TWM635508U - Mixed raised floor - Google Patents

Abstract

A mixed grille floor includes a top plate and a rib structure, wherein the rib structure and the top plate are integrally formed with aluminum alloy, and the top plate is formed with a plurality of through holes to form more than 48% or 50% ventilation. Therefore, the mixed grille floor can meet the needs of cleanliness of semiconductor process.

Description

Integrated grid floor

The invention relates to a floor, especially a composite grille floor with high ventilation rate.

Known raised floors, such as TWM626914 patent, TWM626915 patent, TWM626017 patent, TWM626032 patent, TWM625241 patent, TWM625242 patent, TWM625267 patent, TWM625270 patent, TWM625289 patent and TWM596253 patent, etc., can be used in the semiconductor manufacturing process of the building area, as well as the factory The ventilated floor in the process area, but its ventilation rate is less than 20%, which cannot meet the demand for ventilation rate.

However, the grid floor used for the gutter cover is currently manufactured by welding, such as the TW536257 patent, which is prone to deformation, defects and fractures during the welding forming process.

Furthermore, the ventilation rate of the existing grid floor is too small, so that the return air volume is not enough, so that the cleanliness requirement of the semiconductor manufacturing process cannot be met.

In addition, the structural strength of the conventional grid floor is often insufficient, so when the grid floor carries heavy equipment in the semiconductor manufacturing process, the grid floor is prone to cracking.

On the other hand, the existing grid floor also has the problem of being too heavy, which not only wastes materials, but also increases the manufacturing cost.

Therefore, how to overcome the various problems of the above-mentioned conventional technologies has become a difficult problem to be overcome urgently in the industry at present.

In view of the various deficiencies of the above-mentioned conventional technologies, this creation provides a composite grid floor, which includes: a top plate with opposite ground sides and honeycomb sides, wherein a plurality of grids connecting the ground side and the honeycomb side are formed on the top plate. side perforations to form more than 48% or more than 50% of the ventilation rate; perforation, wherein, the rib structure is sequentially defined from the edge of the top plate to the middle with a first rib, a second rib, a third rib, a fourth rib, a fifth rib, a sixth rib and a seventh rib, and the The height of the first rib, second rib, fourth rib, fifth rib and seventh rib relative to the side of the hive is at least 25 mm to serve as main ribs, and the third rib and sixth rib relative to the The height of the side of the hive is less than 25 mm to serve as the middle rib.

In the aforementioned integrated grid floor, the plurality of recesses are arranged in an array to form a honeycomb structure on the side of the honeycomb.

In the aforementioned integrated grid floor, the first ribs are formed on the edge of the top plate to become the side ribs of the integrated grid floor and serve as the frame of the integrated grid floor.

In the aforementioned integrated grid floor, the sum of the height of the first rib relative to the honeycomb side and the thickness of the top plate is 50 to 59.5 mm, and the thickness of the top plate is 2 to 3 mm.

In the aforementioned integrated grid floor, the height of the second rib, the fourth rib, the fifth rib and the seventh rib relative to the side of the honeycomb is 35 to 52.5 mm.

In the aforementioned integrated grid floor, the height of the third rib and the sixth rib relative to the side of the honeycomb is 17 to 22 mm.

In the aforementioned integrated grid floor, the width of the first rib is 4.8 to 8 mm.

In the aforementioned integrated grid floor, the width of the second rib, the fourth rib, the fifth rib and the seventh rib is 3 to 5.5 mm.

In the aforementioned integrated grid floor, the width of the third rib and the sixth rib is 3 to 3.5 mm.

In the above-mentioned integrated grid floor, the rib structure forms a well-shaped rib with two seventh ribs in the vertical and horizontal directions, so as to divide the integrated grid floor into four areas. Among the four areas 25 subregions are formed between the adjacent second ribs, third ribs, fourth ribs, fifth ribs and sixth ribs, and each subregion has a concave portion, and the well formed on the seventh rib Another concave part formed in the central part of the shaped rib, and has three elongated perforations in each sub-region to form a ventilation rate of more than 48% or more than 50%, and a wing plate is formed around the top plate , so that the thickness of the wing plate is greater than the thickness of the top plate.

In the aforementioned integrated grid floor, the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the central rib, and the plurality of auxiliary ribs are correspondingly formed in each of the recesses, so that the plurality of auxiliary ribs are arranged in a single recess. rib. For example, the height of the auxiliary rib relative to the side of the honeycomb is 10 to 15 mm, and its width is 3 to 3.5 mm.

In the aforementioned integrated grid floor, the widths of the first rib, the second rib and the seventh rib at the opposite sides of the honeycomb side are respectively smaller than the first rib and the second rib at the middle part of the honeycomb side. ribs and the width of the seventh rib to reduce the weight of the integrated grid floor.

In the aforementioned integrated grid floor, the first rib is used to support the foot frame fixed by the integrated grid floor.

In the aforementioned integrated grid floor, the first and second ribs are connected to the four corners of the integrated grid floor to form feet, and the feet are fixed on the supporting legs.

It can be seen from the above that in the integrated grid floor of this creation, the top plate and the plurality of rib structures are integrally cast with aluminum alloy, so that no deformation will occur during the production of the integrated grid floor, and it is not easy to produce Defects and fractures, etc., so compared with the conventional technology, the reliability of the integrated grid floor of this creation is excellent.

Furthermore, through the design of these perforations, a ventilation rate of more than 48% or more than 50% can be formed, so the ventilation rate can be increased to meet the cleanliness requirement of the semiconductor manufacturing process.

In addition, the height of the main ribs of the rib structure relative to the side of the honeycomb is at least 25 mm to enhance the structural strength of the integrated grid floor, so compared with the prior art, the integrated grid floor can withstand Heavy machine equipment in the semiconductor manufacturing process to avoid the problem of cracking of the integrated grid floor during use.

The implementation of this creation is described below through specific specific examples, and those who are familiar with the art can easily understand other advantages and effects of this creation from the content disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this manual are only used to match the content disclosed in the manual, for the understanding and reading of those familiar with this technology, and are not used to limit the implementation of this creation Therefore, it has no technical substantive meaning. Any modification of structure, change of proportional relationship or adjustment of size shall still fall within the scope of this creation without affecting the effect and purpose of this creation. The technical content revealed by the creation must be within the scope covered. At the same time, terms such as "upper", "lower", "left", "right" and "one" quoted in this manual are only for the convenience of description, and are not used to limit the scope of implementation of this creation. The scope, the change or adjustment of its relative relationship, without substantive changes in the technical content, should also be regarded as the scope of the creation that can be implemented.

1A to 1E are schematic diagrams of the first embodiment of the integrated grid floor 1 of the present invention. The integrated grid floor 1 of the present embodiment is used for carrying heavier loads, and its carrying load is about 1000 kilograms.

The composite grid floor 1 has a top plate 10 and multiple rib structures 1a on the top plate 10, so that the top plate 10 and the multiple rib structures 1a are integrally cast with aluminum alloy, so as to The integrated grid floor 1 will not be deformed when manufactured, and problems such as defects and fractures will not easily occur.

Said top plate 10 has opposite ground side 10a and honeycomb side 10b, and said honeycomb side 10b is respectively provided with a plurality of said rib structures 1a in longitudinal and transverse directions, so as to be between said longitudinal and transverse rib structures 1a A plurality of recesses S are formed, wherein Fig. 1C and Fig. 1D only show the longitudinal rib structure 1a, and the arrangement of the transverse rib structure 1a and the longitudinal rib structure 1a is symmetrical, so the section of the transverse rib structure 1a is omitted.

In this embodiment, the top plate 10 is roughly rectangular, such as a square plate, its length L is 600mm and thickness t0 is 2mm, and a wing plate 1d is formed around the top plate 10 (thickness t1 is 8㎜, which is greater than the thickness t0 of the top plate 10), and there are feet 1b formed on the four corners of the integrated grid floor 1, the bottom of which is L-shaped convex (or L-shaped concave) , the foot 1b is fixed on the supporting foot (not shown). For example, the foot 1 b is used to adjust the overall height H of the integrated grid floor 1 , so that multiple integrated grid floors 1 can be located on the same horizontal plane when spliced.

Furthermore, the ground side 10a is a flat surface, and the recesses S are arranged in an array to form a plurality of thimble positions 1c (approximately in a square area formed by every four recesses S) on the honeycomb side 10b. The corner of the above) honeycomb structure.

The rib structure 1a is defined in sequence from the edge of the top plate 10 to the middle (or from the left and right sides to the middle as shown in Figure 1B and Figure 1C ) with a first rib 11, a second rib 12, and a third rib 13. The fourth rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17, and the first to second, fourth to fifth and seventh ribs 11~12, 14~15, 17 are relative to The heights h1~h3, h5, h7 of the honeycomb side 10b are at least 25 mm (㎜), and the heights h4, h6 of the third and sixth ribs 13, 16 relative to the honeycomb side 10b are less than 25 mm Therefore, the first to second, fourth to fifth and seventh ribs 11~12, 14~15, 17 are the main ribs, and the third and sixth ribs 13, 16 are the middle ribs, of which , the first to sixth ribs 11-16 are distributed symmetrically (or symmetrically up and down as shown in FIG. 1B ) based on the seventh rib 17, so that the second rib 12, the third rib 13, the fourth The distance w between the rib 14, the fifth rib 15, the sixth rib 16 and the seventh rib 17 is 48 mm.

In this embodiment, the first ribs 11 are formed on the edge of the top plate 10 to become the side ribs of the integrated grid floor 1 as the frame of the integrated grid floor 1 for fixing the feet 1b. For example, the height h1 of the first rib 11 relative to the honeycomb side 10b is 48 mm (equal to the height h2 of the second rib 12 relative to the honeycomb side 10b), which are larger than the third to seventh ribs 13-17 relative to each other. The height h3~h7 on the honeycomb side 10b, and the sum T of the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness of the top plate 10 in this embodiment is 50 mm (that is, T=h1+t0 ), and the total height H of the height of the foot seat 1b, the height h1 of the first rib 11 relative to the honeycomb side 10b and the thickness t0 of the top plate 10 is the foot height of the integrated grid floor 1, which is 60 mm.

Furthermore, the heights h2-h7 of the second to seventh ribs of the rib structure 1a can be the same or different according to requirements, and the main ribs between the first rib 11 and the recess R, S in the middle (that is, the second The arrangement of the second to seventh ribs (12~17) is shown in Figure 1C. For example, the height h2 of the second rib 12 relative to the honeycomb side 10b is 48mm, the height h4 of the fourth rib 14 relative to the honeycomb side 10b is 35mm, and the height h5 of the fifth rib 15 relative to the honeycomb side 10b is 35㎜, the height h7 of the seventh rib 17 relative to the honeycomb side 10b is 45㎜, the heights h3 and h6 of the third and sixth ribs 13, 16 relative to the honeycomb side 10b are both 18㎜, wherein the longitudinal and The two seventh ribs 17 in the horizontal direction form a well-shaped rib to divide the integrated grid floor 1 into four areas, and the second rib 12, the third rib 13, and the fourth rib 14 adjacent to each area 25 sub-regions are formed between the fifth rib 15 and the sixth rib 16, each sub-region has a recess S, and another type of recess R is formed at the center of the well-shaped rib. Further, the thickness of the top plate 10 in the recess R can be larger than the thickness t0 of the top plate 10 in other places or the same as the thickness t0 of the top plate 10 according to requirements, and two parallel auxiliary ribs 17a are arranged in the recess R , to improve the compressive strength of the integrated grid floor 1 in the middle. For example, because the height h2 of the second rib 12 relative to the honeycomb side 10b is equal to the height h1 of the first rib 11 relative to the honeycomb side 10b, when the integrated grid floor 1 is fixed on a foot frame for a raised floor At the same time, the bottoms of the first ribs 11 and the second ribs 12 are used as supports for the four feet of the integrated grid floor 1 .

Also, the widths d1-d7 of the ribs can be the same (such as the second to sixth ribs 12-16) or different according to requirements, as shown in FIG. 1C. For example, the width d1 of the first rib 11 is 7 mm, the width d2 of the second rib 12 is 4.42 mm, the width d3 of the third rib 13 is 3.5 mm, the width d4 of the fourth rib 14 is 3.5 mm, and the width d4 of the fifth rib 15 The width d5 of the sixth rib 16 is 3.5 mm, the width d6 of the sixth rib 16 is 3.5 mm, and the width d7 of the seventh rib 17 is 5 mm.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different positions where it extends. For example, the widths d1, d2, and d7 of partial ribs can be adjusted, such as the width d1 of the first rib 11, the second rib 12, and the seventh rib 17 on the opposite sides of the honeycomb side 10b as shown in FIG. 1D , d2, d7 are smaller, wherein, the width d1 of the first rib 11 is 5mm, the width d2 of the second rib 12 is 3.5mm, and the width d7 of the seventh rib 17 is 4mm, which are smaller than those shown in Fig. 1C respectively The widths d1, d2, and d7 of the first rib 11, the second rib 12, and the seventh rib 17 in the middle of the honeycomb side 10b are used to reduce the weight of the integrated grid floor 1, while the third, fourth, and seventh ribs The widths d3, d4, d5, d6 of the fifth and sixth ribs 13, 14, 15, 16 remain unchanged.

In addition, the rib structure 1a can add a plurality of auxiliary ribs 17a, 18 whose volume is much smaller than other ribs, as shown in Figure 1C. The height h3, h6 of the middle rib relative to the honeycomb side 10b, and its width d8 is 3 mm. For example, these auxiliary ribs 17a, 18 are correspondingly formed in each of the recesses R, S, and extend along a single direction without interlacing each other. A single recess R, S as shown in FIG. 1C is configured with two parallel auxiliary ribs 17a ,18.

Furthermore, the integrated grid floor 1 forms a plurality of perforations 100 connecting the ground side 10a and the honeycomb side 10b on the top plate 10, and the seventh ribs 17 (two seventh ribs 17 in the vertical and horizontal directions) The formed well-shaped ribs) divide the honeycomb side 10b into four areas (four corner areas), and each area forms 25 sub-areas (corresponding to the position of the concave part S), and the outward extension of the well-shaped ribs ( Cross region), by these ribs (the second rib 12, the third rib 13, the fourth rib 14, the fifth rib 15 and the sixth rib 16), 21 other sub-regions (corresponding to the recess R , S position), so that each sub-region has three elongated perforations 100 to form more than 50% of the ventilation.

In this embodiment, the positions of the through holes 100 are arranged corresponding to the recesses R, S. For example, each recess R, S is formed with three perforations 100, and the three perforations 100 are spaced side by side, and each row of perforations 100 is separated by the auxiliary ribs 17a, 18; in addition, the first and second ribs 11 , The recess S between 12 has only one perforation 100, that is, no auxiliary rib 18 is configured.

Therefore, through the design of the perforation 100, the integrated grid floor 1 can not only increase the ventilation volume, but also help save materials and reduce weight, and can also increase the bearing weight.

Also, the thickness t0 of the top plate 10 of the integrated grid floor 1 is small, and the partial heights h3 and h6 of the rib structure 1a are also small, that is, the heights of the middle ribs (the third and sixth ribs 13, 16) The heights h3, h6 are much smaller than the heights h1, h2, h4, h5, h7 of the main ribs (the first to second, fourth to fifth and seventh ribs 11~12, 14~15, 17) to facilitate Save material and reduce weight.

2A to 2E are schematic diagrams of the second embodiment of the integrated grid floor 2 of the present invention. The load-carrying load of the integrated grid floor 2 of this embodiment is about 1000 kilograms, and the difference between it and the first embodiment lies in the change of the local height of the rib structure 2a, so the same points will not be repeated below.

In this embodiment, the thickness t0 of the top plate 20 is 2mm, the height h1 of the first rib 21 relative to the honeycomb side 20b is 48mm, and the height h1 of the first rib 21 relative to the honeycomb side 20b The sum T of the thickness t0 of the top plate 20 is 50mm, and the total height H of the height of the foot 2b, the height h1 of the first rib 21 relative to the honeycomb side 20b and the thickness t0 of the top plate 20 is 55mm, wherein, the thickness t1 of the wing plate 2d is 6mm, the first rib 21 is formed on the edge of the top plate 20 to become the side rib of the integrated grid floor 2, as the integrated grid floor 2, and the first to sixth ribs 21-26 are symmetrically distributed left and right (or vertically symmetrical as shown in FIG. 2B ) based on the seventh rib 27 .

Furthermore, in the rib structure 2a, as shown in FIG. 2C, the height h2 of the second rib 22 relative to the honeycomb side 20b is 48 mm, the height h4 of the fourth rib 24 relative to the honeycomb side 20b is 35 mm, and the height h2 of the fourth rib 24 relative to the honeycomb side 20b is 35 mm. The height h5 of the fifth rib 25 relative to the honeycomb side 20b is 35mm, the height h7 of the seventh rib 27 relative to the honeycomb side 20b is 45mm, and the height of the third and sixth ribs 23, 26 relative to the honeycomb side 20b Both h3 and h6 are 18㎜. For example, because the height h2 of the second rib 22 relative to the honeycomb side 20b is equal to the height h1 of the first rib 21 relative to the honeycomb side 20b, when the integrated grid floor 2 is fixed on a foot frame for an elevated floor At the same time, the bottoms of the first ribs 21 and the second ribs 22 are used as supports for the four feet of the composite grid floor 2 .

Moreover, the widths d1-d7 of the ribs can be the same or different according to requirements, as shown in FIG. 2C. For example, the width d1 of the first rib 21 is 7 mm, the width d2 of the second rib 22 is 4.42 mm, the width d3 of the third rib 23 is 3.5 mm, the width d4 of the fourth rib 24 is 3.5 mm, and the width d4 of the fifth rib 25 The width d5 of the sixth rib 26 is 3.5 mm, the width d6 of the sixth rib 26 is 3.5 mm, and the width d7 of the seventh rib 27 is 5 mm.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different positions where it extends. For example, the widths d1, d2, and d7 of partial ribs can be adjusted, such as the width d1 of the first rib 21, the second rib 22, and the seventh rib 27 on the opposite sides of the honeycomb side 20b as shown in FIG. 2D , d2, d7 are smaller, wherein, the width d1 of the first rib 21 is 5mm, the width d2 of the second rib 22 is 3.5mm, and the width d7 of the seventh rib 27 is 4mm, which are respectively smaller than those shown in Figure 2C The widths d1, d2, and d7 of the first rib 21, the second rib 22, and the seventh rib 27 in the middle of the honeycomb side 20b are used to reduce the weight of the integrated grid floor 2, while the third, fourth, and seventh ribs The widths d3, d4, d5, d6 of the fifth and sixth ribs 23, 24, 25, 26 remain unchanged.

In addition, the height h0, h8 (such as 10mm) of the auxiliary ribs 27a, 28 relative to the honeycomb side 20b is lower than the height of the middle rib, and its width d8 is 3mm, and these auxiliary ribs 27a, 28 are corresponding Formed in each of the recesses R, S, and extending along a single direction without crossing each other, the single recess R, S shown in Figure 2C is configured with two parallel auxiliary ribs 27a, 28, so that each sub-region has three The strip-shaped perforation 200 forms more than 50% of the ventilation. In addition, the recess S between the first and second ribs 21 , 22 has only one perforation 200 .

Therefore, through the design of the perforation 200, the integrated grid floor 2 can not only increase the ventilation volume, but also help to save materials and reduce weight, and can also increase the bearing weight.

Also, the partial heights h3 and h6 of the rib structure 2a are also smaller, that is, the height h3 and h6 of the middle ribs (the third and sixth ribs 23, 26) are higher than that of the main ribs (the first to second, fourth to The heights h1, h2, h4, h5, h7 of the fifth and seventh ribs (21~22, 24~25, 27) are much smaller, so as to save material and reduce weight.

3A to 3E are schematic diagrams of the third embodiment of the integrated grid floor 3 of the present invention. The integrated grid floor 3 of this embodiment has a heavier load, about 1500 kg, and its difference from the first embodiment lies in the change of the local height of the rib structure 3a, so the same parts will not be repeated below.

In this embodiment, the thickness t0 of the top plate 30 is 2mm, the height h1 of the first rib 31 relative to the honeycomb side 30b is 57.5mm, and the height h1 of the first rib 31 relative to the honeycomb side 30b The sum T of the thickness t0 of the top plate 30 is 59.5mm, and the total height H of the height of the foot 3b, the height h1 of the first rib 31 relative to the honeycomb side 30b and the thickness t0 of the top plate 30 is 60mm, wherein, the thickness t1 of the wing plate 3d is 7mm, the first rib 31 is formed on the edge of the top plate 30 to become the side rib of the integrated grid floor 3, as the integrated grid floor 3, and the first to sixth ribs 31-36 are distributed symmetrically (or symmetrically up and down as shown in FIG. 3B ) based on the seventh rib 37 .

Furthermore, in the rib structure 3a, as shown in FIG. 3C, the height h2 of the second rib 32 relative to the honeycomb side 30b is 52.5 mm, the height h4 of the fourth rib 34 relative to the honeycomb side 30b is 48 mm, and the height h4 of the fourth rib 34 relative to the honeycomb side 30b is 48 mm. The height h5 of the fifth rib 35 relative to the honeycomb side 30b is 48mm, the height h7 of the seventh rib 37 relative to the honeycomb side 30b is 48mm, and the height of the third and sixth ribs 33, 36 relative to the honeycomb side 30b Both h3 and h6 are 22㎜. For example, because the height h2 of the second rib 32 relative to the honeycomb side 30b is lower than the height h1 of the first rib 31 relative to the honeycomb side 30b, when the integrated grid floor 3 is fixed on a raised floor When going up, the bottoms of the first ribs 31 are used as supports for the four feet of the composite grid floor 3 .

In addition, the widths d1-d7 of the ribs can be the same or different according to requirements, as shown in FIG. 3C. For example, the width d1 of the first rib 31 is 7.5 mm, the width d2 of the second rib 32 is 4.5 mm, the width d3 of the third rib 33 is 3.5 mm, the width d4 of the fourth rib 34 is 3.5 mm, and the width d4 of the fifth rib 35 The width d5 of the sixth rib 36 is 3.5 mm, the width d6 of the sixth rib 36 is 3.5 mm, and the width d7 of the seventh rib 37 is 5.5 mm.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different positions where it extends. For example, the widths d1, d2, and d7 of partial ribs can be adjusted, such as the width d1 of the first rib 31, the second rib 32, and the seventh rib 37 on the opposite sides of the honeycomb side 30b as shown in FIG. 3D , d2, d7 are smaller, wherein, the width d1 of the first rib 31 is 5mm, the width d2 of the second rib 32 is 3.6mm, and the width d7 of the seventh rib 37 is 4mm, which are smaller than those shown in Fig. 3C respectively The widths d1, d2, and d7 of the first rib 31, the second rib 32, and the seventh rib 37 in the middle of the honeycomb side 30b are used to reduce the weight of the integrated grid floor 3, while the third, fourth, and seventh ribs The widths d3, d4, d5, d6 of the fifth and sixth ribs 33, 34, 35, 36 remain unchanged.

In addition, the height h0, h8 (such as 15mm) of the auxiliary ribs 37a, 38 relative to the honeycomb side 30b is lower than the height of the middle rib, and its width d8 is 3.5mm, and these auxiliary ribs 37a, 38 are corresponding Formed in each of the recesses R, S, and extending along a single direction without crossing each other, the single recess R, S shown in Figure 3C is configured with two parallel auxiliary ribs 37a, 38, so that each sub-region has three The elongated perforations 300 form more than 50% of the ventilation. In addition, the recess S between the first and second ribs 31 , 32 has only one perforation 300 .

Therefore, through the design of the perforation 300, the integrated grid floor 3 can not only increase the ventilation volume, but also help to save materials and reduce weight, and can also increase the bearing weight.

Also, the partial heights h3 and h6 of the rib structure 3a are also relatively small, that is, the height h3 and h6 of the middle ribs (the third and sixth ribs 33, 36) are higher than those of the main ribs (the first to second, fourth to The heights h1, h2, h4, h5, and h7 of the fifth and seventh ribs (31-32, 34-35, 37) are much smaller, which is beneficial to save material and reduce weight.

4A to 4E are schematic diagrams of the fourth embodiment of the integrated grid floor 4 of the present invention. The integrated grid floor 4 of this embodiment has a lighter load, about 700 kilograms, and its difference from the first embodiment lies in the change of the local height of the rib structure 4a, so the same parts will not be repeated below.

In this embodiment, the thickness t0 of the top plate 40 is 2mm, the height h1 of the first rib 41 relative to the honeycomb side 40b is 48mm, and the height h1 of the first rib 41 relative to the honeycomb side 40b The sum T of the thickness t0 of the top plate 40 is 50mm, and the total height H of the height of the foot 4b, the height h1 of the first rib 41 relative to the honeycomb side 40b and the thickness t0 of the top plate 40 is 55mm, wherein, the thickness t1 of the wing plate 4d is 6mm, the first rib 41 is formed on the edge of the top plate 40 to become the side rib of the integrated grid floor 4, as the integrated grid floor 4, and the first to sixth ribs 41-46 are symmetrically distributed left and right (or vertically symmetrical as shown in FIG. 4B ) based on the seventh rib 47 .

Furthermore, in the rib structure 4a, as shown in FIG. 4C, the height h2 of the second rib 42 relative to the honeycomb side 40b is 48mm, the height h4 of the fourth rib 44 relative to the honeycomb side 40b is 35mm, and the height h4 of the fourth rib 44 relative to the honeycomb side 40b is 35mm. The height h5 of the fifth rib 45 relative to the honeycomb side 40b is 35mm, the height h7 of the seventh rib 47 relative to the honeycomb side 40b is 45mm, the height h3 of the third rib 43 relative to the honeycomb side 40b is 22mm, And the height h6 of the sixth rib 46 relative to the honeycomb side 40b is 18 mm. For example, because the height h2 of the second rib 42 relative to the honeycomb side 40b is equal to the height h1 of the first rib 41 relative to the honeycomb side 40b, when the integrated grid floor 4 is fixed on a foot frame for a raised floor At this time, the bottoms of the first ribs 41 and the second ribs 42 are used as supports for the four feet of the composite grid floor 4 .

Moreover, the widths d1-d7 of the ribs can be the same or different according to requirements, as shown in FIG. 4C. For example, the width d1 of the first rib 41 is 8 mm, the width d2 of the second rib 42 is 4.42 mm, the width d3 of the third rib 43 is 3.5 mm, the width d4 of the fourth rib 44 is 3.5 mm, and the width d4 of the fifth rib 45 The width d5 of the sixth rib 46 is 3.5 mm, the width d6 of the sixth rib 46 is 3.5 mm, and the width d7 of the seventh rib 47 is 5 mm.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different positions where it extends. For example, the widths d1, d2, and d7 of partial ribs can be adjusted, such as the width d1 of the first rib 41, the second rib 42, and the seventh rib 47 on the opposite sides of the honeycomb side 40b as shown in FIG. 4D , d2, d7 are smaller, wherein, the width d1 of the first rib 41 is 5mm, the width d2 of the second rib 42 is 3.5mm, and the width d7 of the seventh rib 47 is 4mm, which are smaller than those shown in Fig. 4C respectively The widths d1, d2, and d7 of the first rib 41, the second rib 42, and the seventh rib 47 in the middle of the honeycomb side 40b are used to reduce the weight of the integrated grid floor 4, while the third, fourth, and seventh ribs The widths d3, d4, d5, d6 of the fifth and sixth ribs 43, 44, 45, 46 remain unchanged.

In addition, the height h0, h8 (such as 10mm) of the auxiliary ribs 47a, 48 relative to the honeycomb side 40b is lower than the height of the middle rib, and its width d8 is 3mm, and these auxiliary ribs 47a, 48 are corresponding Formed in each of the recesses R, S, and extending along a single direction without interlacing each other, the single recess R, S shown in Figure 4C is configured with two parallel auxiliary ribs 47a, 48, so that each sub-region has three The elongated perforations 400 form more than 50% of the ventilation. In addition, the recess S between the first and second ribs 41 , 42 may have only one through hole 400 (as shown in FIG. 4C ) or two through holes 400 (as shown in FIG. 4D ).

Therefore, through the design of the perforation 400, the integrated grid floor 4 can not only increase the ventilation volume, but also help to save materials and reduce weight, and can also increase the bearing weight.

And, the part height h3, h6 of this rib structure 4a is also smaller, namely the height h3, h6 of the middle rib (the third and the sixth rib 43, 46) is higher than the main rib (the first to second, fourth to The heights h1, h2, h4, h5, h7 of the fifth and seventh ribs (41-42, 44-45, 47) are much smaller, so as to save material and reduce weight.

5A to 5E are schematic diagrams of the fifth embodiment of the integrated grid floor 5 of the present invention. The load-carrying load of the integrated grid floor 5 of this embodiment is about 1000 kilograms, and the difference between it and the first embodiment lies in the change of the local height of the rib structure 5a, so the same points will not be repeated below.

In this embodiment, the thickness t0 of the top plate 50 is 2mm, the height h1 of the first rib 51 relative to the honeycomb side 50b is 48mm, and the height h1 of the first rib 51 relative to the honeycomb side 50b The sum T of the thickness t0 of the top plate 50 is 50mm, and the total height H of the height of the foot 5b, the height h1 of the first rib 51 relative to the honeycomb side 50b and the thickness t0 of the top plate 50 is 55mm, wherein, the thickness t1 of the wing plate 5d is 6mm, the first rib 51 is formed on the edge of the top plate 50 to become the side rib of the integrated grid floor 5, as the integrated grid floor 5, and the first to sixth ribs 51-56 are symmetrically distributed left and right (or vertically symmetrical as shown in FIG. 5B ) based on the seventh rib 57 .

Furthermore, in the rib structure 5a, as shown in FIG. 5C, the height h2 of the second rib 52 relative to the honeycomb side 50b is 48mm, the height h4 of the fourth rib 54 relative to the honeycomb side 50b is 35mm, and the height h4 of the fourth rib 54 relative to the honeycomb side 50b is 35mm. The height h5 of the fifth rib 55 relative to the honeycomb side 50b is 35mm, the height h7 of the seventh rib 57 relative to the honeycomb side 50b is 45mm, the height h3 of the third rib 53 relative to the honeycomb side 50b is 22mm, And the height h6 of the sixth rib 56 relative to the honeycomb side 50b is 18mm. For example, because the height h2 of the second rib 52 relative to the honeycomb side 50b is equal to the height h1 of the first rib 51 relative to the honeycomb side 50b, when the integrated grid floor 5 is fixed on a foot frame for a raised floor At the same time, the bottoms of the first rib 51 and the second rib 52 are used as supports for the four feet of the composite grid floor 5 .

Also, the widths d1-d7 of the ribs can be the same or different according to requirements, as shown in FIG. 5C. For example, the width d1 of the first rib 51 is 8 mm, the width d2 of the second rib 52 is 4.42 mm, the width d3 of the third rib 53 is 3.5 mm, the width d4 of the fourth rib 54 is 3.5 mm, and the width d4 of the fifth rib 55 The width d5 of the sixth rib 56 is 3.5 mm, the width d6 of the sixth rib 56 is 3.5 mm, and the width d7 of the seventh rib 57 is 5 mm.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different positions where it extends. For example, the widths d1, d2, and d7 of partial ribs can be adjusted, such as the width d1 of the first rib 51, the second rib 52, and the seventh rib 57 on the opposite sides of the honeycomb side 50b as shown in FIG. 5D , d2, d7 are smaller, wherein, the width d1 of the first rib 51 is 5mm, the width d2 of the second rib 52 is 3.5mm, and the width d7 of the seventh rib 57 is 4mm, which are smaller than those shown in Fig. 5C respectively The widths d1, d2, and d7 of the first rib 51, the second rib 52, and the seventh rib 57 in the middle of the honeycomb side 50b are used to reduce the weight of the integrated grid floor 5, while the third, fourth, and seventh ribs The widths d3, d4, d5, d6 of the fifth and sixth ribs 53, 54, 55, 56 remain unchanged.

In addition, the height h0, h8 (such as 10mm) of the auxiliary ribs 57a, 58 relative to the honeycomb side 50b is lower than the height of the middle rib, and its width d8 is 3mm, and these auxiliary ribs 57a, 58 are corresponding Formed in each of the recesses R, S, and extending along a single direction without crossing each other, the single recess R, S shown in Figure 5C is configured with two parallel auxiliary ribs 57a, 58, so that each sub-region has three The strip-shaped perforation 500 forms more than 48% of ventilation. In addition, the recess S between the first and second ribs 51 , 52 may have only one through hole 500 (as shown in FIG. 5C ) or two through holes 500 (as shown in FIG. 5D ).

Therefore, through the design of the perforation 500, the integrated grid floor 5 can not only increase the ventilation volume, but also help to save materials and reduce weight, and can also increase the bearing weight.

And, the partial height h3, h6 of this rib structure 5a is also smaller, promptly this middle rib (the 3rd and the 6th rib 53, 56) height h3, h6 is higher than main rib (the 1st to the 2nd, the 4th to The heights h1, h2, h4, h5, and h7 of the fifth and seventh ribs (51-52, 54-55, 57) are much smaller, so as to save material and reduce weight.

6A to 6E are schematic diagrams of the sixth embodiment of the integrated grid floor 6 of the present invention. The load-carrying load of the composite grid floor 6 of this embodiment is about 1000 kilograms, and the difference between it and the first embodiment lies in the change of the local height of the rib structure 6a, so the similarities will not be repeated below.

In this embodiment, the thickness t0 of the top plate 60 is 3mm, the height h1 of the first rib 61 relative to the honeycomb side 60b is 48mm, and the height h1 of the first rib 61 relative to the honeycomb side 60b The sum T of the thickness t0 of the top plate 60 is 51mm, and the total height H of the height of the foot 6b, the height h1 of the first rib 61 relative to the honeycomb side 60b and the thickness t0 of the top plate 60 is 55mm, wherein, the thickness t1 of the wing plate 6d is 7mm, the first rib 61 is formed on the edge of the top plate 60 to become the side rib of the integrated grid floor 6, as the integrated grid floor 6, and the first to sixth ribs 61-66 are distributed symmetrically (or symmetrically up and down as shown in FIG. 6B ) based on the seventh rib 67 .

Furthermore, in the rib structure 6a, as shown in FIG. 6C, the height h2 of the second rib 62 relative to the honeycomb side 60b is 45mm, the height h4 of the fourth rib 64 relative to the honeycomb side 60b is 35mm, and the height h4 of the fourth rib 64 relative to the honeycomb side 60b is 35mm. The height h5 of the fifth rib 65 relative to the honeycomb side 60b is 35mm, the height h7 of the seventh rib 67 relative to the honeycomb side 60b is 45mm, the height h3 of the third rib 63 relative to the honeycomb side 60b is 17mm, And the height h6 of the sixth rib 66 relative to the honeycomb side 60b is 17 mm. For example, because the height h2 of the second rib 62 relative to the honeycomb side 60b is lower than the height h1 of the first rib 61 relative to the honeycomb side 60b, when the integrated grid floor 6 is fixed to a raised floor When going up, the bottoms of the first ribs 61 are used as supports for the four feet of the composite grid floor 6 .

Moreover, the widths d1-d7 of the ribs can be the same or different according to requirements, as shown in FIG. 6C. For example, the width d1 of the first rib 61 is 7 mm, the width d2 of the second rib 62 is 4 mm, the width d3 of the third rib 63 is 3 mm, the width d4 of the fourth rib 64 is 3 mm, and the width d4 of the fifth rib 65 The width d5 of the sixth rib 66 is 3 mm, the width d6 of the sixth rib 66 is 3 mm, and the width d7 of the seventh rib 67 is 5 mm.

Furthermore, each of the ribs extends longitudinally or transversely, and the same rib can have different widths at different positions where it extends. For example, the widths d1, d2, and d7 of partial ribs can be adjusted, such as the width d1 of the first rib 61, the second rib 62, and the seventh rib 67 on the opposite sides of the honeycomb side 60b as shown in FIG. 6D , d2, d7 are smaller, wherein, the width d1 of the first rib 61 is 6mm, the width d2 of the second rib 62 is 2.74mm, and the width d7 of the seventh rib 67 is 4mm, which are smaller than those shown in Fig. 6C respectively The widths d1, d2, and d7 of the first rib 61, the second rib 62, and the seventh rib 67 in the middle of the honeycomb side 60b are used to reduce the weight of the integrated grid floor 6, while the third, fourth, and seventh ribs The widths d3, d4, d5, d6 of the fifth and sixth ribs 63, 64, 65, 66 remain unchanged.

In addition, the height h0, h8 (such as 13mm) of the auxiliary ribs 67a, 68 relative to the honeycomb side 60b is lower than the height of the middle rib, and its width d8 is 3mm, and these auxiliary ribs 67a, 68 are corresponding Formed in each of the recesses R, S, and extending along a single direction without interlacing each other, the single recess R, S shown in Figure 6C is configured with three parallel auxiliary ribs 67a, 68, so that each sub-region has four The elongated perforations 600 with a small hollow area form a ventilation rate of more than 48%. In addition, the recess S between the first and second ribs 61 , 62 may have only one through hole 600 (as shown in FIG. 6C ) or two through holes 600 (as shown in FIG. 6D ).

Therefore, through the design of the perforation 600, the integrated grid floor 6 can not only increase the ventilation volume, but also help to save materials and reduce weight, and can also increase the bearing weight.

And, the partial height h3, h6 of this rib structure 6a is also smaller, promptly this middle rib (the 3rd and the 6th rib 63,66) height h3, h6 than main rib (the 1st to the 2nd, the 4th to The heights h1, h2, h4, h5, h7 of the fifth and seventh ribs (61~62, 64~65, 67) are much smaller, so as to save material and reduce weight.

To sum up, the integrated grid floor 1, 2, 3, 4, 5, 6 of this creation is mainly through the top plate 10, 20, 30, 40, 50, 60 and the plurality of rib structures 1a, 2a, 3a, 4a, 5a, 6a are integrally casted with aluminum alloy, and the horizontal ribs and longitudinal ribs are arranged in the same symmetrical manner, so that when making the integrated grid floor 1, 2, 3, 4, 5, 6 There will be no deformation, and it is not easy to produce defects and fractures. Therefore, compared with the conventional technology, the integrated grid floor 1, 2, 3, 4, 5, 6 of this creation is not only excellent in reliability, but also beneficial to Improve yield and save production cost.

Furthermore, through the design of the perforations 100, 200, 300, 400, 500, 600, more than 50% of the ventilation volume can be formed, so the ventilation volume can be increased, which can meet the demand for higher return air volume around the semiconductor process equipment and the shower room, so as to improve the efficiency of the semiconductor process. cleanliness.

Also, the heights h1, h2, h4, h5, h7 of the main ribs of the rib structures 1a, 2a, 3a, 4a, 5a, 6a relative to the honeycomb sides 10b, 20b, 30b, 40b, 50b, 60b are at least 25 mm to increase the structural strength of the integrated grid floor 1, 2, 3, 4, 5, 6, so the integrated grid floor 1, 2, 3, 4, 5, 6 can withstand the semiconductor process Heavy machine equipment is used to avoid the problem of fragmentation of the integrated grid floor 1, 2, 3, 4, 5, 6 during use. Further, the height h1~h7 and the width d1~d7 of the ribs are adjusted according to the bearing load of the integrated grid floor 1, 2, 3, 4, 5, 6, thereby saving the integrated grid floor 1, 2 , 3,4,5,6 materials and weight reduction.

In addition, through the design of the auxiliary ribs 17a, 18, 27a, 28, 37a, 38, 47a, 48, 57a, 58, 67a, 68, the integrated grid floor 1, 2, 3, 4, 5,6 Structural strength.

The above-mentioned embodiments are used to illustrate the principle and effect of the invention, but not to limit the invention. Any person familiar with this art can modify the above-mentioned embodiments without departing from the spirit and scope of this creation. Therefore, the scope of protection of the rights of this creation should be listed in the scope of the patent application described later.

1,2,3,4,5,6: integrated grid floor 1a, 2a, 3a, 4a, 5a, 6a: Rib structure 1b, 2b, 3b, 4b, 5b, 6b: feet 1c: thimble position 1d, 2d, 3d, 4d, 5d, 6d: Flanges 10,20,30,40,50,60: top plate 10a, 20a, 30a, 40a, 50a, 60a: ground side 10b, 20b, 30b, 40b, 50b, 60b: honeycomb side 100,200,300,400,500,600: perforation 11,21,31,41,51,61: first rib 12,22,32,42,52,62: second rib 13,23,33,43,53,63: third rib 14,24,34,44,54,64: Fourth rib 15,25,35,45,55,65: fifth rib 16,26,36,46,56,66: sixth rib 17,27,37,47,57,67: seventh rib 17a, 18, 27a, 28, 37a, 38, 47a, 48, 57a, 58, 67a, 68: Auxiliary ribs d1~d8: width H: total height h0~h8: height L: Length R, S: concave part T: sum t0, t1: thickness w: interval distance

Fig. 1A is the three-dimensional schematic view of the first embodiment of the integrated grid floor of the present invention.

FIG. 1B is a front plan view of FIG. 1A.

FIG. 1C is a cross-sectional view of FIG. 1B along line C-C in one of the directions.

FIG. 1D is a cross-sectional view of FIG. 1B along a line D-D in one of the directions.

FIG. 1E is a three-dimensional schematic diagram of another viewing angle of FIG. 1A .

Fig. 2A is the three-dimensional schematic view of the second embodiment of the integrated grid floor of the present invention.

FIG. 2B is a front plan view of FIG. 2A.

FIG. 2C is a cross-sectional view along line C-C of FIG. 2B along one of the directions.

FIG. 2D is a cross-sectional view of FIG. 2B along a line D-D in one of the directions.

FIG. 2E is a three-dimensional schematic diagram of another viewing angle of FIG. 2A .

Fig. 3A is the three-dimensional schematic view of the third embodiment of the integrated grid floor of the present invention.

FIG. 3B is a front plan view of FIG. 3A.

FIG. 3C is a cross-sectional view of FIG. 3B along line C-C in one of the directions.

FIG. 3D is a cross-sectional view of FIG. 3B along a line D-D in one of the directions.

FIG. 3E is a perspective view of another viewing angle of FIG. 3A .

Fig. 4A is the three-dimensional schematic view of the fourth embodiment of the integrated grid floor of the present invention.

FIG. 4B is a front plan view of FIG. 4A.

FIG. 4C is a cross-sectional view along line C-C of FIG. 4B along one of the directions.

FIG. 4D is a cross-sectional view of FIG. 4B along a line D-D in one of the directions.

FIG. 4E is a three-dimensional schematic diagram of another viewing angle of FIG. 4A.

Fig. 5A is the perspective schematic view of the fifth embodiment of the integrated grid floor of the present invention.

FIG. 5B is a front plan view of FIG. 5A.

FIG. 5C is a cross-sectional view of FIG. 5B along line C-C in one of the directions.

FIG. 5D is a cross-sectional view of FIG. 5B along a line D-D in one of the directions.

FIG. 5E is a schematic perspective view of another viewing angle of FIG. 5A .

Fig. 6A is the perspective schematic view of the sixth embodiment of the integrated grid floor of the present invention.

FIG. 6B is a front plan view of FIG. 6A.

FIG. 6C is a cross-sectional view along line C-C of FIG. 6B along one of the directions.

FIG. 6D is a cross-sectional view of FIG. 6B along a line D-D in one of the directions.

FIG. 6E is a perspective view of another viewing angle of FIG. 6A .

1: Integrated grid floor

1a: Rib structure

1b: foot seat

1d: wing plate

10:Top plate

10a: Ground side

10b: Honeycomb side

100: perforation

11: First rib

12: Second rib

13: Third rib

14: Fourth rib

15: Fifth rib

16: Sixth rib

17: seventh rib

17a,18: Auxiliary ribs

H: total height

h0~h8: height

d1~d8: width

T: sum

t0, t1: thickness

R, S: concave part

Claims (13)

A comprehensive grid floor, including: The top plate has opposite ground side and honeycomb side, wherein a plurality of perforations connecting the ground side and the honeycomb side are formed on the top plate to form a ventilation rate of 48% or more or 50% or more; and A plurality of rib structures are integrally molded and cast with the top plate using aluminum alloy, and are arranged on the honeycomb side of the top plate to form a plurality of recesses, so that each recess has three or four perforations, wherein, The rib structure is defined in sequence from the edge of the top plate to the middle with the first rib, the second rib, the third rib, the fourth rib, the fifth rib, the sixth rib and the seventh rib, and the first rib, The height of the second rib, the fourth rib, the fifth rib and the seventh rib relative to the side of the hive is at least 25 mm as the main rib, and the height of the third rib and the sixth rib relative to the side of the hive Tie below 25 mm to serve as the middle rib. The integrated grid floor according to claim 1, wherein the plurality of recesses are arranged in an array to form a honeycomb structure on the side of the honeycomb. The integrated grid floor according to claim 1, wherein the first rib is formed on the edge of the top plate to become the side rib of the integrated grid floor, and serves as a frame of the integrated grid floor. The composite grid floor as described in Claim 1, wherein the sum of the height of the first rib relative to the side of the honeycomb and the thickness of the top plate is 50 to 59.5 mm, and the thickness of the top plate is 2 to 3 mm. The integrated grid floor according to claim 1, wherein the height of the second rib, the fourth rib, the fifth rib and the seventh rib relative to the side of the honeycomb is 35 to 52.5 mm, and the second rib , The width of the fourth rib, the fifth rib and the seventh rib is 3 to 5.5 mm. The composite grid floor as described in claim 1, wherein the height of the third rib and the sixth rib relative to the side of the honeycomb is 17 to 22 mm, and the width of the third rib and the sixth rib is 3 to 3.5 mm. The integrated grid floor according to claim 1, wherein the width of the first rib is 4.8 to 8 mm. The integrated grid floor as described in Claim 1, wherein, the rib structure is formed with two seventh ribs in the vertical and horizontal directions to form a well-shaped rib, so as to divide the integrated grid floor into four regions 25 subregions are formed between the adjacent second ribs, third ribs, fourth ribs, fifth ribs and sixth ribs in the four regions, each of which has a concave part, and in the seventh Another concave part formed by the central part of the well-shaped rib formed by the rib, and has three long strip-shaped perforations in each sub-area to form more than 48% or more than 50% of the ventilation rate, and in this day A wing plate is formed around the plate, so that the thickness of the wing plate is greater than that of the top plate. The integrated grid floor according to claim 1, wherein the rib structure further includes a plurality of auxiliary ribs whose height is lower than that of the middle rib, and the plurality of auxiliary ribs are correspondingly formed in each of the recesses, so that a single recess The plurality of auxiliary ribs are arranged in the middle line. The integrated grid floor according to Claim 9, wherein the height of the auxiliary rib relative to the side of the honeycomb is 10 to 15 mm, and the width thereof is 3 to 3.5 mm. The integrated grid floor as described in claim 1, wherein the widths of the first rib, the second rib and the seventh rib at the opposite sides of the honeycomb side are respectively smaller than the widths of the middle part of the honeycomb side The width of the first rib, the second rib and the seventh rib is to reduce the weight of the integrated grid floor. The integrated grid floor according to Claim 1, wherein the first rib is used to support the foot frame fixed to the integrated grid floor. The integrated grid floor according to claim 1, wherein the first rib and the second rib are connected to the four corners of the integrated grid floor to form feet, and the feet are fixed to the supporting stand superior.

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