TWI825988B - Light grille floor - Google Patents

Abstract

A light grille floor includes a top plate and a rib structure, wherein the rib structure and the top plate are integrally formed with aluminum alloy, and the top plate is formed with a plurality of through holes to form more than 50% ventilation. Therefore, the light grille floor can meet the needs of cleanliness of semiconductor process.

Description

Light grid floor

The present invention relates to a floor, in particular to a lightweight grille floor with high ventilation rate.

Known raised floors, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent and TWM596253 patent, etc., in addition to being used for factory floors in semiconductor manufacturing processes, they can also be used There is a ventilated floor in the process area, but its ventilation rate is less than 20%, which cannot meet the ventilation rate requirements.

However, the grating floor currently used for ditch covers is made by welding, as shown in the TW536257 patent. Due to the welding forming process, it is easy to deform, and is prone to defects and fractures.

Furthermore, the ventilation volume of the existing grille floor is too small, resulting in insufficient return air volume, which cannot meet the cleanliness requirements of the semiconductor process.

In addition, it is known that the structural strength of the conventional grid floor is often insufficient. Therefore, when the heavier equipment used in the semiconductor manufacturing process is carried on the grid floor, the grid floor is prone to breakage.

On the other hand, existing grille floors also have the problem of being too heavy, which not only wastes materials but also increases manufacturing costs.

Therefore, how to overcome the various problems of the above-mentioned conventional technologies has become an urgent problem that the industry needs to overcome.

In view of the shortcomings of the above-mentioned conventional technologies, the present invention provides a lightweight grid floor, which includes: a top plate with an opposite ground side and a honeycomb side, wherein a plurality of holes are formed on the top plate to connect the ground side and the honeycomb side. perforations to form more than 50% of the ventilation volume; and a plurality of rib structures, which are integrally cast with aluminum alloy with the ceiling, and are provided on the honeycomb side of the ceiling to form a plurality of recesses to allow each of the There are three or four such perforations in the recess, wherein the rib structure is defined sequentially from the edge of the ceiling to the middle, with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, and a third rib. The sixth rib and the seventh rib, and the height of the first rib, the second rib, the third rib, the fifth rib and the seventh rib relative to the side of the honeycomb is at least 25 mm as the main rib, and the height of the third rib is at least 25 mm relative to the side of the honeycomb. The height of the fourth rib and the sixth rib relative to the side of the honeycomb is less than 25 mm, serving as the middle rib.

In the aforementioned light grid floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

In the aforementioned lightweight grille floor, the first rib is formed on the edge of the ceiling to become an edge rib of the lightweight grille floor and serves as a frame of the lightweight grille floor.

In the aforementioned light grid floor, the sum of the height of the first rib relative to the honeycomb side and the thickness of the top plate is 50 mm, and the thickness of the top plate is 2 to 3 mm.

In the aforementioned light grid floor, the height of the second rib, the third rib, the fifth rib and the seventh rib relative to the honeycomb side is 27 to 42 mm.

In the aforementioned light grid floor, the height of the fourth rib and the sixth rib relative to the honeycomb side is 12 to 13 mm.

In the aforementioned light grid floor, the width of the first rib is 4.8 to 7 mm.

In the aforementioned light grid floor, the width of the second rib, third rib, fifth rib and seventh rib is 2.6 to 5.5 mm.

In the aforementioned light grid floor, the width of the fourth rib and the sixth rib is 2.6 to 3.5 mm.

In the aforementioned lightweight grille floor, the rib structure is formed by two seventh ribs in the longitudinal and transverse directions to form a tic-shaped rib, so as to divide the lightweight grille floor into four areas, with adjacent areas in the four areas. There are 25 sub-regions formed between the second rib, third rib, fourth rib, fifth rib and sixth rib. Each sub-region has a recess, and the tic-tac-toe rib formed by the seventh rib Another recess is formed in the central part, and each sub-area has three or four long strips of the perforations to form more than 50% of the ventilation volume, and a wing is formed around the ceiling so that the The thickness of the wing panels is greater than the thickness of the top panel.

In the aforementioned lightweight grille floor, the rib structure includes a plurality of auxiliary ribs with a height lower than the main rib, and each of the auxiliary ribs is correspondingly formed in each of the recesses, so that two of the auxiliary ribs are configured in a single recess. rib. For example, the height of the auxiliary rib relative to the honeycomb side is at least 8.5 mm, and the width is 3 to 3.2 mm.

In the aforementioned lightweight grille floor, the widths of the first rib and the seventh rib at the opposite sides of the honeycomb side are respectively smaller than the widths of the first rib and the seventh rib at the middle portion of the honeycomb side, To reduce the weight of the lightweight grille floor.

In the aforementioned lightweight grille floor, the first rib is formed with feet at four corners of the lightweight grille floor, and the feet are fixed on the support legs.

It can be seen from the above that in the light grille floor of the present invention, the top plate and the plurality of rib structures are mainly made of aluminum alloy to be integrally molded and cast, so that deformation will not occur during the production of the light grille floor, and defects will not easily occur. There are problems such as breakage, so compared with the conventional technology, the lightweight grille floor of the present invention has excellent reliability.

Furthermore, through the design of these perforations, more than 50% of the ventilation volume can be formed, so the ventilation volume can be increased to meet the cleanliness requirements of the semiconductor process.

In addition, the height of the main ribs of the rib structure relative to the honeycomb side is at least 25 mm to enhance the structural strength of the lightweight grid floor. Therefore, compared with the conventional technology, the lightweight grid floor can withstand the semiconductor manufacturing process. Medium and heavy machine equipment to avoid the problem of chipping of the light grating floor during use.

The following describes the implementation of the present invention through specific embodiments. Those familiar with the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to coordinate with the content disclosed in the specification for the understanding and reading of those familiar with the art, and are not used to limit the implementation of the present invention. Therefore, it has no technical substantive significance. Any structural modifications, changes in proportions, or adjustments in size shall still fall within the scope of this invention without affecting the effects that can be produced and the purposes that can be achieved. The technical content disclosed by the invention must be within the scope that can be covered. At the same time, terms such as "upper", "lower", "left", "right" and "one" cited in this specification are only for convenience of description and are not used to limit the implementation of the present invention. Changes or adjustments in scope and relative relationships shall also be regarded as the scope within which the present invention can be implemented, provided there is no substantial change in the technical content.

1A to 1E are schematic diagrams of the first embodiment of the lightweight grille floor 1 of the present invention. The lightweight grille floor 1 of this embodiment is used to carry heavier loads, and its carrying load is about 700 kilograms.

The lightweight grille floor 1 has a top plate 10 and a plurality of rib structures 1a provided on the top plate 10, so that the top plate 10 and the plurality of rib structures 1a are integrally molded and cast with aluminum alloy for easy production. The lightweight grille floor 1 will not be deformed and is not prone to defects, breakage and other problems.

The ceiling 10 has an opposite ground side 10a and a honeycomb side 10b, and the honeycomb side 10b is respectively provided with a plurality of rib structures 1a in the longitudinal and transverse directions, between the plurality of rib structures 1a in the longitudinal and transverse directions. A plurality of recessed portions S are formed. Figures 1C and 1D only show the longitudinal rib structure 1a. The transverse rib structure 1a is arranged in the same manner as the longitudinal rib structure 1a to form a symmetrical structure, so the cross-section of the transverse rib structure 1a is omitted.

In this embodiment, the top plate 10 is roughly rectangular, such as a square plate, with a length L of 600 mm and a thickness t0 of 2 mm, and a wing plate 1d is formed around the top plate 10 (the thickness t1 is 6mm, which is greater than the thickness t0 of the top plate 10), and there are feet 1b formed on the four corners of the light grille floor 1, the bottom of which is L-shaped convex (it can also be L-shaped concave), The foot base 1b is fixed on the support bracket (not shown). For example, the foot base 1b is used to adjust the total height H of the lightweight grille floor 1 so that when multiple lightweight grille floors 1 are spliced together, they can be located on the same level.

Furthermore, the ground side 10a is a flat surface, and the recessed portions S are arranged in an array to form a square area with a plurality of ejector positions 1c (approximately every four recessed portions S) on the honeycomb side 10b. (corner above) honeycomb structure.

The rib structure 1a is defined with a first rib 11, a second rib 12, and a third rib in sequence from the edge of the ceiling 10 to the middle (or the left and right middle direction as shown in Figure 1B and Figure 1C). 13. The fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17, and the first to third, fifth and seventh ribs 11~13, 15 and 17 are relative to the honeycomb side 10b. The heights h1~h3, h5, and h7 are at least 25 millimeters (mm), and the heights h4 and h6 of the fourth and sixth ribs 14 and 16 relative to the honeycomb side 10b are less than 25 mm, so the heights h1~h3, h5, and h7 are less than 25 mm. The first to third, fifth and seventh ribs 11~13, 15 and 17 are used as main ribs, and the fourth and sixth ribs 14 and 16 are used as middle ribs, wherein the first to sixth ribs 11~ 16 are distributed symmetrically (or symmetrically up and down as shown in Figure 1B) based on the seventh rib 17, so that the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15, the sixth rib The distance w between the rib 16 and the seventh rib 17 is 48 mm.

In this embodiment, the first rib 11 is formed on the edge of the ceiling 10 to become an edge rib of the light grille floor 1, and serves as a frame of the light grille floor 1 for fixing the foot base 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 48 mm, which is greater than the height h2 ~ h7 of the second to seventh ribs 12 to 17 relative to the honeycomb side 10b, and the height h1 of the first rib 11 relative to the honeycomb side 10b is 48 mm. The sum T of the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness t0 of the top plate 10 is 50 mm (ie T=h1+t0), and the height of the foot 1b relative to the first rib 11 The total height H between the height h1 of the honeycomb side 10b and the thickness t0 of the top plate 10 is the foot height of the light grid floor 1, which is 55 mm.

Furthermore, the heights h2 to h7 of the second to seventh ribs of the rib structure 1a can be the same or different according to needs, and the second to seventh ribs between the first rib 11 and the recessed portions R and S in the middle are The arrangement of ribs 12~17 is as shown in Figure 1C. For example, the height h2 of the second rib 12 relative to the honeycomb side 10b is 27 mm, the height h3 of the third rib 13 relative to the honeycomb side 10b is 34 mm, and the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 27mm. The height h7 of the seventh rib 17 relative to the honeycomb side 10b is 42mm. The heights h4 and h6 of the fourth and sixth ribs 14 and 16 relative to the honeycomb side 10b are both 12mm. The longitudinal and transverse dimensions are The two seventh ribs 17 form a tic-tac-shape rib to divide the light grille floor 1 into four areas. Each area has adjacent second ribs 12, third ribs 13, fourth ribs 14, and Twenty-five sub-regions are formed between the fifth rib 15 and the sixth rib 16. Each sub-region has a concave portion S, and another type of concave portion R is formed in the center of the tic-tac-toe rib. Furthermore, the thickness of the top plate 10 in the recessed portion R can be greater than the thickness t0 of the top plate 10 in other places or the same as the thickness t0 of the top plate 10 as required, and two parallel auxiliary ribs 17a are arranged in the recessed portion R. , to improve the compressive strength of the light grid floor 1 in the middle. For example, since the height h2 of the second rib 12 relative to the honeycomb side 10b is lower than the height h1 of the first rib 11 relative to the honeycomb side 10b, when the light grid floor 1 is fixed on a tripod for a raised floor, The four foot positions of the light grille floor 1 are supported by the bottom of the first rib 11 .

In addition, the widths d1~d7 of each rib can be the same (such as the second to sixth ribs 12~16) or different according to the requirements, as shown in Figure 1C. For example, the width d1 of the first rib 11 is 8㎜, the width d2 of the second rib 12 is 3.8㎜, the width d3 of the third rib 13 is 3.8㎜, the width d4 of the fourth rib 14 is 3.5㎜, and the width d4 of the fifth rib 15 is 3.5㎜. The width d5 of the sixth rib 16 is 3.8㎜, the width d6 of the sixth rib 16 is 3.5㎜, and the width d7 of the seventh rib 17 is 5.5㎜.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different extending positions as required. For example, the widths d1 and d7 of the local ribs can be adjusted. As shown in FIG. 1D , the widths d1 and d7 of the first rib 11 and the seventh rib 17 on the opposite sides of the honeycomb side 10b are smaller, wherein, The width d1 of the first rib 11 is 5 mm, and the width d7 of the seventh rib 17 is 4.5 mm, which are respectively smaller than the widths of the first rib 11 and the seventh rib 17 in the middle of the honeycomb side 10b shown in Figure 1C d1, d7, to reduce the weight of the light grille floor 1, and the widths d2, d3, d4, d5 of the second, third, fourth, fifth and sixth ribs 12, 13, 14, 15, 16, d6 remains unchanged.

In addition, the rib structure 1a can add a plurality of auxiliary ribs 17a, 18 whose volume is much smaller than other ribs according to the needs. As shown in Figure 1C, its height h0, h8 (such as 8.5mm) relative to the honeycomb side 10b is lower than the The heights of the middle rib relative to the honeycomb side 10b are h4 and h6, and the width d8 is 3.2 mm. For example, the auxiliary ribs 17a, 18 are correspondingly formed in each of the recesses R, S, and extend in a single direction without intersecting with each other. As shown in Figure 1C, the single recess R, S is equipped with two parallel auxiliary ribs 17a. ,18.

Furthermore, the light grid floor 1 is formed on the ceiling 10 with a plurality of perforations 100 connecting the ground side 10a and the honeycomb side 10b, and is connected with the seventh rib 17 (two seventh ribs 17 in the longitudinal and transverse directions). Forming a tic-tac-toe rib), the honeycomb side 10b is divided into four areas (four corner areas), each area forms 25 sub-areas (corresponding to the recess S position), and the tic-tac-toe rib extends outward (cross area), through these ribs (the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16), 21 other sub-areas (corresponding to the recess R, S position), so that each sub-area has three long strips of perforations 100 to form more than 50% ventilation.

In this embodiment, the positions of the through holes 100 are configured corresponding to the recesses R and S. For example, three perforations 100 are formed on each recess R, S, and the three perforations 100 are spaced side by side, and each row of perforations 100 is separated by the auxiliary ribs 17a, 18; in addition, the first and second ribs 11 The recess S between , 12 has only one through hole 100, that is, there is no auxiliary rib 18.

Therefore, the lightweight grille floor 1 can not only increase ventilation through the design of the perforations 100, but also help save materials and reduce weight, and can also increase the load-bearing weight.

In addition, the thickness t0 of the top plate 10 of the lightweight grille floor 1 is small, and the partial height h4, h6 of the rib structure 1a is also small, that is, the height of the middle rib (the fourth and sixth ribs 14, 16) h4, h6 are much smaller than the height h1, h2, h3, h5, h7 of the main ribs (the first, second, third, fifth and seventh ribs 11, 12, 13, 15, 17) to save materials. and weight reduction.

2A to 2E are schematic diagrams of the second embodiment of the lightweight grille floor 2 of the present invention. The load-carrying load of the lightweight grille floor 2 of this embodiment is about 700 kilograms, and the difference from the first embodiment lies in the change in the partial height of the rib structure 2a, so the similarities will not be described again below.

As shown in Figure 2A, the bottom of the foot base 2b has a mouth-shaped convex shape (it can also have a mouth-shaped concave shape).

In this embodiment, the thickness t0 of the top plate 20 is 3mm, the height h1 of the first rib 21 relative to the honeycomb side 20b is 47mm, and the height h1 of the first rib 21 relative to the honeycomb side 20b The sum T of the thickness t0 of the top plate 20 is 50 mm, and the total height H of the height of the foot 2b, the height h1 of the first rib 21 relative to the honeycomb side 20b and the thickness t0 of the top plate 20 is 55mm, in which the thickness t1 of the wing plate 2d is 10mm. The first rib 21 is formed on the edge of the top plate 20 to become the side rib of the light grille floor 2. The first to sixth ribs 21 to 26 are symmetrically distributed (or symmetrically up and down as shown in FIG. 2B ) based on the seventh rib 27 .

Furthermore, in the rib structure 2a, as shown in Figure 2C, the height h2 of the second rib 22 relative to the honeycomb side 20b is 27mm, the height h3 of the third rib 23 relative to the honeycomb side 20b is 27mm, and the height h3 of the third rib 23 relative to the honeycomb side 20b is 27mm. The height h5 of the fifth rib 25 relative to the honeycomb side 20b is 27 mm, the height h7 of the seventh rib 27 relative to the honeycomb side 20b is 41 mm, and the heights of the fourth and sixth ribs 24 and 26 relative to the honeycomb side 20b are h4 and h6 are both 13㎜. On the other hand, three parallel ribs 27a are disposed in the recessed portion R, and their height h0 relative to the honeycomb side 20b is 8.5mm, so as to increase the compressive strength of the lightweight grille floor 2 in the middle. For example, since the height h2 of the second rib 22 relative to the honeycomb side 20b is lower than the height h1 of the first rib 21 relative to the honeycomb side 20b, when the light grid floor 2 is fixed on a tripod for a raised floor, The four foot positions of the light grille floor 2 are supported by the bottom of the first rib 21 .

In addition, the widths d1 to d7 of each rib can be the same or different according to requirements, as shown in Figure 2C. For example, the width d1 of the first rib 21 is 8㎜, the width d2 of the second rib 22 is 5.2㎜, the width d3 of the third rib 23 is 3.5㎜, the width d4 of the fourth rib 24 is 2.6㎜, and the width d4 of the fifth rib 25 is 2.6㎜. The width d5 is 3.5㎜, the width d6 of the sixth rib 26 is 2.6㎜, and the width d7 of the seventh rib 27 is 5.2㎜.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different extending positions as required. For example, the widths d1 and d7 of the local ribs can be adjusted. As shown in FIG. 2D , the widths d1 and d7 of the first rib 21 and the seventh rib 27 on the opposite sides of the honeycomb side 20b are smaller, wherein, The width d1 of the first rib 21 is 4.8 mm, and the width d7 of the seventh rib 27 is 4.5 mm, which are respectively smaller than the first rib 21 and the seventh rib 27 in the middle of the honeycomb side 20b shown in Figure 2C Widths d1, d7 to reduce the weight of the lightweight grille floor 2, and widths d2, d3, d4, d5 of the second, third, fourth, fifth and sixth ribs 22, 23, 24, 25, 26 ,d6 remains unchanged.

In addition, the height h8 of the auxiliary ribs 27a, 28 relative to the honeycomb side 20b is lower than the height of the middle rib, and the width d8 is 3 mm, and the auxiliary ribs 27a, 28 are correspondingly formed in each of the recesses R, In S, and extending in a single direction without intersecting with each other, the single recessed portions R and S as shown in Figure 2C are equipped with three parallel auxiliary ribs 27a, 28, so that each sub-region has four elongated perforations 200. Create more than 50% ventilation volume.

In this embodiment, the three auxiliary ribs 27a, 28 in the recessed portions R and S are arranged with the highest in the middle and the lower on both sides, and the four through holes 200 of each recessed portion R and S are spaced side by side, and are arranged with The auxiliary ribs 27a, 28 separate each row of through holes 200; in addition, the recess S between the first and second ribs 21, 22 has only one through hole 200 (as shown in Figure 2C) or two through holes 200 (as shown in Figure 2C) shown in 2D).

Therefore, the lightweight grille floor 2 can not only increase ventilation through the design of the perforations 200, but also help save materials and reduce weight, and can also increase the load-bearing weight.

In addition, the thickness t0 of the top plate 20 of the lightweight grille floor 2 is small, and the partial height h4, h6 of the rib structure 2a is also small, that is, the height of the middle rib (the fourth and sixth ribs 24, 26) h4, h6 are much smaller than the heights h1, h2, h3, h5, h7 of the main ribs (the first, second, third, fifth and seventh ribs 21, 22, 23, 25, 27) to save materials. and weight reduction.

To sum up, the lightweight grille floors 1 and 2 of the present invention are mainly formed by using the top plates 10 and 20 and the plurality of rib structures 1a and 2a to be integrally molded and cast from aluminum alloy, and the transverse ribs and longitudinal ribs are arranged in the same manner. It is symmetrical so that it will not be deformed when making the lightweight grille floor 1, 2, and is not prone to problems such as defects and breakage. Therefore, compared with the conventional technology, the lightweight grille floor 1, 2 of the present invention is not only more reliable It has excellent performance and is conducive to improving yield and saving production costs.

Furthermore, through the design of 100,200 perforations, more than 50% of the ventilation volume can be formed, so the ventilation volume can be increased, which can meet the demand for higher return air volume around the semiconductor processing equipment and the shower room, thereby improving the efficiency of the semiconductor manufacturing process. Purity.

In addition, the heights h1, h2, h3, h5 and h7 of the main ribs of the rib structures 1a and 2a relative to the honeycomb sides 10b and 20b are all at least 25 mm, so as to enhance the height of the light grille floors 1 and 2. Due to the structural strength, the lightweight grid floors 1 and 2 can withstand the heavier equipment used in the semiconductor manufacturing process, thereby preventing the lightweight grid floors 1 and 2 from being broken during use. Furthermore, the heights h1 ~ h7 and widths d1 ~ d7 of the ribs are adjusted according to the load bearing capacity of the lightweight grille floors 1 and 2 , thereby saving the material and weight of the lightweight grille floors 1 and 2 .

In addition, through the design of the auxiliary ribs 17a, 18, 27a, 28, the structural strength of the lightweight grille floor 1, 2 can be further improved.

The above embodiments are used to illustrate the principles and effects of the present invention, but are not intended to limit the present invention. Anyone skilled in the art can make modifications to the above embodiments without departing from the spirit and scope of the invention. Therefore, the scope of rights protection of the present invention should be as listed in the patent application scope described below.

1,2:Light grid floor 1a,2a: Rib structure 1b,2b: foot base 1c: thimble position 1d,2d:wing plate 10,20:Top plate 10a,20a: Ground side 10b,20b: hive side 100,200: perforation 11,21: first rib 12,22: Second rib 13,23:Third rib 14,24:Fourth rib 15,25:fifth rib 16,26:Sixth rib 17,27:Seventh rib 17a,18,27a,28:auxiliary ribs d1~d8: width H: total height h0~h8: height L: length R,S: concave part T: sum t0,t1:Thickness w: separation distance

Figure 1A is a schematic three-dimensional view of the first embodiment of the lightweight grille floor of the present invention.

Figure 1B is a front plan view of Figure 1A.

FIG. 1C is a cross-sectional view along line C-C in one of the directions of FIG. 1B.

Figure 1D is a cross-sectional view along line D-D in one of the directions of Figure 1B.

FIG. 1E is a perspective view of FIG. 1A from another perspective.

Figure 2A is a schematic three-dimensional view of the second embodiment of the lightweight grille floor of the present invention.

Figure 2B is a front plan view of Figure 2A.

FIG. 2C is a cross-sectional view along line C-C in one of the directions of FIG. 2B.

Figure 2D is a cross-sectional view along the D-D line in one of the directions of Figure 2B.

FIG. 2E is a schematic perspective view of FIG. 2A from another perspective.

1:Light grid floor

1a: Rib structure

1d:wing plate

10:Top plate

10a: Ground side

10b: hive side

100: perforation

11:First rib

12:Second rib

13:Third rib

14:Fourth rib

15:Fifth rib

16:Sixth rib

17:Seventh rib

17a,18: Auxiliary ribs

H: total height

h0~h8: height

d1~d8: width

T: sum

t0,t1:Thickness

R,S: concave part

Claims (11)

A lightweight grille floor, which includes: a ceiling plate with an opposite ground side and a honeycomb side, wherein a plurality of perforations connecting the ground side and the honeycomb side are formed on the ceiling plate to form a ventilation volume of more than 50%; And a plurality of rib structures, which are integrally molded and cast with the top plate using aluminum alloy, and are provided on the honeycomb side of the top plate to form a plurality of recessed portions, so that each of the recessed portions has four such perforations, wherein the ribs The structure has a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib defined in sequence from the edge of the floor to the middle, and the first rib, the second rib The height of the ribs, the third rib, the fifth rib and the seventh rib relative to the honeycomb side shall be at least 25 mm as the main ribs, and the height of the fourth rib and the sixth rib relative to the honeycomb side shall be lower than 25 mm, as a central rib, wherein the rib structure includes a plurality of auxiliary ribs with a height lower than that of the main rib, and each of the auxiliary ribs is correspondingly formed in each of the recesses, so that a single recess is disposed The three auxiliary ribs are arranged with the middle being the highest and the sides being lower. The lightweight grid floor as claimed in claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side. The lightweight grille floor as claimed in claim 1, wherein the first rib is formed on the edge of the ceiling to become an edge rib of the lightweight grille floor to serve as a frame of the lightweight grille floor. The light grid floor as claimed in claim 1, wherein the sum of the height of the first rib relative to the honeycomb side and the thickness of the top plate is 50 mm, and the thickness of the top plate is 2 to 3 mm. centimeters. The light grille floor as described in claim 1, wherein the height of the second rib, the third rib, the fifth rib and the seventh rib relative to the honeycomb side is 27 to 42 mm, and the second rib, the fifth rib and the seventh rib are 27 to 42 mm in height relative to the honeycomb side. The width of the third, fifth and seventh ribs is 2.6 to 5.5 mm. The light grid floor as claimed in claim 1, wherein the height of the fourth rib and the sixth rib relative to the honeycomb side is 12 to 13 mm. The light grid floor as described in claim 1, wherein the width of the first rib is 4.8 to 7 mm, and the width of the fourth rib and the sixth rib is 2.6 to 3.5 mm. The light grille floor as described in claim 1, wherein the rib structure is formed by two seventh ribs in the longitudinal and transverse directions to form a tic-tac-shape rib to divide the light grille floor into four areas. Among the four regions, 25 sub-regions are formed between the adjacent second rib, third rib, fourth rib, fifth rib and sixth rib. Each sub-region has a recess, and is located at the seventh rib. Another recess formed in the center of the tic-shaped ribs, and each sub-area has three or four long strips of the perforations to form more than 50% of the ventilation volume, and around the ceiling A wing plate is formed such that the thickness of the wing plate is greater than the thickness of the top plate. The light grid floor as claimed in claim 1, wherein the height of the auxiliary rib relative to the honeycomb side is at least 8.5 mm, and the width is 3 to 3.2 mm. The light grille floor as claimed in claim 1, wherein the widths of the first rib and the seventh rib at opposite sides of the honeycomb side are respectively smaller than the width of the first rib and the seventh rib at the middle part of the honeycomb side. The width of the seventh rib is to reduce the weight of the lightweight grille floor. The lightweight grille floor as claimed in claim 1, wherein the first rib is formed with feet at four corners of the light grille floor, and the feet are fixed on the support legs.