TWI781003B - Light raised floor - Google Patents

Abstract

A raised floor includes a top plate and a rib structure, wherein the rib structure has a plurality of main ribs with a height of at least 25 mm formed on the top plate to enhance the structural strength of the raised floor. Therefore, when the raised floor carries the heavier equipment in the semiconductor manufacturing process, the problem of the raised floor cracking can be avoided.

Description

light raised floor

The invention relates to a floor, especially a light elevated floor with a rib structure.

At present, in semiconductor factories, elevated floors with multiple micro-perforations are installed to clean the air quality of the environment and ensure the clean room specifications.

At present, the raised floor system is made by mold casting. In the molding process, the required product is often made by a mold, and before the molding operation, a release layer will be coated on the mold to facilitate the subsequent demoulding operation.

However, it is known that the structural strength of the raised floor is often insufficient, so when the raised floor carries heavier equipment in the semiconductor manufacturing process, the raised floor is prone to breakage. On the other hand, there is also the problem that the raised floor is too heavy, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the problems of the above-mentioned conventional technologies has become a difficult problem to be overcome urgently in the industry.

In view of the deficiencies of the above-mentioned prior art, the present invention provides a lightweight raised floor comprising: a top plate having opposite ground sides and a honeycomb side; and a rib structure arranged on the honeycomb side of the top plate to form a plurality of The concave part, wherein, the rib structure is sequentially defined from the edge of the top plate to the middle with the first rib, the second rib, the third rib, the fourth rib, the fifth rib, the sixth rib and the seventh rib, and the The height of the first rib, the fourth rib and the seventh rib relative to the side of the honeycomb is at least 25 mm to serve as the main rib, while the second rib, the third rib, the fifth rib and the The height of the six ribs relative to the sides of the honeycomb is less than 25 mm to serve as the middle ribs.

In the aforementioned lightweight raised floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the side of the honeycomb.

In the aforementioned lightweight raised floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the side of the honeycomb.

In the aforementioned light raised floor, the first rib is formed on the edge of the top plate to become the side rib of the light raised floor, which is used as a frame of the light raised floor for fixing the feet.

In the aforementioned lightweight raised floor, the height of the first rib relative to the side of the honeycomb is greater than the heights of the second rib to the seventh rib relative to the side of the honeycomb, and the sum of the heights of the first rib and the top plate is is 52 mm, and the thickness of the top plate is 2.5 mm.

In the aforementioned lightweight raised floor, the width of the first rib is 6 mm.

In the aforementioned lightweight raised floor, the height of the fourth and seventh ribs relative to the side of the honeycomb is 32 to 44 mm.

In the aforementioned lightweight raised floor, the fourth and seventh ribs have a width of 3 to 4.2 mm.

In the aforementioned lightweight raised floor, the heights of the second, third, fifth and sixth ribs relative to the side of the honeycomb are 5 to 16 mm.

In the aforementioned lightweight raised floor, the widths of the second, third, fifth and sixth ribs are all 2.5 mm.

In the aforementioned lightweight raised floor, a plurality of perforations connecting the ground side and the honeycomb side are formed on the top plate, and the positions of the plurality of perforations correspond to the plurality of recesses.

In the above-mentioned light raised floor, the rib structure forms a well-shaped rib with two seventh ribs in the vertical and horizontal directions, so as to divide the light raised floor into four areas, and the adjacent seventh ribs in the four areas There are 25 sub-regions formed between the second rib, the third rib, the fourth rib, the fifth rib and the sixth rib, and each sub-region has a concave part, which is in the center of the well-shaped rib formed by the seventh rib Another recess formed in the other part, which is equipped with cross-shaped ribs, and a wing plate is formed around the top plate, so that the height of the cross-shaped ribs and the thickness of the wing plate are greater than the thickness of the top plate, so as to improve the height of the top plate. The strength of the light raised floor in the middle. For example, the first to sixth ribs are distributed symmetrically with respect to the square-shaped ribs, and the square-shaped ribs are connected to the first ribs to form a slope to reduce the weight of the lightweight raised floor. Or, 21 other sub-regions are separated by the second rib, the third rib, the fourth rib, the fifth rib and the sixth rib in the well-shaped rib, and there are nine perforations in each sub-region , but the perforation is not formed in the sub-region of the central part of the well-shaped rib.

It can be seen from the above that in the light raised floor of the present invention, the height of the main ribs of the rib structure relative to the side of the honeycomb is at least 25 mm, and the width and height of the middle ribs will not be less than 25 mm. In order to improve the structural strength of the light raised floor (for example, it can carry at least 700 kilograms of machine equipment), and reduce the weight of the light raised floor, so compared with the conventional technology, the light raised floor can bear semiconductor Heavy machine equipment in the manufacturing process to avoid the problem of cracking of the light raised floor during use.

The implementation of the present invention is described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to match the content disclosed in the specification, for the understanding and reading of those familiar with this technology, and are not used to limit the implementation of the present invention Therefore, it has no technical substantive meaning. Any modification of structure, change of proportional relationship or adjustment of size shall still fall within the scope of this invention without affecting the effect and purpose of the present invention. The technical content disclosed by the invention must be within the scope covered. At the same time, terms such as "upper", "lower", "left", "right" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the implementation of the present invention. Changes or adjustments in the scope, and their relative relationships, without substantial changes in the technical content, should also be regarded as the scope of the present invention that can be implemented.

Fig. 1A, Fig. 1B, Fig. 1C, Fig. 1D and Fig. 1E are the schematic diagrams of the first embodiment of the lightweight raised floor 1 of the present invention. The light raised floor 1 of the present embodiment is used for carrying lighter loads, and its carrying load is about 700 kilograms.

The light raised floor 1 is provided with a top plate 10 and a rib structure 1a arranged on the top plate 10 .

Said top plate 10 has opposite ground side 10a and honeycomb side 10b, and said honeycomb side 10b is respectively provided with said rib structure 1a on longitudinal and transverse direction, so as to form between said longitudinal and transverse rib structure 1a The plurality of recesses S, wherein, Fig. 1C shows the longitudinal rib structure 1a, and Fig. 1D shows the transverse rib structure 1a.

In this embodiment, the top plate 10 is roughly rectangular, such as a square plate, its length L is 600mm and thickness t0 is 2.5mm, and a wing plate 1d is formed around the top plate 10 (thickness t1 is 6mm, which is greater than the thickness t0 of the top plate 10), and there are feet 1b formed on the four corners of the top plate 10, the bottom of which is L-shaped convex (or L-shaped concave), for Fix a support tripod (not shown). For example, the feet 1b are used to adjust the total height H of the lightweight raised floor 1 so that multiple lightweight raised floors 1 are located at the same level.

Furthermore, the ground side 10a is a flat surface, and the recesses S are arranged in an array to form a plurality of thimble positions 1c (approximately in a square area formed by every four recesses S) on the honeycomb side 10b. The corner of the above) honeycomb structure.

The rib structure 1a is defined in sequence from the edge of the top plate 10 to the middle (or from the left and right sides to the middle as shown in Figure 1B and Figure 1C ) with a first rib 11, a second rib 12, and a third rib 13. The fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17, and the heights h1, h4 of the first, fourth and seventh ribs 11, 14, 17 relative to the honeycomb side 10b, h7 is at least 25 millimeters (㎜), and the heights h2, h3, h5, h6 of the second, third, fifth and sixth ribs 12, 13, 15, 16 relative to the honeycomb side 10b are lower than 25 mm, so the first, fourth and seventh ribs 11, 14, 17 are the main ribs, and the second, third, fifth and sixth ribs 12, 13, 15, 16 are the middle ribs , wherein, the first to sixth ribs 11-16 are distributed symmetrically (or vertically symmetrically as shown in FIG. 1B ) based on the seventh rib 17 (square rib), so that the second rib 12 , The distance w between the third rib 13 , the fourth rib 14 , the fifth rib 15 , the sixth rib 16 and the seventh rib 17 is 48 mm.

In this embodiment, the first ribs 11 are formed on the edge of the top plate 10 to become the side ribs of the light raised floor 1 and serve as the frame of the light raised floor 1 for fixing the foot 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 49.5 mm, which is greater than the height h2-h7 of the second to seventh ribs 12-17 relative to the honeycomb side 10b, and the first rib 11 and the height of the top plate 10 and T (that is, the height of the first rib 11 relative to the ground side 10a) is 52mm (that is, T=h1+t0), and the foot 1b, the first rib 11 and The total height H of the top plate 10 (ie the foot height of the light raised floor 1) is 55mm.

Furthermore, the heights h2-h7 of the second to seventh ribs 12-17 of the rib structure 1a can be the same or different according to requirements, as shown in FIG. 1C. For example, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 32mm, the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 44mm, and the height h2 of the second rib 12 relative to the honeycomb side 10b is 8㎜, the height h3 of the third rib 13 relative to the honeycomb side 10b is 16㎜, the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 16㎜, and the height of the sixth rib 16 relative to the honeycomb side 10b h6 is 5㎜, wherein, the two seventh ribs 17 in the longitudinal and transverse directions form a well-shaped rib to divide the light raised floor 1 into four areas, and the second rib 12 and the third rib adjacent to each area Between three ribs 13, the 4th rib 14, the 5th rib 15 and the 6th rib 16, form 25 sub-regions, each sub-region has a concave portion S, and forms another at the central part of the well-shaped rib of the 7th rib 17 A kind of concave portion R. Further, the thickness of the top plate 10 at the recess R is 5.5mm, which is greater than the thickness t0 at other places, and the recess R is equipped with a cross-shaped rib 17a, and its height h0 relative to the honeycomb side 10b is 8mm (It is greater than the thickness t0 of the top plate 10), so as to improve the compressive strength of the light raised floor 1 in the middle. It should be understood that the thickness of the top plate 10 at the recess R may also be the same as the thickness t0 of the top plate 10 at other locations.

In addition, the widths d1-d7 of the ribs can be the same or different according to requirements, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 6 mm, the width d2 of the second rib 12 is 2.5 mm, the width d3 of the third rib 13 is 2.5 mm, the width d4 of the fourth rib 14 is 3 mm, and the width d4 of the fifth rib 15 The width d5 of the sixth rib 16 is 2.5 mm, the width d6 of the sixth rib 16 is 2.5 mm, and the width d7 of the seventh rib 17 is 4.2 mm.

In addition, the design of the rib structure 1a in another direction (the up-and-down direction shown in Figure 1B), as shown in Figure 1D, except for the fourth rib 14a, the other ribs are all the same size, so the fourth rib 14a can be adjusted. The height h4 of the rib 14a relative to the honeycomb side 10b is less than 25 mm, such as 5mm, so that the fourth rib 14a becomes a middle rib, and its width d4 is 2.5mm.

It can be seen from the above that the thickness t0 of the top plate 10 of the light raised floor 1 is relatively small, and the heights h2, h3, h5, and h6 of most of the rib structure 1a are also relatively small, that is, the middle ribs (second and third , fifth and sixth ribs 12, 13, 15, 16) height h2, h3, h5, h6 than the main ribs (first rib 11, fourth rib 14 and seventh rib 17) height h1, h4, h7 Much smaller, in order to save material and reduce weight.

Furthermore, the well-shaped ribs formed by the seventh ribs 17 form slopes at the places where the first ribs 11 are connected, so as to reduce the weight of the lightweight raised floor 1 .

Fig. 2A, Fig. 2B, Fig. 2C and Fig. 2D are schematic diagrams of the second embodiment of the lightweight raised floor 2 of the present invention. The difference between this embodiment and the above-mentioned embodiments lies in the addition of perforations, so the similarities will not be repeated below.

As shown in Fig. 2A, Fig. 2B, Fig. 2C and Fig. 2D, the lightweight raised floor 2 forms a plurality of perforations 20 connecting the ground side 10a and the honeycomb side 10b on the top plate 10, and the seventh rib 17 ( Well-shaped ribs) divide the honeycomb side 10b into four regions, and each region forms 25 sub-regions (the concave portion S), and these ribs (the second rib 12, the third rib 13. The fourth rib 14, the fifth rib 15 and the sixth rib 16) can be separated into 21 other sub-regions (the recesses R, S), so that each sub-region has nine perforations 20, but in the well The perforation 20 is not formed in the sub-region (the recess R) of the central part of the font rib.

In this embodiment, the positions of the through holes 20 are arranged corresponding to the recesses S. As shown in FIG. For example, nine through holes 20 are formed on each recess S, and the nine through holes 20 are arranged in an array, so that each row has three through holes 20 .

Therefore, the recess R of the central portion of the seventh rib 17 (well-shaped rib) may not be provided with the perforation 20, and the height h0 of the inner cross-shaped rib 17a relative to the honeycomb side 10b is greater than the thickness t0 of the top plate 10 , to improve the strength of the light raised floor 2.

To sum up, the light raised floor 1, 2 of the present invention mainly uses the heights h1, h4, h7 of the main ribs of the rib structure 1a relative to the honeycomb side 10b to be at least 25 mm to elevate the light raised floor The structural strength of 1, 2, so the light raised floor 1, 2 can bear the heavier machine equipment in the semiconductor manufacturing process, so as to avoid the problem that the light raised floor 1, 2 breaks during use. Further, adjust the height h1~h7 and width d1~d7 of the ribs according to the bearing load of the light raised floor 1, 2, that is, if the bearing load is small, the height h1~h7 and width d1~d7 of the ribs are also Smaller to save material and weight for lightweight raised floors1,2.

Furthermore, the structural strength of the light raised floor 1, 2 can be further enhanced by the design of the middle rib.

The above-mentioned embodiments are used to illustrate the principles and effects of the present invention, but not to limit the present invention. Any person skilled in the art can modify the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the rights of the present invention should be listed in the scope of the patent application described later.

1,2: light raised floor 1a: Rib structure 1b: foot seat 1c: thimble position 1d: wing plate 10:Top plate 10a: Ground side 10b: Honeycomb side 11: First rib 12: Second rib 13: Third rib 14,14a: Fourth rib 15: Fifth rib 16: Sixth rib 17: seventh rib 17a: Cruciform ribs 20: perforation d1~d7: width H: total height h0~h7: height L: Length R, S: concave part T: height and t0, t1: thickness w: interval distance

FIG. 1A is a three-dimensional schematic view of the first embodiment of the lightweight raised floor of the present invention.

FIG. 1B is a front plan view of FIG. 1A.

FIG. 1C is a cross-sectional view of FIG. 1B along line C-C in one of the directions.

FIG. 1D is a cross-sectional view of FIG. 1B along a line D-D in one of the directions.

FIG. 1E is a three-dimensional schematic diagram of another viewing angle of FIG. 1A .

Fig. 2A is a three-dimensional schematic view of the second embodiment of the lightweight raised floor of the present invention.

FIG. 2B is a front plan view of FIG. 2A.

FIG. 2C is a cross-sectional view along line C-C of FIG. 2B along one of the directions.

Fig. 2D is a three-dimensional schematic diagram of another viewing angle of Fig. 2A

1: Light raised floor

1a: Rib structure

1b: foot seat

1d: wing plate

10:Top plate

10a: Ground side

10b: Honeycomb side

11: First rib

12: Second rib

13: Third rib

14: Fourth rib

15: Fifth rib

16: Sixth rib

17: seventh rib

17a: Cruciform ribs

H: total height

h0~h7: height

d1~d7: width

T: height and

t0, t1: thickness

R, S: concave part

Claims (13)

A lightweight raised floor comprising: a top plate having opposite ground sides and a honeycomb side; and a rib structure provided on the honeycomb side of the top plate to form a plurality of recesses, and the plurality of recesses are free of ribs, wherein, The rib structure is defined in sequence from the edge of the top plate to the middle with the first rib, the second rib, the third rib, the fourth rib, the fifth rib, the sixth rib and the seventh rib, and the first rib, The height of the fourth rib and the seventh rib relative to the side of the hive is at least 25 mm to serve as the main rib, while the second rib, the third rib, the fifth rib and the sixth rib are relative to the The height of the side of the hive is less than 25 mm to serve as the middle rib. The lightweight raised floor according to claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the side of the honeycomb. The light raised floor according to claim 1, wherein the first rib is formed on the edge of the top plate to become the side rib of the light raised floor, and serves as a frame of the light raised floor for fixing the feet. The light raised floor according to claim 1, wherein, the height of the first rib relative to the side of the honeycomb is greater than the height of the second rib to the seventh rib relative to the side of the honeycomb, and the height of the first rib and the side of the honeycomb The sum of the heights of the top plate is 52 mm, and the thickness of the top plate is 2.5 mm. The lightweight raised floor as described in Claim 1, wherein the width of the first rib is 6mm. The light raised floor according to claim 1, wherein the height of the fourth rib and the seventh rib relative to the side of the honeycomb is 32 to 44 mm. The light raised floor as described in Claim 1, wherein the width of the fourth rib and the seventh rib is 3 to 4.2 mm. The light raised floor according to claim 1, wherein the height of the second rib, the third rib, the fifth rib and the sixth rib relative to the side of the honeycomb is 5 to 16 mm. The light raised floor as described in Claim 1, wherein the widths of the second rib, the third rib, the fifth rib and the sixth rib are all 2.5 mm. The lightweight raised floor according to claim 1, wherein a plurality of perforations connecting the ground side and the honeycomb side are formed on the top plate, and the positions of the plurality of perforations correspond to the plurality of recesses. The light raised floor as described in Claim 1, wherein, the rib structure forms a well-shaped rib with two seventh ribs in the longitudinal and transverse directions, so as to divide the light raised floor into four areas, and the four 25 sub-regions are formed between the adjacent second ribs, third ribs, fourth ribs, fifth ribs and sixth ribs in the region, each of which has a recess, and is formed on the seventh rib. Another concave part formed by the central part of the well-shaped rib, in which a cross-shaped rib is arranged, and a wing plate is formed around the top plate, so that the height of the cross-shaped rib and the thickness of the wing plate are larger than the top plate thickness to increase the strength of the light raised floor in the middle. The lightweight raised floor according to claim 11, wherein the first to sixth ribs are distributed symmetrically with respect to the well-shaped ribs, and the square-shaped ribs form an inclined plane at the place where the first ribs are connected , to reduce the weight of this lightweight raised floor. The light raised floor as described in claim 11, wherein 21 other sub-regions are separated in the well-shaped ribs by the second rib, the third rib, the fourth rib, the fifth rib and the sixth rib, And there are nine perforations in each sub-region, but the perforation is not formed in the sub-region of the central part of the well-shaped rib.

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