TWI781023B - Standard raised floor - Google Patents

Abstract

A raised floor includes a top plate and a rib structure, wherein the rib structure has a plurality of main ribs with a height of at least 25 mm formed on the top plate to enhance the structural strength of the raised floor. Therefore, when the raised floor carries the heavier equipment in the semiconductor manufacturing process, the problem of the raised floor cracking can be avoided.

Description

Standard raised floor

The invention relates to a floor structure, especially a standard elevated floor with a rib structure.

At present, in semiconductor factories, elevated floors with multiple micro-perforations are installed to clean the air quality of the environment and ensure the clean room specifications.

At present, the raised floor system is made by mold casting. In the molding process, the required product is often made by a mold, and before the molding operation, a release layer will be coated on the mold to facilitate the subsequent demoulding operation.

However, it is known that the structural strength of the raised floor is often insufficient, so when the raised floor carries heavier equipment in the semiconductor manufacturing process, the raised floor is prone to breakage. On the other hand, there is also the problem that the raised floor is too heavy, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the problems of the above-mentioned conventional technologies has become a difficult problem to be overcome urgently in the industry.

In view of the deficiencies of the above-mentioned prior art, the present invention provides a standard raised floor comprising: a top plate having opposite ground sides and a honeycomb side; and a rib structure arranged on the honeycomb side of the top plate to form a plurality of recesses, wherein the rib structure is sequentially defined from the edge of the top plate to the middle with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib, and The height of the first, second, fifth and seventh ribs relative to the side of the hive is at least 25 mm to serve as main ribs, and the height of the third, fourth and sixth ribs relative to the side of the hive Tie below 25 mm to serve as the middle rib.

In the aforementioned standard raised floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the side of the honeycomb.

In the aforementioned standard raised floor, the first rib is formed on the edge of the top plate to become the side rib of the standard raised floor, which serves as the frame of the standard raised floor for fixing the feet.

In the aforementioned standard raised floor, the height of the first rib relative to the side of the honeycomb is greater than the heights of the second to seventh ribs relative to the side of the honeycomb, and the sum of the heights of the first rib and the top plate is at least 53 mm and the thickness of the top plate is at least 2.5 mm.

In the aforementioned standard raised floor, the width of the first rib is at least 7.5 mm.

In the aforementioned standard raised floor, the heights of the second rib, the fifth rib and the seventh rib relative to the honeycomb side are 30 to 47 mm.

In the aforementioned standard raised floor, the width of the second rib, the fifth rib and the seventh rib is 2.3 to 4.5 mm.

In the aforementioned standard raised floor, the heights of the third rib, the fourth rib and the sixth rib relative to the side of the honeycomb are all at least 20 mm.

In the aforementioned standard raised floor, the widths of the third rib, the fourth rib and the sixth rib are all at least 2.5 mm.

In the aforementioned standard raised floor, the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the middle rib, and the plurality of auxiliary ribs are correspondingly formed in each of the recesses, so that the plurality of auxiliary ribs are arranged in a single recess . For example, the plurality of auxiliary ribs extend along a single direction without interlacing each other. Alternatively, the height of the auxiliary rib relative to the side of the honeycomb is at least 7 mm and its width is at least 2.5 mm.

In the aforementioned standard raised floor, a plurality of perforations connecting the ground side and the honeycomb side are formed on the top plate, and the positions of the plurality of perforations correspond to the plurality of recesses, and there are single holes between adjacent three perforations. direction of the auxiliary rib.

In the above-mentioned standard raised floor, the rib structure forms a well-shaped rib with two seventh ribs in the longitudinal and transverse directions, so as to divide the standard raised floor into four areas, and the adjacent four areas 25 subregions are formed between the second rib, third rib, fourth rib, fifth rib and sixth rib, each of which has a concave part, and the well-shaped rib formed on the seventh rib Another concave part formed in the central part of the top plate is equipped with auxiliary ribs, and a wing plate is formed around the top plate, so that the height of the auxiliary ribs and the thickness of the wing plate are greater than the thickness of the top plate, so as to improve the height of the top plate. The strength of the standard raised floor in the middle. For example, the first to sixth ribs are distributed symmetrically with respect to the square-shaped ribs, and the square-shaped ribs are connected to the first ribs to form a slope to reduce the weight of the standard raised floor. Or, 21 other sub-regions are separated by the second rib, the third rib, the fourth rib, the fifth rib and the sixth rib in the well-shaped rib, and there are nine perforations in each sub-region , but the perforation is not formed in the sub-region of the central portion of the well-shaped rib.

As can be seen from the above, in the standard raised floor of the present invention, the height of the main ribs of the rib structure relative to the honeycomb side is at least 25 mm to improve the structural strength of the standard raised floor (if at least Machine equipment weighing 1000 kilograms), so compared with the conventional technology, the standard raised floor can bear heavier machine equipment in the semiconductor manufacturing process, so as to avoid the problem of the standard raised floor being broken during use .

The implementation of the present invention is described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to match the content disclosed in the specification, for the understanding and reading of those familiar with this technology, and are not used to limit the implementation of the present invention Therefore, it has no technical substantive meaning. Any modification of structure, change of proportional relationship or adjustment of size shall still fall within the scope of this invention without affecting the effect and purpose of the present invention. The technical content disclosed by the invention must be within the scope covered. At the same time, terms such as "upper", "lower", "left", "right" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the implementation of the present invention. Changes or adjustments in the scope, and their relative relationships, without substantial changes in the technical content, should also be regarded as the scope of the present invention that can be implemented.

Fig. 1A, Fig. 1B, Fig. 1C and Fig. 1D are schematic views of the first embodiment of the standard raised floor 1 of the present invention. The standard raised floor 1 of the present embodiment is used for carrying heavier loads, and its carrying load is about 1200 kilograms.

Said top plate 10 has opposite ground side 10a and honeycomb side 10b, and said honeycomb side 10b is respectively provided with said rib structure 1a on longitudinal and transverse direction, so as to form between said longitudinal and transverse rib structure 1a For the plurality of recesses S, Fig. 1C only shows the longitudinal rib structure 1a, and the transverse rib structure 1a is the same as the longitudinal rib structure 1a, so the section of the transverse rib structure 1a is omitted.

In this embodiment, the top plate 10 is roughly rectangular, such as a square plate, its length L is 600mm and thickness t0 is 2.5mm, and a wing plate 1d is formed around the top plate 10 (thickness t1 is 6mm, which is greater than the thickness t0 of the top plate 10), and there are feet 1b formed on the four corners of the top plate 10, the bottom of which is L-shaped convex (or L-shaped concave), for Fix a support tripod (not shown). For example, the foot 1b is used to adjust the total height H of the standard raised floor 1 so that a plurality of standard raised floors 1 are located at the same level.

Furthermore, the ground side 10a is a flat surface, and the recesses S are arranged in an array to form a plurality of thimble positions 1c (approximately in a square area formed by every four recesses S) on the honeycomb side 10b. The corner of the above) honeycomb structure.

The rib structure 1a is defined in sequence from the edge of the top plate 10 to the middle (or from the upper and lower sides to the middle as shown in FIG. Four ribs 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17, and the height h1 of the first, second, fifth and seventh ribs 11, 12, 15, 17 relative to the honeycomb side 10b, h2, h5, h7 are at least 25 millimeters (㎜), and the height h3, h4, h6 of the third, fourth and sixth ribs 13, 14, 16 relative to the honeycomb side 10b is less than 25 millimeters , so the first, second, fifth and seventh ribs 11, 12, 15, 17 are used as main ribs, and the third, fourth and sixth ribs 13, 14, 16 are used as middle ribs, wherein, The first to sixth ribs 11-16 are distributed symmetrically (or vertically as shown in Figure 1B) on the basis of the seventh rib 17 (square rib), so that the second rib 12, the third The distance w between the rib 13 , the fourth rib 14 , the fifth rib 15 , the sixth rib 16 and the seventh rib 17 is 48 mm.

In this embodiment, the first ribs 11 are formed on the edge of the top plate 10 to become the side ribs of the standard raised floor 1 and serve as the frame of the standard raised floor 1 for fixing the foot 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is at least 50.5mm, which is greater than the height h2~h7 of the second to seventh ribs 12~17 relative to the honeycomb side 10b, and the first The height sum T of the rib 11 and the top plate 10 (ie the height of the first rib 11 relative to the ground side 10a) is at least 53mm (ie T=h1+t0), and the foot 1b, the first rib 11 and the total height H of the top plate 10 (that is, the foot height of the standard raised floor 1) is at least 55 mm.

Moreover, the heights h2-h7 of the second to seventh ribs 12-17 of the rib structure 1a may be the same or different according to requirements, and the main ribs between the first rib 11 and the recess S in the middle (i.e. The second rib 12 , the fifth rib 15 and the seventh rib 17 ) are arranged in a manner of increasing or decreasing height, as shown in FIG. 1C . For example, the height h2 of the second rib 12 relative to the honeycomb side 10b is 32mm, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 35mm, and the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 45㎜, the heights h3, h4, and h6 of the third, fourth and sixth ribs 13, 14, 16 relative to the honeycomb side 10b are all 20㎜, and the two seventh ribs 17 in the longitudinal and transverse directions A well-shaped rib is formed to divide the standard raised floor 1 into four areas, and each area is adjacent to the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 25 sub-regions are formed between 16, each sub-region has a concave portion S, and another kind of concave portion R is formed at the central part of the well-shaped rib of the seventh rib 17. Further, the thickness of the top plate 10 at the recess R is the same as the thickness t0 at other places (or it can be thickened at the recess R), and two parallel auxiliary ribs 17a are arranged in the recess R, and the inner auxiliary ribs 17a The height h0 (for example, at least 7mm) relative to the honeycomb side 10b is greater than the thickness t0 of the top plate 10, so as to improve the compressive strength of the standard raised floor 1 in the middle.

Moreover, the width of each of the ribs can be the same or different according to requirements, as shown in Figure 1C. For example, the width d1 of the first rib 11 is 7.5 mm, the width d2 of the second rib 12 is 2.5 mm, the width d3 of the third rib 13 is 2.5 mm, the width d4 of the fourth rib 14 is 2.5 mm, and the width d4 of the fifth rib 15 The width d5 of the sixth rib 16 is 3 mm, the width d6 of the sixth rib 16 is 2.5 mm, and the width d7 of the seventh rib 17 is 4.2 mm.

In addition, the rib structure 1a can add a plurality of auxiliary ribs 18 whose volume is much smaller than other ribs, and its height h8 (for example, 8mm) relative to the honeycomb side 10b is lower than the height of the middle rib relative to the honeycomb side 10b h3, h4, h6, and its width d8 is 3㎜. For example, the auxiliary ribs 18 are correspondingly formed in the recesses S and extend along a single direction without crossing each other. A single recess S as shown in FIG. 1B is provided with two parallel auxiliary ribs 18 .

It can be seen from the above that the thickness t0 of the top plate 10 of the standard raised floor 1 is relatively small, and the heights h3, h4, and h6 of most of the rib structure 1a are also relatively small, that is, the middle ribs (the third, fourth and The heights h3, h4, h6 of the sixth ribs 13, 14, 16) are higher than the heights h1, h2, h5, h7 of the main ribs (the first, second, fifth and seventh ribs 11, 12, 15, 17) Much smaller, in order to save material and reduce weight.

Furthermore, the well-shaped ribs formed by the seventh ribs 17 form slopes at the places where the first ribs 11 are connected, so as to reduce the weight of the standard raised floor 1 .

Fig. 2A, Fig. 2B, Fig. 2C and Fig. 2D are schematic views of the second embodiment of the standard raised floor 2 of the present invention. The difference between this embodiment and the above-mentioned embodiments lies in the addition of perforations, so the similarities will not be repeated below.

As shown in Fig. 2A, Fig. 2B, Fig. 2C and Fig. 2D, the standard elevated floor 2 forms a plurality of perforations 20 connecting the ground side 10a and the honeycomb side 10b on the top plate 10, and the seventh rib 17 (the well-shaped ribs) divide the honeycomb side 10b into four regions, and each region forms 25 sub-regions (the concave portion S), and these ribs (the second ribs 12, the third ribs 13, fourth ribs 14, fifth ribs 15 and sixth ribs 16) may be separated by 21 further sub-regions (the recesses R, S), so that each sub-region has nine perforations 20, and in each A unidirectional auxiliary rib 18 is arranged between three adjacent perforations 20 in a sub-region to strengthen the strength of the top plate 10 between the perforations 20, and it is easier to make concave holes in the die-casting process, but in the well The perforation 20 is not formed in the sub-region (the recess R) of the central part of the font rib.

In this embodiment, the positions of the through holes 20 are arranged corresponding to the recesses S. As shown in FIG. For example, nine through holes 20 are formed on each recess S, and the nine through holes 20 are arranged in an array, so that each row has three through holes 20 .

Therefore, the recess R of the central portion of the seventh rib 17 (well-shaped rib) may not be provided with the perforation 20, and the height h0 (such as at least 7mm) of the inner auxiliary rib 17a relative to the honeycomb side 10b is greater than the height h0 of the day. The thickness t0 of the board 10 is to increase the strength of the standard raised floor 2 .

To sum up, the standard elevated floor 1,2 of the present invention mainly uses the heights h1, h2, h5, and h7 of the main ribs of the rib structure 1a relative to the honeycomb side 10b to be at least 25 mm to elevate the The structural strength of the standard raised floor 1, 2, so the standard raised floor 1, 2 can withstand the heavy machine equipment in the semiconductor process, so as to avoid the problem of the standard raised floor 1, 2 being broken during use . Further, adjust the height h1~h7 and width d1~d7 of the ribs according to the bearing load of the standard raised floor 1, 2, that is, if the bearing load is small, the rib height h1~h7 and width d1~d7 It is also smaller to save material and weight of a standard raised floor 1,2.

Furthermore, through the design of the auxiliary ribs 17a, 18, the structural strength of the standard raised floor 1, 2 can be further improved.

The above-mentioned embodiments are used to illustrate the principles and effects of the present invention, but not to limit the present invention. Any person skilled in the art can modify the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the rights of the present invention should be listed in the scope of the patent application described later.

1,2: Standard raised floor 1a: Rib structure 1b: foot seat 1c: thimble position 1d: wing plate 10:Top plate 10a: Ground side 10b: Honeycomb side 11: First rib 12: Second rib 13: Third rib 14: Fourth rib 15: Fifth rib 16: Sixth rib 17: seventh rib 17a,18: Auxiliary ribs 20: perforation d1~d8: width H: total height h0~h8: height L: Length R, S: concave part T: height and t0, t1: thickness w: interval distance

FIG. 1A is a three-dimensional schematic view of the first embodiment of the standard raised floor of the present invention.

FIG. 1B is a front plan view of FIG. 1A.

FIG. 1C is a cross-sectional view of FIG. 1B along line C-C in one of the directions.

FIG. 1D is a three-dimensional schematic view of another viewing angle of FIG. 1A .

Fig. 2A is a three-dimensional schematic view of the second embodiment of the standard raised floor of the present invention.

FIG. 2B is a front plan view of FIG. 2A.

FIG. 2C is a cross-sectional view along line C-C of FIG. 2B along one of the directions.

FIG. 2D is a three-dimensional schematic view of another viewing angle of FIG. 2A .

1: Standard raised floor

1a: Rib structure

1b: foot seat

1d: wing plate

10:Top plate

10a: Ground side

10b: Honeycomb side

11: First rib

12: Second rib

13: Third rib

14: Fourth rib

15: Fifth rib

16: Sixth rib

17: seventh rib

17a,18: Auxiliary ribs

d1~d8: width

H: total height

h0~h8: height

R, S: concave part

T: height and

t0, t1: thickness

Claims (16)

A standard raised floor comprising: a top plate having opposite ground sides and a honeycomb side; and a rib structure disposed on the honeycomb side of the top plate to form a plurality of recesses, wherein the rib structure is There are first rib, second rib, third rib, fourth rib, fifth rib, sixth rib and seventh rib defined in order from the edge of the board to the middle, and the first rib, second rib, fifth rib and the height of the seventh rib relative to the side of the hive is at least 25 mm as the main rib, and the height of the third rib, fourth rib and sixth rib relative to the side of the hive is less than 25 mm, as the middle rib. The standard raised floor according to claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the side of the honeycomb. The standard raised floor as described in claim 1, wherein the first rib is formed on the edge of the top plate to become the side rib of the standard raised floor, as the frame of the standard raised floor, for fixing the feet seat. The standard raised floor according to claim 1, wherein the height of the first rib relative to the side of the honeycomb is greater than the heights of the second to seventh ribs relative to the side of the honeycomb, and the first rib and the side of the honeycomb The sum of the heights of the top plate shall be at least 53 mm, and the thickness of the top plate shall be at least 2.5 mm. The standard raised floor as claimed in claim 1, wherein the width of the first rib is at least 7.5 mm. The standard raised floor according to claim 1, wherein the heights of the second rib, the fifth rib and the seventh rib relative to the side of the honeycomb are 30 to 47 mm. The standard raised floor as described in claim 1, wherein the width of the second rib, the fifth rib and the seventh rib is 2.3 to 4.5 mm. The standard raised floor according to claim 1, wherein the heights of the third rib, the fourth rib and the sixth rib relative to the side of the honeycomb are all at least 20 mm. The standard raised floor as described in Claim 1, wherein the widths of the third rib, the fourth rib and the sixth rib are all at least 2.5 mm. The standard raised floor as described in Claim 1, wherein the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the middle rib, and the plurality of auxiliary ribs are correspondingly formed in each of the recesses, so that a single recess The plurality of auxiliary ribs are arranged. The standard raised floor according to claim 10, wherein the plurality of auxiliary ribs extend along a single direction without interlacing each other. The standard raised floor according to claim 10, wherein the height of the auxiliary rib relative to the side of the honeycomb is at least 7 mm, and the width thereof is at least 2.5 mm. The standard raised floor as described in Claim 1, wherein, a plurality of perforations connecting the ground side and the honeycomb side are formed on the top plate, and the positions of the plurality of perforations are corresponding to the plurality of recesses, and three adjacent Unidirectional auxiliary ribs are provided between the perforations. The standard raised floor as described in Claim 1, wherein, the rib structure forms a well-shaped rib with two seventh ribs in the longitudinal and transverse directions, so as to divide the standard raised floor into four regions, the 25 subregions are formed between the adjacent second ribs, third ribs, fourth ribs, fifth ribs and sixth ribs in the four regions, and each of the subregions has a concave portion, and is placed on the seventh rib. Another concave part formed in the center of the well-shaped ribs, in which auxiliary ribs are arranged, and a wing plate is formed around the top plate, so that the height of the auxiliary rib and the thickness of the wing plate are larger than the top plate thickness to improve the strength of the standard raised floor in the middle. The standard raised floor according to claim 14, wherein the first rib to the sixth rib are symmetrically distributed on the basis of the well-shaped rib, and the well-shaped rib is formed at the place where the first rib is connected bevel to reduce the weight of this standard raised floor. The standard raised floor as described in Claim 14, wherein 21 other sub-regions are separated in the well-shaped ribs by the second rib, the third rib, the fourth rib, the fifth rib and the sixth rib , and there are nine perforations in each sub-region, but the perforation is not formed in the sub-region of the central part of the well-shaped rib.

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