2 to 5 millimeters.

7. The standard grid floor of claim 1, wherein the second, fourth and sixth ribs are 16 to 18 millimeters in height relative to the honeycomb side, and the second, fourth and sixth ribs each have a width of 3.2 millimeters.

8. The standard type grille floor of claim 1, wherein the rib structure is formed with two of the seventh ribs in the longitudinal and transverse directions to divide the standard type grille floor into four regions, 25 sub-regions are formed between the adjacent second, third, fourth, fifth and sixth ribs in the four regions, each sub-region has a recess, another recess is formed in the central portion of the # -shaped rib formed by the seventh rib, and each sub-region has three elongated through holes to form ventilation of 50% or more, and a wing plate is formed around the ceiling to make the thickness of the wing plate greater than that of the ceiling.

9. The standard grid floor as defined in claim 1, wherein the rib structure further comprises a plurality of auxiliary ribs having a height lower than the center rib, and each of the auxiliary ribs is formed in each of the recesses such that two of the auxiliary ribs are disposed in a single recess.

10. The standard grid floor of claim 9, wherein the auxiliary rib has a height of 10 millimeters and a width of 3 millimeters relative to the honeycomb side.

11. The standard type grille floor of claim 1, wherein the widths of the first ribs and the seventh ribs at opposite sides of the honeycomb side are smaller than the widths of the first ribs and the seventh ribs at a middle part of the honeycomb side, respectively, to reduce the weight of the standard type grille floor.

12. The standard grid floor as defined in claim 1, wherein the first ribs are formed with pedestals at four corners of the standard grid floor, the pedestals being fixed to support legs.