CN218149476U - Heavy grid floor - Google Patents

Abstract

A heavy grid floor comprises a top plate and a rib structure, wherein the rib structure and the top plate are integrally cast by aluminum alloy, a plurality of through holes are formed in the top plate to form a ventilation volume of more than 50%, and therefore the requirement of semiconductor manufacturing process cleanliness can be met.

Description

Heavy grid floor

Technical Field

The present invention relates to a floor, and more particularly, to a heavy-duty grating floor having a high ventilation rate.

Background

The existing elevated floors, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent, TWM596253 patent and the like, can be used for the ventilation floors of the process area besides the floor of the plant area of the semiconductor process, but the ventilation rate is less than twenty percent, and the requirement of the ventilation rate cannot be met.

However, the grid floor for the gutter cover is manufactured by welding, such as the TW536257 patent, which is easily deformed and easily generates defects and cracks during the welding process.

Furthermore, the air flow of the conventional grid floor is too small, so that the air return is insufficient, and the requirement of the cleanliness of the semiconductor manufacturing process cannot be met.

In addition, the structural strength of the conventional grid floor is often insufficient, so that the grid floor is easily broken when heavy equipment in a semiconductor manufacturing process is carried on the grid floor.

On the other hand, the conventional grid floor also has the problem of being too heavy, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the above problems of the prior art has become a problem to be overcome in the industry.

SUMMERY OF THE UTILITY MODEL

In view of the above-identified deficiencies in the prior art, the present application provides a heavy-duty grille floor that at least partially solves the problems of the prior art.

The heavy grid floor of the present application includes: an upper plate having a ground side and a honeycomb side opposite to each other, wherein the upper plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to provide a ventilation amount of 50% or more; and a plurality of rib structures which are integrally cast with the antenna plate by using aluminum alloy, and a plurality of recesses are formed on the honeycomb side of the antenna plate so that each recess has three through holes, wherein the rib structures are sequentially defined with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the antenna plate to the middle, the first rib, the second rib, the third rib, the fourth rib, the fifth rib, the sixth rib and the seventh rib are used as main ribs, and the height of the main ribs relative to the honeycomb side is at least 25 mm.

In the above-mentioned heavy-duty grille floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

In the aforementioned heavy-duty grill floor, the first rib is formed at the edge of the ceiling to become a side rib of the heavy-duty grill floor, so as to serve as a frame of the heavy-duty grill floor.

In the aforementioned heavy-duty grille floor, the sum of the thickness of the first rib and the thickness of the top plate relative to the honeycomb side is 59.5mm, and the thickness of the top plate is 2 mm.

In the aforementioned heavy-duty grating floor, the width of the first rib is 7 to 9.5 mm.

In the aforementioned heavy-duty grill floor, the height of the first to seventh ribs with respect to the honeycomb side is 50 to 57.5 mm.

In the aforementioned heavy-duty grill floor, the widths of the second to seventh ribs are 3.5 to 7 mm.

In the aforementioned heavy grid floor, the rib structure forms a # -shaped rib by two seventh ribs in the longitudinal and transverse directions to divide the heavy grid floor into four regions, 25 sub-regions are formed between the adjacent second, third, fourth, fifth and sixth ribs in the four regions, each sub-region has a concave portion, another concave portion is formed in the central portion of the # -shaped rib formed by the seventh rib, each sub-region has three strip-shaped through holes to form a ventilation amount of more than 50%, and a wing plate is formed around the ceiling, so that the thickness of the wing plate is greater than that of the ceiling.

In the aforementioned heavy-duty grille floor, the rib structure further includes a plurality of auxiliary ribs having a height lower than that of the main rib, and each of the auxiliary ribs is correspondingly formed in each of the recesses, so that two auxiliary ribs are disposed in a single recess. For example, the height of the auxiliary rib with respect to the honeycomb side is 25mm, and the width is 3mm.

In the aforementioned heavy-duty grille floor, widths of the first rib, the second rib and the seventh rib at two opposite sides of the honeycomb side are respectively smaller than widths of the first rib, the second rib and the seventh rib at a middle portion of the honeycomb side, so as to reduce a weight of the heavy-duty grille floor.

In the aforementioned heavy grille floor, the first rib and the second rib form a foot seat at four corners of the heavy grille floor, and the foot seat is fixed on the supporting foot stand.

Therefore, in the heavy grid floor, the aluminum alloy integral forming casting is adopted mainly through the top plate and the rib structures, so that the heavy grid floor is not deformed when being manufactured, and the problems of defects, breakage and the like are not easy to generate.

Furthermore, through the design of the through holes, the ventilation quantity is more than 50%, so that the ventilation quantity can be increased to meet the requirement of the cleanliness of the semiconductor manufacturing process.

In addition, the height of the main rib of the rib structure relative to the honeycomb side is at least 25mm, so as to improve the structural strength of the heavy grating floor (such as at least 3000 kg of machine equipment), and compared with the prior art, the heavy grating floor can bear heavier machine equipment in the semiconductor manufacturing process, so that the problem of the heavy grating floor cracking in use is avoided.

Drawings

Fig. 1A is a perspective view of a heavy-duty grid floor of the present application.

Fig. 1B is a front plan view of fig. 1A.

FIG. 1C is a cross-sectional view taken along line C-C of FIG. 1B.

FIG. 1D is a cross-sectional view taken along line D-D of FIG. 1B.

Fig. 1E is a perspective view of fig. 1A from another viewing angle.

Wherein the reference numerals are as follows:

1 heavy grid floor

1a Rib Structure

1b foot stool

1c thimble position

1d wing plate

10 day board

10a ground side

10b Honeycomb side

100 perforation

11 first Rib

12 second Rib

13 third Rib

14 fourth Rib

15 fifth Rib

16 sixth Rib

17 seventh Rib

17a,18 auxiliary Ribs

Width of d1 to d8

Total height of H

h 1-h 8 height

Length of L

R, S concave part

Sum of T

t0, t1 thickness

w are spaced apart by a distance.

Detailed Description

The following description of the embodiments of the present application is provided by way of specific examples, and other advantages and effects of the present application will be readily apparent to those skilled in the art from the disclosure herein.

It should be understood that the structures, ratios, sizes, and the like shown in the drawings and described in the specification are only used for understanding and reading the contents disclosed in the specification, and are not used for limiting the conditions that the present application can implement, so the present invention has no technical significance, and any structural modification, ratio relationship change or size adjustment should still fall within the scope of the technical content disclosed in the present application without affecting the efficacy and the achievable purpose of the present application. In addition, the terms "upper", "lower", "left", "right" and "one" used in the present specification are for clarity of description, and are not intended to limit the scope of the present application, and changes or modifications in the relative relationship may be made without substantial technical changes.

Fig. 1A to 1E are schematic views of a heavy-duty grid floor 1 of the present application. The heavy grid floor 1 of the present embodiment is used to carry a heavy load, which carries more than 3000 kg.

The heavy grid floor 1 is provided with a top plate 10 and a plurality of rib structures 1a arranged on the top plate 10, so that the top plate 10 and the rib structures 1a are integrally cast by aluminum alloy, and the heavy grid floor 1 is not deformed and is not easy to generate defects, fracture and other problems when being manufactured.

The antenna panel 10 has a ground side 10a and a honeycomb side 10b opposite to each other, and the honeycomb side 10b is provided with the rib structures 1a in the longitudinal and transverse directions, respectively, to form a plurality of recesses S between the longitudinal and transverse rib structures 1a, wherein fig. 1C and 1D only show the longitudinal rib structures 1a, and the transverse rib structures 1a are arranged in the same manner as the longitudinal rib structures 1a to be symmetrical, so that the cross-section of the transverse rib structures 1a is omitted.

In the present embodiment, the top plate 10 is substantially rectangular, such as a square plate, the length L of the top plate is 600mm, the thickness t0 of the top plate is 2mm, a wing plate 1d (the thickness t1 of the wing plate is 6mm, which is greater than the thickness t0 of the top plate 10) is formed around the top plate 10, and feet 1b are formed on four corners of the heavy grid floor 1, the bottom of the heavy grid floor is L-shaped convex (or L-shaped concave), and the feet 1b are respectively fixed on four supporting feet (not shown). For example, the foot seats 1b are used to adjust the total height H of the heavy-duty grating floor 1 so that a plurality of heavy-duty grating floors 1 are positioned at the same level when being spliced.

Furthermore, the ground side 10a is a flat surface and the recesses S are arranged in an array to form a honeycomb structure having a plurality of pin locations 1c (approximately at the corners of a square area formed by every four recesses S) on the honeycomb side 10 b.

In the rib structure 1a, a first rib 11, a second rib 12, a third rib 13, a fourth rib 14, a fifth rib 15, a sixth rib 16, and a seventh rib 17 are sequentially defined from the edge of the top plate 10 to the middle (or in the left-right lateral direction as shown in fig. 1C and 1D), and heights h1 to h7 of the first to seventh ribs 11 to 17 relative to the honeycomb side 10B are at least 25 millimeters (mm), so that the first to seventh ribs 11 to 17 serve as main ribs, wherein the first to sixth ribs 11 to 16 are symmetrically distributed on the left and right (or vertically symmetrically as shown in fig. 1B) with the seventh rib 17 as a reference, so that a spacing distance w between the second, third, fourth, fifth, sixth, and seventh ribs 12, 13, 14, 15, 16, and 17 is 48 mm.

In the embodiment, the first rib 11 is formed at the edge of the top plate 10 to become a side rib of the heavy-duty grid floor 1, so as to serve as a frame of the heavy-duty grid floor 1 for fixedly connecting the foot seat 1b. For example, the height H1 of the first rib 11 relative to the honeycomb side 10b is 57.5mm (equal to the heights H2, H7 of the second and seventh ribs 12,17 relative to the honeycomb side 10 b) and is greater than the heights H3-H7 of the third to sixth ribs 13-16 relative to the honeycomb side 10b, and the sum T of the height H1 of the first rib 11 relative to the honeycomb side 10b and the thickness T0 of the antenna board 10 of the present embodiment is 59.5mm (i.e., T = H1+ T0), and the total height H of the height of the foot seat 1b, the height H1 of the first rib 11 relative to the honeycomb side 10b and the thickness T0 of the antenna board 10 is the foot height of the heavy-duty grille floor 1, and the total height H of the present embodiment is 60mm.

Furthermore, the heights h 2-h 7 of the second to seventh ribs of the rib structure 1a may be the same or different according to the requirement, and the arrangement of the main ribs (i.e., the second to seventh ribs 12-17) between the first rib 11 and the middle concave portion S is as shown in fig. 1C. For example, the height h2 of the first ribs 11 and the second ribs 12 relative to the honeycomb side 10b is 57.5mm, the height h3 of the third ribs 13 relative to the honeycomb side 10b is 50mm, the height h4 of the fourth ribs 14 relative to the honeycomb side 10b is 50mm, the height h5 of the fifth ribs 15 relative to the honeycomb side 10b is 50mm, the height h6 of the sixth ribs 16 relative to the honeycomb side 10b is 50mm, and the height h7 of the seventh ribs 17 relative to the honeycomb side 10b is 57.5mm, wherein two seventh ribs 17 in the longitudinal direction and the transverse direction form a grid-shaped rib to divide the heavy-duty grid floor 1 into four regions, and 25 sub-regions each having a recess S are formed between the adjacent second ribs 12, third ribs 13, fourth ribs 14, fifth ribs 15, and sixth ribs 16, and a recess R of another embodiment is formed at the central portion of the grid-shaped rib. Further, the thickness of the top plate 10 in the recess R may be increased as required or the same as the thickness t0 of the top plate 10, and two parallel auxiliary ribs 17a are disposed in the recess R to improve the compressive strength of the heavy grid floor 1 at the middle. For example, since the height h2 of the second rib 12 relative to the honeycomb side 10b is equal to the height h1 of the first rib 11 relative to the honeycomb side 10b, when the heavy-duty grill floor 1 is fixed to a foot stand for an elevated floor, the four feet of the heavy-duty grill floor 1 are supported by the bottoms of the first rib 11 and the second rib 12.

In addition, the widths d 1-d 7 of the ribs may be the same or different as required, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 9.5mm, the width d2 of the second rib 12 is 7mm, the width d3 of the third rib 13 is 3.5mm, the width d4 of the fourth rib 14 is 3.5mm, the width d5 of the fifth rib 15 is 3.5mm, the width d6 of the sixth rib 16 is 3.5mm, and the width d7 of the seventh rib 17 is 6mm.

Further, each rib extends longitudinally or transversely, and the same rib may have different widths at different positions where it extends, as desired. For example, the widths D1, D2, D7 of the local ribs can be adjusted, such that the widths D1, D2, D7 of the first, second, and seventh ribs 11, 12,17 at two opposite sides of the honeycomb side 10b shown in fig. 1D are smaller, wherein the width D1 of the first rib 11 is 7mm, the width D2 of the second rib 12 is 4mm, and the width D7 of the seventh rib 17 is 4.2mm, which are respectively smaller than the widths D1, D2, D7 of the first, second, and seventh ribs 11, 12, and 17 at the middle portion of the honeycomb side 10b shown in fig. 1C, so as to reduce the weight of the heavy grid floor 1, and the widths D3, D4, D5, D6 of the third, fourth, fifth, and sixth ribs 13, 14, 15, 16 are not changed.

In addition, the rib structure 1a may be added with a plurality of auxiliary ribs 17a,18 having a volume much smaller than that of the main rib as required, as shown in fig. 1C, wherein a height h8 (e.g., at least 25 mm) of the auxiliary ribs relative to the honeycomb side 10b is lower than heights h 1-h 7 of the main rib relative to the honeycomb side 20b, and a width d8 thereof is 3mm. For example, the auxiliary ribs 18 are correspondingly formed in each of the recesses S and extend along a single direction without being staggered, and two parallel auxiliary ribs 18 are disposed in a single recess S as shown in fig. 1C.

Furthermore, the heavy grid floor 1 forms a plurality of through holes 100 communicating the ground side 10a and the honeycomb side 10b on the ceiling 10, and the honeycomb side 10b is divided into four regions (four corner regions) by the seventh ribs 17 (the vertical and horizontal two seventh ribs 17 form a cross-shaped rib), each region forms 25 sub-regions (corresponding to the position of the recess S), and the cross-shaped ribs extend outward (cross region), and 21 other sub-regions (corresponding to the positions of the recesses R and S) can be separated by the ribs (the second ribs 12, the third ribs 13, the fourth ribs 14, the fifth ribs 15 and the sixth ribs 16) so that each sub-region has three elongated through holes 100 to form a ventilation amount of 50% or more.

In the present embodiment, the through holes 100 are disposed corresponding to the recesses R and S. For example, three through holes 100 are formed in each of the recesses R and S, and the three through holes 100 are spaced side by side, and the auxiliary ribs 17a and 18 separate the through holes 100; in addition, the recess S between the first and second ribs 11, 12 has only one through-hole 100, i.e. no auxiliary rib 18 is provided.

Therefore, the heavy-duty grill floor 1 not only can increase ventilation amount, but also can save materials and reduce weight and increase bearing weight by the design of the through holes 100.

In addition, the thickness t0 of the top plate 10 of the heavy-duty grating floor 1 is small, which is beneficial to saving materials and reducing weight.

In addition, a concave surface is formed between the seventh rib 17 and the first rib 11 to reduce the weight of the heavy-duty grill floor 1.

To sum up, the heavy grid floor 1 of this application adopts aluminum alloy integrated into one piece casting with these a plurality of rib structures 1a mainly through this day board 10, and horizontal rib is the same and be the symmetry formula with the arrangement mode of vertical rib to can not produce the deformation when making this heavy grid floor 1, and difficult defect and fracture scheduling problem of producing, so compare prior art, the heavy grid floor of this application not only the reliability is splendid, and is favorable to promoting the yield and saves the cost of manufacture.

Furthermore, the design of the through hole 100 can form more than 50% of ventilation volume, thereby increasing the ventilation volume, meeting the requirement of higher air return volume around the semiconductor processing equipment and in a shower room, and improving the cleanliness of the semiconductor processing.

In addition, the heights h 1-h 7 of the ribs of the rib structure 1a relative to the honeycomb side 10b are at least 25mm to improve the structural strength of the heavy-duty grid floor 1, and the heights h1 and h2 of the adjacent first ribs 11 and second ribs 12 relative to the honeycomb side 10b are 57.5mm, so that the heavy-duty grid floor 1 can be simultaneously supported on a foot stand, and therefore the heavy-duty grid floor 1 can bear heavy equipment in a semiconductor manufacturing process to avoid the problem that the heavy-duty grid floor 1 is cracked in use. Furthermore, the height h 1-h 7 and the width d 1-d 7 of the ribs are adjusted according to the load of the heavy grating floor 1, so that the material of the heavy grating floor 1 is saved and the weight is reduced.

In addition, the structural strength of the heavy-duty grill floor 1 can be further improved by the design of the auxiliary ribs 17a, 18.

The above-described embodiments are merely illustrative of the principles and utilities of the present application and are not intended to limit the application. Any person skilled in the art can modify the above-described embodiments without departing from the spirit and scope of the present application. Therefore, the protection scope of the present application should be as set forth in the claims.

Claims (12)

1. A heavy grid floor, comprising:

an upper plate having a ground side and a honeycomb side opposite to each other, wherein the upper plate is formed with a plurality of through holes communicating the ground side and the honeycomb side to provide a ventilation amount of 50% or more; and

a plurality of rib structures, which are cast integrally with the top plate by aluminum alloy, and a plurality of recesses are formed on the honeycomb side of the top plate, so that each recess has three through holes, wherein the rib structure is defined by a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib from the edge of the top plate to the middle in sequence, and the first rib to the seventh rib are used as main ribs, and the height of the main ribs relative to the honeycomb side is at least 25 mm.

2. The heavy duty grid floor of claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

3. The heavy-duty grill floor of claim 1, wherein the first rib is formed at an edge of the ceiling to become a side rib of the heavy-duty grill floor, serving as a rim of the heavy-duty grill floor.

4. The heavy duty grid floor of claim 1, wherein the sum of the thickness of the first rib and the thickness of the top plate with respect to the honeycomb side is 59.5mm, and the thickness of the top plate is 2 mm.

5. The heavy-duty grill floor of claim 1, wherein the width of the first rib is 7 to 9.5 mm.

6. The heavy-duty grill floor of claim 1, wherein the height of the first to seventh ribs with respect to the honeycomb side is 50 to 57.5 mm.

7. The heavy grid floor of claim 1, wherein the width of the second to seventh ribs is 3.5 to 7 mm.

8. The heavy-duty grid floor of claim 1, wherein the rib structure forms a # -shaped rib with two seventh ribs in longitudinal and transverse directions to divide the heavy-duty grid floor into four regions, 25 sub-regions are formed between adjacent second, third, fourth, fifth and sixth ribs in the four regions, each sub-region has a concave portion, another concave portion is formed at a central portion of the # -shaped rib formed by the seventh rib, each sub-region has three elongated through holes to form a ventilation amount of more than 50%, and a wing plate is formed around the ceiling plate to make a thickness of the wing plate larger than that of the ceiling plate.

9. The heavy-duty grill floor of claim 1, wherein the rib structure further comprises a plurality of auxiliary ribs having a height lower than that of the main rib, and each of the auxiliary ribs is formed in each of the recesses, respectively, such that two of the auxiliary ribs are disposed in a single recess.

10. The heavy duty grill floor of claim 9, wherein the height of the auxiliary ribs with respect to the honeycomb side is 25mm and the width is 3mm.

11. The heavy-duty grill floor of claim 1, wherein widths of the first rib, the second rib, and the seventh rib at opposite lateral portions of the honeycomb side are respectively smaller than widths of the first rib, the second rib, and the seventh rib at a middle portion of the honeycomb side, so as to reduce weight of the heavy-duty grill floor.

12. The heavy-duty grill floor of claim 1, wherein the first rib and the second rib have foot seats formed at four corners of the heavy-duty grill floor, the foot seats being fixed to the supporting legs.

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