TWM625270U - Standard raised floor - Google Patents

Abstract

A raised floor includes a top plate and a rib structure, wherein the rib structure has a plurality of main ribs with a height of at least 25 mm formed on the top plate to enhance the structural strength of the raised floor. Therefore, when the raised floor carries the heavier equipment in the semiconductor manufacturing process, the problem of the raised floor cracking can be avoided.

Description

Standard Raised Floor

This work is about a floor, especially a standard raised floor with a rib structure.

At present, semiconductor factories are equipped with raised floors with multiple micro-perforations to purify the air quality of the environment and ensure the specifications of clean rooms.

At present, the raised floor is made by die casting. In the die-casting process, the desired product is often produced by a die, and before the die-casting process, a release layer is applied to the die to facilitate subsequent demoulding operations.

However, the structural strength of the conventional raised floor is often insufficient, so when the raised floor carries heavy equipment in the semiconductor process, the raised floor is prone to breakage. On the other hand, there is also the problem that the raised floor is too heavy, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the above-mentioned problems of the prior art has actually become an urgent problem to be overcome in the current industry.

In view of the above-mentioned deficiencies in the prior art, the present invention provides a standard type of raised floor, which includes: a ceiling plate, which has an opposite ground side and a honeycomb side; and a rib structure, which is arranged on the honeycomb side of the ceiling plate to form a a plurality of recesses, wherein the rib structure defines a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib in order from the edge of the ceiling to the middle, and The first, second, third, fifth and seventh ribs are used as main ribs, and their height relative to the honeycomb side is at least 25 mm, and the fourth and sixth ribs are used as middle ribs. The height relative to the honeycomb side is less than 25 mm.

In the aforementioned standard raised floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side.

In the aforesaid standard raised floor, the first rib is formed on the edge of the top plate to become a side rib of the standard raised floor, used as a frame of the standard raised floor for fixing the feet.

In the aforementioned standard raised floor, the height of the first rib relative to the honeycomb side is greater than the height of the second rib to the seventh rib relative to the honeycomb side, and the height of the first rib and the ceiling is greater than The system is 38 to 58 mm, and the thickness of the top plate is 2.5 mm.

In the aforementioned standard raised floor, the height of the second rib, the third rib, the fifth rib and the seventh rib relative to the honeycomb side is 25 to 45 mm.

In the aforementioned standard raised floor, the height of the fourth and sixth ribs relative to the honeycomb side is 12 to 18 mm.

In the aforementioned standard raised floor, the width of the first rib is 7.5 mm.

In the aforementioned standard raised floor, the width of the second rib, the third rib, the fifth rib and the seventh rib is 2.5 to 5.3 mm.

In the aforementioned standard raised floor, the width of the fourth and sixth ribs is 2.5 to 3 mm.

In the aforementioned standard raised floor, the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the middle rib, and the plurality of auxiliary ribs are correspondingly formed in each of the concave portions, so that a plurality of the auxiliary ribs are arranged in a single concave portion. rib. For example, the plurality of auxiliary ribs extend in a single direction without interdigitating. Alternatively, the height of the auxiliary rib relative to the honeycomb side is 3 to 5 mm, and the width thereof is 2.5 to 3 mm.

In the aforementioned standard raised floor, a plurality of perforations connecting the ground side and the honeycomb side are formed on the top plate, and the positions of the plurality of perforations correspond to the plurality of recesses.

In the aforementioned standard raised floor, the rib structure is tied with two seventh ribs in the longitudinal and transverse directions to form a well-shaped rib, so as to divide the standard raised floor into four areas, and the four areas are adjacent to each other. 25 sub-regions are formed between the second rib, the third rib, the fourth rib, the fifth rib and the sixth rib. The rib is symmetrically distributed on the basis, and another concave part is formed in the central part of the well-shaped rib formed by the seventh rib, and an auxiliary rib or cross-shaped rib is arranged in it, and a wing plate is formed around the top plate , so that the height of the auxiliary rib or the height of the cross-shaped rib and the thickness of the wing plate are greater than the thickness of the top plate, so as to improve the strength of the standard elevated floor in the middle. For example, the second rib, the third rib, the fourth rib, the fifth rib and the sixth rib are separated into 21 other sub-regions in the well-shaped rib, and each of the sub-regions has nine through holes , but the perforation is not formed in the sub-region of the central part of the well-shaped rib.

It can be seen from the above that in the standard raised floor of this creation, the height of the main rib of the rib structure relative to the honeycomb side is at least 25 mm, so as to improve the structural strength of the standard raised floor. In the prior art, the standard raised floor can withstand heavier equipment in the semiconductor process, so as to avoid the problem of the standard raised floor being broken during use.

The following specific embodiments are used to illustrate the implementation of the present invention, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings in this specification are only used to cooperate with the contents disclosed in the specification for the understanding and reading of those who are familiar with the art, and are not intended to limit the implementation of this creation. Therefore, it has no technical significance. Any modification of the structure, change of the proportional relationship or adjustment of the size, shall still fall within the scope of this work without affecting the effect and purpose of this creation. The technical content disclosed by the creation must be within the scope of coverage. At the same time, the terms such as "up", "down", "left", "right" and "one" quoted in this specification are only for the convenience of description and are not used to limit the implementation of this creation. The change or adjustment of the scope and its relative relationship shall also be regarded as the scope of the implementation of this creation, provided that there is no substantial change in the technical content.

1A , FIG. 1B , FIG. 1C and FIG. 1D are schematic views of the first embodiment of the standard raised floor 1 created by the present invention. The standard raised floor 1 of the present embodiment is used for carrying a relatively heavy load, and the carrying load is about 1000 kg.

The standard raised floor 1 has a ceiling 10 and a rib structure 1 a provided on the ceiling 10 .

The top plate 10 has an opposite ground side 10a and a honeycomb side 10b, and the honeycomb side 10b is provided with the rib structure 1a in the longitudinal direction and the transverse direction, respectively, so as to form between the longitudinal and transverse rib structures 1a. 1C only shows the longitudinal rib structure 1a, and the transverse rib structure 1a is the same as the longitudinal rib structure 1a, so the cross section of the transverse rib structure 1a is omitted.

In this embodiment, the top plate 10 is substantially rectangular, such as a square plate, the length L is 600 mm and the thickness t0 is 2.5 mm, and a wing plate 1d is formed around the top plate 10 (the thickness t1 is 2.5 mm). 6 mm, which is greater than the thickness t0 of the top plate 10), and feet 1b are formed on the four corners of the top plate 10, the bottom of which is L-shaped convex (or L-shaped concave) for Fix a support tripod (figure omitted). For example, the feet 1b are used to adjust the total height H of the standard raised floor 1 so that a plurality of standard raised floors 1 are located on the same level.

Furthermore, the ground side 10a is a flat surface, and the concave portions S are arranged in an array to form a plurality of ejector positions 1c (about a square area formed by every four concave portions S) on the honeycomb side 10b. on the corner of ) the honeycomb structure.

The rib structure 1a is defined by a first rib 11 , a second rib 12 , and a third rib in sequence from the edge of the top plate 10 to the middle (or the left and right sides as shown in FIG. 1B and FIG. 1C in the middle direction). 13. The fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17, and the first to third, fifth and seventh ribs 11-13, 15, 17 are relative to the honeycomb side 10b. The heights h1~h3, h5, h7 are at least 25 mm (mm), and the heights h4, h6 of the fourth and sixth ribs 14, 16 relative to the honeycomb side 10b are less than 25 mm, so the The first to third, fifth and seventh ribs 11~13, 15, 17 are used as main ribs, and the fourth and sixth ribs 14, 16 are used as middle ribs, wherein the first to sixth ribs 11~ 16 is distributed symmetrically from left to right (or up and down as shown in FIG. 1B ) based on the seventh rib 17 (the well-shaped rib), so that the second rib 12 , the third rib 13 , the fourth rib 14 , the The distance w between the fifth rib 15, the sixth rib 16 and the seventh rib 17 is 48 mm.

In this embodiment, the first rib 11 and the second rib 12 are formed on the edge of the top plate 10 to serve as a frame for fixing the foot base 1b. For example, the first rib 11 and the second rib 12 are of the same height, and the sum of the heights of the first rib 11 and the ceiling 10 (that is, the height of the first rib 11 relative to the ground side 10 a ) is 38 mm , and the total height H of the foot base 1b, the first rib 11 and the ceiling 10 is 40 mm. The first rib 11 is formed on the edge of the ceiling 10 to become the edge rib of the standard raised floor 1, so as to As the frame of the standard raised floor 1 , the foot base 1b is fixed. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 35.5 mm, both of which are greater than the heights h2-h7 of the second to seventh ribs 12-17 relative to the honeycomb side 10b, and the first rib 11 and the The height of the top plate 10 and T (that is, the height of the first rib 11 relative to the ground side 10a) is 38 mm (that is, T=h1+t0), and the foot 1b, the first rib 11 and the top plate The total height H of 10 (that is, the foot height of standard raised floor 1) is 40mm.

Furthermore, the heights h2 to h7 of the second to seventh ribs of the rib structure 1a may be the same or different according to requirements, as shown in FIG. 1C . For example, the height h2 of the second rib 12 relative to the honeycomb side 10b is 35 mm, the height h3 of the third rib 13 relative to the honeycomb side 10b is 35 mm, and the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 35 mm, the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 35 mm, the heights h4 and h6 of the fourth and sixth ribs 14, 16 relative to the honeycomb side 10b are both 18 mm, wherein the longitudinal and The two transverse seventh ribs 17 form a well-shaped rib to divide the standard elevated floor 1 into four areas, and each area is adjacent to the second rib 12, the third rib 13, the fourth rib 14, the Twenty-five sub-regions are formed between the fifth rib 15 and the sixth rib 16, each sub-region has a concave portion S, and another form of concave portion R is formed in the center of the well-shaped rib. Further, the thickness of the top plate 10 in the concave portion R can be larger than the thickness t0 of the top plate 10 at other places or the same as the thickness t0 of the top plate 10 according to requirements, and the concave portion R is provided with two parallel auxiliary ribs 17a , in order to improve the compressive strength of the standard raised floor 1 in the middle.

In addition, the widths d1-d7 of each of the ribs may be the same (eg, the second to sixth ribs 12-16) or different according to requirements, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 7.5 mm, the width d2 of the second rib 12 is 3 mm, the width d3 of the third rib 13 is 3 mm, the width d4 of the fourth rib 14 is 3 mm, and the fifth rib 15 The width d5 is 3 mm, the width d6 of the sixth rib 16 is 3 mm, and the width d7 of the seventh rib 17 is 4.8 mm.

In addition, the rib structure 1a can be provided with a plurality of auxiliary ribs 17a, 18 whose volume is much smaller than that of other ribs, as shown in FIG. The height h4, h6 of the middle rib relative to the honeycomb side 10b, and the width d8 thereof is 3 mm. For example, the auxiliary ribs 17a, 18 are correspondingly formed in each of the recesses R, S, and extend in a single direction without interlacing with each other. The single recess S shown in FIG. 1C is provided with two parallel auxiliary ribs 17a, 18 .

It can be seen from the above that the thickness t0 of the ceiling 10 of the standard raised floor 1 is relatively small, and the partial heights h4 and h6 of the rib structure 1a are also relatively small, that is, the middle ribs (the fourth and sixth ribs 14 and 16 ) The heights h4, h6 are much smaller than the heights h1, h2, h3, h5, h7 of the main ribs (the first, second, third, fifth and seventh ribs 11, 12, 13, 15, 17), in order to facilitate Save material and reduce weight.

FIG. 2A , FIG. 2B and FIG. 2C are schematic diagrams of the second embodiment of the standard raised floor 2 of the present creation. The standard raised floor 2 of this embodiment is also used to carry heavier loads, the load is about 1000 kg, and the difference from the first embodiment is the change of the local height of the rib structure 2a, so the same points will not be repeated below. .

In this embodiment, the thickness t0 of the top plate 20 is 2.5 mm, the height h1 of the first rib 21 relative to the honeycomb side 20b is 55.5 mm, and the height of the first rib 21 and the top plate 20 is equal to T (that is, the height of the first rib 21 relative to the ground side 20a) is 58mm, and the total height H of the foot seat 2b, the first rib 21 and the top plate 20 is 60mm, wherein the wing plate 2d The thickness t1 is 6 mm, the first rib 21 is formed on the edge of the top plate 20 and becomes the side rib of the standard elevated floor 2 as the frame of the standard elevated floor 2, and the first to sixth The ribs 21 to 26 are distributed symmetrically from left to right (or symmetrically from top to bottom as shown in FIG. 2B ) based on the seventh rib 27 .

Furthermore, in the rib structure 2a, as shown in FIG. 2C, the height h2 of the second rib 22 relative to the honeycomb side 20b is 25 mm, the height h3 of the third rib 23 relative to the honeycomb side 20b is 25 mm, and the height h3 of the third rib 23 relative to the honeycomb side 20b is 25 mm. The height h5 of the fifth rib 25 relative to the honeycomb side 20b is 32 mm, the height h7 of the seventh rib 27 relative to the honeycomb side 20b is 45 mm, the height of the fourth and sixth ribs 24, 26 relative to the honeycomb side 20b Both h4 and h6 are 12mm. On the other hand, the thickness of the top plate 20 at the concave portion R is increased to 5.5 mm (that is, greater than the thickness t0 of the top plate 20 at other places), and the concave portion R is provided with a cross-shaped rib 27a, which is opposite to The height h0 of the honeycomb side 20b is 13 mm (which is greater than the thickness t0 of the top plate 20 ), so as to improve the compressive strength of the standard raised floor 2 in the middle.

In addition, the widths d1 to d7 of the ribs can be the same or different according to requirements, as shown in FIG. 2C . For example, the width d1 of the first rib 21 is 7.5 mm, the width d2 of the second rib 22 is 3 mm, the width d3 of the third rib 23 is 2.5 mm, the width d4 of the fourth rib 24 is 2.5 mm, and the fifth rib 25 The width d5 is 3 mm, the width d6 of the sixth rib 26 is 2.5 mm, and the width d7 of the seventh rib 27 is 5.3 mm.

In addition, the height h8 of the auxiliary rib 28 relative to the honeycomb side 20b is 3 mm, and the width d8 is 2.5 mm.

It can be seen from the above that the heights h4 and h6 of the rib structure 2a are also smaller, that is, the heights h4 and h6 of the middle ribs (the fourth and sixth ribs 24 and 26 ) are higher than the heights h4 and h6 of the main ribs (the first, second, and third ribs 24 and 26 ). , the fifth and seventh ribs 21, 22, 23, 25, 27) of the height h1, h2, h3, h5, h7 are much smaller, in order to save material and reduce weight.

3A , 3B, 3C and 3D are schematic diagrams of the third embodiment of the standard raised floor 3 of the present creation. The difference between this embodiment and the above-mentioned embodiment is that a new perforation is added, so the same points will not be repeated below.

As shown in FIGS. 3A , 3B, 3C and 3D, based on the first embodiment, the standard raised floor 3 is formed on the ceiling 10 with a plurality of through holes 30 connecting the ground side 10a and the honeycomb side 10b, and The honeycomb side 10b is divided into four regions by the seventh rib 17 (the well-shaped rib), and each region forms 25 sub-regions (the concave portion S), and the well-shaped rib is formed by the ribs (the first rib). The second rib 12 , the third rib 13 , the fourth rib 14 , the fifth rib 15 and the sixth rib 16 ) can be separated by 21 other sub-regions (the recesses R, S), so that each sub-region has nine The perforation 30 is formed, but the perforation 30 is not formed in the sub-region (the concave part R) of the central part of the well-shaped rib.

In this embodiment, the positions of the through holes 30 correspond to the concave portions S. For example, each recess S is formed with nine through holes 30 , and the nine through holes 30 are arranged in an array, and each row of through holes 30 is separated by the auxiliary rib 18 , so that each row has three through holes 30 .

Therefore, the hole 30 may not be provided in the concave portion R of the central portion of the seventh rib 17 (the well-shaped rib), and the height h0 of the inner auxiliary rib 17a or the cross-shaped rib 27a relative to the honeycomb side 10b is greater than the top plate The thickness t0 of 10 is used to improve the strength of the standard raised floor 3 .

It should be understood that the standard raised floor 2 of the second embodiment can also form the through holes 30 in the concave portion S thereof.

To sum up, the standard raised floor 1, 2, 3 of this creation is mainly due to the heights h1, h2, h3, h5, h7 of the main ribs of the rib structures 1a, 2a relative to the honeycomb side 10b, 20b are at least at least It is 25 mm to improve the structural strength of the standard raised floor 1, 2, 3, so the standard raised floor 1, 2, 3 can withstand the heavier equipment in the semiconductor process, so as to avoid the standard raised floor 1, 2, 3 Floors 1, 2, and 3 are broken during use. Further, the heights h1~h7 and widths d1~d7 of the ribs are adjusted according to the bearing load of the standard raised floor 1, 2, 3, thereby saving the material and weight of the standard raised floor 1, 2, 3.

Furthermore, by the design of the auxiliary ribs 18, 28, the structural strength of the standard raised floor 1, 2, 3 can be further enhanced.

The above-mentioned embodiments are used to illustrate the principles and effects of the present invention, but not to limit the present invention. Anyone skilled in the art can make modifications to the above embodiments without departing from the spirit and scope of the present creation. Therefore, the protection scope of the rights of this creation should be listed in the patent application scope mentioned later.

1,2,3: Standard Raised Floor 1a, 2a: Rib structure 1b, 2b: feet 1c: Ejector position 1d, 2d: Wings 10,20: top plate 10a, 20a: Ground side 10b, 20b: Hive side 11,21: First rib 12,22: Second rib 13,23: Third rib 14,24: Fourth rib 15,25: Fifth rib 16,26: Sixth Rib 17,27: Seventh Rib 17a, 18, 28: Auxiliary ribs 27a: Cross Ribs 30: perforation d1~d8: width H: total height h0~h8: height L: length R, S: Recess T: height and t0, t1: thickness w: separation distance

FIG. 1A is a three-dimensional schematic diagram of the first embodiment of the standard raised floor created by the present invention.

FIG. 1B is a front plan view of FIG. 1A .

FIG. 1C is a cross-sectional view of FIG. 1B taken along the line C-C in one of the directions.

FIG. 1D is a schematic perspective view of FIG. 1A from another perspective.

FIG. 2A is a three-dimensional schematic diagram of the second embodiment of the standard raised floor of the present creation.

FIG. 2B is a front plan view of FIG. 2A.

FIG. 2C is a cross-sectional view of FIG. 2B along the C-C line in one of the directions.

FIG. 3A is a three-dimensional schematic diagram of the third embodiment of the standard raised floor of the present creation.

FIG. 3B is a plan view from the front of FIG. 3A .

FIG. 3C is a cross-sectional view of FIG. 3B taken along the C-C line in one of the directions.

FIG. 3D is a schematic three-dimensional view of FIG. 3A from another viewing angle.

1: Standard Raised Floor

1a: Rib structure

1b: Foot seat

1d: wing plate

10: top plate

10a: Ground side

10b: Hive side

11: First Rib

12: Second Rib

13: Third Rib

14: Fourth Rib

15: Fifth rib

16: Sixth Rib

17: Seventh Rib

17a, 18: Auxiliary ribs

d1~d8: width

H: total height

h0~h8: height

T: height and

t0, t1: thickness

R, S: Recess

Claims (15)

A standard type of raised floor comprising: a top plate having opposing ground and honeycomb sides; and The rib structure is arranged on the honeycomb side of the top plate to form a plurality of concave parts, wherein the rib structure is defined by the first rib, the second rib, the third rib, the fourth rib and the fourth rib in sequence from the edge of the top plate to the middle. The rib, the fifth rib, the sixth rib and the seventh rib, and the height of the first rib, the second rib, the third rib, the fifth rib and the seventh rib relative to the honeycomb side is at least 25 mm, with As the main rib, the height of the fourth rib and the sixth rib relative to the honeycomb side is less than 25 mm, as the middle rib. The standard raised floor as claimed in claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the honeycomb side. The standard raised floor as claimed in claim 1, wherein the first rib is formed on the edge of the ceiling to become a side rib of the standard raised floor, used as a frame of the standard raised floor for fixing feet seat. The standard raised floor as claimed in claim 1, wherein the height of the first rib relative to the honeycomb side is greater than the heights of the second rib to the seventh rib relative to the honeycomb side, and the first rib is different from the honeycomb side. The sum of the heights of the top plate is 38 to 58 mm, and the thickness of the top plate is 2.5 mm. The standard raised floor as claimed in claim 1, wherein the height of the second rib, the third rib, the fifth rib and the seventh rib relative to the honeycomb side is 25 to 45 mm. The standard raised floor as claimed in claim 1, wherein the height of the fourth rib and the sixth rib relative to the honeycomb side is 12 to 18 mm. The standard raised floor according to claim 1, wherein the width of the first rib is 7.5 mm. The standard raised floor according to claim 1, wherein the width of the second rib, the third rib, the fifth rib and the seventh rib is 2.5 to 5.3 mm. The standard raised floor as claimed in claim 1, wherein the width of the fourth rib and the sixth rib is 2.5 to 3 mm. The standard raised floor as claimed in claim 1, wherein the rib structure further comprises a plurality of auxiliary ribs whose height is lower than that of the middle rib, and the plurality of auxiliary ribs are correspondingly formed in each of the concave portions, so that a single concave portion is formed. The plurality of auxiliary ribs are arranged in the middle system. The standard raised floor of claim 10, wherein the plurality of auxiliary ribs extend in a single direction without interlacing each other. The standard type raised floor as claimed in claim 10, wherein the height of the auxiliary rib relative to the honeycomb side is 3 to 5 mm, and the width thereof is 2.5 to 3 mm. The standard raised floor according to claim 1, wherein a plurality of perforations connecting the ground side and the honeycomb side are formed on the top plate, and the positions of the plurality of perforations correspond to the plurality of recesses. The standard raised floor as claimed in claim 1, wherein the rib structure is longitudinally and laterally tied with two of the seventh ribs to form a well-shaped rib, so as to divide the standard raised floor into four areas, the 25 sub-regions are formed between the adjacent second rib, third rib, fourth rib, fifth rib and sixth rib in the four regions, each sub-region has a recess, the first rib to sixth rib The ribs are symmetrically distributed on the basis of the well-shaped rib, and another concave part is formed in the central part of the well-shaped rib formed by the seventh rib. A wing plate is formed around the board, so that the height of the auxiliary rib or the height of the cross-shaped rib and the thickness of the wing plate are all greater than the thickness of the top plate, so as to improve the strength of the standard elevated floor in the middle. The standard raised floor of claim 14, wherein 21 other sub-areas are separated from the second rib, the third rib, the fourth rib, the fifth rib and the sixth rib in the well-shaped rib , and each of the sub-regions has nine through holes, but the through-holes are not formed in the sub-region of the central part of the well-shaped rib.

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